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    • 23. 发明授权
    • Plasma generating apparatus and method using neutral beam
    • 等离子体发生装置和使用中性束的方法
    • US07777178B2
    • 2010-08-17
    • US11277261
    • 2006-03-23
    • Geun-Young YeomSang-Duk ParkChang-Kwon Oh
    • Geun-Young YeomSang-Duk ParkChang-Kwon Oh
    • H05H3/02
    • H05H1/46H05H2001/4667
    • A plasma generating apparatus and method using a neutral beam, capable of readily generating plasma at the same gas flow rate by changing the structure of an ion gun, without a separate ignition device, are provided. The apparatus includes a plasma generating part formed of a quartz cup, a radio frequency (RF) applying antenna disposed at the periphery of the plasma generating part, a cooling water supply part disposed at the periphery of the plasma generating part, and an igniter in direct communication with the plasma generating part, wherein a gas for generating plasma is supplied into the igniter, and the igniter has a higher local pressure than the plasma generating part at the same gas flow rate. The ion gun is also cheaper to manufacture since it does not require a separate power supply.
    • 提供了一种使用中性束的等离子体发生装置和方法,其能够通过改变离子枪的结构而容易地以相同的气体流量产生等离子体,而不需要单独的点火装置。 该装置包括由石英杯形成的等离子体产生部件,设置在等离子体产生部件周边的射频(RF)施加天线,设置在等离子体产生部件周边的冷却水供应部分,以及点火器 与等离子体产生部件的直接连通,其中用于产生等离子体的气体被供应到点火器中,并且点火器具有比等离子体产生部件具有相同气体流量的更高的局部压力。 离子枪制造成本也便宜,因为它不需要单独的电源。
    • 26. 发明申请
    • APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING NEUTRALIZED BEAMS INCLUDING APPLYING A VOLTAGE TO A SUBSTRATE SUPPORT
    • 使用中性线处理基板的装置和方法,包括将电压应用于基板支持
    • US20090140132A1
    • 2009-06-04
    • US12323783
    • 2008-11-26
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • H05H3/02
    • H01J37/30H01J2237/0041H01J2237/04756H01J2237/20H01J2237/31
    • An apparatus and method for processing a substrate using neutralized beams are provided. A substrate processing apparatus includes an ion source generating device configured to form an ion source. An ion extraction device is configured to extract and accelerate ions from the ion source. An ion neutralizing device is configured to convert the ions extracted and accelerated from the ion extraction device into neutralized beams. A remaining portion of the ions extracted and accelerated from the ion extraction device is not converted into the neutralized beams. A substrate support is configured to support a substrate such that the neutralized beams are directed towards the substrate support. A substrate power supply is configured to apply a voltage to the substrate support such that the remaining portion of the ions that is not converted into the neutralized beams is directed away from the substrate support by the applied voltage of the substrate.
    • 提供了一种使用中和束来处理衬底的设备和方法。 衬底处理装置包括被配置为形成离子源的离子源生成装置。 离子提取装置被配置为从离子源提取和加速离子。 离子中和装置被配置为将从离子提取装置提取和加速的离子转化成中和的束。 从离子提取装置提取和加速的离子的剩余部分不被转换成中和的束。 衬底支撑件被配置为支撑衬底,使得中和的光束被引向衬底支撑件。 衬底电源被配置为向衬底支撑件施加电压,使得未转换成中和束的离子的剩余部分通过衬底的施加电压被引导离开衬底支撑。
    • 27. 发明授权
    • Apparatus for producing atomic beam
    • 用于生产原子束的装置
    • US07488932B2
    • 2009-02-10
    • US11454361
    • 2006-06-15
    • Chin-Kuo Ting
    • Chin-Kuo Ting
    • H05H3/02
    • H05H3/02
    • An apparatus for producing an atomic beam comprising an ionization chamber, an ion beam drawing device, a neutralization chamber and a voltage regulating device is provided. The ionization chamber generates an ion beam and the ion beam drawing device draws the ion beam out from the ionization chamber. The neutralization chamber and the voltage regulating device are disposed on the path of the ion beam. Moreover, the ion beam drawing device is disposed between the ionization chamber and the neutralization chamber and the voltage regulating device is disposed between the ion beam drawing device and the neutralization chamber. The energy of the ion beam can be reduced by the voltage regulating device. The ion beam is neutralized to a neutral atomic beam after passing through the neutralization chamber. Therefore, the apparatus for producing the atomic beam provided in this invention can effectively produce the neutral atomic beam.
    • 提供了一种用于制造包括电离室,离子束拉伸装置,中和室和电压调节装置的原子束的装置。 电离室产生离子束,离子束引出装置将离子束从电离室中抽出。 中和室和电压调节装置设置在离子束的路径上。 此外,离子束拉伸装置设置在电离室和中和室之间,电压调节装置设置在离子束引出装置和中和室之间。 离子束的能量可以通过电压调节装置来减少。 离子束通过中和室后被中和到中性原子束。 因此,本发明提供的原子束制造装置能够有效地产生中性原子束。
    • 28. 发明授权
    • Nanoelectromechanical and microelectromechanical sensors and analyzers
    • 纳米机电和微机电传感器和分析仪
    • US07408147B2
    • 2008-08-05
    • US11460063
    • 2006-07-26
    • Robert Heinrich BlickMichael Scott WestphallLloyd Michael Smith
    • Robert Heinrich BlickMichael Scott WestphallLloyd Michael Smith
    • H05H3/02G01N11/00
    • G01N29/022B82Y15/00G01N29/036G01N2291/0256G01N2291/0423G01N2291/0427G01N2291/106H01J49/025H01J2329/00
    • The present invention provides methods, devices and device components for detecting, sensing and analyzing molecules. Detectors of the present invention provide good detection sensitivity over a wide range of molecular masses ranging from a few Daltons up to 10s of megadaltons, which does not decrease as function of molecular mass. Sensors and analyzers of the present invention detect emission from an array of resonators to determine the molecular masses and/or electric charges of molecules which impact or contact an external surface of a membrane that is used to mount and excite the resonators in the array. Resonators in the array are excited via piezoelectric and/or magnetic excitation of the mounting membrane and, optionally, grid electrodes are used in certain configurations for electrically biasing for the resonator array, and for amplification or suppression of emission from the resonators so as to provide detection and mass/electric charge analysis with good sensitivity and resolution.
    • 本发明提供用于检测,感测和分析分子的方法,装置和装置组件。 本发明的检测器在范围广泛的分子量范围内提供良好的检测灵敏度,范围从几道尔顿至10s兆兆分之一,其不随分子量的功能而降低。 本发明的传感器和分析器检测来自谐振器阵列的发射,以确定影响或接触用于安装和激励阵列中的谐振器的膜的外表面的分子的分子质量和/或电荷。 阵列中的谐振器通过安装膜的压电和/或磁激励而激发,并且可选地,栅极用于某些构造以用于谐振器阵列的电偏置,以及用于放大或抑制来自谐振器的发射,从而提供 检测和质量/电荷分析具有良好的灵敏度和分辨率。
    • 29. 发明授权
    • Substrate processing apparatus using neutralized beam and method thereof
    • 使用中和束的基板处理装置及其方法
    • US07385183B2
    • 2008-06-10
    • US11335725
    • 2006-01-19
    • Sung-Chan ParkSung-Wook Hwang
    • Sung-Chan ParkSung-Wook Hwang
    • H05H3/02H01J37/26H01S1/00
    • H01J37/026H01J37/32357H01J2237/0042H01J2237/334
    • In a substrate processing apparatus using a neutralized beam and a method thereof, the substrate processing apparatus includes: an ion source for emitting an ion beam at an emitting angle; reflectors at which the ion beam emitted by the ion source is incident and subject to 2n collisions (where n is a positive integer) in first and second opposite directions to neutralize the ion beam as a neutralized beam and to restore a direction of propagation of the neutralized beam to the emitting angle of the ion beam; and a substrate at which the neutralized beam generated by the reflectors is incident on to perform a process. Accordingly, an incident angle of the resultant neutralized beam is perpendicular to a substrate, while the direction of propagation of the originating ion source and the surface of the substrate are maintained to be perpendicular to each other.
    • 在使用中和束的基板处理装置及其方法中,基板处理装置包括:用于以发射角发射离子束的离子源; 由离子源发射的离子束入射并且在第一和第二相反方向上经受2n次碰撞(其中n是正整数)的反射器,以将离子束中和作为中和的光束,并恢复所述离子束的传播方向 中和的束到离子束的发射角; 以及由反射器产生的被中和的光束入射的基板,以执行处理。 因此,所得中和束的入射角垂直于基板,而原始离子源和基板的表面的传播方向保持彼此垂直。