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1. 发明授权

US09952141B1 Method of characterizing a beam of electromagnetic radiation in ellipsometer and the like systems 有权
公开(公告)号：US09952141B1
公开(公告)日：2018-04-24
申请号：US14999748
申请日：2016-06-22
申请人： Jeffrey S. Hale , Craig M. Herzinger , Martin M. Liphardt
发明人： Jeffrey S. Hale , Craig M. Herzinger , Martin M. Liphardt
IPC分类号： G01N21/21 , G01J4/04
CPC分类号： G01N21/211 , G01N2201/127
摘要： An approach to characterizing beams of electromagnetic radiation such as are applied in ellipsometer and the like systems, involving considering the beam to be comprised of a number of spatially distributed beam rays, each of which is represented mathematically as an effectively independent source.

2. 发明授权

US08159672B1 Sample investigating system and method of use 有权
标题翻译：样本调查系统及使用方法
公开(公告)号：US08159672B1
公开(公告)日：2012-04-17
申请号：US12592015
申请日：2009-11-19
申请人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
发明人： Martin M. Liphardt , Thomas E. Tiwald , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , Ronald A. Synowicki , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/55
摘要： A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
摘要翻译：用于调整作为单元的相邻源/检测器与样本之间的间隔的分光系统和用于将从所述样品反射回入所述样品然后沿着位于所述样品中的轨迹的入射光束引导的反射装置入射平面与入射光束偏移，或直接从反射装置进入检测器，包括用于减少来自样品背面的电磁波束的反射的装置，包括使用方法。

3. 发明授权

US07872751B2 Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权
标题翻译：快速样品高度，AOI和POI校准在映射椭偏仪等
公开(公告)号：US07872751B2
公开(公告)日：2011-01-18
申请号：US12313760
申请日：2008-11-25
申请人： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
发明人： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/01 , G01N21/21 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译：与对准系统（AS）功能组合的样本调查系统（ES）以及启用非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，应用于映射椭偏仪等。

4. 发明授权

US07215424B1 Broadband ellipsometer or polarimeter system including at least one multiple element lens 有权
标题翻译：包括至少一个多元素透镜的宽带椭偏仪或偏振计系统
公开(公告)号：US07215424B1
公开(公告)日：2007-05-08
申请号：US11103229
申请日：2005-04-12
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0202 , G01J3/0208 , G01N21/21 , G01N21/211 , G01N2021/213
摘要： Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.
摘要翻译：准无彩色多元素透镜在管状安装夹具中相对于彼此精确地安装，以及其在聚焦（和任选地重新准直））中的应用，使分光电磁束成为非常小的，相对不分散的，材料系统上的区域斑点。

5. 发明授权

US07193710B1 Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses 有权
标题翻译：旋转或可旋转补偿器光谱椭偏仪系统包括多个元件透镜
公开(公告)号：US07193710B1
公开(公告)日：2007-03-20
申请号：US10829620
申请日：2004-04-22
申请人： Blaine D. Johs , Martin M. Liphardt , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Blaine D. Johs , Martin M. Liphardt , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J4/04 , G01N21/211 , G01N2021/213
摘要： Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.
摘要翻译：公开了一种分光椭偏仪系统，其包括偏振器和分析器元件，其在数据采集期间保持固定在适当的位置，以及至少一个连续旋转或逐步旋转的补偿器，其透过电磁束并且施加连续可变或多个顺序离散的极化状态在电磁辐射束上; 以及至少一个透射电磁光束的多重元件透镜。

6. 发明授权

US07075650B1 Discrete polarization state spectroscopic ellipsometer system and method of use 有权
标题翻译：离散偏振态光谱椭偏仪系统及其使用方法
公开(公告)号：US07075650B1
公开(公告)日：2006-07-11
申请号：US10613118
申请日：2003-07-07
申请人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
发明人： Blaine D. Johs , Martin M. Liphardt , Ping He , Jeffrey S. Hale
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The prefered spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.
摘要翻译：一种分光椭偏仪系统，包括多个单独的光源，所述多个单独的光源被依次通电以提供不同极化状态的每一个光束序列，但是沿公共轨迹朝向样品。优选的光谱椭偏仪系统在数据收集期间没有移动的部分，并且其提供顺序的多个顺序离散而不是连续变化的偏振状态。

7. 发明授权

US07295313B1 Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters 有权
$Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters$
标题翻译：中波长带光谱椭偏仪应用于多层交替高/低折射率滤光片的原位实时制造
公开(公告)号：US07295313B1
公开(公告)日：2007-11-13
申请号：US10943821
申请日：2004-09-17
申请人： Blaine D. Johs , Jeffrey S. Hale , John A. Woollam , Craig M. Herzinger
发明人： Blaine D. Johs , Jeffrey S. Hale , John A. Woollam , Craig M. Herzinger
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/213 , G02B5/285 , G02B5/288
摘要： Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data over an intermediate wavelength band range around a pass or reject band, to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength thin film interference filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.
摘要翻译：公开了在通过或拒绝频带周围的中间波长带范围内应用倾斜入射角，反射和/或透射模式分光椭偏仪PSI和/或DELTA（包括其组合和/或数学等价物）的波长数据，以监测和/或控制制造多层高/低折射率带通，带阻和变化的衰减对波长薄膜干涉滤波器，单独或与透射非椭圆电磁波转折点组合以基本上正常的入射角获得的层数据。

8. 发明授权

US07245376B2 Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter 有权
标题翻译：旋转补偿器椭圆计/偏振计中的组合空间滤波器和继电器系统
公开(公告)号：US07245376B2
公开(公告)日：2007-07-17
申请号：US11284213
申请日：2005-11-22
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G02B17/008
摘要： Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
摘要翻译：改进的低像差继电器系统在旋转补偿器椭圆偏振器，偏振计等系统中作为空间滤波器。

9. 发明授权

US07099006B1 Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means 有权
标题翻译：椭偏仪或偏光计等具有光束色移和定向装置的系统
公开(公告)号：US07099006B1
公开(公告)日：2006-08-29
申请号：US10613051
申请日：2003-07-07
申请人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden
发明人： Blaine D. Johs , Galen L. Pfeiffer , Jeffrey S. Hale , Christopher A. Goeden
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while de-emphasizing visual wavelength intensity and simultaneously emphasizing both IR and UV wavelength intensities, applied in ellipsometer or polarimeter and the like systems.
摘要翻译：用于反射地引导电磁辐射的分光束的电磁光束色移和引导装置，同时强调视觉波长强度并且同时强调以椭偏仪或偏光计等应用的IR和UV波长强度。

10. 发明授权

US07075649B1 Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration 有权
标题翻译：离散极化状态可旋转补偿光谱椭偏仪系统及校准方法
公开(公告)号：US07075649B1
公开(公告)日：2006-07-11
申请号：US09945962
申请日：2001-09-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green , Jeffrey S. Hale
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green , Jeffrey S. Hale
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N21/274 , G01N2021/213
摘要： Disclosed are spectroscopic ellipsometer and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer and analyzer elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator electromagnetic beam transmitting means, which serves to enable imposing a plurality of sequentially discrete, rather than continuously varying, polarization states on said beam of electromagnetic radiation. Further disclosed is a calibration procedure for said spectroscopic ellipsometer system portion of the invention which involves the gathering of, for each of a plurality of ellipsometrically distinct sample systems, spectroscopic data at a sequential plurality of discrete electromagnetic radiation beam polarization states, combined with providing of a mathematical model of the spectroscopic ellipsometer system and application of a mathematical regression procedure.
摘要翻译：公开了光谱椭偏仪和组合光谱反射计/椭偏仪系统。分光椭偏仪系统部分包括在数据采集期间保持固定在位的偏振器和分析器元件，以及逐步旋转的补偿器电磁束发射装置，其用于使多个顺序离散而不是连续变化的极化状态在所述电磁辐射束。进一步公开的是本发明的所述分光椭偏仪系统部分的校准程序，其涉及对于多个椭偏不同的采样系统中的每一个，以顺序的多个离散电磁辐射束极化状态收集光谱数据，光谱椭偏仪系统的数学模型和数学回归程序的应用。

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