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41. 发明授权

US5796983A Dielectric function parametric model, and method of use 失效
标题翻译：介电函数参数模型及其使用方法
公开(公告)号：US5796983A
公开(公告)日：1998-08-18
申请号：US514959
申请日：1995-08-14
申请人： Craig M. Herzinger , Blaine D. Johs
发明人： Craig M. Herzinger , Blaine D. Johs
IPC分类号： H01L21/66 , G01N21/00
CPC分类号： H01L22/12
摘要： Novel dielectric function parametric model oscillator structures comprised of finite order polynomials and/or essentially zero-width finite magnitude discontinuities in appropriate sequences, which novel oscillator structures are suitable for application in a Kronig-Kramer consistent dielectric function oscillator structure based mathematical model, are disclosed. The present invention method of application enables production of one-dimensional normalized dependent variable vs. independent variable evaluating look-up tables by application of convolution integration effected oscillator structure Gaussian broadening, as applied to finite order polynomials, without the requirement that numerical derivatives or integrations be performed. In use, addition of contributions from one or more said present invention oscillator structures allows determination of dependent variable values given independent variable values, without requiring subtraction of relatively large numbers. In addition only a relatively small set of essentially uncorrelated present invention oscillator structure finite order polynomial term coefficient and finite magnitude discontinuity magnitude defining mathematical model coefficients are required. The present invention dielectric function model oscillator structure mathematical model allows user determinable degrees of freedom which allow essentially any plot of dielectric function dependent vs. independent variable data to be modeled with a high degree of mathematical model coefficients.
摘要翻译：公开了新颖的介电函数参数模型振荡器结构，该结构由适当序列中的有限阶多项式和/或基本上零宽度有限幅度不连续性组成，该新型振荡器结构适用于基于Kronig-Kramer一致的介电函数振荡器结构的数学模型。本发明的应用方法能够通过应用卷积积分实现的振荡器结构高斯加宽，适用于有限阶多项式，而不需要数值导数或积分，从而生成一维归一化因变量与独立变量评估查找表。被执行。在使用中，从一个或多个所述本发明振荡器结构的贡献的添加允许确定给定独立变量值的因变量值，而不需要相减较大数目。此外，仅需要一组基本上不相关的本发明的振荡器结构有限阶多项式项系数和限定数学模型系数的有限幅度不连续量级。本发明的介电函数模型振荡器结构数学模型允许用户可确定的自由度，其允许使用高度的数学模型系数对基本上任何相对于独立可变数据的介电函数图进行建模。

42. 发明授权

US08248607B1 Empirical correction for spectroscopic ellipsometric measurements of rough or textured surfaces 有权
标题翻译：粗糙或纹理表面光谱椭偏测量的经验校正
公开(公告)号：US08248607B1
公开(公告)日：2012-08-21
申请号：US12804958
申请日：2010-08-03
申请人： Craig M. Herzinger , Blaine D. Johs , Mathias M. Schubert , Tino Hofmann
发明人： Craig M. Herzinger , Blaine D. Johs , Mathias M. Schubert , Tino Hofmann
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method of applying spectroscopic ellipsometry to arrive at accurate values of optical and physical properties for thin films on samples having rough or textured surfaces.
摘要翻译：一种应用光谱椭偏仪的方法，以获得具有粗糙或纹理表面的样品上的薄膜的光学和物理性质的准确值。

43. 发明授权

US08013996B1 Spatial filter in sample investigation system 有权
标题翻译：样本调查系统中的空间滤波器
公开(公告)号：US08013996B1
公开(公告)日：2011-09-06
申请号：US12454007
申请日：2009-05-12
申请人： Martin M. Liphardt , Ping He , Blaine D. Johs , Craig M. Herzinger
发明人： Martin M. Liphardt , Ping He , Blaine D. Johs , Craig M. Herzinger
IPC分类号： G01J4/00
CPC分类号： G01J1/02 , G01J1/0295 , G01J1/04 , G01J1/0425 , G01J1/0437 , G01J1/0451 , G01J1/0462 , G01N21/211 , G01N21/55 , G02B27/46
摘要： Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having an opening therethrough of an arbitrary shape, including methodology for fabracting the aperture on an end of an optical fiber per se.
摘要翻译：利用电磁辐射来研究样品并且包括至少一个空间滤光器的系统，该至少一个空间滤光器具有通孔中具有任意形状的开口，该空间滤光器包括用于在光纤本身端部进行衍射的方法。

44. 发明授权

US07460230B2 Deviation angle self compensating substantially achromatic retarder 有权
公开(公告)号：US07460230B2
公开(公告)日：2008-12-02
申请号：US11590408
申请日：2006-10-31
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B27/286
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

45. 发明申请

US20080100842A1 Deviation angle self compensating substantially achromatic retarder 有权
公开(公告)号：US20080100842A1
公开(公告)日：2008-05-01
申请号：US11633138
申请日：2006-12-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
IPC分类号： G01J4/00
CPC分类号： G02B5/3083 , G01J1/0407 , G01N21/211 , G01N2021/213 , G02B26/06
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

46. 发明授权

US07327456B1 Spectrophotometer, ellipsometer, polarimeter and the like systems 有权
标题翻译：分光光度计，椭偏仪，偏光计等系统
公开(公告)号：US07327456B1
公开(公告)日：2008-02-05
申请号：US11145470
申请日：2005-06-06
申请人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt , Gerald T. Cooney
发明人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt , Gerald T. Cooney
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J1/02 , G01J1/0266 , G01J3/0202 , G01J3/0224 , G01J3/0235 , G01J3/0237 , G01J3/0289 , G01J3/04 , G01J3/18 , G01J4/00 , G01N21/211
摘要： Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
摘要翻译：公开了能够在真空 - 紫外（VUV）至近红外（NIR）波长范围内操作的椭偏仪等系统的改进以及使用方法。

47. 发明授权

US07295313B1 Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters 有权
$Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters$
标题翻译：中波长带光谱椭偏仪应用于多层交替高/低折射率滤光片的原位实时制造
公开(公告)号：US07295313B1
公开(公告)日：2007-11-13
申请号：US10943821
申请日：2004-09-17
申请人： Blaine D. Johs , Jeffrey S. Hale , John A. Woollam , Craig M. Herzinger
发明人： Blaine D. Johs , Jeffrey S. Hale , John A. Woollam , Craig M. Herzinger
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/213 , G02B5/285 , G02B5/288
摘要： Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data over an intermediate wavelength band range around a pass or reject band, to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength thin film interference filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.
摘要翻译：公开了在通过或拒绝频带周围的中间波长带范围内应用倾斜入射角，反射和/或透射模式分光椭偏仪PSI和/或DELTA（包括其组合和/或数学等价物）的波长数据，以监测和/或控制制造多层高/低折射率带通，带阻和变化的衰减对波长薄膜干涉滤波器，单独或与透射非椭圆电磁波转折点组合以基本上正常的入射角获得的层数据。

48. 发明授权

US07245376B2 Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter 有权
标题翻译：旋转补偿器椭圆计/偏振计中的组合空间滤波器和继电器系统
公开(公告)号：US07245376B2
公开(公告)日：2007-07-17
申请号：US11284213
申请日：2005-11-22
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G02B17/008
摘要： Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
摘要翻译：改进的低像差继电器系统在旋转补偿器椭圆偏振器，偏振计等系统中作为空间滤波器。

49. 发明授权

US07075649B1 Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration 有权
标题翻译：离散极化状态可旋转补偿光谱椭偏仪系统及校准方法
公开(公告)号：US07075649B1
公开(公告)日：2006-07-11
申请号：US09945962
申请日：2001-09-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green , Jeffrey S. Hale
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green , Jeffrey S. Hale
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： Disclosed are spectroscopic ellipsometer and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer and analyzer elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator electromagnetic beam transmitting means, which serves to enable imposing a plurality of sequentially discrete, rather than continuously varying, polarization states on said beam of electromagnetic radiation. Further disclosed is a calibration procedure for said spectroscopic ellipsometer system portion of the invention which involves the gathering of, for each of a plurality of ellipsometrically distinct sample systems, spectroscopic data at a sequential plurality of discrete electromagnetic radiation beam polarization states, combined with providing of a mathematical model of the spectroscopic ellipsometer system and application of a mathematical regression procedure.
摘要翻译：公开了光谱椭偏仪和组合光谱反射计/椭偏仪系统。分光椭偏仪系统部分包括在数据采集期间保持固定在位的偏振器和分析器元件，以及逐步旋转的补偿器电磁束发射装置，其用于使多个顺序离散而不是连续变化的极化状态在所述电磁辐射束。进一步公开的是本发明的所述分光椭偏仪系统部分的校准程序，其涉及对于多个椭偏不同的采样系统中的每一个，以顺序的多个离散电磁辐射束极化状态收集光谱数据，光谱椭偏仪系统的数学模型和数学回归程序的应用。

50. 发明授权

US06982792B1 Spectrophotometer, ellipsometer, polarimeter and the like systems 有权
标题翻译：分光光度计，椭偏仪，偏光计等系统
公开(公告)号：US06982792B1
公开(公告)日：2006-01-03
申请号：US10376677
申请日：2003-02-28
申请人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt
发明人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J3/02 , G01J3/0202 , G01J3/021 , G01J3/0235 , G01J3/0237 , G01J3/0291 , G01J3/04 , G01J3/12 , G01J4/00 , G01N2021/213
摘要： Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
摘要翻译：公开了能够在真空 - 紫外（VUV）至近红外（NIR）波长范围内操作的椭偏仪等系统的改进以及使用方法。

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