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1. 发明授权

US09341585B2 X-ray detector including integrated electron detector 有权
标题翻译： X射线检测器包括集成电子检测器
公开(公告)号：US09341585B2
公开(公告)日：2016-05-17
申请号：US14053714
申请日：2013-10-15
申请人： PULSETOR, LLC
发明人： Nicholas C. Barbi , Richard B. Mott
IPC分类号： G01T1/20 , H01J37/28 , G01N23/225 , H01J37/244
CPC分类号： G01N23/2257 , G01T1/2018 , H01J37/244 , H01J37/28 , H01J2237/24415 , H01J2237/2443
摘要： An X-ray detector includes a housing and an X-ray sensing device provided within the housing along the axis of the housing, wherein the housing is structured to be coupled to the electron column or sample chamber of a charged particle beam device. The X-ray detector also includes an electron detector structured to detect a plurality of electrons ejected from a sample in response to an electron beam impinging on the sample, the electron detector being coupled to the housing on or near the axis such that a first line of sight to the electron detector from a point at which the electron beam impinges on the sample is similar to a second line of sight to the X-ray sensing device from the point at which the electron beam impinges on the sample such that X-ray and Backscattered electron images will show similar parallax and shadowing effects.
摘要翻译： X射线检测器包括壳体和沿着壳体的轴线设置在壳体内的X射线感测装置，其中壳体构造成耦合到带电粒子束装置的电子柱或样品室。 X射线检测器还包括电子检测器，其被构造为响应于照射在样品上的电子束来检测从样品喷出的多个电子，电子检测器在轴上或附近耦合到壳体，使得第一线从电子束撞击样品的点到电子检测器的视线类似于从电子束照射在样品上的点到X射线感测装置的第二视线，使得X射线背散射电子图像将显示相似的视差和阴影效应。

2. 发明申请

US20140042316A1 X-ray detector including integrated electron detector 有权
标题翻译： X射线检测器包括集成电子检测器
公开(公告)号：US20140042316A1
公开(公告)日：2014-02-13
申请号：US14053714
申请日：2013-10-15
申请人： PULSETOR, LLC
发明人： Nicholas C. Barbi , Richard B. Mott
IPC分类号： G01N23/225
CPC分类号： G01N23/2257 , G01T1/2018 , H01J37/244 , H01J37/28 , H01J2237/24415 , H01J2237/2443
摘要： An X-ray detector includes a housing and an X-ray sensing device provided within the housing along the axis of the housing, wherein the housing is structured to be coupled to the electron column or sample chamber of a charged particle beam device. The X-ray detector also includes an electron detector structured to detect a plurality of electrons ejected from a sample in response to an electron beam impinging on the sample, the electron detector being coupled to the housing on or near the axis such that a first line of sight to the electron detector from a point at which the electron beam impinges on the sample is similar to a second line of sight to the X-ray sensing device from the point at which the electron beam impinges on the sample such that X-ray and Backscattered electron images will show similar parallax and shadowing effects.
摘要翻译： X射线检测器包括壳体和沿着壳体的轴线设置在壳体内的X射线感测装置，其中壳体构造成耦合到带电粒子束装置的电子柱或样品室。 X射线检测器还包括电子检测器，其被构造为响应于照射在样品上的电子束来检测从样品喷出的多个电子，电子检测器在轴上或附近耦合到壳体，使得第一线从电子束撞击样品的点到电子检测器的视线类似于从电子束照射在样品上的点到X射线感测装置的第二视线，使得X射线背散射电子图像将显示相似的视差和阴影效应。

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