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    • 44. 发明授权
    • Non-volatile memory devices and methods of manufacturing the same
    • 非易失性存储器件及其制造方法
    • US07564094B2
    • 2009-07-21
    • US12004985
    • 2007-12-21
    • Dong-Hyun KimChang-Jin Kang
    • Dong-Hyun KimChang-Jin Kang
    • H01L21/8238
    • H01L21/28282
    • Non-volatile memory devices include a tunnel insulating layer on a channel region of a substrate, a charge-trapping layer pattern on the tunnel insulating layer and a first blocking layer pattern on the charge-trapping layer pattern. Second blocking layer patterns are on the tunnel insulating layer proximate sidewalls of the charge-trapping layer pattern. The second blocking layer patterns are configured to limit lateral diffusion of electrons trapped in the charge-trapping layer pattern. A gate electrode is on the first blocking layer pattern. The second blocking layer patterns may prevent lateral diffusion of the electrons trapped in the charge-trapping layer pattern.
    • 非易失性存储器件包括在衬底的沟道区上的隧道绝缘层,隧道绝缘层上的电荷俘获层图案和电荷俘获层图案上的第一阻挡层图案。 第二阻挡层图案位于邻近电荷俘获层图案侧壁的隧道绝缘层上。 第二阻挡层图案被配置为限制捕获在电荷俘获层图案中的电子的横向扩散。 栅电极位于第一阻挡层图案上。 第二阻挡层图案可以防止捕获在电荷俘获层图案中的电子的横向扩散。
    • 45. 发明授权
    • Predistortion apparatus and method for compensating for a nonlinear distortion characteristic of a power amplifier using a look-up table
    • 用于使用查找表补偿功率放大器的非线性失真特性的预失真装置和方法
    • US07542518B2
    • 2009-06-02
    • US11027676
    • 2005-01-03
    • Dong-Hyun KimDong-Won Shin
    • Dong-Hyun KimDong-Won Shin
    • H04K1/02
    • H04L27/368
    • A polynomial predistortion apparatus and method for compensating for a nonlinear distortion characteristic of a power amplifier is provided. The apparatus and method comprise an adaptation controller for determining polynomial coefficients by calculating an inverse nonlinear distortion characteristic of the power amplifier, and calculating complex predistortion gains for all possible amplitudes of an input signal using the determined polynomial coefficients; and a predistorter for receiving an input signal which is a combination of complex-modulated previous baseband input signal samples and current input signal samples, predistorting the input signal using the complex predistortion gains output from the adaptation controller, and outputting the predistorted input signal to the power amplifier.
    • 提供了一种用于补偿功率放大器的非线性失真特性的多项式预失真装置和方法。 该装置和方法包括:一个自适应控制器,用于通过计算功率放大器的反非线性失真特性来确定多项式系数;以及使用所确定的多项式系数来计算输入信号的所有可能振幅的复数预失真增益; 以及预失真器,用于接收作为复调制的先前基带输入信号样本和当前输入信号采样的组合的输入信号,使用从适配控制器输出的复数预失真增益来预失真输入信号,并将预失真输入信号输出到 功率放大器。
    • 46. 发明申请
    • Method of Fabricating Semiconductor Device Having Self-Aligned Contact Plug and Related Device
    • 具有自对准接触插头及相关器件的半导体器件制造方法
    • US20080283957A1
    • 2008-11-20
    • US12112438
    • 2008-04-30
    • Nam-Jung KangDong-Soo WooHyeong-Sun HongDong-Hyun Kim
    • Nam-Jung KangDong-Soo WooHyeong-Sun HongDong-Hyun Kim
    • H01L29/00H01L21/4763
    • H01L27/10888H01L21/76897H01L27/10855
    • Methods of fabricating a semiconductor device having a self-aligned contact plug are provided. Methods include forming a lower insulating layer on a semiconductor substrate, forming a plurality of interconnection patterns parallel to each other on the lower insulating layer; forming an upper insulating layer that is configured to fill between the interconnection patterns, and forming a plurality of first mask patterns crossing the plurality of interconnection patterns, ones of the plurality of first mask patterns parallel to each other on the semiconductor substrate having the upper insulating layer. Methods may include forming a second mask pattern that is self-aligned to the plurality of first mask patterns and that is between ones of the plurality of first mask patterns, etching the upper insulating layer and the lower insulating layer using the first and second mask patterns and the plurality of interconnection patterns as etch masks to form a plurality of contact holes exposing the semiconductor substrate, and forming a plurality of contact plugs in respective ones of the plurality of contact holes. Semiconductor devices are also provided.
    • 提供制造具有自对准接触插头的半导体器件的方法。 方法包括在半导体衬底上形成下绝缘层,在下绝缘层上形成彼此平行的多个互连图案; 形成上部绝缘层,其被构造成填充在所述互连图案之间,并且形成与所述多个互连图案交叉的多个第一掩模图案,所述多个第一掩模图案中的所述第一掩模图案在具有所述上绝缘体的半导体衬底上彼此平行 层。 方法可以包括形成第二掩模图案,该第二掩模图案与多个第一掩模图案自对准,并且位于多个第一掩模图案之间,使用第一和第二掩模图案蚀刻上绝缘层和下绝缘层 以及所述多个互连图案作为蚀刻掩模,以形成暴露所述半导体衬底的多个接触孔,以及在所述多个接触孔中的相应接触孔中形成多个接触插塞。 还提供了半导体器件。
    • 49. 发明申请
    • Methods of fabricating nonvolatile memory devices
    • 制造非易失性存储器件的方法
    • US20070231989A1
    • 2007-10-04
    • US11807544
    • 2007-05-29
    • Seung-Pil ChungJong-Ho ParkKyeong-Koo ChiDong-Hyun Kim
    • Seung-Pil ChungJong-Ho ParkKyeong-Koo ChiDong-Hyun Kim
    • H01L21/8238
    • H01L27/11521H01L27/115
    • A nonvolatile memory device includes a semiconductor substrate, a device isolation film, a tunnel insulation film, a plurality of floating gates, an inter-gate dielectric film, and a control gate pattern. Trenches are formed in the substrate that define active regions therebetween. The device isolation film is in the trenches in the substrate. The tunnel insulation film is on the active regions of the substrate. The plurality of floating gates are each on the tunnel insulation film over the active regions of the substrate. The inter-gate dielectric film extends across the floating gates and the device isolation film. The control gate pattern is on the inter-gate dielectric film and extends across the floating gates. A central region of the device isolation film in the trenches has an upper major surface that is recessed below an upper major surface of a surrounding region of the device isolation film in the trenches. An edge of the recessed central region of the device isolation film is aligned with a sidewall of an adjacent one of the floating gates.
    • 非易失性存储器件包括半导体衬底,器件隔离膜,隧道绝缘膜,多个浮置栅极,栅极间电介质膜和控制栅极图案。 沟槽形成在衬底中,其间限定有效区域。 器件隔离膜位于衬底中的沟槽中。 隧道绝缘膜位于衬底的有源区上。 多个浮置栅极分别位于衬底的有源区上的隧道绝缘膜上。 栅极间电介质膜延伸穿过浮栅和器件隔离膜。 控制栅极图案在栅极间电介质膜上并且跨越浮动栅极延伸。 沟槽中的器件隔离膜的中心区域具有在沟槽中的器件隔离膜的周围区域的上主表面下方凹陷的上主表面。 器件隔离膜的凹入的中心区域的边缘与相邻的一个浮动栅极的侧壁对准。
    • 50. 发明授权
    • Apparatus for cleaning a wafer
    • 清洁晶片的装置
    • US07264008B2
    • 2007-09-04
    • US10608074
    • 2003-06-30
    • Dong-Hyun KimSang-Ho Lee
    • Dong-Hyun KimSang-Ho Lee
    • B08B3/00
    • H01L21/67051B08B3/02Y10S134/902
    • An apparatus for cleaning a wafer includes a plurality of holders for contacting and securing peripheral portions of a wafer, and for rotating the wafer, a first plate disposed to face a first surface of the wafer, the first plate having a plurality of first nozzles for spraying a first cleaning solution onto the first surface of the wafer, and a second plate disposed to face a second surface of the wafer that is opposite to the first surface, the second plate having a plurality of second nozzles for spraying a second cleaning solution onto the second surface of the wafer. In operation, the first and second plates and the wafer are rotated in opposite directions. The opposite rotation causes the cleaning solutions to flow abruptly thereby increasing a frictional force between the surfaces on the wafer and the cleaning solutions to improve the efficiency of the cleaning process.
    • 一种用于清洁晶片的设备包括多个保持器,用于接触和固定晶片的周边部分,并且用于旋转晶片,设置成面对晶片的第一表面的第一板,所述第一板具有多个第一喷嘴, 将第一清洗溶液喷射到晶片的第一表面上,以及设置成面对与第一表面相对的晶片的第二表面的第二板,第二板具有多个第二喷嘴,用于将第二清洁溶液喷射到 晶片的第二表面。 在操作中,第一和第二板和晶片沿相反的方向旋转。 相反的旋转导致清洁溶液突然流动,从而增加了晶片表面和清洁溶液之间的摩擦力,以提高清洁过程的效率。