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    • 41. 发明授权
    • Air-conditioning method and system for an automotive vehicle
    • 汽车空调方法和系统
    • US4381074A
    • 1983-04-26
    • US317865
    • 1981-11-03
    • Tetsuya IijimaSeiichi Takahashi
    • Tetsuya IijimaSeiichi Takahashi
    • B60H1/00F24F11/02G05D23/00B60H3/00
    • B60H1/00835
    • An air-conditioning method and system for an automotive vehicle according to the present invention automatically maintains the temperature of air within the passenger compartment at a value preset by a passenger compartment air temperature presetting device and adjusted to a comfortable temperature which varies according to the outside-air temperature in accordance with a predetermined relationship defined by three linear functions having two points of intersection. The method comprises the steps of calculating a basic outlet duct air temperature, calculating an outlet duct air temperature correction, adding the two calculated values, and calculating an air mix door opening percentage, in addition to calculating a comfortable passenger compartment air temperature.
    • 根据本发明的用于机动车辆的空调方法和系统将乘客舱内的空气温度自动保持在由乘客室空气温度预设装置预设的值,并被调节到根据外部变化的舒适温度 根据由具有两个交点的三个线性函数定义的预定关系来确定气温。 该方法包括计算基本出口管道空气温度,计算出口管道空气温度校正,加上两个计算值,以及计算空气混合门开启百分比,以及计算舒适的乘员室空气温度。
    • 42. 发明申请
    • METHOD FOR PROTECTING SEMICONDUCTOR WAFER AND PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE
    • 用于保护半导体晶体管的方法和用于生产半导体器件的方法
    • US20100184297A1
    • 2010-07-22
    • US12665529
    • 2008-06-20
    • Mikio TakagiSeiichi Takahashi
    • Mikio TakagiSeiichi Takahashi
    • H01L21/306
    • H01L21/02063H01J37/3244H01J37/32449H01L21/67069
    • [Task] In a proposed protection method, re-oxidation of a semiconductor wafer is prevented. The method is appropriate for fine patterned semiconductor device. A wafer is dry etched and is subjected to a next step of forming an electrode material film. The dry-etched wafer is maintained not re-oxidized until the next step. The dry etching reaction products are appropriately removed.[Means for Solution] A wafer, on which the dry etching reaction products remain, is protected by the reaction products. The wafer is held in an inert gas protective atmosphere having a pressure of 50 Pa or more and an atmospheric pressure or less, or is held in air equivalent to the air of a clean room or in a gas-mixture atmosphere of said air and an inert gas. The reaction products are decomposed and removed by heating immediately before the formation of an electrode-material film.
    • [任务]在所提出的保护方法中,防止了半导体晶片的再氧化。 该方法适用于精细图案化半导体器件。 将晶片干蚀刻,并进行形成电极材料膜的下一步骤。 干蚀刻的晶片保持不再氧化直到下一步骤。 适当地除去干蚀刻反应产物。 [解决方案]残留有干蚀刻反应产物的晶片被反应产物保护。 将晶片保持在压力为50Pa以上且大气压以下的惰性气体保护气氛中,或者保持在与洁净室的空气或空气的气体混合气氛相当的空气中, 惰性气体。 反应产物在形成电极材料膜之前立即加热分解和除去。
    • 44. 发明授权
    • Etching method
    • 蚀刻方法
    • US07497963B2
    • 2009-03-03
    • US11032393
    • 2005-01-10
    • Kwang-Myung LeeKi-Young YunSeung-Ki ChaeNo-Hyun HuhWan-Goo HwangJung-Hyun HwangShinji YanagisawaKengo TsutsumiSeiichi Takahashi
    • Kwang-Myung LeeKi-Young YunSeung-Ki ChaeNo-Hyun HuhWan-Goo HwangJung-Hyun HwangShinji YanagisawaKengo TsutsumiSeiichi Takahashi
    • B44C1/22
    • H01L21/67063H01L21/31116
    • In this etching method, since an etching gas is introduced before introduction of free radicals into a processing chamber, the etching gas has been adsorbed on the surface of substrates when the free radicals are introduced. Accordingly, the free radicals react with the etching gas adsorbed on the surface of the substrates, and the reaction proceeds uniformly on the surface of the substrate. As a result, nonuniform etching does not occur on the surface of the substrate. Moreover, since the reaction between the etching gas and the free radicals occurs on the surface of the substrate, an intermediate product produced according to the reaction between the etching gas and the free radicals reacts with an etching object promptly. Therefore, the intermediate product is not exhausted from the processing chamber 12 excessively, and hence the etching efficiency is high. As a result, according to this etching method, not only the in-plane distribution of the etching amount becomes more uniform, but also the etching rate is increased more than in the conventional etching method.
    • 在该蚀刻方法中,由于在将自由基引入处理室之前引入蚀刻气体,当引入自由基时,蚀刻气体已被吸附在基板的表面上。 因此,自由基与吸附在基板表面的蚀刻气体反应,反应在基板表面上均匀地进行。 结果,在基板的表面上不会发生不均匀的蚀刻。 此外,由于蚀刻气体和自由基之间的反应发生在基板的表面上,所以根据蚀刻气体和自由基之间的反应产生的中间产物迅速与蚀刻对象反应。 因此,中间产品没有过度地从处理室12中排出,因此蚀刻效率高。 结果,根据该蚀刻方法,不仅蚀刻量的面内分布变得更均匀,而且比常规蚀刻方法更多地提高蚀刻速率。
    • 50. 发明授权
    • Tying method and tying apparatus for articles
    • 捆扎方法和捆扎装置
    • US5944064A
    • 1999-08-31
    • US894148
    • 1997-08-13
    • Tsutomu SaitoSeiichi TakahashiHirokazu Watanabe
    • Tsutomu SaitoSeiichi TakahashiHirokazu Watanabe
    • B65B13/28E04G21/12B21F15/04
    • B65B13/285E04G21/122
    • An engaging portion in engagement with a tying material and a hook, as a twisting mechanism, are mounted on an oscillating member provided on a spindle, and the continuous linear tying material is fed in a direction crossing a spindle axis into engagement with the engaging portion to form a starting point which is folded into a U-shape. In this state, the tying material is delivered to an encompassing guide to thereby guide the tying material around articles to be tied together, while forming two wires by folding the tying material into a substantially U-shape by a feeding force. The engaging portion and the hook are integrally rotated so that a folded extreme end portion and a rear end portion on the other side of the tying material are twisted together with each other to tie articles together. Accordingly, tying can be firmly done with one winding, while forming two wires by automatically folding the continuous linear tying material in half.
    • PCT No.PCT / JP96 / 00343 Sec。 371日期1997年8月13日 102(e)日期1997年8月13日PCT提交1996年2月16日PCT公布。 公开号WO96 / 25330 PCT 日期1996年8月22日将与捆扎材料接合的接合部分和作为扭转机构的钩安装在设置在主轴上的摆动部件上,并且连续线性捆扎材料沿与主轴轴线交叉的方向进给 与接合部分接合以形成折叠成U形的起点。 在这种状态下,捆扎材料被输送到围绕的导向件,从而将绑扎材料引导到待捆扎在一起的物品周围,同时通过将捆扎材料通过馈送力折叠成大致U形而形成两根线。 接合部和钩一体地旋转,使得捆扎材料另一侧上的折叠的前端部和后端部彼此扭绞在一起,将物品捆扎在一起。 因此,可以用一个绕组牢固地进行捆扎,同时通过将连续的线性捆扎材料自动地折叠成两半而形成两根线。