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1. 发明授权

US06497148B1 Gyroscope and input apparatus using the same 失效
标题翻译：陀螺仪和使用其的输入装置
公开(公告)号：US06497148B1
公开(公告)日：2002-12-24
申请号：US09657435
申请日：2000-09-07
申请人： Munemitsu Abe , Eiji Shinohara , Masayoshi Esashi
发明人： Munemitsu Abe , Eiji Shinohara , Masayoshi Esashi
IPC分类号： G01P904
CPC分类号： G01C19/5607
摘要： A gyroscope of the invention is provided with a tuning fork having three legs and a support, a top side glass substrate and a bottom side glass substrate between which the tuning fork is interposed, driving movable electrodes disposed on the top surface of each leg, driving fixed electrodes disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes.
摘要翻译：本发明的陀螺仪设有具有三个支腿的支架，支撑件，顶侧玻璃基板和底侧玻璃基板，其间插有音叉，驱动设置在每个支腿顶表面上的可动电极，驱动固定电极，设置在顶侧玻璃基板的底面上以与驱动可动电极相对，设置在每个支腿的自由端的上表面上并联连接的六个检测可动电极，以及六个检测固定电极彼此平行地设置在顶侧玻璃基板的底面上，以面对检测可动电极。

2. 发明授权

US06536281B2 Capacitive micro sensor, gyroscope, and input device 失效
标题翻译：电容式微型传感器，陀螺仪和输入装置
公开(公告)号：US06536281B2
公开(公告)日：2003-03-25
申请号：US09757450
申请日：2001-01-09
申请人： Munemitsu Abe , Eiji Shinohara , Masayoshi Esashi
发明人： Munemitsu Abe , Eiji Shinohara , Masayoshi Esashi
IPC分类号： G01P900
CPC分类号： B81B7/007 , B81C2203/031 , G01C19/5621 , G01C19/5628
摘要： The invention provides a capacitive micro sensor that suppresses electric noise generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork having three legs, driving electrodes and detecting electrodes provided on two glass substrates, driving field-throughs that supply the driving electrodes with a drive signal, and detecting fields-through that extract a detecting signal from the detecting electrodes. And, a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent field-throughs of the areas where the driving field-throughs and the detecting field-throughs are arrayed.
摘要翻译：本发明提供一种电容式微型传感器，其抑制电极周围产生的电噪声，提高S / N比，提高检测灵敏度。本发明的陀螺仪包括具有三个支腿的音叉，设置在两个玻璃基板上的驱动电极和检测电极，驱动通过驱动电极向驱动电极提供驱动的通孔，以及检测从所述驱动电极提取检测信号的场通检测电极。并且，提供检测和驱动之间的屏蔽构件，检测和检测之间的屏蔽构件以及驱动和驱动之间的屏蔽构件，这使得驱动区域的相邻穿越区域之间的静电屏蔽并且检测通过被排列。

3. 发明授权

US06584843B2 Gyroscope and input unit using the same 失效
标题翻译：陀螺仪和输入单元使用相同
公开(公告)号：US06584843B2
公开(公告)日：2003-07-01
申请号：US09862554
申请日：2001-05-22
申请人： Munemitsu Abe , Masayoshi Esashi
发明人： Munemitsu Abe , Masayoshi Esashi
IPC分类号： G01P904
CPC分类号： G01C19/5607
摘要： A gyroscope includes a tuning fork, which includes a plurality of tines formed of a conductive material and a supporting portion; an upper glass substrate and a lower glass substrate which sandwich the tuning fork; drive electrodes which are provided on each of the upper and the lower glass substrates in such a manner that parts of the drive electrodes oppose the tines and the remaining parts protrude from the tines, the drive electrodes being capacitively coupled to the tines and driving the tines in a direction parallel to the substrates; and detection electrodes which are capacitively coupled to the tines, and which detect displacements of the tines in a direction perpendicular to the vibrating direction of the tines.
摘要翻译：陀螺仪包括音叉，音叉包括由导电材料形成的多个尖齿和支撑部分; 夹着音叉的上玻璃基板和下玻璃基板; 驱动电极，其设置在上部玻璃基板和下部玻璃基板中的每一个上，使得驱动电极的一部分与尖齿相对，其余部分从齿突出，驱动电极电容耦合到齿并驱动尖齿在平行于基板的方向上; 以及与电位耦合到尖齿的检测电极，并且检测尖齿在与尖齿的振动方向垂直的方向上的位移。

4. 发明授权

US06424504B1 Microactuator, magnetic head device, and magnetic recording apparatus 失效
标题翻译：微型致动器，磁头装置和磁记录装置
公开(公告)号：US06424504B1
公开(公告)日：2002-07-23
申请号：US09326195
申请日：1999-06-04
申请人： Munemitsu Abe , Masayoshi Esashi
发明人： Munemitsu Abe , Masayoshi Esashi
IPC分类号： G11B556
CPC分类号： B81B3/0051 , B81B2203/0136 , B81B2203/051 , G11B5/5552 , G11B5/5556 , G11B21/20 , H02N1/008
摘要： In a microactuator, a fixed substrate and a movable substrate are placed to be spaced opposed to each other. Between these substrates, a plurality of actuators are arranged to provide different moving distances. The actuators include comb-like movable electrodes formed on the movable substrate, and fixed electrodes formed on the fixed substrate, and having a plurality of teeth that extend outside the leading ends of the teeth of the movable electrodes in an undriven state. The movable substrate is allowed to move so that the leading ends of the teeth of the movable electrodes reach the outer ends of the teeth of the fixed electrodes. The portions of the fixed electrode teeth, which extend outside the movable electrode teeth, are different in length among the actuators.
摘要翻译：在微致动器中，固定基板和可移动基板被放置成彼此相对间隔开。在这些基板之间，布置多个致动器以提供不同的移动距离。致动器包括形成在可移动基板上的梳状可动电极和形成在固定基板上的固定电极，并且具有多个齿，该多个齿在可移动电极的齿的前端延伸到未驱动状态。可移动基板被允许移动，使得可移动电极的齿的前端到达固定电极的齿的外端。在可动电极齿之外延伸的固定电极齿的部分在致动器中的长度不同。

5. 发明授权

US07177519B2 Functional multilayer film and method for manufacturing the same 失效
标题翻译：功能性多层膜及其制造方法
公开(公告)号：US07177519B2
公开(公告)日：2007-02-13
申请号：US10726383
申请日：2003-12-03
申请人： Yoshihiro Someno , Munemitsu Abe , Masayoshi Esashi
发明人： Yoshihiro Someno , Munemitsu Abe , Masayoshi Esashi
IPC分类号： G02B6/00 , G02B6/26
CPC分类号： B32B15/01 , Y10T428/24917
摘要： A functional multilayer film and a method for manufacturing the same is provided in which the intervals of fine metallic bodies in the thickness direction and the arrangement thereof in the surface direction are regular, and the fine metallic bodies arranged on each layer are aligned in the thickness direction.A functional multilayer film is obtained by fixing a plurality of fine metallic bodies to a matrix made of a dielectric substance. The matrix is obtained by laminating metal-arranged thin films, which each contain a dielectric thin film having a predetermined thickness and the fine metallic bodies arranged on the dielectric thin film. A plurality of recesses is regularly formed on the surface of the dielectric thin film, and the fine metallic bodies are arranged in the lower parts of the recesses.
摘要翻译：提供了一种功能性多层膜及其制造方法，其中厚度方向上的细金属体的间隔及其在表面方向上的布置是规则的，并且布置在每层上的细金属体的厚度方向。通过将多个细金属体固定在由电介质构成的基体上而获得功能性多层膜。通过层压金属排列的薄膜获得矩阵，每个薄膜各自包含具有预定厚度的电介质薄膜和布置在电介质薄膜上的细金属体。在电介质薄膜的表面上规则地形成多个凹部，并且在凹部的下部配置微细的金属体。

6. 发明授权

US06524878B2 Microactuator, method for making the same, and magnetic head unit and magnetic recording apparatus using the same 失效
公开(公告)号：US06524878B2
公开(公告)日：2003-02-25
申请号：US10133121
申请日：2002-04-25
申请人： Munemitsu Abe , Masayoshi Esashi
发明人： Munemitsu Abe , Masayoshi Esashi
IPC分类号： H01L2100
CPC分类号： G11B5/5552 , G11B5/596 , H02N1/008
摘要： A microactuator has a first substrate, a second substrate, a first comb electrode having a plurality of first comb elements formed on an inner surface of the first substrate, a second comb electrode having a plurality of second comb elements formed on an inner surface of the second substrate, and a connecting film formed by partially removing an interlayer formed on the inner face of any one of the first substrate and the second substrate. The first substrate and the second substrate face each other with a distance and are movable with respect to each other. The first comb elements and the second comb elements are alternately disposed. Any one of the first electrode and the second electrode is bonded to the connecting film. This microactuator is preferably used in magnetic head units and magnetic recording apparatuses.

7. 发明授权

US06439052B1 Gyroscope and input apparatus using the gyroscope that detects displacement of leg of tuning fork by means of capacitance change when angular velocity is entered 失效
标题翻译：陀螺仪和使用陀螺仪的输入装置，其通过输入角速度时的电容变化来检测音叉的腿的位移
公开(公告)号：US06439052B1
公开(公告)日：2002-08-27
申请号：US09565003
申请日：2000-05-04
申请人： Munemitsu Abe , Masayoshi Esashi , Shinji Murata
发明人： Munemitsu Abe , Masayoshi Esashi , Shinji Murata
IPC分类号： G01P904
CPC分类号： G01C19/5607
摘要： The invention provides a gyroscope that brings about the miniaturization of a device, improvement of detection sensitivity, and reduction of driving voltage. A gyroscope of the present invention is provided with a tuning fork formed of conductive material having a plurality of legs and a support, a top glass substrate and a bottom glass substrate for holding the tuning fork in-between, a plurality of driving electrodes for driving the plurality of legs in capacitance coupling with the legs, and a plurality of detecting electrodes, each detecting electrode is disposed so as to face to the end face of each leg in the extending direction correspondingly to each leg.
摘要翻译：本发明提供了一种导致装置小型化，提高检测灵敏度和降低驱动电压的陀螺仪。本发明的陀螺仪设置有由具有多个支腿的导电材料形成的音叉和用于将音叉保持在其间的支撑体，顶部玻璃基板和底部玻璃基板，用于驱动的多个驱动电极与腿部电容耦合的多个支腿和多个检测电极，每个检测电极设置成相应于每个支腿在延伸方向上面对每个支腿的端面。

8. 发明授权

US08481248B2 Method for fabricating micromachine component of resin 失效
标题翻译：制造树脂微机械部件的方法
公开(公告)号：US08481248B2
公开(公告)日：2013-07-09
申请号：US11922529
申请日：2006-06-15
申请人： Nao Honda , Satoshi Mori , Shuji Tanaka , Masayoshi Esashi
发明人： Nao Honda , Satoshi Mori , Shuji Tanaka , Masayoshi Esashi
IPC分类号： G03F7/22
CPC分类号： F04D29/281 , B29C64/106 , B29C64/124 , B29L2031/7496 , B81C99/008 , F04D29/023 , F05D2230/31 , F05D2300/44
摘要： A method for fabricating a micromachine component of resin comprising step (a) of forming a sacrifice layer on a substrate, step (b) of forming at least two photosensitive resin composition layers sequentially on the sacrifice layer, and performing photolithography of each photosensitive resin composition layer to form an air gap portion defining the circumferential edge portion of the micromachine component and an air gap portion where an internal structure of the micromachine component is constituted to form a multilayer structure, step (c) for depositing dry film resist on the multilayer structure of the cured photosensitive resin composition layer, and performing photolithography of the dry film resist layer to form a cured dry film resist layer in which an air gap portion defining the circumferential edge of a shroud layer and an air gap where the structure of the shroud layer is constituted are formed, and step (d) for separating the micromachine component having the multilayer structure of the cured photosensitive resin composition layer and the cured dry film resist layer from the substrate by removing the sacrifice layer.
摘要翻译：一种用于制造树脂微机械部件的方法，包括在基板上形成牺牲层的步骤（a），在牺牲层上依次形成至少两个感光性树脂组合物层的步骤（b），并对各感光性树脂组合物进行光刻形成限定微机械部件的周缘部的气隙部和构成微机械部件的内部结构的气隙部，形成多层结构，在多层结构体上设置干膜抗蚀剂的工序（c）并进行干膜抗蚀剂层的光刻，形成固化的干膜抗蚀剂层，其中限定了护罩层的周缘的气隙部分和护罩层的结构的气隙形成，并且步骤（d）用于分离具有多层的微机械部件通过除去牺牲层从固化的光敏树脂组合物层和固化的干膜抗蚀剂层结构。

9. 发明申请

US20120217638A1 WIRING CONNECTION METHOD AND FUNCTIONAL DEVICE 有权
标题翻译：接线方法和功能设备
公开(公告)号：US20120217638A1
公开(公告)日：2012-08-30
申请号：US13393577
申请日：2010-09-01
申请人： Shuji Tanaka , Masayoshi Esashi , Sakae Matsuzaki , Mamoru Mori
发明人： Shuji Tanaka , Masayoshi Esashi , Sakae Matsuzaki , Mamoru Mori
IPC分类号： H01L23/48 , H01L21/762
CPC分类号： H01L24/16 , B81B2203/04 , B81C3/001 , B81C2203/031 , H01L24/81 , H01L2224/16225 , H01L2224/16227 , H01L2224/16503 , H01L2224/81192 , H01L2224/8181 , H01L2224/81893 , H01L2224/97 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01019 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01049 , H01L2924/01078 , H01L2924/01079 , H01L2924/01327 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/1461 , H01L2924/15788 , H01R43/0214 , H01L2224/81 , H01L2924/00
摘要： By forming a metal layer 14 on at least one of a connecting electrode 12 of a first substrate 10 and a connecting electrode 17 of a second substrate 15, placing the first substrate 10 and the second substrate 15 together in order that the connecting electrode 12 and the connecting electrode 17 face opposite to each other via the metal layer 14, increasing temperature up to anodic bonding temperature, and applying DC voltage between the first substrate 10 and the second substrate 15 while maintaining that temperature, the first substrate 10 and the second substrate 15 are anodically bonded, and at the same time by melting the metal layer 14, the connecting electrode 12 and the connecting electrode 17 are electrically connected. The method achieves anodic bonding of substrates with high yield and at the same time establishes wiring connection, effective for packaging.
摘要翻译：通过在第一基板10的连接电极12和第二基板15的连接电极17中的至少一个上形成金属层14，将第一基板10和第二基板15放置在一起，以使连接电极12和连接电极17通过金属层14彼此面对，提高温度直到阳极接合温度，并且在保持该温度的同时在第一基板10和第二基板15之间施加直流电压，第一基板10和第二基板 15被阳极结合，同时通过熔化金属层14，连接电极12和连接电极17电连接。该方法以高产率实现了基板的阳极接合，同时建立了线路连接，对包装有效。

10. 发明授权

US07405506B2 Driving mechanism and micro-mirror device provided with the same 失效
标题翻译：驱动机构和微镜装置相同
公开(公告)号：US07405506B2
公开(公告)日：2008-07-29
申请号：US11201316
申请日：2005-08-11
申请人： Masayoshi Esashi , Naoki Kikuchi , Rogerio Jun Mizuno , Masanori Maeda , Satoshi Karasawa
发明人： Masayoshi Esashi , Naoki Kikuchi , Rogerio Jun Mizuno , Masanori Maeda , Satoshi Karasawa
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： H02N1/008 , G02B26/0841 , H02K2201/18
摘要： A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of actuators provided on both sides with respect to the turning axis and on the same surface side of the plate member. Each of the actuators includes a fixed electrode unit fixed to the frame member and a movable electrode unit fixed to the plate member. The fixed electrode unit includes a substrate, a pair of fixed comb electrodes provided on both surface sides of the substrate. The movable electrode unit includes a pair of movable comb electrodes, each of which engages with the corresponding fixed comb electrode with a gap therebetween. Both pairs of the fixed comb electrode and the corresponding movable comb electrode are configured such that a voltage can be applied therebetween independently.
摘要翻译：相对于框架构件围绕预定转动轴线转动板状构件的驱动机构包括支撑板构件的一对支撑构件，设置在相对于转动轴线的两侧和相同表面上的一对致动器侧板。每个致动器包括固定到框架构件的固定电极单元和固定到板构件的可动电极单元。固定电极单元包括基板，设置在基板的两个表面侧上的一对固定梳电极。可动电极单元包括一对可动梳状电极，每一个可动梳状电极与对应的固定梳状电极接合，并在其间具有间隙。固定梳状电极和对应的可动梳状电极的两对被配置成可以独立地施加电压。

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