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31. 发明授权

US06452175B1 Column for charged particle beam device 有权
标题翻译：用于带电粒子束装置的柱
公开(公告)号：US06452175B1
公开(公告)日：2002-09-17
申请号：US09293482
申请日：1999-04-15
申请人： Pavel Adamec
发明人： Pavel Adamec
IPC分类号： H01J3720
CPC分类号： H01J37/1478 , H01J37/28 , H01J2237/1506
摘要： A charged particle beam column comprises: a particle source; an objective lens; a pre-lens deflection unit for deflecting a beam of charged particles away from the optical axis on such a path that the combined action of the objective lens and the pre-lens deflection unit directs the beam of charged particles towards the optical axis to hit the specimen surface from a first direction; and an in-lens deflection unit arranged in the vicinity of the objective lens for redirecting the deflected beam of charged particles on such a path that the combined action of the objective lens and the in-lens deflection unit redirects the beam of charged particles towards the optical axis to hit the specimen surface under said large beam landing angle from a second direction substantially opposite to said first direction.
摘要翻译：带电粒子束柱包括：粒子源; 物镜; 一个预透镜偏转单元，用于在物镜和预透镜偏转单元的组合作用将带电粒子束朝向光轴引导以撞击光轴之前将带电粒子束偏离光轴偏转的路径，样品表面从第一个方向; 以及布置在物镜附近的镜片内偏转单元，用于将偏转的带电粒子束重定向到物镜和镜片间偏转单元的组合作用将带电粒子束朝向光轴从与所述第一方向大致相反的第二方向在所述大光束着落角下撞击所述样品表面。

32. 发明授权

US08674300B2 Feedback loop for emitter flashing 有权
标题翻译：发射器闪烁的反馈回路
公开(公告)号：US08674300B2
公开(公告)日：2014-03-18
申请号：US12910502
申请日：2010-10-22
申请人： Pavel Adamec
发明人： Pavel Adamec
IPC分类号： H05B37/02
CPC分类号： H01J37/073 , H01J2237/022 , H01J2237/0653 , H01J2237/2485
摘要： A method and a device for stabilizing the emission current of an emitter of a charged particle beam device are provided. In the method, the emitter is operated under predetermined operation parameters including at least one voltage with a predetermined value. The method includes determining a first value of the emission current under the predetermined operation parameters and flash cleaning the emitter while a first electric field is applied to the emitter. The first electric field is generated by the at least one voltage having a first value of the at least one voltage, wherein the first value of the at least one voltage is provided in dependence of the determined first value of the emission current.
摘要翻译：提供一种用于稳定带电粒子束装置的发射极的发射电流的方法和装置。在该方法中，发射器在包括至少一个具有预定值的电压的预定操作参数下运行。该方法包括在预定操作参数下确定发射电流的第一值，并且在向发射器施加第一电场时闪光清洁发射器。第一电场由具有至少一个电压的第一值的至少一个电压产生，其中根据确定的发射电流的第一值提供至少一个电压的第一值。

33. 发明授权

US08044368B2 Lens coil cooling of a magnetic lens 有权
标题翻译：镜头线圈冷却的磁性镜片
公开(公告)号：US08044368B2
公开(公告)日：2011-10-25
申请号：US12047614
申请日：2008-03-13
申请人： Pavel Adamec
发明人： Pavel Adamec
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J2237/002 , H01J2237/1405
摘要： A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic field, a pole piece to guide the magnetic field, a heat shield, which is connected to a cooling system, and a thermal insulation layer provided between the heat shield and the coil.
摘要翻译：提供了一种用于带电粒子束装置和带电粒子束装置的磁透镜。磁性透镜包括具有用于产生磁场的被激励的线圈绕组的线圈，用于引导磁场的极片，连接到冷却系统的隔热层和设置在隔热层之间的绝热层和线圈。

34. 发明授权

US07928403B2 Multiple lens assembly and charged particle beam device comprising the same 有权
标题翻译：多透镜组件和包括该多透镜组件的带电粒子束装置
公开(公告)号：US07928403B2
公开(公告)日：2011-04-19
申请号：US11323017
申请日：2005-12-30
申请人： Pavel Adamec
发明人： Pavel Adamec
IPC分类号： H01J37/26
CPC分类号： H01J37/12 , H01J37/14 , H01J37/28 , H01J2237/1205 , H01J2237/121 , H01J2237/1405 , H01J2237/1501 , H01J2237/2611 , H01J2237/2817
摘要： The invention provides a multiple-lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of the optical axes of the lens sub units are inclined to each other. Further, the invention provides a charged particle beam device which comprises at least one multiple-lens assembly and a method for operating a charged particle beam device.
摘要翻译：本发明提供了一种用于带电粒子束装置的多透镜组件1，其包括至少两个透镜子单元2，每个子单元具有光轴3，其中透镜子单元的至少两个光轴倾斜于彼此。此外，本发明提供一种带电粒子束装置，其包括至少一个多透镜组件和用于操作带电粒子束装置的方法。

35. 发明授权

US07659514B2 Asymmetric annular detector 有权
标题翻译：非对称环形探测器
公开(公告)号：US07659514B2
公开(公告)日：2010-02-09
申请号：US11849768
申请日：2007-09-04
申请人： Pavel Adamec
发明人： Pavel Adamec
IPC分类号： G01T1/20
CPC分类号： H01J37/244 , H01J2237/2443
摘要： An assembly for a detection unit for an optical device is described. The assembly includes a scintillator adapted to received secondary particles and, in response, generate photons, wherein the scintillator includes an opening for trespassing of a primary beam through the scintillator. The scintillator including the opening is asymmetrical with regard to one axis.
摘要翻译：描述了用于光学装置的检测单元的组件。该组件包括适于接收的二次粒子的闪烁体，并且作为响应产生光子，其中闪烁体包括用于侵入通过闪烁体的初级束的开口。包括开口的闪烁体相对于一个轴线是不对称的。

36. 发明申请

US20070158588A1 CHARGED PARTICLE BEAM EMITTING DEVICE AND METHOD FOR OPERATING A CHARGED PARTICLE BEAM EMITTING DEVICE 有权
标题翻译：充电颗粒射束发射装置和用于操作充电颗粒光束发射装置的方法
公开(公告)号：US20070158588A1
公开(公告)日：2007-07-12
申请号：US11469728
申请日：2006-09-01
申请人： Fang Zhou , Pavel Adamec , Jurgen Frosien , Jimmy Vishnipolsky
发明人： Fang Zhou , Pavel Adamec , Jurgen Frosien , Jimmy Vishnipolsky
IPC分类号： A61N5/00
CPC分类号： H01J37/073 , H01J2237/022 , H01J2237/06325
摘要： A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of placing the cold field emitter in a vacuum of a given pressure, the emitter exhibiting a high initial emission current I0 and a lower stable mean emission current IS under a given electric extraction field; applying the given electric extraction field to the emitter for emitting electrons from the emitter surface; performing a cleaning process by applying at least one heating pulse to the cold field emitter for heating the emitter surface, whereby the cleaning process is performed before the emission current of the cold field emitter has declined to the lower stable mean emission value IS; and repeating the cleaning process to keep the emission current of the emitter continuously above the substantially stable emission value IS.
摘要翻译：提供了一种用于操作带电粒子束发射器件的方法，特别是包括冷场发射器的电子束发射器件。该方法包括以下步骤：将冷场发射器置于给定压力的真空中，发射体表现出高的初始发射电流I 0和较低的稳定平均发射电流I S，在给定的电提取场下; 将给定的电提取场施加到发射器以从发射器表面发射电子; 通过对冷场发射器施加至少一个加热脉冲来加热发射体表面来执行清洁处理，由此在冷场发射器的发射电流已经下降到较低的稳定平均发光值I < S

37. 发明申请

US20070145303A1 Protecting Aperture for Charged Particle Emitter 审中-公开
标题翻译：保护充电粒子的孔径
公开(公告)号：US20070145303A1
公开(公告)日：2007-06-28
申请号：US11553153
申请日：2006-10-26
申请人： Pavel Adamec
发明人： Pavel Adamec
IPC分类号： G21K5/10
CPC分类号： H01J37/301 , H01J37/18 , H01J2237/188
摘要： A charged particle beam apparatus and a method are provided. The apparatus comprises a charged particle emitter located within a gun chamber, the gun chamber being adapted to encompass a first pressure; at least one further vacuum chamber adapted to encompass a second pressure between one order and four orders of magnitude higher than the first pressure; a first aperture unit; comprising at least a first aperture opening and a molecule blocking area; a second aperture unit comprising a second aperture opening. Thereby, the first aperture unit and/or the second aperture unit is a differential pressure aperture separating two independently evacuateable vacuum chambers and being adapted for maintaining a pressure difference of at least two orders of magnitude and the emitter, the molecule blocking area and the second aperture opening are positioned to be on a straight line.
摘要翻译：提供带电粒子束装置和方法。该装置包括位于枪室内的带电粒子发射器，枪室适于包围第一压力; 至少一个另外的真空室，其适于包含比所述第一压力高一到四个数量级的第二压力; 第一光圈单元; 至少包括第一孔口和分子阻挡区域; 第二孔单元，包括第二孔口。因此，第一孔单元和/或第二孔单元是分离两个独立可抽空的真空室的差压孔，并适于保持至少两个数量级的压力差和发射极，分子阻挡面积和第二孔孔径开口位于直线上。

38. 发明授权

US07075075B2 Charged particle deflecting system 有权
标题翻译：带电粒子偏转系统
公开(公告)号：US07075075B2
公开(公告)日：2006-07-11
申请号：US10871879
申请日：2004-06-18
申请人： Pavel Adamec , Harry Munack
发明人： Pavel Adamec , Harry Munack
IPC分类号： H01J37/147 , H01J37/256 , H01J37/28
CPC分类号： H01J37/153 , H01J37/1475 , H01J2237/141 , H01J2237/1532 , H01J2237/1536
摘要： The invention provides a deflecting system for deflecting a charged particle beam from a first direction to a second direction, the deflecting system comprising a first deflector for deflecting said charged particle beam off the first direction within a first deflection plane; a second deflector for deflecting the deflected charged particle beam into the second direction within the first deflection plane; and at least one deflecting pair of correcting coils comprising two correction coils which is positioned and shaped to reduce an astigmatism of the charged particle beam caused by the deflections.
摘要翻译：本发明提供了一种用于将带电粒子束从第一方向偏转到第二方向的偏转系统，该偏转系统包括用于在第一偏转平面内将所述带电粒子束偏离第一方向的第一偏转器; 第二偏转器，用于将偏转的带电粒子束偏转到第一偏转平面内的第二方向; 以及至少一个偏转对的校正线圈，其包括两个校正线圈，其被定位和成形以减少由偏转引起的带电粒子束的像散。

39. 发明授权

US07067807B2 Charged particle beam column and method of its operation 有权
标题翻译：带电粒子束柱及其操作方法
公开(公告)号：US07067807B2
公开(公告)日：2006-06-27
申请号：US10937802
申请日：2004-09-08
申请人： Igor Petrov , Pavel Adamec , Zvika Rosenberg
发明人： Igor Petrov , Pavel Adamec , Zvika Rosenberg
IPC分类号： H01J37/28 , H01J37/145
CPC分类号： H01J37/28 , G01N23/2204 , G01N23/2251 , H01J2237/04756 , H01J2237/24578 , H01J2237/24592 , H01J2237/2817
摘要： A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so as to provide a desirably high effective voltage of the column at said given voltage of the anode. A certain voltage is supplied an electrode of a lens arrangement located closer to the sample, this voltage being selected to satisfy one of the following conditions: the electrode voltage is either equal to or slightly lower than that of the sample; and the electrode voltage is significantly higher than that of the sample.
摘要翻译：提出了一种用于控制带有带电粒子束的样品检查的方法和系统。将一定的给定电压提供给柱的阳极以提供用于带电粒子束的所需加速电压。向选择的样品提供一定的负电压，以便在阳极的所述给定电压下提供柱的期望的高有效电压。向位于更靠近样品的透镜装置的电极提供一定电压，该电压被选择为满足以下条件之一：电极电压等于或略低于样品的电压; 电极电压明显高于样品。

40. 发明授权

US07034297B2 Method and system for use in the monitoring of samples with a charged particle beam 有权
标题翻译：用于监测带有带电粒子束的样品的方法和系统
公开(公告)号：US07034297B2
公开(公告)日：2006-04-25
申请号：US10382789
申请日：2003-03-05
申请人： Igor Petrov , Zvika Rosenberg , Pavel Adamec , Igor Krayvitz
发明人： Igor Petrov , Zvika Rosenberg , Pavel Adamec , Igor Krayvitz
IPC分类号： G21G5/00 , G01R31/28 , H01J37/28 , H01J37/26
CPC分类号： H01J37/28 , G01N23/225 , H01J2237/20207
摘要： A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis defined by a beam directing arrangement is provided so as to orient the sample at a certain non-right angle θ1 with respect to the optical axis. A primary charged particle beam propagating towards the sample is deflected so as to affect the trajectory of the primary charged particle beam to provide a certain non-zero angle θ2 between the primary beam propagation axis and said optical axis.
摘要翻译：提出了一种用于监测带有带电粒子束的样品的方法和装置。提供了由样品表面限定的平面和由光束引导装置限定的光轴之间的机械位移，以使样品相对于光轴以一定的非直角θ1取向。向样品传播的初级带电粒子束被偏转，以影响初级带电粒子束的轨迹，以在主光束传播轴和所述光轴之间提供一定的非零角度θ2。

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