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    • 34. 发明申请
    • MANUFACTURING METHOD OF A SEMICONDUCTOR ELEMENT
    • 半导体元件的制造方法
    • US20100216268A1
    • 2010-08-26
    • US12539355
    • 2009-08-11
    • Koji KatayamaHiroyuki KitabayashiSatoshi Arakawa
    • Koji KatayamaHiroyuki KitabayashiSatoshi Arakawa
    • H01L21/00
    • H01L21/3081H01L21/32139
    • A method of manufacturing a semiconductor element of good characteristics at a reduced manufacturing cost is provided. The manufacturing method of the semiconductor element includes a GaN-containing semiconductor layer forming step, an electrode layer forming step, a step of forming an Al film on the GaN-containing semiconductor layer, a step of forming a mask layer made of a material of which etching rate is smaller than that of a material of the Al film, a step of forming a ridge portion using the mask layer as a mask, a step of retreating a position of a side wall of the Al film with respect to a position of a side wall of the mask layer, a step of forming, on the side surface of the ridge portion and the top surface of the mask layer, a protective film made of a material of which etching rate is smaller than that of the material forming the Al film, and a step of removing the Al film and thereby removing the mask layer and a portion of the protective film formed on the top surface of the mask layer.
    • 提供一种以降低的制造成本制造具有良好特性的半导体元件的方法。 半导体元件的制造方法包括含GaN半导体层形成工序,电极层形成工序,在含GaN半导体层上形成Al膜的工序,形成掩模层的工序, 该蚀刻速率小于Al膜的材料的蚀刻速率,使用该掩模层作为掩模形成脊部的步骤,相对于Al膜的位置退回Al膜的侧壁的位置的步骤 掩模层的侧壁,在脊部的侧表面和掩模层的顶表面上形成保护膜,该保护膜的蚀刻速率小于形成该掩模层的材料的蚀刻速率的材料 Al膜,以及除去Al膜,从而除去掩模层和形成在掩模层的顶表面上的保护膜的一部分的步骤。