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    • 31. 发明申请
    • SEMICONDUCTOR MEMORY DEVICE HAVING CROSS-POINT STRUCTURE
    • 具有跨点结构的半导体存储器件
    • US20100128512A1
    • 2010-05-27
    • US12089273
    • 2006-09-27
    • Tetsuya OhnishiSyogo Hayashi
    • Tetsuya OhnishiSyogo Hayashi
    • G11C11/22G11C11/00
    • G11C5/063G11C7/18G11C8/10G11C11/1655G11C11/1657G11C11/1659G11C11/22G11C13/0023G11C13/003G11C2213/76G11C2213/77H01L27/101
    • A semiconductor memory device having a cross-point structure comprising a plurality of first electrode wirings extending in the same direction, a plurality of second electrode wirings intersecting with the first electrode wirings, and memory materials for storing data at the intersection points of the first and second electrode wirings has a problem that an effective voltage applied to the memory material fluctuates in a memory cell array due to the voltage drop caused by the wiring resistance of each electrode wiring. The sum of the wiring resistance of the first electrode wiring to a certain intersection point and the wiring resistance of the second electrode wiring to the certain intersection point is substantially constant at any intersection point, and the load resistors for adjusting the fluctuation of the electrode wiring resistances in a memory cell array are connected at least either one of the first and second electrode wirings.
    • 一种具有交叉点结构的半导体存储器件,包括沿相同方向延伸的多个第一电极布线,与第一电极布线相交的多个第二电极布线,以及用于在第一和第二布线的交点处存储数据的存储材料 第二电极布线存在由于由每个电极布线的布线电阻引起的电压降,施加到存储器材料的有效电压在存储单元阵列中波动的问题。 第一电极布线与某一交点的布线电阻和第二电极布线到某一交点的布线电阻之和在任何交点处基本恒定,并且用于调节电极布线的波动的负载电阻 存储单元阵列中的电阻连接在第一和第二电极布线中的至少一个中。
    • 36. 发明授权
    • Method for fabricating a semiconductor device using implantation and
subsequent annealing to eliminate defects
    • 使用注入和随后退火制造半导体器件以消除缺陷的方法
    • US5407838A
    • 1995-04-18
    • US196795
    • 1994-02-15
    • Tetsuya OhnishiKazushi Naruse
    • Tetsuya OhnishiKazushi Naruse
    • H01L21/265H01L21/331H01L29/73H01L29/732
    • H01L21/26506H01L21/26513H01L29/66272Y10S148/024Y10S438/966Y10S438/98
    • A method for fabricating a semiconductor device including carrying out an ion implantation into a predetermined region of a single-crystal silicon substrate to form therein an amorphized ion-implanted layer according to any one of the methods: (A) implanting an ion of an atom serving as carrier into the predetermined region, followed by implanting an ion of an electrically inert atom or molecule into the region, (B) implanting an ion of an electrically inert atom or molecule in the region, followed by implanting an ion of an atom serving as carrier in the region, and (C) implanting an ion of a molecule in which an atom serving as carrier is bonded to an electrically inert atom; annealing the substrate in an inert atmosphere to crystallize the amorphized ion-implanted layer again; and further annealing the substrate in an oxidizing atmosphere to eliminate defects at the interface of the substrate and the ion implantation layer.
    • 一种用于制造半导体器件的方法,包括根据以下方法中的任一种方法将离子注入到单晶硅衬底的预定区域中以形成非晶化离子注入层:(A)注入原子离子 作为载体进入预定区域,然后将电惰性原子或分子的离子注入该区域,(B)在该区域中注入电惰性原子或分子的离子,随后注入一个原子的离子 作为该区域的载体,(C)将其中作为载体的原子键合的分子的离子注入到电惰性的原子上; 在惰性气氛中对衬底退火,再次使非晶化离子注入层结晶; 并且在氧化气氛中进一步退火衬底以消除衬底和离子注入层的界面处的缺陷。