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31. 发明授权

US6087197A Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same 失效
公开(公告)号：US6087197A
公开(公告)日：2000-07-11
申请号：US227922
申请日：1999-01-08
申请人： Koji Eriguchi , Masafumi Kubota , Masaaki Niwa , Noboru Nomura
发明人： Koji Eriguchi , Masafumi Kubota , Masaaki Niwa , Noboru Nomura
IPC分类号： B81B3/00 , G01Q70/10 , G01Q70/16 , G02B6/12 , G02B6/124 , G11C23/00 , H01H1/00 , H01L21/308 , H01L31/0352 , H01L31/18 , H01L33/10 , H01L33/18 , H01L21/20
CPC分类号： H01L31/1804 , B82Y10/00 , G02B6/1245 , G11C23/00 , H01H1/0036 , H01L21/3086 , H01L31/0352 , G02B2006/12102 , G02B2006/12173 , G02B2006/12176 , H01L33/10 , H01L33/18 , Y02E10/547 , Y02P70/521 , Y10S438/947 , Y10S438/962 , Y10S438/964
摘要： On a silicon substrate is formed a silicon dioxide film and then hemispherical grains made of silicon, each having an extremely small diameter, are deposited thereon by LPCVD. After annealing the hemispherical grains, the silicon dioxide film is etched using the hemispherical grains as a first dotted mask, thereby forming a second dotted mask composed of the silicon dioxide film. The resulting second dotted mask is used to etch the silicon substrate to a specified depth from the surface thereof, thereby forming an aggregate of semiconductor micro-needles. Since the diameter of each of the semiconductor micro-needles is sufficiently small to cause the quantum size effects as well as has only small size variations, remarkable quantum size effects can be obtained. Therefore, it becomes possible to constitute a semiconductor apparatus with a high information-processing function by using the aggregate of semiconductor micro-needles (quantized region).

32. 发明授权

US6033928A Method of manufacturing aggregate of semiconductor micro-needles 失效
标题翻译：制造半导体微针聚集体的方法
公开(公告)号：US6033928A
公开(公告)日：2000-03-07
申请号：US333320
申请日：1994-11-02
申请人： Koji Eriguchi , Masafumi Kubota , Masaaki Niwa , Noboru Nomura
发明人： Koji Eriguchi , Masafumi Kubota , Masaaki Niwa , Noboru Nomura
IPC分类号： B81B3/00 , G01Q70/10 , G01Q70/16 , G02B6/12 , G02B6/124 , G11C23/00 , H01H1/00 , H01L21/308 , H01L31/0352 , H01L31/18 , H01L33/10 , H01L33/18 , H01L21/32
CPC分类号： H01L31/1804 , B82Y10/00 , G02B6/1245 , G11C23/00 , H01H1/0036 , H01L21/3086 , H01L31/0352 , G02B2006/12102 , G02B2006/12173 , G02B2006/12176 , H01L33/10 , H01L33/18 , Y02E10/547 , Y02P70/521 , Y10S438/947 , Y10S438/962 , Y10S438/964
摘要： On a silicon substrate is formed a silicon dioxide film and then hemispherical grains made of silicon, each having an extremely small diameter, are deposited thereon by LPCVD. After annealing the hemispherical grains, the silicon dioxide film is etched using the hemispherical grains as a first dotted mask, thereby forming a second dotted mask composed of the silicon dioxide film. The resulting second dotted mask is used to etch the silicon substrate to a specified depth from the surface thereof, thereby forming an aggregate of semiconductor micro-needles. Since the diameter of each of the semiconductor micro-needles is sufficiently small to cause the quantum size effects as well as has only small size variations, remarkable quantum size effects can be obtained. Therefore, it becomes possible to constitute a semiconductor apparatus with a high information-processing function by using the aggregate of semiconductor micro-needles (quantized region).
摘要翻译：在硅衬底上形成二氧化硅膜，然后通过LPCVD在其上沉积各自具有极小直径的由硅制成的半球状晶粒。在半球形晶粒退火之后，使用半球形晶粒作为第一虚线掩模来蚀刻二氧化硅膜，由此形成由二氧化硅膜构成的第二虚线掩模。所得到的第二点阵掩模用于将硅衬底从其表面蚀刻到指定的深度，从而形成半导体微针的聚集体。由于每个半导体微针的直径足够小以致量子尺寸效应以及仅具有小的尺寸变化，因此可以获得显着的量子尺寸效应。因此，通过使用半导体微针的集合体（量化区域），可以构成具有高信息处理功能的半导体装置。

33. 发明授权

US06028305A Dual cantilever scanning probe microscope 失效
标题翻译：双悬臂扫描探针显微镜
公开(公告)号：US06028305A
公开(公告)日：2000-02-22
申请号：US47239
申请日：1998-03-25
申请人： Stephen C. Minne , Calvin F. Quate
发明人： Stephen C. Minne , Calvin F. Quate
IPC分类号： G01Q10/06 , G01Q20/04 , G01Q30/02 , G01Q60/36 , G01Q70/04 , G01Q70/10 , H01J3/14
CPC分类号： G01Q60/363 , B82Y35/00 , G01Q70/06 , Y10S977/874
摘要： This microscope apparatus comprises two probes. The first probe is configured to interact with and measure characteristics of surfaces within an effective measurement distance of the first probe. This probe could be contact type, non-contact type, constant force mode, or constant height mode. A combination of actuation devices positions the first probe over a surface of a sample. The surface is scanned at high speeds in search of a target area. When a target area is found, a scanner moves the sample so that a second contact type probe with a sharp tip is positioned over the target area. The second probe is activated and the target area is scanned at low speeds and high resolution. The first and second probes are part of the same probe assembly. The probe assembly of the present invention does not require probe replacement as frequently as current assemblies because the sharp tip is used only at low speeds and high resolution configurations. Thus, the sharp tip wears slower than it would if the sharp tip was used to find the target feature as well.
摘要翻译：该显微镜装置包括两个探针。第一探针被配置为与第一探针的有效测量距离内的表面相互作用并测量表面的特征。该探头可以是接触式，非接触型，恒力模式或恒定高度模式。致动装置的组合将第一探针定位在样品的表面上。高速扫描表面以寻找目标区域。当找到目标区域时，扫描器移动样本，使得具有尖锐尖端的第二接触型探针位于目标区域上方。第二个探针被激活，目标区域以低速和高分辨率扫描。第一和第二探针是相同探针组件的一部分。本发明的探头组件不需要像现有组件那样频繁地进行探头更换，因为尖端仅在低速和高分辨率配置下使用。因此，尖锐的尖端磨损比如果尖锐的尖端用于找到目标特征时的磨损更慢。

34. 发明授权

US5939719A Scanning probe microscope with scan correction 失效
公开(公告)号：US5939719A
公开(公告)日：1999-08-17
申请号：US831153
申请日：1997-04-01
申请人： Sang-Il Park , Ian R. Smith , Michael Kirk
发明人： Sang-Il Park , Ian R. Smith , Michael Kirk
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00 , H01J37/26
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

35. 发明授权

US5877891A Scanning probe microscope having a single viewing device for on-axis and oblique optical views 失效
标题翻译：扫描探针显微镜具有单个观察装置，用于轴上和斜视光学视图
公开(公告)号：US5877891A
公开(公告)日：1999-03-02
申请号：US428358
申请日：1995-04-21
申请人： Sano-Il Park , Frederick I. Linker , Ian R. Smith
发明人： Sano-Il Park , Frederick I. Linker , Ian R. Smith
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

36. 发明授权

US5763879A Diamond probe tip 失效
标题翻译：金刚石探头尖
公开(公告)号：US5763879A
公开(公告)日：1998-06-09
申请号：US714606
申请日：1996-09-16
申请人： Jerry W. Zimmer , Daniel A. Worsham
发明人： Jerry W. Zimmer , Daniel A. Worsham
IPC分类号： G01Q10/04 , G01Q70/10 , G01Q70/14 , G01R1/067 , G01R3/00 , H02J37/26
CPC分类号： G01R1/06761 , G01R1/06738 , G01R3/00 , Y10T428/30 , Y10T428/31678
摘要： A probe for electrical contact with a metal layer of an integrated circuit wherein the probe features a polycrystalline diamond layer coating a fine conductive wire. The diamond coating has exposed pyramidal facets having a density of at least 2000 per square millimeter. The substrate has a radius exceeding one micrometer.
摘要翻译：用于与集成电路的金属层电接触的探针，其中所述探针的特征在于涂覆有细导线的多晶金刚石层。金刚石涂层具有暴露的具有至少2000每平方毫米密度的金字塔形小平面。基板的半径超过一微米。

37. 发明授权

US5594166A Cantilever for use with atomic force microscope and process for the production thereof 失效
标题翻译：悬臂用于原子力显微镜及其制造方法
公开(公告)号：US5594166A
公开(公告)日：1997-01-14
申请号：US311018
申请日：1994-09-22
申请人： Junju Itoh , Yasushi Toma
发明人： Junju Itoh , Yasushi Toma
IPC分类号： G01Q70/10 , G01B5/28 , G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q20/02 , G01Q60/38 , H01J37/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q60/40 , Y10S977/873
摘要： The improved cantilever for use with an atomic force microscope comprises a single-crystal silicon base 11 having adequate mechanical strength, a cantilever beam 12 that is made from a silicon oxide film and which is joined at one end to the base, and a conical stylus 13 with a sharp tip that is formed of single-crystal silicon on the cantilever beam 12 at the other end which is opposite the end joined to the base 11, and all surfaces of the cantilever are covered with a thin electroconductive film 14. If desired, protective plates 15 for protecting the cantilever beam against mechanical damage may be provided that are processed from the base material in such a way that they hold the beam therebetween and which have satisfactory strength. The stylus has an abrupt profile with a sharp tip and a high aspect ratio, and the cantilever beam has an invariable spring constant and supports the stylus at an end.
摘要翻译：与原子力显微镜一起使用的改进的悬臂包括具有足够的机械强度的单晶硅基座11，由氧化硅膜制成并且在一端连接到基座的悬臂梁12和圆锥形的触针 13具有尖锐的尖端，其在与连接到基座11的端部相对的另一端处的悬臂梁12上由单晶硅形成，并且悬臂的所有表面都被薄的导电膜14覆盖。如果需要可以提供用于保护悬臂梁免受机械损坏的保护板15，其从基体材料被加工成使得它们将梁保持在其间并具有令人满意的强度。触针具有尖锐尖端和高纵横比的突然轮廓，并且悬臂梁具有恒定的弹簧常数并且在一端支撑触针。

38. 发明授权

US5569918A Probe holder and probe mounting method for a scanning probe microscope 失效
标题翻译：用于扫描探针显微镜的探头支架和探头安装方法
公开(公告)号：US5569918A
公开(公告)日：1996-10-29
申请号：US406296
申请日：1995-03-17
申请人： Zhouhang Wang
发明人： Zhouhang Wang
IPC分类号： G01Q30/02 , G01Q70/02 , G01Q70/10 , G01Q70/16 , G12B5/00 , H01J37/20 , H01J37/28
CPC分类号： G01Q30/02 , B82Y35/00 , G01Q70/02 , Y10S977/873
摘要： A probe holder non-rotatingly mountable in a support bracket releasibly receives a scanning microscope probe. Guide rods extend outward from the probe holder on the scan head and engage bores formed in the other of the probe holder and the scan head during closure of the scan head with the probe holder to co-axially align the probe with a probe receiver in the scan head. Transversely extending arms on a spindle attached to a scan head slide along ramp surfaces in the scan head to a fixed stop to rotationally position the scan head. Complementary surfaces on the spindle and a stationarily affixed sleeve co-axially center the scan head with the scan head support structure and the probe holder. A method of co-axially and rotationally aligning a probe for exchange between a scan head and a probe holder is disclosed using the guide rods and guide bores, the spindle arms, ramp and stop surfaces and the complementary surfaces on the spindle and the stationary sleeve, and a non-rotatable probe holder mount. The alignment structure and method are also applied to a sample holder.
摘要翻译：可旋转地安装在支撑支架中的探针支架可释放地接收扫描显微镜探针。引导杆从扫描头上的探头支架向外延伸，并且在扫描头与探针支架关闭期间接合形成在探针支架和扫描头中的另一个中的孔，以使探针与探针接收器在轴向对准扫描头。安装在扫描头上的主轴上的横向延伸的臂沿着扫描头中的斜面滑动到固定的停止点以旋转地定位扫描头。主轴上的互补表面和固定固定的套筒将扫描头与扫描头支撑结构和探头支架同轴居中。公开了使用导向杆和引导孔，主轴臂，斜面和止动表面以及主轴和固定套筒上的互补表面的同轴和旋转对准探针以在扫描头和探针保持架之间进行交换的方法，以及不可旋转的探针支架。对准结构和方法也适用于样品架。

39. 发明授权

US5431055A Surface measuring apparatus using a probe microscope 失效
标题翻译：使用探针显微镜的表面测量装置
公开(公告)号：US5431055A
公开(公告)日：1995-07-11
申请号：US058231
申请日：1993-05-10
申请人： Keiji Takata , Hiromichi Shimizu , Shigeyuki Hosoki , Sumio Hosaka
发明人： Keiji Takata , Hiromichi Shimizu , Shigeyuki Hosoki , Sumio Hosaka
IPC分类号： G01B7/34 , G01N27/00 , G01N27/02 , G01N29/06 , G01N29/24 , G01N37/00 , G01Q10/00 , G01Q60/00 , G01Q60/04 , G01Q60/10 , G01Q60/14 , G01Q70/10 , H01J37/28
CPC分类号： G01Q30/02 , B82Y35/00 , G01Q60/12 , G01Q60/16 , G01N2291/048 , Y10S977/851 , Y10S977/861
摘要： A scanning tunneling microscope, in which the gap between a tip having a keenly sharpened end and a sample is narrowed to let flow a tunneling current between them and thereby allow observation of the surface of the sample, a strain wave detecting device is disposed on the sample or in the vicinity of the sample to detect strain waves generated within the sample. By modulating the value of the above described tunneling current, strain waves are generated within the sample. The strain waves are detected by the above described strain wave detecting device. On the basis of the amplitude information and phase information of detected strain waves, physical information regarding the inside of the sample is obtained.
摘要翻译：扫描隧道显微镜，其中具有锐利尖端的尖端与样品之间的间隙变窄以使它们之间的隧道电流流动，从而允许观察样品的表面，将应变波检测装置设置在样品或样品附近，以检测样品内产生的应变波。通过调制上述隧穿电流的值，在样品内产生应变波。应变波由上述应变波检测装置检测。根据检测出的应变波的振幅信息和相位信息，获得关于样本内部的物理信息。

40. 发明授权

US5393647A Method of making superhard tips for micro-probe microscopy and field emission 失效
标题翻译：制作超微观尖端的方法，用于微探针显微镜和场发射
公开(公告)号：US5393647A
公开(公告)日：1995-02-28
申请号：US92780
申请日：1993-07-16
申请人： Armand P. Neukermans , Timothy G. Slater , Linda E. Whittlesey , Sean S. Cahill
发明人： Armand P. Neukermans , Timothy G. Slater , Linda E. Whittlesey , Sean S. Cahill
IPC分类号： G01Q70/10 , B81C1/00 , C23C16/00 , G01Q70/14 , G01Q70/16 , H01J9/02 , H01J37/073 , H01L21/302
CPC分类号： G01Q70/16 , B81C1/00682 , B82Y35/00 , G01Q70/14 , H01J9/025 , B81B2201/12 , H01J2209/0226
摘要： Forming micro-probe tips for an atomic force microscope, a scanning tunneling microscope, a beam electron emission microscope, or for field emission, by first thinning a tip of a first material, such as silicon. The tips are then reacted with a second material, such as atoms from an organic or ammonia vapor, at a temperature of about 1000.degree. C..+-.200.degree. C. and vacuum conditions for several minutes. Vapors such as methane, propane or acetylene will be converted to SiC or WC while ammonia will be converted to Si.sub.3 N.sub.4. The converted material will have different physical, chemical and electrical properties. For example, a SiC tip will be superhard, approaching diamond in hardness. Electrically conductive tips are suitable for field emission.
摘要翻译：通过首先使诸如硅的第一材料的尖端变薄，形成用于原子力显微镜，扫描隧道显微镜，束电子发射显微镜或用于场发射的微探针尖端。然后将尖端与第二种材料（例如来自有机或氨蒸汽的原子）在约1000℃±200℃的温度和真空条件下反应数分钟。蒸气如甲烷，丙烷或乙炔将转化为SiC或WC，而氨将转化为Si3N4。转换的材料将具有不同的物理，化学和电学性能。例如，SiC尖端将是超硬的，接近金刚石的硬度。导电尖端适用于场发射。

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