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31. 发明授权

US06756248B2 Pressure transducer and manufacturing method thereof 失效
标题翻译：压力传感器及其制造方法
公开(公告)号：US06756248B2
公开(公告)日：2004-06-29
申请号：US10082318
申请日：2002-02-26
申请人： Masaharu Ikeda , Masayoshi Esashi
发明人： Masaharu Ikeda , Masayoshi Esashi
IPC分类号： H01L2100
CPC分类号： H04R31/00 , H04R19/00 , H04R19/005 , H04R19/04 , H04R31/003
摘要： A pressure transducer designed to transform static pressure or dynamic pressure applied to a diaphragm into a corresponding electrical signal and a method of manufacturing the same are provided. The transducer includes a fixed electrode formed in an upper surface of a substrate and a moving electrode provided in the diaphragm disposed above the fixed electrode through a cavity. The substrate has formed in the bottom thereof at least one hole which is used in a manufacturing process for removing a sacrificial layer formed between the diaphragm and the upper surface of the substrate in dry etching to form the cavity.
摘要翻译：提供了一种用于将施加到隔膜上的静压或动态压力转换成相应的电信号的压力传感器及其制造方法。换能器包括形成在基板的上表面中的固定电极和设置在通过空腔设置在固定电极上方的隔膜中的移动电极。衬底在其底部形成有至少一个孔，其用于在干蚀刻中去除在膜片和衬底的上表面之间形成的牺牲层的制造工艺以形成空腔。

32. 发明授权

US06747465B2 Contractor, method for manufacturing the same, and probe card using the same 失效
标题翻译：承包商，制造方法，以及使用其的探针卡
公开(公告)号：US06747465B2
公开(公告)日：2004-06-08
申请号：US09986561
申请日：2001-11-09
申请人： Masayoshi Esashi , Shinji Iino , Tomohisa Hoshino
发明人： Masayoshi Esashi , Shinji Iino , Tomohisa Hoshino
IPC分类号： G01R3102
CPC分类号： G01R1/07371
摘要： There is disclosed a contactor which is used for testing electric characteristics of an object to be tested, the contactor comprising a contactor board, a plurality of conductive members formed through the contactor board, a plurality of beam members, and a contact terminal provided at the tip of each beam member. In this contactor, each beam member has a tip and a base end at its both ends, and has a step shape or an arch shape between the tip and the base end. The base end of each beam member is connected to each conductive member. The contact terminal member can be formed integrally with a conductive layer of the beam member.
摘要翻译：公开了一种用于测试被测物的电特性的接触器，该接触器包括接触器板，通过该接触器板形成的多个导电部件，多个梁部件和设置在该接触器上的接触端子每个梁构件的尖端。在该接触器中，每个梁构件在其两端具有尖端和基端，并且在尖端和基端之间具有台阶形状或拱形形状。每个梁构件的基端连接到每个导电构件。接触端子构件可以与梁构件的导电层一体地形成。

33. 发明授权

US06679118B1 Accelerometer and spherical sensor type measuring instrument 失效
标题翻译：加速度计和球面传感器式测量仪
公开(公告)号：US06679118B1
公开(公告)日：2004-01-20
申请号：US10019126
申请日：2002-06-18
申请人： Masayoshi Esashi , Takao Murakoshi , Shigeru Nakamura , Nobuo Takeda
发明人： Masayoshi Esashi , Takao Murakoshi , Shigeru Nakamura , Nobuo Takeda
IPC分类号： G01P15125
CPC分类号： G01P15/125 , G01P15/131 , G01P15/18
摘要： An object is to provide an accelerometer or a spherical sensor-type measurement device, able to control by means of an active restraining control system a spherical mass part or a spherical sensor part. The accelerometer or spherical sensor-type measurement device has a spherical mass part, which is levitated by electrostatic supporting forces, and electrodes positioned so as to surround the spherical mass part and which have spherical inner surfaces; the above electrodes include a plurality of electrostatic supporting electrodes, positioned symmetrically with respect to the spherical mass part, and a displacement detection electrode, positioned between the electrostatic supporting electrodes.
摘要翻译：目的是提供一种加速度计或球形传感器型测量装置，其能够通过主动约束控制系统来控制球形质量部分或球形传感器部分。加速度计或球面传感器型测量装置具有由静电支撑力悬浮的球形质量部分，以及围绕球形质量部分并且具有球形内表面的电极; 上述电极包括相对于球形质量部分对称定位的多个静电支撑电极和位于静电支撑电极之间的位移检测电极。

34. 发明授权

US06598483B2 Capacitive vacuum sensor 失效
标题翻译：电容式真空传感器
公开(公告)号：US06598483B2
公开(公告)日：2003-07-29
申请号：US09801721
申请日：2001-03-09
申请人： Haruzo Miyashita , Masayoshi Esashi
发明人： Haruzo Miyashita , Masayoshi Esashi
IPC分类号： G01L912
CPC分类号： G01L9/0072 , G01L9/0042
摘要： A capacitive vacuum sensor includes a non-conducting substrate, a plurality of fixed electrodes on the non-conducting substrate, and a diaphragm electrode formed by a plurality of elastic structures, each of the elastic structures being arranged to oppose a respective one of the fixed electrodes and having a different physical size (area) that is the same as that of each corresponding fixed electrode. More specifically, the areas of the elastic structures have a specific relationship between them, as defined by a specific ratio, and the areas may differ successively from each other according to the specific ratio. The capacitive vacuum sensor further includes compensation electrodes that are not sensitive to any change in the capacitance that may occur in response to any change in the pressure, but is only sensitive to any change in the capacitance that may occur in response to any change in the temperature. The elastic structures forming the diaphragm electrode have a plurality of projections on the surfaces to detach the elastic structures, which have been pressed against by the corresponding fixed electrodes under the higher pressure, away from the corresponding fixed electrodes when the pressure becomes lower.
摘要翻译：电容式真空传感器包括非导电衬底，在非导电衬底上的多个固定电极和由多个弹性结构形成的隔膜电极，每个弹性结构被布置成与固定的电极，并且具有与每个对应的固定电极的物理尺寸（面积）不同的物理尺寸（面积）。更具体地说，弹性结构的面积按照特定的比例具有特定的关系，并且该区域可以根据具体的比例而相互不同。电容式真空传感器还包括对响应于任何压力变化可能发生的任何电容变化都不敏感的补偿电极，但仅对响应于任何变化可能发生的电容的任何变化敏感温度。形成隔膜电极的弹性结构在压力变低时，在表面上具有多个突起，以将相应的固定电极压靠在较高压力下的弹性结构分离。

35. 发明授权

US06497148B1 Gyroscope and input apparatus using the same 失效
标题翻译：陀螺仪和使用其的输入装置
公开(公告)号：US06497148B1
公开(公告)日：2002-12-24
申请号：US09657435
申请日：2000-09-07
申请人： Munemitsu Abe , Eiji Shinohara , Masayoshi Esashi
发明人： Munemitsu Abe , Eiji Shinohara , Masayoshi Esashi
IPC分类号： G01P904
CPC分类号： G01C19/5607
摘要： A gyroscope of the invention is provided with a tuning fork having three legs and a support, a top side glass substrate and a bottom side glass substrate between which the tuning fork is interposed, driving movable electrodes disposed on the top surface of each leg, driving fixed electrodes disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes.
摘要翻译：本发明的陀螺仪设有具有三个支腿的支架，支撑件，顶侧玻璃基板和底侧玻璃基板，其间插有音叉，驱动设置在每个支腿顶表面上的可动电极，驱动固定电极，设置在顶侧玻璃基板的底面上以与驱动可动电极相对，设置在每个支腿的自由端的上表面上并联连接的六个检测可动电极，以及六个检测固定电极彼此平行地设置在顶侧玻璃基板的底面上，以面对检测可动电极。

36. 发明授权

US5952572A Angular rate sensor and acceleration sensor 失效
标题翻译：角速率传感器和加速度传感器
公开(公告)号：US5952572A
公开(公告)日：1999-09-14
申请号：US784405
申请日：1997-01-17
申请人： Mitsuhiro Yamashita , Masayoshi Esashi
发明人： Mitsuhiro Yamashita , Masayoshi Esashi
IPC分类号： G01C19/56 , G01P15/08 , G01P15/09 , G01P15/125 , G01P15/18 , G01P9/00
CPC分类号： G01P15/0802 , G01C19/56 , G01P15/125 , G01P2015/0828 , G01P2015/084 , G01P2015/0842
摘要： The sensor is a small-sized vibratory angular velocity sensor, and making use of anisotropic etching characteristics of single crystal silicon substrate, as shown in FIG. 1, four cantilever beams 103 of leading end load (masses 102) type are disposed in a cross form, and the center of gravity (coupling portion 104) thereof is supported by a bridge 105 to form a vibrator, which is excited by electrostatic force by utilizing electrodes 110, 115 formed above and below the end portion of the masses 102, and the angular rate is detected from the capacitance change.
摘要翻译：该传感器是小型振动角速度传感器，并利用单晶硅衬底的各向异性蚀刻特性，如图1所示。如图1所示，前端负载（质量102）型的四个悬臂梁103以十字形状设置，其重心（联接部分104）由桥105支撑，以形成由静电力激励的振动器通过利用形成在质量体102的端部的上方和下方的电极110,115，并且从电容变化检测角速率。

37. 发明授权

US09215089B2 Touch sensor system 有权
标题翻译：触摸传感器系统
公开(公告)号：US09215089B2
公开(公告)日：2015-12-15
申请号：US13502078
申请日：2009-10-14
申请人： Masanori Muroyama , Masayoshi Esashi , Shuji Tanaka , Sakae Matsuzaki , Mitsutoshi Makihata , Yutaka Nonomura , Motohiro Fujiyoshi , Takahiro Nakayama , Ui Yamaguchi , Hitoshi Yamada
发明人： Masanori Muroyama , Masayoshi Esashi , Shuji Tanaka , Sakae Matsuzaki , Mitsutoshi Makihata , Yutaka Nonomura , Motohiro Fujiyoshi , Takahiro Nakayama , Ui Yamaguchi , Hitoshi Yamada
IPC分类号： G06F13/00 , H04L12/40 , G01L1/14 , G01L5/22 , G06F13/376
CPC分类号： H04L12/40032 , G01L1/142 , G01L1/146 , G01L5/228 , G06F13/376 , H04L12/40013
摘要： A touch sensor system includes buses, a plurality of touch sensor devices disposed on the buses, and an information integrating device that is connected to all the buses and integrates information from the touch sensor device. The touch sensor device includes a sensor unit and a signal processing unit that transmits a sensor data signal generated by processing an analog sensor signal to the information integrating device through the bus. The signal processing unit includes a digital converting unit, a threshold evaluating unit that gives a start permission of the signal process when a sensor value exceeds a preset threshold, an ID adding unit that adds a transmitter identification number to the sensor signal, and a data transmitting unit that outputs the sensor data signal to a signal line of the bus. Fast responses are made possible without increasing the amount of data and host processing load while including many touch sensor elements.
摘要翻译：触摸传感器系统包括总线，布置在总线上的多个触摸传感器装置，以及连接到所有总线并且集成来自触摸传感器装置的信息的信息集成装置。触摸传感器装置包括传感器单元和信号处理单元，该单元通过总线将通过处理模拟传感器信号而产生的传感器数据信号发送到信息集成装置。信号处理单元包括：数字转换单元，当传感器值超过预设阈值时给出信号处理开始许可的阈值评估单元;将传感器信号加上发射机标识号的ID添加单元，以及数据发送单元，其将传感器数据信号输出到总线的信号线。快速响应是可能的，而不增加数据量和主机处理负载，同时包括许多触摸传感器元件。

38. 发明授权

US08823114B2 Sensor device having electrode draw-out portions through side of substrate 有权
标题翻译：传感器装置具有通过衬底侧的电极引出部分
公开(公告)号：US08823114B2
公开(公告)日：2014-09-02
申请号：US13502083
申请日：2010-10-13
申请人： Shuji Tanaka , Masayoshi Esashi , Masanori Muroyama , Sakae Matsuzaki , Mitsutoshi Makihata , Yutaka Nonomura , Motohiro Fujiyoshi , Takahiro Nakayama , Ui Yamaguchi , Hitoshi Yamada
发明人： Shuji Tanaka , Masayoshi Esashi , Masanori Muroyama , Sakae Matsuzaki , Mitsutoshi Makihata , Yutaka Nonomura , Motohiro Fujiyoshi , Takahiro Nakayama , Ui Yamaguchi , Hitoshi Yamada
IPC分类号： H01L29/84 , H01L23/48 , G01L5/22 , G01L1/14 , B81C1/00 , H01L23/00 , H01L23/10
CPC分类号： B81C1/00238 , B81B2201/0264 , B81B2207/012 , B81C2201/019 , B81C2203/032 , B81C2203/0792 , G01L1/146 , G01L1/148 , G01L5/228 , H01L23/10 , H01L24/04 , H01L24/29 , H01L24/32 , H01L24/82 , H01L24/94 , H01L2924/01004 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01057 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/1461 , H01L2924/15787 , H01L2924/15788 , H01L2924/19041 , H01L2924/30105 , H01L2924/3011 , H01L2924/3025 , H01L2924/3512 , H01L2924/00
摘要： Provided is a technique for packaging a sensor structure having a contact sensing surface and a signal processing LSI that processes a sensor signal. The sensor structure has the contact sensing surface and sensor electrodes. The signal processing integrated circuit is embedded in a semiconductor substrate. The sensor structure and the semiconductor substrate are bonded by a bonding layer, forming a sensor device as a single chip. The sensor electrodes and the integrated circuit are sealed inside the sensor device, and the sensor electrodes and external terminals of the integrated circuit are led out to the back surface of the semiconductor substrate through a side surface of the semiconductor substrate.
摘要翻译：提供了一种用于封装具有接触感测表面的传感器结构和处理传感器信号的信号处理LSI的技术。传感器结构具有接触感应表面和传感器电极。信号处理集成电路嵌入在半导体衬底中。传感器结构和半导体衬底通过接合层粘接，形成传感器装置作为单个芯片。传感器电极和集成电路密封在传感器装置的内部，并且集成电路的传感器电极和外部端子通过半导体衬底的侧表面被引出到半导体衬底的背面。

39. 发明授权

US08796850B2 Wiring connection method and functional device 有权
标题翻译：接线方式及功能设备
公开(公告)号：US08796850B2
公开(公告)日：2014-08-05
申请号：US13393577
申请日：2010-09-01
申请人： Shuji Tanaka , Masayoshi Esashi , Sakae Matsuzaki , Mamoru Mori
发明人： Shuji Tanaka , Masayoshi Esashi , Sakae Matsuzaki , Mamoru Mori
IPC分类号： H01L23/48 , H01L23/00
CPC分类号： H01L24/16 , B81B2203/04 , B81C3/001 , B81C2203/031 , H01L24/81 , H01L2224/16225 , H01L2224/16227 , H01L2224/16503 , H01L2224/81192 , H01L2224/8181 , H01L2224/81893 , H01L2224/97 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01019 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01049 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/1461 , H01L2924/15788 , H01R43/0214 , H01L2224/81 , H01L2924/00
摘要： By forming a metal layer 14 on at least one of a connecting electrode 12 of a first substrate 10 and a connecting electrode 17 of a second substrate 15, placing the first substrate 10 and the second substrate 15 together in order that the connecting electrode 12 and the connecting electrode 17 face opposite to each other via the metal layer 14, increasing temperature up to anodic bonding temperature, and applying DC voltage between the first substrate 10 and the second substrate 15 while maintaining that temperature, the first substrate 10 and the second substrate 15 are anodically bonded, and at the same time by melting the metal layer 14, the connecting electrode 12 and the connecting electrode 17 are electrically connected. The method achieves anodic bonding of substrates with high yield and at the same time establishes wiring connection, effective for packaging.
摘要翻译：通过在第一基板10的连接电极12和第二基板15的连接电极17中的至少一个上形成金属层14，将第一基板10和第二基板15放置在一起，以使连接电极12和连接电极17通过金属层14彼此面对，提高温度直到阳极接合温度，并且在保持该温度的同时在第一基板10和第二基板15之间施加直流电压，第一基板10和第二基板 15被阳极结合，同时通过熔化金属层14，连接电极12和连接电极17电连接。该方法以高产率实现了基板的阳极接合，同时建立了线路连接，对包装有效。

40. 发明申请

US20080227060A1 Driving Mechanism Using Shape Memory Alloys And Devices Equipped With The Same 有权
标题翻译：使用形状记忆合金和装备的驱动机构
公开(公告)号：US20080227060A1
公开(公告)日：2008-09-18
申请号：US10585998
申请日：2005-01-19
申请人： Masayoshi Esashi , Yoichi Haga , Masanori Mizushima , Tadao Matsunaga
发明人： Masayoshi Esashi , Yoichi Haga , Masanori Mizushima , Tadao Matsunaga
IPC分类号： G09B21/00
CPC分类号： G09B21/004 , G09B21/007
摘要： A driving mechanism using shape memory alloys comprises a first and a second shape memory alloys coils (1, 2), a pin-like drive member (3) connected to each of the shape memory alloys coils (1, 2) extending in the axis direction, a substrate (4) having a wiring pattern (11) and a drive circuit (4a) to supply current to the shape memory alloys coils (1, 2), and a magnetic latch part (9) to hold the drive member (3), and the magnetic latch part (9) has a latch position in the axis direction of the drive member (3), the drive circuit (4a) selectively current-drives the first and the second shape memory alloys coils (1, 2), the driven first or second shape memory alloys coils (1, 2) is heated and compressed to move the drive member (3) in the axis direction, and magnetic bodies (9a, 9b) provided to the drive member (3) is magnetically fixed at the latch position, thereby fixed and held in the axis direction.
摘要翻译：使用形状记忆合金的驱动机构包括第一和第二形状记忆合金线圈（1,2），连接到沿着轴线延伸的每个形状记忆合金线圈（1,2）的销状驱动构件（3）具有布线图案（11）的基板（4）和向形状记忆合金线圈（1,2）供给电流的驱动电路（7a），以及用于将驱动部件（3），并且所述磁性锁定部（9）在所述驱动部件（3）的轴向上具有闩锁位置，所述驱动电路（4a）选择性地驱动所述第一形状记忆合金线圈（1），2）中，驱动的第一或第二形状记忆合金线圈（1,2）被加热和压缩以使驱动构件（3）沿轴向方向移动，并且设置到驱动构件的磁体（9a，9b）（3）磁性固定在锁定位置，从而固定并保持在轴向。

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