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    • 41. 发明授权
    • Liquid processing method and liquid processing apparatus
    • 液体处理方法和液体处理装置
    • US07640885B2
    • 2010-01-05
    • US11812766
    • 2007-06-21
    • Tsunenaga NakashimaKenji UrataShinji OkadaNobuaki Matsuoka
    • Tsunenaga NakashimaKenji UrataShinji OkadaNobuaki Matsuoka
    • B05B15/02B05B3/00B05C11/02
    • B05C11/08H01L51/0005
    • In a nozzle unit 4 equipped with processing-liquid nozzles 4A to 4J, an air layer 73 and a solvent layer 74 for processing liquid are successively formed outside a processing-liquid layer 71 included in the tip of each nozzle 4A (4B to 4J). Next, the solvent layer 74 in the nozzle 4A is thrown out into a drain part 62 of a standby unit 6 and subsequently, the processing liquid is supplied from the nozzle 4A to the surface of a wafer W, performing a coating process. After completing the coating process, the processing liquid remaining in the nozzle 4A is sucked and continuously, respective tips of the nozzles 4A to 4J are dipped into respective solvents in solvent reservoir 62A to 62J, respectively. From this state, by sucking in the nozzle 4A, there are newly formed, outside the processing layer 71 in the tip of the nozzle 4A, an air layer 73 and a solvent layer 74. Thus, in supplying a substrate, such as semiconductor wafer, with a processing liquid by use of a nozzle unit having a plurality of processing-liquid nozzles integrated, it is possible to prevent dryness of the processing liquids in the respective nozzles while preventing the nozzle unit from being large-sized.
    • 在具有处理液喷嘴4A〜4J的喷嘴单元4中,在各喷嘴4A(4B〜4J)的前端包含的处理液层71的外侧依次形成有用于处理液体的空气层73和溶剂层74, 。 接着,喷嘴4A中的溶剂层74被排出到备用单元6的排出部分62中,随后将处理液从喷嘴4A供给至晶片W的表面,进行涂覆处理。 在完成涂布处理之后,吸附残留在喷嘴4A中的处理液,喷嘴4A至4J的各个末端分别浸入溶剂储存器62A至62J中的相应溶剂中。 从该状态,通过吸入喷嘴4A,在喷嘴4A的前端处的处理层71的外侧,空气层73和溶剂层74之间新形成。因此,在供给诸如半导体晶片的基板 通过使用具有一体化的多个处理液喷嘴的喷嘴单元,通过处理液体,可以防止喷嘴单元大尺寸的处理液在各喷嘴中的干燥。
    • 44. 发明申请
    • Pellicle and novel fluoropolymer
    • 薄膜和新型含氟聚合物
    • US20060240222A1
    • 2006-10-26
    • US11446242
    • 2006-06-05
    • Ikuo MatsukuraHiromasa YamamotoYuichiro IshibashiShinji OkadaNaoko Shirota
    • Ikuo MatsukuraHiromasa YamamotoYuichiro IshibashiShinji OkadaNaoko Shirota
    • B32B3/10
    • G03F1/62C08G65/007C08G65/226G03F7/0046Y10T428/24331Y10T428/3154
    • It is to provide a useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material. A pellicle wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following unit (1). The unit (1) is a unit containing a fluorine atom, wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group. For example, a unit represented by the following formula (A1) (wherein n is 1 or 2, RF1 is —F or —CF3, and RF2 is —F or a C1-5 perfluoroalkyl group):
    • 本发明提供一种对短波长光(具有193nm的照射波长的ArF准分子激光和157nm的照射波长的F2准分子激光)的透明性和耐久性优异的氟系聚合物, 防护薄膜材料。 防护薄膜组件,其中用于防护薄膜和/或粘合剂的聚合物(I)是基本上包含以下单元(1)的聚合物。 单元(1)是包含氟原子的单元,其中形成聚合物主链的链包含碳原子和醚氧原子,形成主链的至少一个碳原子是形成环状基团的碳原子,并且 形成主链的至少一个醚性氧原子是不形成环状基团的氧原子。 例如,由下式(A1)(其中n为1或2,R F1)表示的单元为-F或-CF 3 3,R“ F 2是-F或C 1-5〜5全氟烷基):
    • 46. 发明授权
    • Electric power steering apparatus
    • 电动助力转向装置
    • US08948970B2
    • 2015-02-03
    • US13380999
    • 2011-11-04
    • Shinji OkadaHideyuki KobayashiNaoki Sawada
    • Shinji OkadaHideyuki KobayashiNaoki Sawada
    • B62D6/00B62D11/00B62D12/00B62D5/04
    • B62D5/0469B62D5/0481
    • [Problem]An object of the present invention is to provide an electric power steering apparatus that realizes weight saving and downsizing of component parts by counting and controlling the number of times of end hitting and simultaneously calculating a current limit value depending on the number of times of end hitting to limit assist.[Means for solving the problem]The present invention is an electric power steering apparatus that comprises an end hitting detection means that detects end hitting based on the steering torque and a differential steering torque obtained by differentiating the steering torque and outputs an end hitting detection signal, a counting means that counts a number 1 of times of end hitting detected by the end hitting detection means, a storage means that stores and keeps a total number of times of end hitting, and a current limit value calculating means that calculates a current limit value depending on a number 2 of times of end hitting obtained by adding the number 1 of times of end hitting from the counting means and the total number of times of end hitting from the storage means, wherein the current command value is limited based on the current limit value calculated by the current limit value calculating means.
    • 发明内容本发明的目的是提供一种电动助力转向装置,其通过对结束击打次数进行计数和控制来实现重量减轻和小型化,并且根据次数同时计算电流限制值 的终点击中来限制帮助。 解决问题的手段本发明是一种电动助力转向装置,其包括根据转向转矩检测结束击打的终点击检测装置和通过对转向转矩进行微分而获得的差速转向转矩,并输出终点击检测信号 计数装置,其对由终点击检测装置检测到的结束击打次数1进行计数;存储装置,其存储并保持结束击打的总次数;以及电流限制值计算装置,其计算电流限制 取决于通过从计数装置添加结束击打次数而获得的结束击打次数2和从存储装置结束击打的总次数,其中当前命令值基于 由电流限制值计算装置计算的电流限制值。
    • 48. 发明授权
    • Steering device
    • 转向装置
    • US08707818B2
    • 2014-04-29
    • US13379245
    • 2011-07-27
    • Shinji OkadaKou Yamamoto
    • Shinji OkadaKou Yamamoto
    • B62D1/18
    • B62D1/184
    • A steering device is provided in which fastening of a column is carried out smoothly, meshing of a movable tilt lock gear and a fixed tilt lock gear is carried out smoothly when tilting is clamped, and a rigidity can be increased when the tilting is clamped. A side plate on a left side to which a fixed tilt lock gear is attached is restrained from being elastically deformed by a rib. Therefore, in tilting and clamping and telescopically clamping, positions of the fixed tilt lock gear and a movable tilt lock gear in a vehicle width direction relative to each other is not varied, and therefore, the movable tilt lock gear and the fixed tilt lock gear are brought in mesh with each other smoothly.
    • 提供了一种转向装置,其中柱的紧固平稳地进行,当倾斜被夹紧时,可移动倾斜锁定齿轮和固定倾斜锁定齿轮的啮合被平滑地执行,并且当倾斜被夹紧时可以增加刚度。 安装有固定倾斜锁定齿轮的左侧的侧板被肋肋抑制成弹性变形。 因此,在倾斜和夹紧和可伸缩夹紧中,固定倾斜锁定齿轮和可移动倾斜锁定齿轮在车辆宽度方向上相对于彼此的位置不变,因此可移动倾斜锁定齿轮和固定倾斜锁定齿轮 彼此平滑地相互啮合。
    • 49. 发明授权
    • Steering device
    • 转向装置
    • US08677856B2
    • 2014-03-25
    • US13265430
    • 2011-07-14
    • Shinji OkadaYuuichi Tomaru
    • Shinji OkadaYuuichi Tomaru
    • B62D1/18
    • B62D1/187B62D1/184
    • A steering device facilitates assembly of a tilt lock mechanism, which elastically supports movement of a movable tilt lock gear to a stationary cam in a tilt direction via a spring. When a cylindrical part of a tilt stopper is inserted into a through hole, the cylindrical part enlarges in diameter, and surfaces of engagement projections engage with an end surface of an inclined cam surface side of the stationary cam. A right end surface of a tilt stopper flange part abuts against an end surface of the movable tilt lock gear. The movable tilt lock gear, a wire spring, and the stationary cam are integrated by the tilt stopper, and are prevented from being dispersed during transport. As a result, the assembly time can be reduced.
    • 转向装置便于组装倾斜锁定机构,该倾斜锁定机构通过弹簧弹性地支撑可动倾斜锁定齿轮沿倾斜方向移动到固定凸轮。 当倾斜挡块的圆柱形部分插入到通孔中时,圆柱形部分的直径扩大,并且接合突起的表面与固定凸轮的倾斜凸轮表面侧的端表面接合。 倾斜止动器凸缘部的右端面与可动倾斜锁定齿轮的端面抵接。 可动倾斜锁定齿轮,线弹簧和固定凸轮由倾斜挡块一体化,并且防止在运输过程中分散。 结果,可以减少组装时间。
    • 50. 发明授权
    • Steering device
    • 转向装置
    • US08671796B2
    • 2014-03-18
    • US13265451
    • 2011-07-14
    • Shinji OkadaYuuichi Tomaru
    • Shinji OkadaYuuichi Tomaru
    • B62D1/18
    • B62D1/187B62D1/184
    • A steering device reduces a sliding sound and an impact sound between a movable tilt lock gear and an outer surface of a side plate of a vehicle body attachment bracket. When a movable tilt lock gear is rotated, and a thread of an inclined cam surface of a stationary cam runs on a thread of an inclined cam surface of a movable cam, a fastening rod is pulled toward a left side, and the movable tilt lock gear is pushed toward an outer surface of a left side plate. Because a first buffer member and a second buffer member are attached to the movable tilt lock gear, sliding surfaces of the first buffer member and a sliding surface of the second buffer member contact the outer surface of the left side plate, and slide, to suppress the sliding sound.
    • 转向装置减少可动倾斜锁定齿轮与车身安装支架的侧板的外表面之间的滑动声音和撞击声音。 当可移动倾斜锁定齿轮旋转时,固定凸轮的倾斜凸轮表面的螺纹在可移动凸轮的倾斜凸轮表面的螺纹上行进时,将紧固杆拉向左侧,并且可移动倾斜锁 齿轮被推向左侧板的外表面。 由于第一缓冲构件和第二缓冲构件附接到可动倾斜锁定齿轮,所以第一缓冲构件的滑动面和第二缓冲构件的滑动面与左侧板的外表面接触并滑动,以抑制 滑动的声音。