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1. 发明授权

US10871395B2 Filter assembly for providing adjustable spectral capabilities in a broadband inspection system 有权
公开(公告)号：US10871395B2
公开(公告)日：2020-12-22
申请号：US15649388
申请日：2017-07-13
申请人： KLA-Tencor Corporation
发明人： Jeremy Nesbitt , Jagadeesh Kumar , David C. Oram
IPC分类号： G01J3/02 , G01J3/32 , G01J3/12 , G01J3/18
CPC分类号： G01J3/0235 , G01J3/0202 , G01J3/0291 , G01J3/12 , G01J3/18 , G01J3/32 , G01J2003/1213 , G01J2003/1217 , G01J2003/1221
摘要： A system which may be used to increase the number of available spectrum bands in an inspection system is provided. The system may include an illumination source configured to emit broadband illumination. The system may also include a filter assembly including two or more filter units. The two or more filter units may include two or more filters with one or more varying filtering characteristics. The system may also include two or more motors configured to selectively actuate selected filters of the filter units into the beam of illumination. Using the system, the number of available spectrum bands to be used in an inspection system may be increased.

2. 发明申请

US20180313762A1 MULTIFOCAL HYPERSPECTRAL RAMAN SYSTEM AND METHODS FOR IMAGING OF MATERIALS 审中-公开
公开(公告)号：US20180313762A1
公开(公告)日：2018-11-01
申请号：US16028998
申请日：2018-07-06
申请人： CASE WESTERN RESERVE UNIVERSITY
发明人： Ozan AKKUS , Shan YANG
IPC分类号： G01N21/65 , G01J3/28 , G01J3/44 , G01J3/02 , G01J3/26 , G01J3/10
CPC分类号： G01N21/65 , G01J3/0205 , G01J3/0208 , G01J3/0224 , G01J3/0227 , G01J3/0235 , G01J3/0294 , G01J3/10 , G01J3/26 , G01J3/2823 , G01J3/44 , G01J3/4412 , G01J3/508 , G01N2201/06113
摘要： A hyperspectral Raman imaging system having the ability to focus on excitation laser beam over a relatively wide field of view due to the use of a lens array, in particular a microlens array. Hyperspectral selection is provided in one embodiment through the use of dual-axis controlled dielectric filtration. Methods for analyzing materials with the system are disclosed. The device or system can be used in generally any application where investigation of materials is required.

3. 发明申请

US20180275069A1 ICP EMISSION SPECTROPHOTOMETER 审中-公开
公开(公告)号：US20180275069A1
公开(公告)日：2018-09-27
申请号：US15926097
申请日：2018-03-20
申请人： Hitachi High-Tech Science Corporation
发明人： Yutaka Ikku
IPC分类号： G01N21/73 , G01J3/18 , G01J3/28 , G01J3/443
CPC分类号： G01N21/73 , G01J3/0235 , G01J3/04 , G01J3/18 , G01J3/2823 , G01J3/443 , G01J2003/045 , G01N21/68
摘要： An ICP emission spectrophotometer includes an inductively coupled plasma device, a spectroscope, and a computer. The spectroscope includes an incidence window, an incidence side slit, a diffraction grating, an emission window, an emission side slit, and a detector. Measurement conditions including diffraction condition and a measurement result are displayed on a display device. In a case where there are a plurality of diffraction conditions each including a combination of a diffraction grating and a diffraction order for measuring desired diffracted light, comparison information including at least an intensity and a resolution of emitted light in the diffraction condition is displayed on the display device. A measurer selects diffraction conditions in which resolution is higher from among the diffraction conditions, and selects a diffraction condition in which an intensity is obtained from among the selected diffraction conditions.

4. 发明申请

US20180231415A1 ENCLOSED BENCHTOP RAMAN SPECTROMETRY DEVICE 审中-公开
公开(公告)号：US20180231415A1
公开(公告)日：2018-08-16
申请号：US15897754
申请日：2018-02-15
申请人： MarqMetrix Inc.
发明人： Brian James Marquardt , John Scott Van Vuren
IPC分类号： G01J3/02 , G01N21/95 , G01N21/65 , G01N33/68 , A61B5/00 , G01N15/02
CPC分类号： G01J3/0202 , A61B5/0082 , G01J3/0208 , G01J3/0235 , G01J3/0262 , G01J3/0264 , G01J3/027 , G01J3/0291 , G01J3/44 , G01N15/0227 , G01N21/65 , G01N21/95 , G01N33/6851
摘要： An enclosed benchtop analytical device, as well as systems, processes, and techniques related thereto are disclosed. A benchtop analytical device can include an enclosure enclosing a probe and a sample. A compliance component can determine satisfaction of one or more compliance rules, such as a compliance rule relating to an enclosure being in an operable configuration based on a lid of the enclosure being closed. If the compliance rule(s) is determined to be satisfied, the compliance component may enable the release of optical energy for interrogation of the sample via the probe. In some embodiments, the enclosure can enclose a sample plate that can be used to conveniently and accurately retain a sample in a suitable position within the enclosure.

5. 发明申请

US20180209849A1 DATA BLENDING MULITPLE DISPERSIVE RANGE MONOCHROMATOR 审中-公开
公开(公告)号：US20180209849A1
公开(公告)日：2018-07-26
申请号：US15416552
申请日：2017-01-26
申请人： WESTCO SCIENTIFIC INSTRUMENTS, INC
发明人： Jerome J. Workman, Jr. , Tushar Saraf , Thomas Andrew Bennett , John Glaberson
IPC分类号： G01J3/28 , G01J3/18 , G01J3/02
CPC分类号： G01J3/28 , G01J3/0202 , G01J3/0235 , G01J3/0267 , G01J3/0289 , G01J3/06 , G01J3/1804 , G01J2003/1828
摘要： Aspects of blending data detected by a monochromator over multiple wavelength ranges is described herein. In one embodiment, the monochromator includes a diffraction grating, a grating drive motor that rotates the diffraction grating to provide, by diffraction of broadband light, first dispersed wavelengths of light and second dispersed wavelengths of light, a detector that detects a first reflection from the first dispersed wavelengths of light and a second reflection from the second dispersed wavelengths of light, and processing circuitry that blends data values from the first reflection and data values from the second reflection together to provide a spectrum of combined data values. By blending data detected over multiple ranges, measurements of relatively high precision and quality can be provided over a wider spectral range.

6. 发明授权

US09958324B1 Enclosed benchtop raman spectrometry device 有权
公开(公告)号：US09958324B1
公开(公告)日：2018-05-01
申请号：US15434002
申请日：2017-02-15
申请人： MarqMetrix, Inc.
发明人： Brian James Marquardt , John Scott Van Vuren , Giora Proskurowski
IPC分类号： G01J3/00 , G01J3/02 , G01J1/42 , G01J3/44 , G01J3/28
CPC分类号： G01J3/027 , G01J3/0208 , G01J3/0235 , G01J3/0262 , G01J3/0264 , G01J3/44 , G01J3/4412 , G01J2003/283 , G01N21/65
摘要： An enclosed benchtop Raman spectrometry device, systems, methods, and techniques related thereto are disclosed. A benchtop Raman spectrometer can comprise an enclosure enclosing a probe and sample. In an embodiment, a compliance component can determine concurrent satisfaction of a group of compliance rules. The compliance rules can relate to contact between the probe and sample, environmental conditions within the enclosure, illumination conditions within the enclosure, an operation state of a viewport allowing direct viewing of a sample-probe interface, etc. While concurrent satisfaction is determined, the release of optical energy for interrogation of the sample via the probe can be enabled. In an embodiment, the probe can comprise a spherical optical element, e.g., a BallProbe®, which can be brought into contact with the sample to perform Raman spectroscopy.

7. 发明授权

US09786400B2 Adjustable aperture device with integral aperture holes 有权
公开(公告)号：US09786400B2
公开(公告)日：2017-10-10
申请号：US13683645
申请日：2012-11-21
申请人： Agilent Technologies, Inc.
发明人： Armin Steinke
IPC分类号： G21K1/04 , G01J1/04 , G01J3/02 , G01J3/04 , G01N30/64 , G01N30/72
CPC分类号： G21K1/04 , G01J1/0403 , G01J1/0437 , G01J1/044 , G01J1/0462 , G01J3/0202 , G01J3/0229 , G01J3/0235 , G01J3/04 , G01N30/64 , G01N30/72
摘要： An adjustable aperture device for an electromagnetic radiation detecting apparatus includes a position adjustment body configured for adjusting a position of a selected aperture hole of multiple selectable aperture holes, where electromagnetic radiation propagates through the selected aperture hole. The adjustable aperture device further includes a guide unit configured for guiding the position adjustment body along a predefined guide direction, and an aperture body defining the aperture holes and including multiple engagement sections, where the adjustment body is engagable in a selectable one of the engagement sections to thereby select the selected aperture hole. The adjustable aperture device further includes a pre-loading element configured for pre-loading the position adjustment body towards the aperture body, and a drive unit configured for driving the aperture body to move so that the position adjustment body is engaged in a respective one of the plurality of engagement sections.

8. 发明授权

US09752931B2 Spectrometer with multiple Fabry-Perot filters for gas analysis 有权
公开(公告)号：US09752931B2
公开(公告)日：2017-09-05
申请号：US14488608
申请日：2014-09-17
申请人： SICK AG
发明人： Torsten Waldmann , Rolf Disch
IPC分类号： G01J3/02 , G01N33/00 , G01N21/3504 , G01J3/12 , G01J3/26 , G01J3/433
CPC分类号： G01J3/0205 , G01J3/0235 , G01J3/12 , G01J3/26 , G01J3/433 , G01J2003/1282 , G01N21/3504 , G01N33/0062
摘要： A spectrometer (10) for gas analysis is provided, the spectrometer comprising a measurement cell (28) having a gas to be investigated, a light source (12) for the transmission of light (14) into the measurement cell (28) on a light path (16), a filter arrangement (22) having a Fabry-Perot filter (24a-c) in the light path (16), in order to set frequency properties of the light (14) by means of a transmission spectrum of the filter arrangement (22), as well as a detector (36, 38) which measures the absorption of the light (14) by the gas (30) in the measurement cell (28). In this connection the filter arrangement (22) has a plurality of Fabry-Perot filters (24a-c) arranged behind one another in the light path (14) and a control unit (44) for the filter arrangement (22) is provided in order to change the transmission spectrum by setting at least one of the Fabry-Perot filters (24a-c).

9. 发明授权

US09366573B2 Spectral camera with overlapping segments of image copies interleaved onto sensor array 有权
标题翻译：具有重叠的图像副本片段的光谱相机交错传感器阵列
公开(公告)号：US09366573B2
公开(公告)日：2016-06-14
申请号：US14267776
申请日：2014-05-01
申请人： IMEC
发明人： Bert Geelen , Andy Lambrechts , Klaas Tack
IPC分类号： H04N9/07 , H04N9/04 , G01J3/28 , G01J3/51 , G01J3/02
CPC分类号： G01J3/2803 , G01J3/0208 , G01J3/0229 , G01J3/0235 , G01J3/0264 , G01J3/2823 , G01J3/513 , Y10T29/49826
摘要： A spectral camera having an objective lens, an array of lenses for producing optical copies of segments of the image, an array of filters for the different optical channels and having an interleaved spatial pattern, and a sensor array to detect the copies of the image segments is disclosed. Further, detected segment copies of spatially adjacent optical channels have different passbands and represent overlapping segments of the image, and detected segment copies of the same passband on spatially non-adjacent optical channels represent adjacent segments of the image which fit together. Having segments of the image copied can help enable better optical quality for a given cost. Having an interleaved pattern of the filter bands with overlapping segments enables each point of the image to be sensed at different bands to obtain the spectral output for many bands simultaneously to provide better temporal resolution.
摘要翻译：具有物镜的光谱相机，用于产生图像的片段的光学副本的透镜阵列，用于不同光学信道的滤光器阵列并具有交错的空间图案，以及用于检测图像片段的副本的传感器阵列被披露。此外，空间相邻光通道的检测到的片段副本具有不同的通带并且表示图像的重叠片段，并且在空间上不相邻的光学通道上检测到相同通带的片段副本表示装配在一起的图像的相邻片段。复制图像的片段有助于为给定成本提供更好的光学质量。具有重叠片段的滤波器带的交错图案使得能够在不同频带处感测图像的每个点，以同时获得许多频带的频谱输出以提供更好的时间分辨率。

10. 发明授权

US09250132B2 Methods and systems for chemical composition measurement and monitoring using a rotating filter spectrometer 有权
公开(公告)号：US09250132B2
公开(公告)日：2016-02-02
申请号：US13932481
申请日：2013-07-01
申请人： Pason Systems Corp.
发明人： David Bonyuet , Vidi A. Saptari
IPC分类号： G01N21/25 , G01J3/42 , G01J3/02 , G01J3/06 , G01J3/32 , G01N21/27 , G01N21/31 , G01J3/12 , G01N21/33 , G01N21/3504
CPC分类号： G01J3/42 , G01J3/02 , G01J3/0235 , G01J3/06 , G01J3/32 , G01J2003/1247 , G01N21/274 , G01N21/314 , G01N21/33 , G01N21/3504 , G01N2021/3174 , G01N2201/129
摘要： The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly. In preferred embodiments, the rotatable filter is tilted with respect to the rotation axis, thereby providing surprisingly improved measurement stability and significantly improved control of the wavelength coverage of the filter spectrometer.

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