会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 43. 发明申请
    • Semiconductor device having LDD-type source/drain regions and fabrication method thereof
    • 具有LDD型源极/漏极区域的半导体器件及其制造方法
    • US20050045921A1
    • 2005-03-03
    • US10948883
    • 2004-09-24
    • Do-Hyung KimJin-Ho KimByung-Jun Hwang
    • Do-Hyung KimJin-Ho KimByung-Jun Hwang
    • H01L21/336H01L21/768H01L21/8234H01L21/8238H01L21/8244H01L27/092H01L27/11H01L29/78H01L29/06
    • H01L29/6653H01L21/76801H01L21/76832H01L21/76837H01L21/76895H01L21/823425H01L29/6659
    • A semiconductor device having LDD-type source/drain regions and a method of fabricating the same are provided. The semiconductor device includes at least a pair of gate patterns disposed on a semiconductor substrate and LDD-type source/drain regions disposed at both sides of the gate patterns. The substrate having the gate patterns and the LDD-type source/drain regions is covered with a conformal etch stop layer. The etch stop layer is covered with an interlayer insulating layer. The LDD-type source/drain region is exposed by a contact hole that penetrates the interlayer insulating layer and the etch stop layer. The method of forming the LDD-type source/drain regions and the etch stop layer includes forming low-concentration source/drain regions at both sides of the gate patterns and forming the conformal etch stop layer on the substrate having the low-concentration source/drain regions. Gate spacers are then formed on the sidewalls of the gate patterns. Using the gate patterns and the gate spacers as implantation masks, impurity ions are implanted into the semiconductor substrate to form high-concentration source/drain regions. The spacers are then selectively removed. An interlayer insulating layer is formed on the substrate where the spacers are removed.
    • 提供具有LDD型源极/漏极区域的半导体器件及其制造方法。 半导体器件包括设置在半导体衬底上的至少一对栅极图案和设置在栅极图案两侧的LDD型源极/漏极区域。 具有栅极图案和LDD型源极/漏极区域的衬底被保形蚀刻停止层覆盖。 蚀刻停止层被层间绝缘层覆盖。 LDD型源极/漏极区域通过穿透层间绝缘层和蚀刻停止层的接触孔露出。 形成LDD型源极/漏极区域和蚀刻停止层的方法包括在栅极图案的两侧形成低浓度源极/漏极区域,并在具有低浓度源/漏极区域的衬底上形成保形蚀刻停止层, 漏区。 然后在栅极图案的侧壁上形成栅极间隔物。 使用栅极图案和栅极间隔物作为注入掩模,将杂质离子注入到半导体衬底中以形成高浓度源极/漏极区域。 然后选择性地去除间隔物。 在基板上形成层间绝缘层,其中隔离物被去除。
    • 49. 发明授权
    • Photomask cleaning apparatus and methods of cleaning a photomask using the same
    • 光掩模清洁装置和使用其的光掩模的清洁方法
    • US08585391B2
    • 2013-11-19
    • US13238805
    • 2011-09-21
    • Jin-Ho KimYo-Han AhnJeong-In YoonJi-Young Kim
    • Jin-Ho KimYo-Han AhnJeong-In YoonJi-Young Kim
    • G03F1/82G03F1/62
    • G03F1/64B08B7/0042B23K26/0006B23K26/032B23K26/0622B23K26/142B23K26/352B23K26/361B23K2103/56G03F1/82
    • A photomask cleaning apparatus includes a photomask receiving stage and a laser supply unit. The photomask receiving stage is configured to receive and retain a photomask in a desired orientation. The photomask has a front face having a pellicle adhesive residue region thereon. The desired orientation is with the front face positioned to allow gravity to move particles on the front face away from the front face without interference from the front face of the photomask. The laser supply unit is configured to generate a laser beam that irradiates a target region on the front face of the photomask to remove a pellicle adhesive residue from the target region. The photomask cleaning apparatus is configured to move the target region on the front face of the photomask to irradiate the entire pellicle adhesive residue region. Methods of using the photomask cleaning apparatus are also provided.
    • 光掩模清洁装置包括光掩模接收台和激光供给单元。 光掩模接收台被配置为以期望的方向接收和保持光掩模。 光掩模具有在其上具有防护薄膜粘合剂残留区域的前表面。 期望的取向是将前表面定位成允许重力将前表面上的颗粒移动远离前表面,而不会受到光掩模前表面的干扰。 激光供给单元被配置为产生照射光掩模的前表面上的目标区域以从目标区域去除防护薄膜组合物残留物的激光束。 光掩模清洁装置被配置为移动光掩模的前表面上的目标区域以照射整个防粘膜残留区域。 还提供了使用光掩模清洁装置的方法。
    • 50. 发明申请
    • THIN FILM DEPOSITION APPARATUS
    • 薄膜沉积装置
    • US20130180454A1
    • 2013-07-18
    • US13823846
    • 2011-09-16
    • Sang-Joon ParkJin-Ho KimByung-Guk Son
    • Sang-Joon ParkJin-Ho KimByung-Guk Son
    • C23C16/455
    • C23C16/455C23C16/303C23C16/45508C23C16/45514H01L21/02538H01L21/0262
    • Provided is a thin film deposition apparatus which comprises a chamber, a susceptor, a source gas supply part, and a susceptor support. The chamber has an inner space in which a deposition process is performed. The susceptor is disposed within the chamber to directly support a plurality of substrates along a circumference of a center of a top surface or support a substrate holder on which at least one substrate is disposed. The source gas supply part supplies first and second source gases into a central portion of an upper side of the susceptor in a state where the first and second gases are separated from each other. Also, the source gas supply part respectively injects the first and second source gases separated from each other toward a circumference of the susceptor through vertically arranged source gas injection holes to supply the first and second source gases onto the substrates disposed on the susceptor. The susceptor support is configured to support a center of the susceptor from a lower side of the susceptor. Also, the susceptor support includes an additional gas supply part for injecting an additional gas introduced from the outside onto a top surface of the susceptor.
    • 提供一种薄膜沉积设备,其包括室,基座,源气体供应部分和基座支撑件。 该腔室具有进行沉积处理的内部空间。 基座设置在室内以沿着顶表面的中心的圆周直接支撑多个基板,或支撑其上设置有至少一个基板的基板保持器。 源气体供给部在第一气体和第二气体彼此分离的状态下将第一源气体和第二源气体供给到基座的上侧的中央部。 另外,原料气体供给部分通过垂直排列的原料气体注入孔分别将彼此分离的第一和第二源气体朝向基座的圆周喷射,以将第一和第二源气体提供到设置在基座上的基板上。 基座支撑构造成从基座的下侧支撑基座的中心。 此外,基座支架包括用于将从外部引入的附加气体注入到基座的顶表面上的附加气体供应部件。