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    • 31. 发明申请
    • Reflection Sensing System
    • 反射感应系统
    • US20130015356A1
    • 2013-01-17
    • US13325857
    • 2011-12-14
    • Cheng-Chung ShihYung-Chuan ChuangChien-Chung Hsiao
    • Cheng-Chung ShihYung-Chuan ChuangChien-Chung Hsiao
    • H01L31/167G01J5/08G01J1/44
    • G01J1/0422G01J1/0209G01J1/0295G01S7/4813G01S17/026H01L25/167H01L2924/0002H01L2924/00
    • A reflection sensing system comprising a body, an illuming module and a detecting module. The body is made of LCP. The illuming module includes a first accommodating space and an LED, and the detecting module includes a light detector. The first accommodating space is disposed in the body and has a first opening at one end. In the first accommodating space, the neighboring region relative to the first opening is parabolic or approximately parabolic. At an end at an inner side of the first accommodating space near the light detector, at least one cross-section near the first opening is not parabolic or approximately parabolic. The LED is disposed at the focus of the first accommodating space and aligned towards the first opening. The light detector of the detecting module is disposed in the body and generates a sensing signal after receiving light.
    • 一种反射感测系统,包括主体,发光模块和检测模块。 身体由LCP制成。 发光模块包括第一容纳空间和LED,并且检测模块包括光检测器。 第一容纳空间设置在主体中并且在一端具有第一开口。 在第一容纳空间中,相对于第一开口的相邻区域是抛物线形或近似抛物线形。 在靠近光检测器的第一容纳空间的内侧的端部处,在第一开口附近的至少一个横截面不是抛物面的或大致抛物线的。 LED设置在第一容纳空间的焦点处并且朝向第一开口对准。 检测模块的光检测器设置在身体中,并在接收到光后产生感测信号。
    • 32. 发明授权
    • Light receiving device, light receiving device manufacturing method, and light receiving method
    • 光接收装置,光接收装置的制造方法以及光接收方法
    • US08279379B2
    • 2012-10-02
    • US12889230
    • 2010-09-23
    • Shin MasudaEiji Kato
    • Shin MasudaEiji Kato
    • G02F1/1335G02F1/29G02B26/08
    • G01J1/04G01J1/0407G01J1/0422G01J1/0429G01J1/0437
    • There is provided a light receiving device including a polarization dispersing section that disperses a polarization direction of incoming light into a plurality of polarization directions, a light collecting section that has a metal pattern shaped like concentric circles on a surface thereof, where the light collecting section collects light that has passed through the polarization dispersing section, and a light receiving section that receives the light collected by the light collecting section. Also provided are a light receiving device manufacturing method and a light receiving method. The light collecting section may have a surface plasmon antenna that has the metal pattern shaped like the concentric circles on a surface thereof, and the light receiving section may receive the light collected toward a center of the concentric circles of the metal pattern of the light collecting section, through a hole at the center of the concentric circles, on a rear side of the light collecting section.
    • 提供了一种光接收装置,其包括将入射光的偏振方向分散成多个偏振方向的偏振光分散部,具有在其表面上形状为同心圆的金属图案的聚光部, 收集通过偏振分散部的光,以及受光部,其接收由该光收集部收集的光。 还提供了一种光接收装置的制造方法和光接收方法。 集光部可以具有表面等离子体激元天线,其具有在其表面上形状与同心圆形状的金属图案,并且光接收部可以接收朝向聚光的金属图案的同心圆的中心收集的光 通过在同心圆的中心的孔,在集光部的后侧。
    • 33. 发明授权
    • Segmented polarizer for optimizing performance of a surface inspection system
    • 分段偏振器,用于优化表面检测系统的性能
    • US08169613B1
    • 2012-05-01
    • US12618620
    • 2009-11-13
    • Stephen BiellakDaniel Kavaldjiev
    • Stephen BiellakDaniel Kavaldjiev
    • G01J4/00
    • G01J1/0422G01J1/0429G01N21/8806G01N21/9501G02B5/3025G02B5/3075
    • A polarizing device may be used with sample inspection system having one or more collection systems that receive scattered radiation from a region on a sample surface and direct it to a detector. The polarizing device disposed between the collection system(s) and the detector. The polarizing device may include a plurality of polarizing sections. The sections may be characterized by different polarization characteristics. The polarizing device is configured to transmit scattered radiation from defects to the detector and to block noise from background sources that do not share characteristics with scattered radiation from the defects from reaching the detector while, maximizing a capture rate for the defects the detector at a less than optimal signal-to-noise ratio.
    • 可以使用具有一个或多个收集系统的样本检查系统的偏振装置,其接收来自样品表面上的区域的散射辐射并将其引导到检测器。 设置在收集系统和检测器之间的偏振装置。 偏振装置可以包括多个偏振部分。 这些部分可以具有不同的偏振特性。 偏振装置被配置为将来自缺陷的散射辐射传输到检测器并且阻止来自背景源的噪声,其不与来自缺陷的散射辐射共享特征以到达检测器,同时使检测器的缺陷的捕获率最小化 比最佳信噪比。
    • 36. 发明申请
    • LIGHT RECEIVING DEVICE, LIGHT RECEIVING DEVICE MANUFACTURING METHOD, AND LIGHT RECEIVING METHOD
    • 光接收装置,光接收装置的制造方法和光接收方法
    • US20110090431A1
    • 2011-04-21
    • US12889230
    • 2010-09-23
    • Shin MASUDAEiji KATO
    • Shin MASUDAEiji KATO
    • G02F1/1335G02B5/30
    • G01J1/04G01J1/0407G01J1/0422G01J1/0429G01J1/0437
    • There is provided a light receiving device including a polarization dispersing section that disperses a polarization direction of incoming light into a plurality of polarization directions, a light collecting section that has a metal pattern shaped like concentric circles on a surface thereof, where the light collecting section collects light that has passed through the polarization dispersing section, and a light receiving section that receives the light collected by the light collecting section. Also provided are a light receiving device manufacturing method and a light receiving method. The light collecting section may have a surface plasmon antenna that has the metal pattern shaped like the concentric circles on a surface thereof, and the light receiving section may receive the light collected toward a center of the concentric circles of the metal pattern of the light collecting section, through a hole at the center of the concentric circles, on a rear side of the light collecting section.
    • 提供了一种光接收装置,其包括将入射光的偏振方向分散成多个偏振方向的偏振光分散部,具有在其表面上形状为同心圆的金属图案的聚光部, 收集通过偏振分散部的光,以及受光部,其接收由该光收集部收集的光。 还提供了一种光接收装置的制造方法和光接收方法。 集光部可以具有表面等离子体激元天线,其具有在其表面上形状与同心圆形状的金属图案,并且光接收部可以接收朝向聚光的金属图案的同心圆的中心收集的光 通过在同心圆的中心的孔,在集光部的后侧。