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1. 发明申请

US20090091758A1 Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation 有权
标题翻译：构造偏移角自补偿基本消色差延迟器以补偿光束扫描的方法
公开(公告)号：US20090091758A1
公开(公告)日：2009-04-09
申请号：US12290787
申请日：2008-11-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统补偿光谱椭偏仪和/或偏振计系统。

2. 发明授权

US07508510B2 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths 有权
标题翻译：在具有多个波长的样品基板上研究完全相同点的系统和方法
公开(公告)号：US07508510B2
公开(公告)日：2009-03-24
申请号：US11636786
申请日：2006-12-12
申请人： Galen L. Pfeiffer , Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Christopher A. Goeden , Ping He , John A. Woollam , James D. Welch
发明人： Galen L. Pfeiffer , Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Christopher A. Goeden , Ping He , John A. Woollam , James D. Welch
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0289 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/213
摘要： System for and Method of analyzing a sample at substantially the exact same small spot thereon with a plurality of wavelengths using a lens system which provides the same focal length at at least two wavelengths at various positions thereof with respect to a sample, including analyzing data obtained at those wavelengths.
摘要翻译：使用在相对于样本的各个位置处以至少两个波长提供相同焦距的透镜系统来分析具有多个波长的基本上与其上的基本上完全相同的小点处的样本的系统和方法，包括分析获得的数据在那些波长。

3. 发明授权

US07450231B2 Deviation angle self compensating substantially achromatic retarder 有权
标题翻译：偏差角自补偿基本上消色差延迟器
公开(公告)号：US07450231B2
公开(公告)日：2008-11-11
申请号：US11633138
申请日：2006-12-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B5/3083 , G01J1/0407 , G01N21/211 , G01N2021/213 , G02B26/06
摘要： A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
摘要翻译：用于宽光谱范围（例如，190-1700nm）旋转补偿光谱椭偏仪和/或偏振计系统的基本上无色多元素补偿器系统。多个全内反射进入进入的电磁辐射束的延迟，并且这些元件被定向成使得由延迟元件的位置和/或旋转的变化而导致的净延迟与输入光束角的变化最小化。

4. 发明授权

US07304737B1 Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence 有权
标题翻译：旋转或可旋转的补偿器系统以多个入射角对样品上的斑点提供畸变校正的电磁辐射
公开(公告)号：US07304737B1
公开(公告)日：2007-12-04
申请号：US11497920
申请日：2006-08-03
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/212 , G01N2021/213 , G01N2021/215
摘要： Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.
摘要翻译：光谱椭偏仪系统包括在数据采集期间保持固定在位的偏振器和分析器元件，而至少一个连续旋转或逐步旋转的补偿器在电磁辐射束上施加连续可变或多个顺序离散的极化状态，包括系统的反射镜和折射元件，用于校正像差，同时以多个不同的入射角将电磁辐射束引导到样品上的斑点。

5. 发明授权

US07057717B1 System for and method of investigating the exact same point on a sample substrate with at least two wavelengths 有权
标题翻译：用至少两个波长在样品基底上研究完全相同点的系统和方法
公开(公告)号：US07057717B1
公开(公告)日：2006-06-06
申请号：US10426590
申请日：2003-04-30
申请人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , Christopher A. Goeden , John A. Woollam , James D. Welch
发明人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He , Christopher A. Goeden , John A. Woollam , James D. Welch
IPC分类号： G01N21/00
CPC分类号： G02B13/146 , G01J3/0208 , G01N21/21 , G01N21/211
摘要： Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount.
摘要翻译：公开了用至少两个波长或至少两个波长范围分析样品系统上基本上相同点的系统和方法，其中焦距不超过可接受量的波长变化。

6. 发明授权

US06950182B1 Functional equivalent to spatial filter in ellipsometer and the like systems 有权
标题翻译：功能相当于椭圆仪等系统中的空间滤波器
公开(公告)号：US06950182B1
公开(公告)日：2005-09-27
申请号：US10178723
申请日：2002-06-24
申请人： Martin M Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
发明人： Martin M Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
IPC分类号： G01J4/00 , G01N21/00 , G01N21/21 , G01N21/55
CPC分类号： G01N21/55 , G01N21/211
摘要： Disclosed is the application of a functional equivalent to a spatial filter in ellipsometer and the like systems. Included are demonstrated multi-element converging lens systems which focus an electromagnetic beam onto a fiber optic. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.
摘要翻译：公开了在椭偏仪等系统中应用空间滤波器的功能等同物。包括的是将电磁波聚焦到光纤上的多元件会聚透镜系统。目的是消除大体上任意的强度分布的径向外环，使得电磁波强度被快速衰减到零，而不是例如证明作为半径的函数的不规则轮廓。

7. 发明授权

US06804004B1 Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry 有权
标题翻译：用于透镜延迟，椭圆测量和偏振测量的参数化数学模型方程中参数的不相关评估的多元素透镜系统和方法
公开(公告)号：US06804004B1
公开(公告)日：2004-10-12
申请号：US09583229
申请日：2000-05-30
申请人： Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt
发明人： Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt
IPC分类号： G01B1106
CPC分类号： G01N21/211 , G01J3/14 , G01J3/447
摘要： Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing lens(es), optionally in combination with beam directing and/or window elements present in an ellipsometer system which are positioned with respect to input and/or output len(es) so as to be ellipsometrically indistinguishable therefrom, to arrive at material system characterizing ellipsometric PSI and DELTA results.
摘要翻译：公开了多元素透镜，其在椭偏仪和偏光计系统中表现出减少的消色差焦距和降低的电磁光束光斑尺寸分散效应。还公开了用于评估参数化方程式中的参数的方法，该方法能够计算在电磁辐射束中输入到或之间的正交分量的延迟，所述正交分量被引导通过输入和/或输出光学元件并与材料系统相互作用的输入和输出光学元件，与材料系统进入的延迟基本上不相关。本发明的输入和/或输出聚焦透镜在光谱椭偏仪介导的对材料系统上的小斑点的调查中的应用发现，其中使电磁辐射束通过输入透镜会聚，与非常小的，色散的未分散的点相互作用区域，然后在进入检测器系统之前可选地通过输出透镜重新校准。本发明的方法在需要分离输入和/或输出光学元件聚焦透镜的双折射效应（可选地与存在于椭圆偏振仪系统中的光束引导和/或窗口元件）相关联的位置方面提供了益处，所述光学元件聚焦透镜相对于输入和/或输出len（es）以便椭圆不能与其区分开来，以得到表征椭圆偏振PSI和DELTA结果的材料系统。

8. 发明授权

US6100981A Dual horizontally oriented triangle shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：双水平取向三角形光学延迟元件，用于光谱椭偏仪和偏振计系统
公开(公告)号：US6100981A
公开(公告)日：2000-08-08
申请号：US225371
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G01J4/00 , G02B5/30
CPC分类号： G01J4/00 , G02B5/3083 , G01J2003/2866
摘要： A retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second triangular shaped elements arranged so that the first triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and downward from an upper point, with a third side which is oriented essentially horizontally and is continuous with, and present below the first and second sides; and so that the second triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and upward from a lower point, with a third side which is oriented essentially horizontally and is continuous with, and present above the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
摘要翻译：一种延迟器系统，用于在电磁辐射束的正交分量之间输入延迟，具有第一和第二三角形元件，其布置成使得如在侧视图中看到的第一三角形元件呈现向左突出的第一和第二侧并且从上点向下和向下，第三侧基本上水平地定向并且与第一和第二侧连续并存在下方; 并且使得从侧视图看出的第二三角形元件呈现出从第一和第二侧面向下突出的第一和第二侧面，其中第三侧面基本上水平地定向并与之连续，并且目前在第一和第二边。在光谱椭偏仪/偏振计系统中使用时，电磁辐射束在传播方向上离开，即使当延迟器系统绕电磁辐射的轨迹旋转电磁辐射束。

9. 发明授权

US6084674A Parallelogram shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems 有权
标题翻译：用于光谱椭偏仪和偏振计系统的平行四边形光学延迟器元件
公开(公告)号：US6084674A
公开(公告)日：2000-07-04
申请号：US225118
申请日：1999-01-04
申请人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
发明人： Blaine D. Johs , Craig M. Herzinger , Steven E. Green
IPC分类号： G01J3/28 , G02B5/30 , G01J4/00
CPC分类号： G02B5/3083 , G01J2003/2866
摘要： A retarder system and method of its use in ellipsometers and polarimeters are disclosed. The retarder system is a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides which are parallel to one another. The retarder system also has right and left sides which are parallel to one another, with both the right and left sides being oriented at an angle to the top and bottom sides. The retarder system is made of a material with an index of refraction greater than that of a surrounding ambient. In use an input beam of electromagnetic radiation is caused to enter the right or left side of the retarder system, is diffracted inside the retarder system, and follows a locus which causes it to essentially totally internally reflect from internal interfaces of both the top and bottom sides, then emerge from the retarder system at the opposite, left or right respectively, side in a direction which is essentially undeviated and undisplaced from the locus of the input beam of electromagnetic radiation, even when the retarder system is caused to rotate about an axis coincident with the locus of the electromagentic beam.
摘要翻译：公开了一种用于椭偏仪和偏振计的延迟器系统及其方法。延迟器系统是平行四边形元件，从侧视图看，具有彼此平行的顶侧和底侧。缓速器系统还具有彼此平行的左右两侧，左右两侧与顶侧和底侧成一定角度。缓速器系统由折射率大于周围环境的材料制成。在使用中，导致电磁辐射的输入束进入延迟器系统的右侧或左侧，在延迟器系统内部衍射，并且跟随一个轨迹，使得其基本上完全内部从顶部和底部的内部接口反射侧面，然后即使当延迟器系统绕轴线旋转时，从相对的左侧或右侧的延迟器系统以从电磁辐射的输入光束的轨迹基本上未变形和未放置的方向出现与电磁光束的轨迹一致。

10. 发明授权

US07907280B2 Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation 有权
标题翻译：构造偏移角自补偿基本消色差延迟器以补偿光束扫描的方法
公开(公告)号：US07907280B2
公开(公告)日：2011-03-15
申请号：US12290787
申请日：2008-11-04
申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
发明人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
IPC分类号： G01J4/00 , G02B5/30
CPC分类号： G02B5/3083 , G01J4/00
摘要： A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
摘要翻译：一种配置用于将相位相位延迟引入到其中输入的电磁波的正交极化分量的系统的方法，其中该系统包括用于在宽光谱范围（例如，190-1700nm）旋转的基本上无色多元素延迟器系统补偿光谱椭偏仪和/或偏振计系统。

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