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    • 26. 发明授权
    • Ceramic element, method for producing ceramic element, display device, relay device and capacitor
    • 陶瓷元件,陶瓷元件的制造方法,显示装置,继电器装置及电容器
    • US06265811B1
    • 2001-07-24
    • US09117243
    • 1998-11-10
    • Yukihisa TakeuchiToshikatsu KashiwayaNobuo Takahashi
    • Yukihisa TakeuchiToshikatsu KashiwayaNobuo Takahashi
    • H01L4108
    • H01L41/1875H01H1/0036H01H57/00H01H2001/0042H01H2057/006H01L41/0973H01L41/098H01L41/314Y10T29/42
    • A ceramic element comprises a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the main actuator element 26, and a fixed section 20 for supporting the vibrating section 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is increased in an analog manner in accordance with a voltage V applied to the pair of electrodes 24a, 24b. Specifically, an expression of p/t≦2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24a, 24b is p. Accordingly, the mechanical displacement amount is changed in an analog manner in accordance with the applied voltage, making it possible to maintain a displacement amount equivalent to that obtained during application of a driving voltage, in a no voltage-loaded state after completion of application of the driving voltage.
    • 陶瓷元件包括具有抗铁电体膜22的主致动器元件26和形成在反铁电体膜22的第一主表面(前表面)上的一对电极24a,24b,用于支撑主铁芯的振动部分18 致动器元件26和用于以振动方式支撑振动部分18的固定部分20。 偏振后的反铁电体膜22具有根据施加到一对电极24a,24b的电压V的模拟方式增加平均介电常数的区域Zt。 具体地,如果反铁电体膜22的平均膜厚为t,并且一对电极24a,24b之间的间距为p,则p / t <= 2.5的表达式被满足。 因此,机械位移量根据所施加的电压以模拟方式改变,使得可以在完成施加之后的无电压负载状态下保持与施加驱动电压期间获得的位移量相当的位移量 的驱动电压。
    • 27. 发明授权
    • Piezoelectric/electrostrictive film element
    • 压电/电致伸缩膜元件
    • US06217979B1
    • 2001-04-17
    • US09085853
    • 1998-05-27
    • Yukihisa TakeuchiTsutomu NanatakiKoji KimuraNobuo Takahashi
    • Yukihisa TakeuchiTsutomu NanatakiKoji KimuraNobuo Takahashi
    • C04B3700
    • C04B35/486C04B35/4885C04B35/6264C04B2235/3225C04B2235/6025H01L41/0973H01L41/314H04R17/08Y10T428/24273Y10T428/24322Y10T428/24331
    • A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
    • 公开了制造压电/电致伸缩薄膜元件的方法。 薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板,以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。 该方法包括以下步骤:(a)制备已经烧结的衬底,其中至少隔膜部分含有1.1-5.0重量份的氧化铝; (b)通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料,通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层,在独立的 形式或复合形式; 和(c)对压电/电致伸缩层进行烧制,至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒,界面位于压电/电致伸缩层的正下方 。
    • 30. 发明授权
    • Piezoelectric/electrostrictive film type actuator and method for manufacturing the same
    • 压电/电致伸缩薄膜式致动器及其制造方法
    • US06796637B2
    • 2004-09-28
    • US10156729
    • 2002-05-28
    • Mutsumi KitagawaNobuo TakahashiYukihisa Takeuchi
    • Mutsumi KitagawaNobuo TakahashiYukihisa Takeuchi
    • B41J2045
    • B41J2/1632B41J2/14233B41J2/161B41J2/1634B41J2/1642B41J2/1643H04R17/00Y10T29/42Y10T29/49004Y10T29/49128Y10T29/49155Y10T29/49401
    • A piezoelectric/electrostrictive film-type actuator has a ceramic base and a piezoelectric/electrostrictive element, which has piezoelectric/electrostrictive films and electrode films and which is disposed on the ceramic base, and is driven in accordance with a dislocation of the piezoelectric/electrostrictive element. The piezoelectric/electrostrictive element is formed such that the piezoelectric/electrostrictive films and the electrode films are alternately laminated so as to construct the uppermost layer and the lowermost layer with the electrode films. Also, the piezoelectric/electrostrictive films have two layers and no pores, containing a different phase formed by a decomposed material thereof, in the boundary sandwiched therebetween. In addition, the upper layer of the two-layered piezoelectric/electrostrictive films is thicker than the lower layer. This piezoelectric/electrostrictive film-type actuator solves the problem in that a withstand voltage of the piezoelectric/electrostrictive films is likely to decrease, and effectively achieves a bending dislocation.
    • 压电/电致伸缩膜型致动器具有陶瓷基体和压电/电致伸缩元件,其具有压电/电致伸缩膜和电极膜,并且其设置在陶瓷基底上,并且根据压电/电致伸缩体的位错来驱动 元件。 压电/电致伸缩元件被形成为使得压电/电致伸缩膜和电极膜交替层压,以便用电极膜构建最上层和最下层。 此外,压电/电致伸缩膜在夹在其中的边界中具有两层且不含有由其分解材料形成的不同相的孔。 此外,双层压电/电致伸缩膜的上层比下层厚。 这种压电/电致伸缩薄膜型致动器解决了压电/电致伸缩薄膜的耐电压可能降低的问题,并且有效地实现了弯曲位错。