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    • 1. 发明申请
    • APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING NEUTRALIZED BEAMS INCLUDING APPLYING A VOLTAGE TO A SUBSTRATE SUPPORT
    • 使用中性线处理基板的装置和方法,包括将电压应用于基板支持
    • US20090140132A1
    • 2009-06-04
    • US12323783
    • 2008-11-26
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • H05H3/02
    • H01J37/30H01J2237/0041H01J2237/04756H01J2237/20H01J2237/31
    • An apparatus and method for processing a substrate using neutralized beams are provided. A substrate processing apparatus includes an ion source generating device configured to form an ion source. An ion extraction device is configured to extract and accelerate ions from the ion source. An ion neutralizing device is configured to convert the ions extracted and accelerated from the ion extraction device into neutralized beams. A remaining portion of the ions extracted and accelerated from the ion extraction device is not converted into the neutralized beams. A substrate support is configured to support a substrate such that the neutralized beams are directed towards the substrate support. A substrate power supply is configured to apply a voltage to the substrate support such that the remaining portion of the ions that is not converted into the neutralized beams is directed away from the substrate support by the applied voltage of the substrate.
    • 提供了一种使用中和束来处理衬底的设备和方法。 衬底处理装置包括被配置为形成离子源的离子源生成装置。 离子提取装置被配置为从离子源提取和加速离子。 离子中和装置被配置为将从离子提取装置提取和加速的离子转化成中和的束。 从离子提取装置提取和加速的离子的剩余部分不被转换成中和的束。 衬底支撑件被配置为支撑衬底,使得中和的光束被引向衬底支撑件。 衬底电源被配置为向衬底支撑件施加电压,使得未转换成中和束的离子的剩余部分通过衬底的施加电压被引导离开衬底支撑。
    • 2. 发明授权
    • Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support
    • 用于使用中和束处理衬底的装置和方法,包括向衬底支撑件施加电压
    • US08450680B2
    • 2013-05-28
    • US13306364
    • 2011-11-29
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • H05H3/02
    • H01J37/30H01J2237/0041H01J2237/04756H01J2237/20H01J2237/31
    • An apparatus and method for processing a substrate using neutralized beams are provided. A substrate processing apparatus includes an ion source generating device configured to form an ion source. An ion extraction device is configured to extract and accelerate ions from the ion source. An ion neutralizing device is configured to convert the ions extracted and accelerated from the ion extraction device into neutralized beams. A remaining portion of the ions extracted and accelerated from the ion extraction device is not converted into the neutralized beams. A substrate support is configured to support a substrate such that the neutralized beams are directed towards the substrate support. A substrate power supply is configured to apply a voltage to the substrate support such that the remaining portion of the ions that is not converted into the neutralized beams is directed away from the substrate support by the applied voltage of the substrate.
    • 提供了一种使用中和束来处理衬底的设备和方法。 衬底处理装置包括被配置为形成离子源的离子源生成装置。 离子提取装置被配置为从离子源提取和加速离子。 离子中和装置被配置为将从离子提取装置提取和加速的离子转化成中和的束。 从离子提取装置提取和加速的离子的剩余部分不被转换成中和的束。 衬底支撑件被配置为支撑衬底,使得中和的光束被引向衬底支撑件。 衬底电源被配置为向衬底支撑件施加电压,使得未转换成中和束的离子的剩余部分通过衬底的施加电压被引导离开衬底支撑。
    • 3. 发明申请
    • Apparatus and Method for Processing Substrate Using Neutralized Beams Including Applying a Voltage to a Substrate Support
    • 使用包括对基板支撑施加电压的中和束来处理基板的装置和方法
    • US20120068058A1
    • 2012-03-22
    • US13306364
    • 2011-11-29
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • H05H3/02
    • H01J37/30H01J2237/0041H01J2237/04756H01J2237/20H01J2237/31
    • An apparatus and method for processing a substrate using neutralized beams are provided. A substrate processing apparatus includes an ion source generating device configured to form an ion source. An ion extraction device is configured to extract and accelerate ions from the ion source. An ion neutralizing device is configured to convert the ions extracted and accelerated from the ion extraction device into neutralized beams. A remaining portion of the ions extracted and accelerated from the ion extraction device is not converted into the neutralized beams. A substrate support is configured to support a substrate such that the neutralized beams are directed towards the substrate support. A substrate power supply is configured to apply a voltage to the substrate support such that the remaining portion of the ions that is not converted into the neutralized beams is directed away from the substrate support by the applied voltage of the substrate.
    • 提供了一种使用中和束来处理衬底的设备和方法。 衬底处理装置包括被配置为形成离子源的离子源生成装置。 离子提取装置被配置为从离子源提取和加速离子。 离子中和装置被配置为将从离子提取装置提取和加速的离子转化成中和的束。 从离子提取装置提取和加速的离子的剩余部分不被转换成中和的束。 衬底支撑件被配置为支撑衬底,使得中和的光束被引向衬底支撑件。 衬底电源被配置为向衬底支撑件施加电压,使得未转换成中和束的离子的剩余部分通过衬底的施加电压被引导离开衬底支撑。
    • 4. 发明授权
    • Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support
    • 用于使用中和束处理衬底的装置和方法,包括向衬底支撑件施加电压
    • US08089042B2
    • 2012-01-03
    • US12323783
    • 2008-11-26
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • H05H3/02
    • H01J37/30H01J2237/0041H01J2237/04756H01J2237/20H01J2237/31
    • An apparatus and method for processing a substrate using neutralized beams are provided. A substrate processing apparatus includes an ion source generating device configured to form an ion source. An ion extraction device is configured to extract and accelerate ions from the ion source. An ion neutralizing device is configured to convert the ions extracted and accelerated from the ion extraction device into neutralized beams. A remaining portion of the ions extracted and accelerated from the ion extraction device is not converted into the neutralized beams. A substrate support is configured to support a substrate such that the neutralized beams are directed towards the substrate support. A substrate power supply is configured to apply a voltage to the substrate support such that the remaining portion of the ions that is not converted into the neutralized beams is directed away from the substrate support by the applied voltage of the substrate.
    • 提供了一种使用中和束来处理衬底的设备和方法。 衬底处理装置包括被配置为形成离子源的离子源生成装置。 离子提取装置被配置为从离子源提取和加速离子。 离子中和装置被配置为将从离子提取装置提取和加速的离子转化成中和的束。 从离子提取装置提取和加速的离子的剩余部分不被转换成中和的束。 衬底支撑件被配置为支撑衬底,使得中和的光束被引向衬底支撑件。 衬底电源被配置为向衬底支撑件施加电压,使得未转换成中和束的离子的剩余部分通过衬底的施加电压被引导离开衬底支撑。
    • 5. 发明授权
    • Structure of engine mount for vehicle
    • 车辆发动机支架结构
    • US08651217B2
    • 2014-02-18
    • US13191879
    • 2011-07-27
    • Yong-Jin KimSeung-Won KimKong-Sup JungHyo-Seok Kim
    • Yong-Jin KimSeung-Won KimKong-Sup JungHyo-Seok Kim
    • B60K5/12
    • B60K5/1241B60K5/04B60K17/24B62D21/11
    • A structure of an engine mount is provided for a vehicle in which an engine is disposed in the front of the vehicle, a front wheel is driven, and the engine is integrally coupled with a transmission to be seated horizontally on a vehicle body in a transverse mounting direction. The structure may include a driveshaft coupled to receive the driving force of the engine through the transmission and penetrate a center bearing through a bearing bracket fixed to the engine, a subframe as a plate shape coupled to the vehicle body in a rear lower part of the engine and coupled to a lower part of the transmission through a main roll rod mounted on the front, and a sub-roll rod having one end connected to the subframe and the other end connected to the bearing bracket.
    • 发动机支架的结构为发动机设置在车辆的前部而被驱动的车辆提供,并且发动机与变速器一体地联接,以使车身横向放置在横向 安装方向。 该结构可以包括被连接以通过传动装置接收发动机的驱动力的驱动轴,并通过固定在发动机上的轴承架穿过中心轴承,将副车架作为联接到车身的板形在后部的下部 发动机,并且通过安装在前部的主辊杆耦合到变速器的下部;以及副辊杆,其一端连接到副车架,另一端连接到轴承座。
    • 8. 发明授权
    • Pulse plasma matching systems and methods including impedance matching compensation
    • 脉冲等离子体匹配系统和方法包括阻抗匹配补偿
    • US08222821B2
    • 2012-07-17
    • US12145850
    • 2008-06-25
    • Keun-Hee BaiYoon-Jae KimYong-Jin Kim
    • Keun-Hee BaiYoon-Jae KimYong-Jin Kim
    • H05B31/26
    • H05H1/46H01J37/32082H01J37/32183
    • A pulse plasma matching system includes an RF matching box configured to receive an RF power pulse generated by an RF power source, configured to perform a plasma impedance matching, and configured to apply the RF power pulse to a process chamber, and a network analyzer configured to measure an impedance of plasma generated in a process chamber. A controller is configured to generate a capacitance control signal corresponding to a plasma impedance value measured by the network analyzer, configured to supply the capacitance control signal to the RF matching box, and configured to generate an impedance matching compensation pulse, and a phase shifter is configured to receive the impedance matching compensation pulse and to shift a phase of the impedance matching compensation pulse to synchronize the impedance matching compensation pulse to the RF power pulse.
    • 脉冲等离子体匹配系统包括:RF匹配盒,被配置为接收由RF电源产生的RF功率脉冲,被配置为执行等离子体阻抗匹配,并且被配置为将RF功率脉冲施加到处理室;以及网络分析器, 以测量在处理室中产生的等离子体的阻抗。 控制器被配置为产生对应于由网络分析器测量的等离子体阻抗值的电容控制信号,其被配置为向RF匹配箱提供电容控制信号,并且被配置为产生阻抗匹配补偿脉冲,并且移相器是 被配置为接收阻抗匹配补偿脉冲并且移动阻抗匹配补偿脉冲的相位以将阻抗匹配补偿脉冲同步到RF功率脉冲。
    • 10. 发明授权
    • Method for representing gray scale on plasma display panel in consideration of address light
    • 考虑到地址灯在等离子体显示面板上表示灰度的方法
    • US07961204B2
    • 2011-06-14
    • US11853684
    • 2007-09-11
    • Yong-Jin Kim
    • Yong-Jin Kim
    • G09G5/10G09G3/28
    • G09G3/2803G09G3/2029G09G3/2946G09G2310/066G09G2320/0238G09G2320/0271G09G2320/0606G09G2320/0626
    • A gray-scale representation method for a plasma display panel, which method includes arranging, in time sequence, a plurality of subfields each having a brightness weight and achieving gray-scale representation by a combination of the subfields, each subfield including an address period and a sustain period. In the gray-scale representation method, the number of sustain pulses for each subfield is determined so that a light generated from the difference of the number of sustain pulses between two adjacent gray scales can be greater than a light discharged in the address period, when the number of subfields for the higher one of the two adjacent gray scales is less than that for the lower one. The reversion of gray scales that occurs when the address light is increased as high as the sustain light can be eliminated to achieve correct gray-scale representation. A smoother gray-scale representation can be achieved with reduced power consumption by adjusting the difference of the number of sustain pulses between the two adjacent gray scales in consideration of the address light.
    • 一种用于等离子体显示面板的灰度表示方法,该方法包括按时间顺序排列多个子场,每个子场具有亮度权重,并通过子场的组合实现灰度表示,每个子场包括地址周期和 维持期 在灰阶表示方法中,确定每个子场的维持脉冲数,使得从两个相邻灰度级之间的维持脉冲数的差异产生的光可以大于在寻址周期中放出的光,当 两个相邻灰度中较高的一个灰度级的子场数小于下一个灰度级的子场数。 当可以消除地址光增加到持续光的高度时发生的灰度的反转,以获得正确的灰度级表示。 考虑到地址光,可以通过调整两个相邻灰度级之间的维持脉冲数量的差异来降低功耗,从而实现更平滑的灰度表示。