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    • 41. 发明授权
    • Multi-stage type processing apparatus
    • 多级式处理装置
    • US07166184B2
    • 2007-01-23
    • US10778947
    • 2004-02-16
    • Akihiko NakamuraTaiichiro AokiSeiji OhishiTamotsu Sasaki
    • Akihiko NakamuraTaiichiro AokiSeiji OhishiTamotsu Sasaki
    • G03B27/32H01L21/68
    • G03F7/3021Y10S134/902
    • A multi-stage type processing apparatus which can be positioned in a limited space without having a complicated driving mechanism, includes processing units which are stacked in a multi-stage state in the vertical direction. Each processing unit has a cup surrounding a substrate and a chuck for retaining and rotating a substrate, and the cup can be elevated and lowered with respect to the chuck. A cylinder unit is contracted and thereby all the cups are unitarily lowered, so that the top surface of the chuck is located in a slightly upper position with respect to the top surface of the cup. In this state, a substrate is mounted on the chuck and attracted. Next, the cylinder unit is extended and thereby all the cups are unitarily elevated so as to accommodate the substrate therein. In this state, developing liquid is dropped from a nozzle for developing liquid onto the center of the substrate, and a motor is driven to rotate the chuck (the substrate) via a drive shaft and a timing belt to allow the developing liquid to cover the entire surface of the substrate.
    • 可以定位在有限空间中而不具有复杂驱动机构的多级型处理装置包括在垂直方向上以多级状态堆叠的处理单元。 每个处理单元具有围绕基板的杯和用于保持和旋转基底的卡盘,并且杯可以相对于卡盘升高和降低。 气缸单元收缩,从而所有的杯子一体地降低,使得卡盘的顶表面相对于杯的顶表面位于较高的位置。 在这种状态下,将基板安装在卡盘上并被吸引。 接下来,气缸单元延伸,从而所有的杯子一体地升高,以便容纳衬底。 在这种状态下,显影液从用于显影液的喷嘴滴落到基板的中心,驱动马达驱动以通过驱动轴和同步皮带旋转卡盘(基板),以使显影液覆盖 基片的整个表面。
    • 42. 发明授权
    • Complex electromagnetic relay
    • 复杂的电磁继电器
    • US06903638B2
    • 2005-06-07
    • US10936581
    • 2004-09-09
    • Akihiko NakamuraShigemitsu AokiHirofumi Saso
    • Akihiko NakamuraShigemitsu AokiHirofumi Saso
    • H01H50/02H01H45/00H01H45/02H01H50/04H01H51/20H01H67/00H01H13/02H01H51/22
    • H01H50/042H01H50/023H01H50/026H01H2050/044H01H2050/049
    • A complex electromagnetic relay including a plurality of relay structures configured respectively as relays independent of each other, each relay structure including an electromagnet assembly and a contact section acting to open or close in accordance with an operation of the electromagnet assembly; and a housing accommodating the relay structures in a mutually inverted orientation with contact sections of the relay structures being located alternately at opposing sides. The electromagnet assemblies in the relay structures are provided individually with bobbins supporting coils. The housing includes an enclosing wall enclosing the relay structures in an envelope-like manner and a partition wall arranged between the relay structures disposed side-by-side to separate the relay structures from each other. The bobbins of the electromagnet assemblies are fixedly attached to the enclosing wall as well as to the partition wall.
    • 一种复杂的电磁继电器,包括分别独立地构成的继电器的多个继电器结构,每个继电器结构包括电磁体组件和根据电磁体组件的操作而打开或闭合的接触部分; 以及壳体,其以相反方向容纳所述继电器结构,其中所述继电器结构的接触部分交替地位于相对侧。 继电器结构中的电磁体组件单独设置有支撑线圈的线轴。 壳体包括围绕中继结构以封闭状包围的封闭壁和布置在并排设置的中继结构之间以将中继结构彼此分离的分隔壁。 电磁铁组件的线轴固定地附接到封闭壁以及分隔壁。
    • 47. 发明授权
    • Process for producing carboxylic acid derivatives
    • 制备羧酸衍生物的方法
    • US5510506A
    • 1996-04-23
    • US392852
    • 1995-03-27
    • Akira TakaseHiroyuki KaiMoriyasu MasuiKatuhisa MasumotoAkihiko NakamuraYujiro KiyoshimaMikio Sasaki
    • Akira TakaseHiroyuki KaiMoriyasu MasuiKatuhisa MasumotoAkihiko NakamuraYujiro KiyoshimaMikio Sasaki
    • C07C249/12C07C251/48C07C229/02
    • C07C249/12C07C251/48
    • A process is disclosed to produce a carboxylic acid derivative of the general formula VIII!: ##STR1## wherein R.sup.1, R.sup.2, R.sup.3 and L are each as defined in the specification, characterized in that a benzyl halide is reacted with a cyano compound to give a phenylacetonitrile, which is then reacted with an alkyl nitrite in the presence of a base to give an .alpha.-hydroxyiminophenylacetonitrile, which is then reacted with an alkylating agent to give an .alpha.-alkoxyiminophenylacetonitrile, which is then hydrolyzed in the presence of a base, or is hydrated and treated with an acid, followed by hydrolysis in the presence of a base, to give an .alpha.-alkoxyiminophenylacetic acid, which is then reacted with an acid halide forming agent, or is convened into a metal salt, followed by reaction with an alkylating agent, or is reacted with a lower alcohol in the presence of an acid catalyst.According to the present invention, the reactions can be allowed to proceed under mild conditions over the whole process, and the desired carboxylic acid derivative VIII! can be produced without any facilities such as high-pressure steam equipment, high-temperature heat medium control equipment and freezing machines. In addition, there is no need to use various different solvents in the respective steps and the present process can be conducted with only one solvent, in which respect the present invention is also advantageous.
    • PCT No.PCT / JP94 / 01075 Sec。 371日期:1995年3月27日 102(e)1995年3月27日PCT PCT 1994年7月1日PCT公布。 出版物WO95 / 01328 日本公开1995年1月12日。公开了一种制备通式[Ⅷ]羧酸衍生物的方法:各自如说明书中所定义,其特征在于苄基卤与氰基化合物反应得到苯乙腈 然后在碱的存在下与亚硝酸烷基酯反应,得到α-羟基亚氨基苯基乙腈,然后与烷基化剂反应,得到α-烷氧基亚氨基苯基乙腈,然后在碱的存在下水解,或水合和 然后在碱的存在下水解,得到α-烷氧基亚氨基苯基乙酸,然后与酰卤化物形成试剂反应,或转入金属盐中,随后与烷基化剂反应, 或者在酸催化剂的存在下与低级醇反应。 根据本发明,可以在整个过程的温和条件下进行反应,并且可以制备所需的羧酸衍生物[Ⅷ],无需任何设备,例如高压蒸汽设备,高温热介质控制 设备和冷冻机。 此外,在各步骤中不需要使用各种不同的溶剂,并且本发明方法可以仅使用一种溶剂进行,其中本发明也是有利的。
    • 49. 发明授权
    • Speed controller of motor
    • 电机转速控制器
    • US5377295A
    • 1994-12-27
    • US785331
    • 1991-11-01
    • Eiji UedaAkihiko NakamuraMakoto Gotou
    • Eiji UedaAkihiko NakamuraMakoto Gotou
    • H02P23/00H02P5/00
    • H02P23/16Y10S388/902
    • Disclosed is a speed controller of a motor which comprises a rotation sensor for generating an A.C. signal having a period in accordance with a rotating speed of a motor; speed detection device for effecting detection operations a plurality of times per round of the motor by the A.C. signal of the rotation sensor; compensation device for generating a control signal on the basis of a detection signal of the speed detection device; and driving device for driving the motor in accordance with the control signal of the compensation device; wherein the compensation device includes rotation error detection device for obtaining a rotation error responsive to the detection signal of the speed detection device; memory device for storing a memory value; memory output value generation device for generating a memory output value by the use of the memory value of the memory device; filter device for obtaining a calculation error from the rotation error; renewing and storing device for renewing and storing substantially sequentially the memory value of the memory device by a renewed value corresponding to a value obtained by calculating and synthesizing the calculation error and the memory output value whenever the speed detection device effects Q times detection operations; and control signal generation device for generating a control signal responsive to the rotation error of the memory output value.
    • 公开了一种电动机的速度控制器,其包括用于产生具有根据电动机的转速的周期的交流信号的旋转传感器; 速度检测装置,用于通过旋转传感器的交流信号来实现每一周电动机的多次检测操作; 补偿装置,用于根据速度检测装置的检测信号产生控制信号; 以及用于根据补偿装置的控制信号驱动马达的驱动装置; 其中所述补偿装置包括响应于所述速度检测装置的检测信号而获得旋转误差的旋转误差检测装置; 用于存储存储器值的存储器件; 存储器输出值生成装置,用于通过使用存储器件的存储器值来产生存储器输出值; 用于从旋转误差获得计算误差的过滤装置; 更新和存储装置,用于当速度检测装置执行Q次检测操作时,基本顺序地更新和存储与存储装置的存储器值相对应的更新值,该值对应于通过计算和合成计算误差和存储器输出值而获得的值; 以及响应于存储器输出值的旋转误差产生控制信号的控制信号产生装置。