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    • 43. 发明授权
    • Method for manufacturing poorly conductive layers
    • 制造导电不良层的方法
    • US07857948B2
    • 2010-12-28
    • US11458444
    • 2006-07-19
    • Jürgen RammBeno WidrigChristian Wohlrab
    • Jürgen RammBeno WidrigChristian Wohlrab
    • C23C14/34
    • C23C14/325H01J37/32055H01J37/3266H01J37/34
    • Method for producing poorly conductive and in particular nonconductive layers on at least one work piece by means of a vacuum-coating process in which an electric arc discharge is activated between at least one anode and the cathode of an arc source in a reactive-gas atmosphere, whereby on the surface of a target that is electrically connected to the cathode either none or only a small outer magnetic field is generated that extends essentially perpendicular to the target surface for assisting the evaporation process, the degree of recoating of the target surface by other coating sources is less than 10%, and the magnetic field is generated with a magnet system that encompasses at least one axially polarized coil with a geometry similar to the circumference of the target.
    • 通过真空镀膜工艺在至少一个工件上制造导电不良且特别是非导电层的方法,其中电弧放电在反应气体气氛中的电弧源的至少一个阳极和阴极之间被激活 ,由此在与阴极电连接的靶的表面上,不产生仅仅基本上垂直于目标表面延伸的辅助蒸发过程的小的外部磁场,由另外的目标表面重涂的程度 涂覆源小于10%,并且磁场是用包含至少一个轴向极化线圈的磁体系统产生的,其具有类似于目标周长的几何形状。
    • 44. 发明授权
    • Plasma booster for plasma treatment installation
    • 等离子体加速器用于等离子体处理装置
    • US07798097B2
    • 2010-09-21
    • US11416344
    • 2006-05-01
    • Orlaw MasslerHubert EberlePatrick Gschwend
    • Orlaw MasslerHubert EberlePatrick Gschwend
    • C23C16/00
    • H01J37/32009C23C14/22C23C16/0272C23C16/26C23C16/50H01J37/32018
    • An arrangement for boosting or igniting a glow discharge plasma for coating workpieces has at least one hollow body of an electrically conductive material formed such that when an electric signal is applied to the hollow body at least in a certain pressure and voltage range, the geometric conditions for the ignition of a discharge in the interior of the hollow body are satisfied. The hollow body has at least one opening through which charge carriers can flow off into the environs of the arrangement in order to ignite and operate the plasma or to boost a plasma existing there. The arrangement has a mechanism which connects the hollow body electrically with the workpieces such that the hollow body is essentially at workpiece potential.
    • 用于升高或点燃用于涂覆工件的辉光放电等离子体的装置具有至少一个导电材料的中空体,其形成为使得当电信号至少在一定压力和电压范围内施加到中空体时,几何条件 用于在中空体的内部点燃点火。 中空体具有至少一个开口,电荷载体可以穿过该开口流入该装置的周围,以便点燃和操作等离子体或者提高存在于其中的等离子体。 该装置具有将空心体与工件电连接使得中空体基本上处于工件电位的机构。