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    • 23. 发明授权
    • Three phase capacitance-based sensing and actuation
    • 三相电容式感应和驱动
    • US07484411B2
    • 2009-02-03
    • US11668951
    • 2007-01-30
    • Robert G. Walmsley
    • Robert G. Walmsley
    • G01P15/125
    • G01P15/125G01P2015/082
    • Various systems and methods for sensing are provided. In one embodiment, a sensing system is provided that includes a first electrode array disposed on a proof mass, and a second electrode array disposed on a planar surface of a support structure. The proof mass is attached to the support structure via a compliant coupling such that the first electrode array is positioned substantially parallel to and faces the second electrode array, where the proof mass is capable of displacement relative to the support structure. The displacement of the proof mass is in a direction substantially parallel to the second electrode array. The first electrode array comprises a plurality of first patterns of electrodes, the first patterns being interdigitated, and each of the first patterns comprises at least two first electrodes. The second electrode array comprises a plurality of second patterns of electrodes, the second patterns being interdigitated. Each of the second patterns comprising at least three second electrodes, where corresponding ones of the second electrodes in the second patterns are coupled in common.
    • 提供了用于感测的各种系统和方法。 在一个实施例中,提供了一种感测系统,其包括设置在检测质量块上的第一电极阵列和设置在支撑结构的平坦表面上的第二电极阵列。 检测质量块通过柔性联接件附接到支撑结构,使得第一电极阵列基本上平行于第二电极阵列定位,并且面对第二电极阵列,其中证明物质能够相对于支撑结构移位。 检测质量块的位移在大致平行于第二电极阵列的方向上。 第一电极阵列包括多个电极的第一图案,第一图案被交叉指向,并且每个第一图案包括至少两个第一电极。 第二电极阵列包括多个第二图案的电极,第二图案是交叉的。 每个第二图案包括至少三个第二电极,其中第二图案中的相应的第二电极共同耦合。
    • 28. 发明授权
    • Compensating frequency mismatch in gyroscopes
    • 陀螺仪补偿频率失配
    • US08733171B2
    • 2014-05-27
    • US13119928
    • 2008-10-31
    • Wenhua ZhangRobert G. Walmsley
    • Wenhua ZhangRobert G. Walmsley
    • G01C19/56
    • G01C19/5755G01C19/574
    • Gyroscopes that can compensate frequency mismatch are provided. In this regard, a representative gyroscope, among others, includes a top substrate including an outermost structure, a first driving structure and a first sensing structure. The first driving structure and the first sensing structure are disposed within the outermost structure. The first driving structure and the first sensing structure include a first driving electrode and a first sensing electrode that are disposed on a bottom surface of the first driving structure and first sensing structure, respectively. A portion of the mass on the top surface of the first sensing structure is removed. The gyroscope further includes a bottom substrate that is disposed below the top substrate. The bottom substrate includes a second driving electrode and a second sensing electrode that are disposed on a top surface of the bottom substrate and below the first driving electrode and the first sensing electrode.
    • 提供可以补偿频率不匹配的陀螺仪。 在这方面,代表性的陀螺仪其中包括包括最外面结构的顶部基底,第一驱动结构和第一感测结构。 第一驱动结构和第一感测结构设置在最外面的结构内。 第一驱动结构和第一感测结构包括分别设置在第一驱动结构和第一感测结构的底表面上的第一驱动电极和第一感测电极。 去除第一感测结构的顶表面上的质量的一部分。 陀螺仪还包括设置在顶部基板下方的底部基板。 底部基板包括设置在底部基板的顶表面上并且在第一驱动电极和第一感测电极下方的第二驱动电极和第二感测电极。
    • 30. 发明申请
    • THREE PHASE CAPACITANCE-BASED SENSING
    • 三相电容传感器
    • US20120085169A1
    • 2012-04-12
    • US13257386
    • 2009-03-19
    • Robert G. Walmsley
    • Robert G. Walmsley
    • G01P15/125
    • G01P15/125B81B3/0086B81B7/008B81B2201/0235B81B2203/0136G01P15/131G01P15/18G01P2015/0814G01P2015/082
    • Various systems and methods for sensing are provided. In one embodiment, a sensing system is provided that includes a first electrode array disposed on a proof mass, and a second electrode array disposed on a planar surface of a support structure. The proof mass is attached to the support structure via a compliant coupling such that the first electrode array is positioned substantially parallel to and faces the second electrode array and the proof mass is capable of displacement relative to the support structure. The first electrode array includes a plurality of first patterns of electrodes and the second electrode array includes a plurality of second patterns of electrodes. The sensing system further includes circuitry configured to provide an input voltage to each of the second patterns of electrodes to produce an electrical null position for the first electrode array.
    • 提供了用于感测的各种系统和方法。 在一个实施例中,提供了一种感测系统,其包括设置在检测质量块上的第一电极阵列和设置在支撑结构的平坦表面上的第二电极阵列。 检测质量通过柔性联接件附接到支撑结构,使得第一电极阵列基本上平行于第二电极阵列并面对第二电极阵列,并且检测质量块能够相对于支撑结构移位。 第一电极阵列包括多个电极的第一图案,第二电极阵列包括多个第二图案的电极。 感测系统还包括被配置为向每个第二电极图形提供输入电压以产生第一电极阵列的电零位置的电路​​。