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31. 发明申请

US20100140513A1 EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS 有权
标题翻译：极光超光源光源装置
公开(公告)号：US20100140513A1
公开(公告)日：2010-06-10
申请号：US12605113
申请日：2009-10-23
申请人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Tamotsu Abe
发明人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Tamotsu Abe
IPC分类号： G21K5/02
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70175 , G03F7/70916 , H05G2/006 , H05G2/008
摘要： An extreme ultraviolet light source apparatus has a magnetic field generator which generates a magnetic field region around a direction of the magnetic field passing through a plasma region in which a plasma is to be generated and converges charged particles including ion emitted from the plasma region toward the direction of the magnetic field, a first charged particle collector (receiver) mounted at both sides of an axis of the magnetic field in the magnetic field region in order to collect (receive) the charged particles converged by the magnetic field, a target supply unit supplying a target from a nozzle located outside a converging region in which the charged particles are to be converged inside the magnetic field region in an extreme ultraviolet light generating chamber, and a target collector located at a position opposite to the nozzle, the target retrieval portion retrieving a residual target which does not contribute to generation of the plasma.
摘要翻译：极紫外光源装置具有磁场发生器，该磁场发生器在通过等离子体产生等离子体区域的磁场方向周围产生磁场区域，并将包含从等离子体区域射出的离子的带电粒子向着磁场方向，安装在磁场区域的磁场轴的两侧的第一带电粒子收集器（接收器），以收集（接收）由磁场收敛的带电粒子;目标供给单元从位于极紫外光发生室内的磁场区域内的会聚区域的会聚区域的喷嘴和位于与喷嘴相对的位置的目标集合体供给目标，目标取出部检索对等离子体的产生无贡献的残留目标。

32. 发明申请

US20090179148A1 MASS SPECTROMETER AND MASS SPECTROMETRY METHOD 审中-公开
标题翻译：质谱仪和质谱方法
公开(公告)号：US20090179148A1
公开(公告)日：2009-07-16
申请号：US12350328
申请日：2009-01-08
申请人： Hiroyuki Yasuda , Yasushi Terui , Shinji Nagai , Tetsuya Nishida
发明人： Hiroyuki Yasuda , Yasushi Terui , Shinji Nagai , Tetsuya Nishida
IPC分类号： B01D59/44 , H01J49/00
CPC分类号： H01J49/004 , H01J49/063
摘要： Performing an MS3 with a tandem mass spectrometer causes problems of increase in size of the device and of increase in cost. Likewise, a plural number of times MS/MS analyses are even more difficult. An electrode to create a harmonic potential is disposed in a collision cell, and fragment ions produced by the first-time collision induced dissociation are accumulated in the harmonic potential. Target ions of the subsequent stage are let out, by means of an axial resonance excitation, selectively from the accumulated ions. The ions are excited in the axial direction to have a potential exceeding the harmonic potential. Thereby, the second-time collision induced dissociation is performed by means of a potential difference provided at the subsequent stage. In addition, an operation to return the ions back to the harmonic potential enables a plural number of times MS/MS analyses to be performed.
摘要翻译：使用串联质谱仪进行MS3会导致设备尺寸增加和成本增加的问题。同样，多次MS / MS分析更加困难。用于产生谐波电位的电极设置在碰撞室中，并且由第一次碰撞引起的解离产生的碎片离子累积在谐波电位中。选择性地从累积的离子中排出后续阶段的目标离子，借助于轴向共振激发。离子在轴向上被激发以具有超过谐波电位的电位。因此，通过在后续阶段提供的电位差来执行第二次碰撞诱导解离。此外，使离子返回到谐波电位的操作能够进行多次MS / MS分析。

33. 发明申请

US20050279926A1 Ion trap/time-of-flight mass analyzing apparatus and mass analyzing method 有权
标题翻译：离子阱/飞行时间质量分析仪和质量分析方法
公开(公告)号：US20050279926A1
公开(公告)日：2005-12-22
申请号：US11149263
申请日：2005-06-10
申请人： Yasushi Terui , Toyoharu Okumoto , Tsukasa Shishika , Shinji Nagai , Masaru Tomioka
发明人： Yasushi Terui , Toyoharu Okumoto , Tsukasa Shishika , Shinji Nagai , Masaru Tomioka
IPC分类号： G01N27/62 , B01D59/44 , H01J49/40 , H01J49/42
CPC分类号： H01J49/424 , H01J49/0009 , H01J49/0031 , H01J49/004 , H01J49/40 , H01J49/427
摘要： An “ion trap-TOF/MS” capable of calibrating the observed mass for each of an ion trap and a TOF. In the ion trap-TOF/MS, sample ions having known mass numbers and ionized by an ion source are trapped within an ion trap. Auxiliary AC voltages having a frequency component ω are applied to the end cap electrodes of the ion trap to expel unwanted ions out of the ion trap. A measurement process is carried out by applying DC voltages to the ring electrode and the end cap electrodes to expel an ion remaining within the ion trap, and measuring the mass number of the expelled ion by the time-of-flight mass spectrometer. The measurement process is repeated while changing the frequency component ω, and the ion signal intensity measured by the time-of-flight mass spectrometer is compared with a previously stored threshold, thereby making calibration of the frequency component ω for the ion having the known mass number. Thus, the calibrating of the observed mass can be realized for each of the ion trap and the TOF.
摘要翻译：能够校准每个离子阱和TOF的观察质量的“离子阱TOF / MS”。在离子阱TOF / MS中，已知质量数和离子源电离的样品离子被捕获在离子阱内。具有频率分量ω的辅助AC电压被施加到离子阱的端盖电极以将不需要的离子排出离子阱。通过向环形电极和端盖电极施加直流电压以排出留在离子阱内的离子，并且通过飞行时间质谱仪测量排出的离子的质量数来进行测量处理。在改变频率分量ω时重复测量过程，并将通过飞行时间质谱仪测量的离子信号强度与先前存储的阈值进行比较，从而对具有已知质量的离子进行频率分量ω的校准数。因此，可以为每个离子阱和TOF实现观察质量的校准。

34. 发明授权

US06839373B1 Ultra-narrow band flourine laser apparatus 有权
标题翻译：超窄带激光设备
公开(公告)号：US06839373B1
公开(公告)日：2005-01-04
申请号：US09608964
申请日：2000-06-30
申请人： Kiwamu Takehisa , Hakaru Mizoguchi , Shinji Nagai , Tatsumi Gotou
发明人： Kiwamu Takehisa , Hakaru Mizoguchi , Shinji Nagai , Tatsumi Gotou
IPC分类号： H01S3/223 , B23K26/06 , H01S3/00 , H01S3/08 , H01S3/097 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号： H01S3/10092 , B23K26/064 , B23K26/0643 , B23K26/0648 , H01S3/005 , H01S3/08059 , H01S3/097 , H01S3/225 , H01S3/2325 , H01S3/2366
摘要： An ultra-narrow band fluorine laser apparatus is provided in which a line width of a fluorine laser can be narrowed to about 0.2 to 0.3 pm without using any band-narrowing element such as an etalon. In an oscillator 11, a laser chamber 15 is provided in a stable type resonator constituted by an output mirror 13 and a totally reflecting mirror 14. The laser chamber 15 is filled with a laser gas at about 0.8 atm. As a result, when discharge is caused in the laser chamber 15 to cause laser oscillation, laser light L10 in a bandwidth of about 0.3 pm is provided. The power of the laser light L10 is increased by an amplifier 12. The amplifier 12 emits laser light L20 in a bandwidth of about 0.3 pm having laser energy of 10 mJ or more.

35. 发明授权

US5675235A Charging apparatus for controlling supplement of electric current to a rechargeable battery 失效
标题翻译：用于控制对可再充电电池的电流补充的充电装置
公开(公告)号：US5675235A
公开(公告)日：1997-10-07
申请号：US605922
申请日：1996-02-23
申请人： Shinji Nagai
发明人： Shinji Nagai
IPC分类号： H02J7/10 , H01M10/44 , H02J7/00 , H01M10/46
CPC分类号： H02J7/008 , H01M10/44
摘要： A charging apparatus for charging a rechargeable battery, such as a Lithium-ion type battery. The charging apparatus is provided with a first current stabilized unit and a second current stabilized unit for stabilizing two different levels of electric current. The first current stabilized unit provides a relatively large electric current for charging the battery package. The second current stabilized unit provides a relatively small electric current for charging the battery package. A switching unit is provided for switching a connection of the first and second current stabilized units to provide current to the rechargeable battery. A detection unit is provided for detecting an electric voltage at terminals of the rechargeable battery. The detection unit controls the switching unit so as to switch connection of the first and second current stabilized units to provide current to the rechargeable battery based on the detected voltage.
摘要翻译：一种用于对诸如锂离子型电池的可再充电电池进行充电的充电装置。充电装置设置有用于稳定两个不同电平的电流的第一电流稳定单元和第二电流稳定单元。第一电流稳定单元提供相对较大的电流以对电池组充电。第二电流稳定单元提供相对小的电流来对电池组充电。提供开关单元用于切换第一和第二电流稳定单元的连接以向可再充电电池提供电流。提供检测单元，用于检测可再充电电池的端子处的电压。检测单元控制开关单元，以便基于检测到的电压来切换第一和第二电流稳定单元的连接以向可再充电电池提供电流。

36. 发明授权

US5216371A Battery pack including measuring and indicating 失效
标题翻译：电池组包括测量和显示
公开(公告)号：US5216371A
公开(公告)日：1993-06-01
申请号：US869070
申请日：1992-04-16
申请人： Shinji Nagai
发明人： Shinji Nagai
IPC分类号： G01R31/36
CPC分类号： G01R31/3686 , G01R31/3655
摘要： A battery pack including a casing adapted to be detachably attached to a battery-powered apparatus. A rechargeable secondary battery is housed within the casing and includes positive and negative terminals. At least a pair of power electrodes are connected to the positive and negative terminals of the secondary battery and positioned on an outer surface of the casing so as to be electrically connected to the battery-powered apparatus. A measuring circuit is provided within the casing for measuring the remaining amount of electric power in the secondary battery and generating one or more information signals related to the remaining amount of the electric power which has been measured. One or more signal electrodes are provided on the outer surface of the casing and adapted to transfer the information generated from the measuring circuit to an apparatus to be connected to the battery pack. In addition to or instead of the signal electrodes, an indicating unit may be provided for indicating information related to the remaining amount of the electric power of the secondary battery at the outer surface of the casing in accordance with the information signals generated from the measuring circuit.
摘要翻译：一种电池组，包括适于可拆卸地附接到电池供电设备的壳体。可再充电二次电池容纳在外壳内，包括正极和负极。至少一对电力电极连接到二次电池的正极和负极端子并且定位在壳体的外表面上，以便电连接到电池供电的装置。在壳体内设置有测量电路，用于测量二次电池中的剩余电量，并产生与已测量的电力剩余量相关的一个或多个信息信号。一个或多个信号电极设置在壳体的外表面上，并且适于将从测量电路产生的信息传送到要连接到电池组的装置。除了信号电极之外或替代信号电极，可以提供指示单元，用于根据从测量电路产生的信息信号来指示与外壳的外表面处的二次电池的电力的剩余量有关的信息。

37. 发明授权

US08872142B2 Extreme ultraviolet light generation apparatus 有权
标题翻译：极紫外光发生装置
公开(公告)号：US08872142B2
公开(公告)日：2014-10-28
申请号：US13474100
申请日：2012-05-17
申请人： Shinji Nagai , Tamotsu Abe , Hitoshi Nagano , Osamu Wakabayashi
发明人： Shinji Nagai , Tamotsu Abe , Hitoshi Nagano , Osamu Wakabayashi
IPC分类号： G21K5/00 , G21K5/02 , H05G2/00 , G03F7/20
CPC分类号： H05G2/008 , B23K10/00 , B23K26/12 , B23K26/36 , G03B27/32 , G03F7/70025 , G03F7/70033 , G21K1/067 , G21K5/00 , G21K5/02 , G21K2201/064 , H05G2/005
摘要： An apparatus for generating extreme ultraviolet light used with a laser apparatus and connected to an external device so as to supply the extreme ultraviolet light thereto includes a chamber provided with at least one inlet through which a laser beam is introduced into the chamber; a target supply unit provided on the chamber configured to supply a target material to a predetermined region inside the chamber; a discharge pump connected to the chamber; at least one optical element provided inside the chamber; an etching gas introduction unit provided on the chamber through which an etching gas passes; and at least one temperature control mechanism for controlling a temperature of the at least one optical element.
摘要翻译：一种用于产生与激光装置并且连接到外部装置以便提供极紫外光的极紫外光的装置，包括设置有至少一个入口的腔室，激光束通过该入口引入腔室; 设置在所述室上的目标供给单元，其构造成将目标材料供应到所述室内的预定区域; 连接到所述室的排出泵; 设置在所述室内的至少一个光学元件; 蚀刻气体导入单元，设置在所述室上，蚀刻气体通过所述蚀刻气体导入单元; 以及用于控制所述至少一个光学元件的温度的至少一个温度控制机构。

38. 发明授权

US08748853B2 Chamber apparatus 有权
标题翻译：室内设备
公开(公告)号：US08748853B2
公开(公告)日：2014-06-10
申请号：US13494442
申请日：2012-06-12
申请人： Shinji Nagai , Osamu Wakabayashi , Yutaka Shiraishi , Junichi Fujimoto
发明人： Shinji Nagai , Osamu Wakabayashi , Yutaka Shiraishi , Junichi Fujimoto
IPC分类号： H05G2/00
CPC分类号： H05G2/008 , G03F7/70033 , G03F7/70916 , H05G2/003
摘要： A chamber apparatus for operating with a laser apparatus includes a chamber, a target supply unit, a collection unit and a collection container. The chamber includes an inlet through which a laser beam from the laser apparatus enters the chamber. The target supply unit is configured to supply a target material to a predetermined region inside the chamber. The collection unit includes a debris entering surface so that debris generated when the target material is irradiated with the laser beam enters the debris entering surface. The debris entering surface is inclined with respect to a direction in which the debris enters the debris entering surface. The collection container collects the debris flowing out of the collection unit.
摘要翻译：用于利用激光装置操作的腔室装置包括腔室，目标供应单元，收集单元和收集容器。该腔室包括入口，来自激光装置的激光束通过入口进入腔室。目标供给单元被配置为将目标材料供应到室内的预定区域。收集单元包括碎屑进入表面，使得当靶材料被激光束照射时产生的碎屑进入碎片进入表面。碎屑进入表面相对于碎片进入碎片进入表面的方向倾斜。收集容器收集从收集单元流出的碎屑。

39. 发明授权

US08530869B2 Extreme ultraviolet light source apparatus 有权
标题翻译：极紫外光源设备
公开(公告)号：US08530869B2
公开(公告)日：2013-09-10
申请号：US13184047
申请日：2011-07-15
申请人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
发明人： Shinji Nagai , Takanobu Ishihara , Kouji Kakizaki , Hiroshi Sobukawa , Takeshi Murakami , Masahiro Inoue
IPC分类号： A61N5/06 , G01N21/64 , G01J3/10
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70858 , G03F7/70916 , G03F7/70983 , H05G2/005
摘要： An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light emitted from the target being ionized as a plasma by irradiation with the laser light at a plasma luminescence point in the vacuum chamber, and an ion debris removal unit at least a part of which is located in an obscuration region including the plasma luminescence point.
摘要翻译：极紫外光源装置包括将目标供给到真空室中的目标供给单元，将激光输出到真空室中的激光振荡器，通过反射从目标发射的极紫外光而向外部输出极紫外光的集光镜通过在真空室中的等离子体发光点用激光照射等离子体，以及离子碎片去除单元，其至少一部分位于包括等离子体发光点的遮蔽区域中。

40. 发明授权

US08158959B2 Extreme ultraviolet light source apparatus 有权
标题翻译：极紫外光源设备
公开(公告)号：US08158959B2
公开(公告)日：2012-04-17
申请号：US12705287
申请日：2010-02-12
申请人： Takeshi Asayama , Kouji Kakizaki , Akira Endo , Shinji Nagai
发明人： Takeshi Asayama , Kouji Kakizaki , Akira Endo , Shinji Nagai
IPC分类号： G01N21/00 , G01N21/33 , H05G2/00
CPC分类号： H05G2/008 , H05G2/003 , H05G2/005
摘要： An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.
摘要翻译：一种极紫外光源装置，通过在室内产生通过用激光照射目标材料而产生的等离子体的极紫外光，并且利用磁场或电场来控制与极紫外光一起产生的离子的流动，极紫外光源装置包括离子收集器装置，该离子收集器装置通过布置在腔室一侧的孔收集离子，以及中断机构阻止溅射颗粒朝向孔的方向移动，溅射粒子在离子碰撞面与离子收集器装置中的离子相撞。

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