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    • 36. 发明申请
    • TRENCH ISOLATION IMPLANTATION
    • 扩张隔离植被
    • US20100219501A1
    • 2010-09-02
    • US12758488
    • 2010-04-12
    • Gurtej S. SandhuJohn Smythe
    • Gurtej S. SandhuJohn Smythe
    • H01L21/762H01L29/06
    • H01L21/76237G11C11/401H01L27/10844H01L27/11517
    • Embodiments of the disclosure include a shallow trench isolation structure having a dielectric material with energetic species implanted to a predetermined depth of the dielectric material. Embodiments further include methods of fabricating the trench structures with the implant of energetic species to the predetermined depth. In various embodiments the implant of energetic species is used to densify the dielectric material to provide a uniform wet etch rate across the surface of the dielectric material. Embodiments also include memory devices, integrated circuits, and electronic systems that include shallow trench isolation structures having the dielectric material with the high flux of energetic species implanted to the predetermined depth of the dielectric material.
    • 本公开的实施例包括浅沟槽隔离结构,其具有将能量物质注入电介质材料的预定深度的电介质材料。 实施例还包括使能量物质的植入物到预定深度制造沟槽结构的方法。 在各种实施例中,能量物质的注入用于致密化电介质材料,以提供穿过电介质材料表面的均匀的湿蚀刻速率。 实施例还包括存储器件,集成电路和电子系统,其包括浅沟槽隔离结构,其具有植入到介电材料的预定深度的高能量物质的高通量的电介质材料。
    • 38. 发明授权
    • Silicon dioxide deposition methods using at least ozone and TEOS as deposition precursors
    • 至少使用臭氧和TEOS作为沉积前体的二氧化硅沉积方法
    • US08304353B2
    • 2012-11-06
    • US13247088
    • 2011-09-28
    • John SmytheGurtej S. Sandhu
    • John SmytheGurtej S. Sandhu
    • H01L21/31H01L21/469
    • H01L21/31612H01L21/02164H01L21/02304H01L21/02312H01L21/02315H01L21/3105
    • Embodiments disclosed herein pertain to silicon dioxide deposition methods using at least ozone and tetraethylorthosilicate (TEOS) as deposition precursors. In one embodiment, a silicon dioxide deposition method using at least ozone and TEOS as deposition precursors includes flowing precursors comprising ozone and TEOS to a substrate under subatmospheric pressure conditions effective to deposit silicon dioxide-comprising material having an outer surface onto the substrate. The outer surface is treated effective to one of add hydroxyl to or remove hydroxyl from the outer surface in comparison to any hydroxyl presence on the outer surface prior to said treating. After the treating, precursors comprising ozone and TEOS are flowed to the substrate under subatmospheric pressure conditions effective to deposit silicon dioxide-comprising material onto the treated outer surface of the substrate. Other embodiments are contemplated.
    • 本文公开的实施方案涉及至少使用臭氧和原硅酸四乙酯(TEOS)作为沉积前体的二氧化硅沉积方法。 在一个实施方案中,使用至少臭氧和TEOS作为沉积前体的二氧化硅沉积方法包括在低于大气压的压力条件下将包含臭氧和TEOS的前体流入基底,以有效地将具有外表面的含二氧化硅的材料沉积到基底上。 与所述处理之前的外表面上的任何羟基存在相比,外表面被有效地对从外表面添加羟基或除去羟基之一进行处理。 在处理之后,包含臭氧和TEOS的前体在有效将含二氧化硅的材料沉积到经处理的基底的外表面上的低于大气压的压力条件下流到基底。 预期其他实施例。