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    • 1. 发明申请
    • Driving Mechanism Using Shape Memory Alloys And Devices Equipped With The Same
    • 使用形状记忆合金和装备的驱动机构
    • US20080227060A1
    • 2008-09-18
    • US10585998
    • 2005-01-19
    • Masayoshi EsashiYoichi HagaMasanori MizushimaTadao Matsunaga
    • Masayoshi EsashiYoichi HagaMasanori MizushimaTadao Matsunaga
    • G09B21/00
    • G09B21/004G09B21/007
    • A driving mechanism using shape memory alloys comprises a first and a second shape memory alloys coils (1, 2), a pin-like drive member (3) connected to each of the shape memory alloys coils (1, 2) extending in the axis direction, a substrate (4) having a wiring pattern (11) and a drive circuit (4a) to supply current to the shape memory alloys coils (1, 2), and a magnetic latch part (9) to hold the drive member (3), and the magnetic latch part (9) has a latch position in the axis direction of the drive member (3), the drive circuit (4a) selectively current-drives the first and the second shape memory alloys coils (1, 2), the driven first or second shape memory alloys coils (1, 2) is heated and compressed to move the drive member (3) in the axis direction, and magnetic bodies (9a, 9b) provided to the drive member (3) is magnetically fixed at the latch position, thereby fixed and held in the axis direction.
    • 使用形状记忆合金的驱动机构包括第一和第二形状记忆合金线圈(1,2),连接到沿着轴线延伸的每个形状记忆合金线圈(1,2)的销状驱动构件(3) 具有布线图案(11)的基板(4)和向形状记忆合金线圈(1,2)供给电流的驱动电路(7a),以及用于将驱动部件 (3),并且所述磁性锁定部(9)在所述驱动部件(3)的轴向上具有闩锁位置,所述驱动电路(4a)选择性地驱动所述第一形状记忆合金线圈(1) ,2)中,驱动的第一或第二形状记忆合金线圈(1,2)被加热和压缩以使驱动构件(3)沿轴向方向移动,并且设置到驱动构件的磁体(9a,9b) (3)磁性固定在锁定位置,从而固定并保持在轴向。
    • 4. 发明申请
    • Active tube and active tube system
    • 主动管和主动管系统
    • US20070083084A1
    • 2007-04-12
    • US10582355
    • 2004-12-10
    • Masayoshi EsashiYoichi HagaMasanori MizushimaTadao Matsunaga
    • Masayoshi EsashiYoichi HagaMasanori MizushimaTadao Matsunaga
    • A61B1/00
    • A61B1/0058A61B1/0051G02B23/2476
    • An active tube and its system are offered which can be directed by bending its tip, controlling the degree of bend, thereby easily capable of insertion into difficult positions, and which can be driven at low temperature at which it can be used for inspection and medical treatment. A bending mechanism (21) is constructed by wiring an SMA coil (21e) along an outer side of a working channel tube (21a). The bending mechanism (21) is inserted into an outer skin tube (25) with a plurality of built-in weights (22). A front tip (23) is attached to the front end side of the bending mechanism (21) as a tip (2) of an active tube (1). A main tube (4) is connected through the working channel tube (21a) at the tip (2). A wire (21g) is connected to the SMA coil (21e). Said wire (21g) is inserted to the behind end side (41) of the main tube (4) in a wiring channel (4B9 of the main tube, thereby makes it possible to drive the bending mechanism (21) from outside.
    • 提供一种主动管及其系统,其可以通过弯曲其尖端来引导,控制弯曲度,从而容易地插入困难位置,并且可以在可用于检查和医疗的低温下驱动 治疗。 弯曲机构(21)通过沿着工作通道管(21a)的外侧布线SMA线圈(21e)而构成。 弯曲机构(21)被插入具有多个内置重物(22)的外皮管(25)中。 前端(23)作为活动管(1)的前端(2)安装在弯曲机构(21)的前端侧。 主管(4)通过工作通道管(21a)在尖端(2)处连接。 电线(21g)连接到SMA线圈(21e)。 所述线(21g)在布线通道(主管的4B 9)中插入主管(4)的后端侧(41),从而可以从外部驱动弯曲机构(21) 。
    • 5. 发明授权
    • Electrostatic chucking device
    • 静电吸盘装置
    • US5851641A
    • 1998-12-22
    • US848625
    • 1997-04-29
    • Tadao MatsunagaTakaya MatsushitaKei Hattori
    • Tadao MatsunagaTakaya MatsushitaKei Hattori
    • B23Q3/15H01L21/683B32B9/00
    • H01L21/6833Y10T279/23Y10T428/24917Y10T428/31504
    • The present invention is to provide an electrostatic chucking device having improved heat conductivity and at the same time increased adsorption area and improved adsorptity as well as having no uneveness on the wafer-provided face. The electrostatic chucking device of the present invention comprises a metal base, an adhesive layer, an electrode layer comprising a metal-deposited or metal-plated layer, and an electrically insulating layer possessing a face for providing a substance to be adhered by suction, laminated thereon in this order. The electrostatic chucking device is produced by a process comprising a stage for forming a metal-deposited or metal-plated layer on one face of a heat resistant film, a stage for providing a photoresist layer on the surface of the electrode layer, carrying out pattern exposure, development, and an etching processing, a stage for forming a semi-cured adhesive layer on the surface of the etched electrode layer, a stage for punching the formed laminated sheet according to the shape of a metal base, and stage for laminating the metal base and the laminate sheet via the above-mentioned adhesive and curing the laminated product.
    • 本发明提供一种静电吸附装置,其具有改善的导热性,并且同时增加了吸附面积和改进的吸附性,并且在晶片提供面上没有不均匀性。 本发明的静电吸附装置包括金属基底,粘合剂层,包含金属沉积或金属镀层的电极层和具有用于通过抽吸提供待粘附物质的面的电绝缘层,层压 按此顺序。 静电吸附装置通过包括在耐热膜的一个面上形成金属沉积或金属镀层的工序的工序,在电极层的表面上设置光致抗蚀剂层的工序, 曝光,显影和蚀刻处理,在蚀刻电极层的表面上形成半固化粘合剂层的阶段,根据金属基底的形状冲压所形成的层叠片的阶段和用于层压 金属基底和层压片通过上述粘合剂固化并固化层压产品。
    • 7. 发明授权
    • Electrostatic chucking device
    • 静电吸盘装置
    • US5645921A
    • 1997-07-08
    • US561731
    • 1995-11-22
    • Tadao MatsunagaTakaya MatsushitaKei Hattori
    • Tadao MatsunagaTakaya MatsushitaKei Hattori
    • B23Q3/15H01L21/683B32B9/00
    • H01L21/6833Y10T279/23Y10T428/24917Y10T428/31504
    • The present invention is to provide an electrostatic chucking device having improved heat conductivity and at the same time increased adsorption area and improved adsorptity as well as having no uneveness on the wafer-provided face. The electrostatic chucking device of the present invention comprises a metal base, an adhesive layer, an electrode layer comprising a metal-deposited or metal-plated layer, and an electrically insulating layer possessing a face for providing a substance to be adhered by suction, laminated thereon in this order. The electrostatic chucking device is produced by a process comprising a stage for forming a metal-deposited or metal-plated layer on one face of a heat resistant film, a stage for providing a photoresist layer on the surface of the electrode layer, carrying out pattern exposure, development, and an etching processing, a stage for forming a semi-cured adhesive layer on the surface of the etched electrode layer, a stage for punching the formed laminated sheet according to the shape of a metal base, and stage for laminating the metal base and the laminate sheet via the above-mentioned adhesive and curing the laminated product.
    • 本发明提供一种静电吸附装置,其具有改善的导热性,并且同时增加了吸附面积和改进的吸附性,并且在晶片提供面上没有不均匀性。 本发明的静电吸附装置包括金属基底,粘合剂层,包含金属沉积或金属镀层的电极层和具有用于通过抽吸提供要粘附的物质的面的电绝缘层,层压 按此顺序。 静电吸附装置通过包括在耐热膜的一个面上形成金属沉积或金属镀层的工序的工序,在电极层的表面上设置光致抗蚀剂层的工序, 曝光,显影和蚀刻处理,在蚀刻电极层的表面上形成半固化粘合剂层的阶段,根据金属基底的形状冲压所形成的层叠片的阶段和用于层压 金属基底和层压片通过上述粘合剂固化并固化层压产品。