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41. 发明授权

US06631645B1 Semiconductor pressure sensor utilizing capacitance change 失效
标题翻译：半导体压力传感器利用电容变化
公开(公告)号：US06631645B1
公开(公告)日：2003-10-14
申请号：US09653165
申请日：2000-09-01
申请人： Shinya Satou , Keiji Hanzawa , Satoshi Shimada , Naohiro Monma , Atsushi Miyazaki
发明人： Shinya Satou , Keiji Hanzawa , Satoshi Shimada , Naohiro Monma , Atsushi Miyazaki
IPC分类号： G01L912
CPC分类号： G01L9/0073 , G01L9/125
摘要： An S/N ratio of an output of a semiconductor pressure sensor is improved, the sensor being of an electrostatic capacitance type pressure sensor for generating an output based upon a ratio between capacitances of a pressure sensitive capacitance element and a reference capacitance element. This semiconductor pressure sensor has: a pressure sensitive capacitance element having an electrostatic capacitance Cs changing with a pressure to be detected; a reference capacitance element having an electrostatic capacitance Cr not changing with the pressure; and a unit for detecting the pressure by outputting a signal corresponding to a ratio between the capacitances Cs and Cr, wherein an initial value Cr0 of the capacitance Cr and an initial value Cs0 of the capacitance Cs are defined by 1.2
摘要翻译：提高半导体压力传感器的输出的S / N比，该传感器是用于根据压敏电容元件的电容与参考电容元件之间的比率产生输出的静电电容式压力传感器。该半导体压力传感器具有：静电电容Cs随着要检测的压力而变化的压敏电容元件; 具有不随压力变化的静电电容Cr的参考电容元件; 以及用于通过输出对应于电容Cs和Cr之间的比率的信号来检测压力的单元，其中电容Cr的初始值Cr 0 和初始值Cs 电容Cs的 0 由1.2 0 / Cs 0 <1.8。通过改变两个元件的电极面积等来调节CR 0 / Cs 0 的比例。以这种方式，可以获得较大的压力表输出DeltaV，降低放大器的放大系数，并提供传感器的高精度。

42. 发明授权

US06188340B1 Sensor adjusting circuit 有权
标题翻译：传感器调节电路
公开(公告)号：US06188340B1
公开(公告)日：2001-02-13
申请号：US09167984
申请日：1998-10-08
申请人： Masahiro Matsumoto , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Atsushi Miyazaki , Keiji Hanzawa
发明人： Masahiro Matsumoto , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Atsushi Miyazaki , Keiji Hanzawa
IPC分类号： H03M100
CPC分类号： G01D3/022 , G01D3/02
摘要： A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.
摘要翻译：提供了一种用于调整数字传感器的传感器调节电路，其电路规模小并且可以在宽的调节范围内保持高精度。一种传感器调节电路，用于调节从传感器输入的模拟输入信号，并根据要感测的物理量将其输出为另一个模拟输出信号，包括：第一模数转换器，具有模拟积分器（2），用于积分模拟输入信号，比较器（3），用于将模拟积分器的输出与预定值进行比较;以及D / A转换器（7），用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器（5）。

43. 发明授权

US06167761A Capacitance type pressure sensor with capacitive elements actuated by a diaphragm 失效
标题翻译：电容型压力传感器，其电容元件由隔膜驱动
公开(公告)号：US06167761A
公开(公告)日：2001-01-02
申请号：US09103612
申请日：1998-06-24
申请人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
发明人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
IPC分类号： G01L912
CPC分类号： G01L9/0073
摘要： In a capacitance type pressure sensor, a diaphragm is formed of a fragile material using an impurity-diffused monocrystal silicon and constitutes a stable pressure-responsive structure which does not undergo a plastic deformation. Between the diaphragm and a movable electrode is formed an oxide film to diminish stray capacitance between the movable electrode and a substrate and also between the movable electrode and a impurity-diffused layer. The oxide film and the movable electrode are each divided into plural regions so that the divided regions of the movable electrode are formed on the divided regions of the oxide film, thereby diminishing stress strain induced by a difference in therm expansion coefficient among the diaphragm, oxide film and movable electrode. The upper surface of a fixed electrode is covered with a structure for the fixed electrode which structure is formed by an insulating polycrystal silicon film not doped with impurity whereby the rigidity of the electrode is enhanced and it is possible to diminish a leak current.
摘要翻译：在电容式压力传感器中，使用杂质扩散的单晶硅由脆性材料形成隔膜，构成不发生塑性变形的稳定的压力响应结构。在隔膜和可动电极之间形成氧化膜，以减小可动电极和基板之间以及可移动电极和杂质扩散层之间的杂散电容。氧化物膜和可动电极分别分成多个区域，使得可动电极的分割区域形成在氧化膜的分割区域上，从而减小由隔膜，氧化物中的热膨胀系数差引起的应力应变薄膜和可动电极。固定电极的上表面被固定电极的结构覆盖，该结构由不掺杂杂质的绝缘多晶硅膜形成，由此电极的刚性增强并且可以减小漏电流。

44. 发明授权

US5506454A System and method for diagnosing characteristics of acceleration sensor 失效
标题翻译：用于诊断加速度传感器特性的系统和方法
公开(公告)号：US5506454A
公开(公告)日：1996-04-09
申请号：US059069
申请日：1993-05-10
申请人： Keiji Hanzawa , Tetsuo Matsukura , Hirokazu Fujita , Masayoshi Suzuki , Masahiro Matsumoto
发明人： Keiji Hanzawa , Tetsuo Matsukura , Hirokazu Fujita , Masayoshi Suzuki , Masahiro Matsumoto
IPC分类号： B60R21/01 , G01P15/04 , G01P15/125 , G01P21/00 , G01R31/00 , B60R21/08
CPC分类号： B60R21/0173 , B60R21/01 , G01P15/04 , G01P15/125 , G01P21/00 , G01R31/007 , G01P2015/0828
摘要： An apparatus for diagnosing the characteristic of an acceleration sensor and a method for diagnosis thereof are disclosed. The acceleration sensor includes a movable electrode (or mass part) displaced in accordance with an acceleration and a fixed electrode disposed opposite to the movable electrode. In a diagnosis mode, a signal for diagnosis is applied to the fixed electrode so that an electrostatic force as a force corresponding to a predetermined acceleration is generated between the fixed electrode and the movable electrode. In the case where the acceleration sensor is sound, the movable electrode or mass part is normally displaced. A failure of the acceleration sensor, the deterioration thereof in performance, a change in characteristic thereof caused from the lapse of time, or the like is self-diagnosed by detecting a change in capacitance between the movable electrode and the fixed electrode upon generation of the diagnosis signal. The force corresponding to the predetermined acceleration may be an electromagnetic force or a mechanical oscillation based on a piezoelectric element.
摘要翻译：公开了一种用于诊断加速度传感器的特性的装置及其诊断方法。加速度传感器包括根据加速度移位的可移动电极（或质量部分）和与可动电极相对设置的固定电极。在诊断模式中，用于诊断的信号被施加到固定电极，使得在固定电极和可动电极之间产生作为与预定加速度相对应的力的静电力。在加速度传感器是声音的情况下，可移动电极或质量部分通常位移。通过检测可动电极和固定电极之间的电容变化，可以自诊断加速度传感器的故障，其性能的劣化，由于时间的流失引起的特性变化等诊断信号。对应于预定加速度的力可以是基于压电元件的电磁力或机械振荡。

45. 发明授权

US3942767A Method and apparatus for continuously automatically controlling the water content of kneaded viscous materials 失效
标题翻译：用于连续自动控制捏合粘性物质含水量的方法和装置
公开(公告)号：US3942767A
公开(公告)日：1976-03-09
申请号：US439636
申请日：1974-02-04
申请人： Keiji Hanzawa , Yoshiyuki Takahashi , Nobuyoshi Suga , Tojo Kato , Makoto Handa , Hiromichi Hayashi , Shinichi Taneya , Toshimaro Sone
发明人： Keiji Hanzawa , Yoshiyuki Takahashi , Nobuyoshi Suga , Tojo Kato , Makoto Handa , Hiromichi Hayashi , Shinichi Taneya , Toshimaro Sone
IPC分类号： B01F15/04 , G01N27/22 , G05D22/02 , B01F3/10
CPC分类号： B01F15/0408 , G01N27/223 , G05D22/02
摘要： A feed material is introduced into a pressure-kneading portion of a kneader with a slightly insufficient water content, wherein the remaining water is added and the material is kneaded to be delivered from the kneader as having a predetermined water content, and concurrently the water content of the kneaded material being delivered is continuously measured near the exit of said kneader and the amount of water to be added to the pressure-kneading portion is controlled according to the measured water content, whereby the water content in the kneaded material is maintained constant.
摘要翻译：将原料引入捏合机的加压捏合部分，其含水量略低，其中添加剩余的水，并且将该材料捏合以从具有预定水含量的捏和机输送，同时水含量在所述捏合机的出口附近连续地测量被输送的捏合材料，并且根据测量的含水量来控制加入到加压捏合部分中的水量，从而使捏合材料中的水分含量保持不变。

46. 发明授权

US09784605B2 Thermal flow meter including a cover mounted on a housing and where a bypass passage is formed by the cover and a bypass passage trench 有权
公开(公告)号：US09784605B2
公开(公告)日：2017-10-10
申请号：US14407730
申请日：2012-06-15
申请人： Noboru Tokuyasu , Shinobu Tashiro , Keiji Hanzawa , Takeshi Morino , Ryosuke Doi , Akira Uenodan
发明人： Noboru Tokuyasu , Shinobu Tashiro , Keiji Hanzawa , Takeshi Morino , Ryosuke Doi , Akira Uenodan
IPC分类号： G01F1/68 , G01F1/684 , G01F1/696 , G01F15/14
CPC分类号： G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6965 , G01F15/14
摘要： The present invention has been made to improve measurement accuracy of a thermal flow meter. In the thermal flowmeter according to the invention, a circuit package (400) that measures a flow rate is molded in a first resin molding process. In a second resin molding process, a housing (302) having an inlet trench (351), a bypass passage trench on frontside (332), an outlet trench (353), and the like are formed through resin molding, and an outer circumferential surface of the circuit package (400) produced in the first resin molding process is enveloped by a resin in the second resin molding process to fix the circuit package (400) to the housing (302).

47. 发明授权

US09772208B2 Thermal type flowmeter with particle guide member 有权
公开(公告)号：US09772208B2
公开(公告)日：2017-09-26
申请号：US14359161
申请日：2012-01-18
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692 , G01F1/684 , G01F1/696 , G01F15/00 , G01F5/00
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.

48. 发明申请

US20140167781A1 SENSOR DEVICE 审中-公开
标题翻译：传感器设备
公开(公告)号：US20140167781A1
公开(公告)日：2014-06-19
申请号：US14235933
申请日：2011-08-03
申请人： Satoshi Asano , Masahiro Matsumoto , HIroshi Nakano , Keiji Hanzawa
发明人： Satoshi Asano , Masahiro Matsumoto , HIroshi Nakano , Keiji Hanzawa
IPC分类号： G01R1/18 , G01D7/00
CPC分类号： G01R1/18 , B81B3/0086 , G01D7/00
摘要： An objective of the present invention is to provide a sensor device with an increased accuracy. In order to achieve the objective, provided is a sensor device includes: an external terminal 2 to which an external device is connected; a ground terminal 3 connected to the ground; an internal circuit 4 that generates a sensor output signal; and a protection circuit 5 having a resistive element 6 and a capacitative element 7 between the external terminal and the internal circuit, in which the capacitative element is formed of a pair of electrodes having different conductivities from each other and a lower-conductive electrode 7a of the electrodes which has a smaller conductivity is connected to the external terminal and the internal circuit.
摘要翻译：本发明的目的是提供一种具有更高精度的传感器装置。为了实现该目的，提供了一种传感器装置，包括：连接有外部装置的外部端子2; 连接到地面的接地端子3; 产生传感器输出信号的内部电路4; 以及保护电路5，其在外部端子和内部电路之间具有电阻元件6和电容元件7，其中电容元件由彼此具有不同电导率的一对电极形成，并且电容元件7的下导电电极7a 具有较小导电性的电极连接到外部端子和内部电路。

49. 发明授权

US08640538B2 Flow sensor and manufacturing method of the same and flow sensor module and manufacturing method of the same 有权
标题翻译：流量传感器及其制造方法和流量传感器模块及其制造方法相同
公开(公告)号：US08640538B2
公开(公告)日：2014-02-04
申请号：US13393155
申请日：2011-09-13
申请人： Tsutomu Kono , Keiji Hanzawa , Takeshi Morino , Yuki Okamoto , Noboru Tokuyasu , Shinobu Tashiro
发明人： Tsutomu Kono , Keiji Hanzawa , Takeshi Morino , Yuki Okamoto , Noboru Tokuyasu , Shinobu Tashiro
IPC分类号： G01F1/68
CPC分类号： G01F1/383 , G01F1/34 , G01F1/6845 , G01F1/692 , G01F1/698 , G01F5/00 , H01L2224/48227 , H01L2224/73265 , H01L2924/10157 , H01L2924/15151 , H01L2924/15153
摘要： Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).
摘要翻译：提供了抑制每个流量传感器的性能变化的技术。在本发明的流量传感器FS1中，半导体芯片CHP1的一部分被配置为在形成在半导体芯片CHP1上的流量检测单元（FDU）暴露的状态下被树脂（MR）覆盖。由于树脂（MR）的上表面SUR（MR）高于半导体芯片（CHP1）的上表面SUR（CHP），所以通过在上表面SUR（CHP）的一部分上密封树脂半导体芯片CHP1在与空气流动方向平行的方向上，可以使流量检测单元（FDU）周围的空气流稳定。此外，通过增加半导体芯片（CHP1）和树脂（MR）之间的接触面积，可以防止半导体芯片（CHP1）和树脂（MR）之间的界面剥离。

50. 发明申请

US20130199280A1 Thermal Flow Meter 有权
标题翻译：热流量计
公开(公告)号：US20130199280A1
公开(公告)日：2013-08-08
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

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