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21. 发明授权

US07748103B2 Method of manufacturing a perpendicular magnetic recording write head with notched trailing shield 失效
标题翻译：制造带切口后挡板的垂直磁记录写头的方法
公开(公告)号：US07748103B2
公开(公告)日：2010-07-06
申请号：US11379969
申请日：2006-04-24
申请人： Donald G. Allen , Amanda Baer , Michael Feldbaum , Wen-Chien David Hsiao , Vladimir Nikitin , Aron Pentek , Katalin Pentek
发明人： Donald G. Allen , Amanda Baer , Michael Feldbaum , Wen-Chien David Hsiao , Vladimir Nikitin , Aron Pentek , Katalin Pentek
IPC分类号： G11B5/187 , G11B5/23
CPC分类号： G11B5/1278 , G11B5/11 , G11B5/3116 , G11B5/3146 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording write head has a write pole, a trapezoidal-shaped trailing shield notch, and a metal gap layer between the write pole and notch. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap layer. The write head is fabricated by reactive ion beam etching of a thin mask film above the write pole to remove the mask film and widen the opening at the edges of the write pole. The gap layer and notch are deposited into the widened opening above the write pole. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap layer, which is formed of a different material than the surrounding filler material.
摘要翻译：垂直磁记录写头具有写极，梯形后屏蔽切口和写极和凹口之间的金属间隙层。写入极具有后缘，其具有基本上限定轨道宽度的宽度并且面向凹口的前边缘，但是通过间隙层与其间隔开。写头通过在写极上方的薄掩模膜的反应离子束蚀刻来制造，以去除掩模膜并加宽写入极的边缘处的开口。间隙层和凹口沉积在写柱上方的加宽开口中。写极具有非磁性填充材料，例如氧化铝，除了其后缘外围，其与间隙层接触，间隙层由与周围填料材料不同的材料形成。

22. 发明授权

US07743487B2 Method to planarize perpendicular write poles using a combination of CMP and reactive ion milling 有权
标题翻译：使用CMP和反应离子铣削的组合来平面化垂直写入极的方法
公开(公告)号：US07743487B2
公开(公告)日：2010-06-29
申请号：US11453681
申请日：2006-06-14
申请人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek , Neil Leslie Robertson , Sue Siyang Zhang
发明人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek , Neil Leslie Robertson , Sue Siyang Zhang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/1871 , G11B5/3169 , Y10T29/49032 , Y10T29/49039 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular write head includes a beveled main pole having corners defining a track width and having a planarized surface and encapsulated on either side thereof and below by an alumina layer, the alumina layer having a polished surface and extending above the main pole on either side thereof as steps.
摘要翻译：垂直写头包括具有限定轨道宽度并且具有平坦化表面并且在其两侧和下方由氧化铝层封装的角的倾斜主极，所述氧化铝层具有抛光表面并且在其两侧的主极上方延伸作为步骤。

23. 发明授权

US07715147B2 Magnetic write head having a shield that extends below the leading edge of the write pole 有权
标题翻译：磁写头具有在写柱的前缘下方延伸的屏蔽
公开(公告)号：US07715147B2
公开(公告)日：2010-05-11
申请号：US11588961
申请日：2006-10-27
申请人： Michael Feldbaum , Quang Le , Aron Pentek , Sue Siyang Zhang
发明人： Michael Feldbaum , Quang Le , Aron Pentek , Sue Siyang Zhang
IPC分类号： G11B5/187 , G11B5/11
CPC分类号： G11B5/11 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic recording that has a write pole and a trailing or side shield that has a leading edge that extends to or beyond the leading edge of write pole, thereby ensuring complete side magnetic shielding. The write head can be formed by forming the write pole on a non-magnetic substrate that is constructed of a material that can be readily removed by reactive ion etching (RIE). The write pole can be formed by depositing a layer of magnetic write pole material over the substrate and then forming a mask over the magnetic write pole material. An ion mill can be performed to define the write pole, and then a reactive ion etch can be performed to notch the substrate, so that when a non-magnetic shield gap material is deposited it will be below or at the bottom of the write pole. Then a magnetic shield material can be deposited to form a shield having a leading edge that extends beyond the leading edge of the write pole.
摘要翻译：一种用于垂直磁记录的磁写头，具有写磁极和后屏蔽或侧屏蔽，其具有延伸到或超过写极的前沿的前沿，从而确保完全的侧磁屏蔽。写头可以通过在由可以通过反应离子蚀刻（RIE）容易地去除的材料构成的非磁性衬底上形成写极来形成。可以通过在衬底上沉积一层磁性写入磁极材料，然后在磁性写入磁极材料上形成掩模来形成写入极。可以执行离子磨以限定写入极，然后可以执行反应离子蚀刻以蚀刻衬底，使得当非磁性屏蔽间隙材料沉积时，它将在写入极的下方或底部。然后，可以沉积磁屏蔽材料以形成具有延伸超过写柱的前缘的前缘的屏蔽。

24. 发明授权

US07576951B2 Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
标题翻译：具有磁写入磁极的垂直磁性写头具有凹形后缘
公开(公告)号：US07576951B2
公开(公告)日：2009-08-18
申请号：US11411556
申请日：2006-04-25
申请人： Donald G. Allen , Amanda Baer , Michael Feldbaum , Hung-Chin Guthrie , Wen-Chien David Hsiao , Yimin Hsu , Ming Jiang , Yinshi Liu , Aaron Neuhaus , Vladimir Nikitin , Aron Pentek , Katalin Pentek , Yi Zheng
发明人： Donald G. Allen , Amanda Baer , Michael Feldbaum , Hung-Chin Guthrie , Wen-Chien David Hsiao , Yimin Hsu , Ming Jiang , Yinshi Liu , Aaron Neuhaus , Vladimir Nikitin , Aron Pentek , Katalin Pentek , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/1871 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.
摘要翻译：用于垂直磁记录的磁写头，具有带有凹后缘的写极。磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。凹形后边缘提高磁性能，例如通过改善转变曲率。构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

25. 发明授权

US07523550B2 Process to open connection vias on a planarized surface 有权
标题翻译：在平坦化表面上打开连接通孔的过程
公开(公告)号：US07523550B2
公开(公告)日：2009-04-28
申请号：US11411555
申请日：2006-04-25
申请人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek
发明人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek
IPC分类号： H01K3/10
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49021 , Y10T29/49032 , Y10T29/49044 , Y10T29/49126 , Y10T29/49139 , Y10T29/49153 , Y10T29/49155 , Y10T29/49165 , Y10T29/49169
摘要： A method for forming a via in an alumina protective layer on a structure such as a magnetic write head for use in perpendicular magnetic recording. A structure such as a magnetic pole, and or magnetic trailing shield, is formed over a substrate and is covered with a thick layer of alumina. The alumina layer can then be planarized by a chemical mechanical polishing process (CMP) and then a mask structure, such as a photoresist mask, is formed over the alumina layer. The mask structure is formed with an opening disposed over the contact pad. A reactive ion mill is then performed to remove portions of the alumina layer that are exposed at the opening in the mask, thereby forming a via in the alumina layer.
摘要翻译：在用于垂直磁记录的诸如磁写头的结构上的氧化铝保护层中形成通孔的方法。诸如磁极和/或磁性后屏蔽的结构形成在衬底上并被厚层氧化铝覆盖。然后可以通过化学机械抛光工艺（CMP）将氧化铝层平坦化，然后在氧化铝层上形成诸如光致抗蚀剂掩模的掩模结构。掩模结构形成有设置在接触垫上方的开口。然后执行反应离子研磨机以除去在掩模中的开口处暴露的部分氧化铝层，从而在氧化铝层中形成通孔。

26. 发明申请

US20070263324A1 PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH NOTCHED TRAILING SHIELD AND METHOD FOR MAKING 失效
标题翻译：具有记录轨迹的平面磁记录头和制造方法
公开(公告)号：US20070263324A1
公开(公告)日：2007-11-15
申请号：US11379969
申请日：2006-04-24
申请人： Donald Allen , Amanda Baer , Michael Feldbaum , Wen-Chien Hsiao , Vladimir Nikitin , Aron Pentek , Katalin Pentek
发明人： Donald Allen , Amanda Baer , Michael Feldbaum , Wen-Chien Hsiao , Vladimir Nikitin , Aron Pentek , Katalin Pentek
IPC分类号： G11B5/48
CPC分类号： G11B5/1278 , G11B5/11 , G11B5/3116 , G11B5/3146 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： The invention is a perpendicular magnetic recording write head with a write pole, a trapezoidal-shaped trailing shield notch, and a metal gap layer between the write pole and notch. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap layer. The write head is fabricated by a process than includes reactive ion beam etching of a thin mask film above the write pole to remove the mask film and widen the opening at the edges of the write pole. The gap layer and notch are deposited into the widened opening above the write pole. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap layer, which is formed of a different material than the surrounding filler material.
摘要翻译：本发明是一种具有写极，梯形后屏蔽切口和写极与刻槽之间的金属间隙层的垂直磁记录写头。写入极具有后缘，其具有基本上限定轨道宽度的宽度并且面向凹口的前边缘，但是通过间隙层与其间隔开。写头通过一种工艺制造，而不是包括对写极上方的薄掩模膜的反应离子束蚀刻，以去除掩模膜并加宽写入极的边缘处的开口。间隙层和凹口沉积在写柱上方的加宽开口中。写极具有非磁性填充材料，例如氧化铝，除了其后缘外围，其与间隙层接触，间隙层由与周围填料材料不同的材料形成。

27. 发明申请

US20070245544A1 METHOD FOR MAKING A PERPENDICULAR MAGNETIC RECORDING WRITE HEAD 失效
标题翻译：一种完整的磁记录写头的方法
公开(公告)号：US20070245544A1
公开(公告)日：2007-10-25
申请号：US11380189
申请日：2006-04-25
申请人： Donald Allen , Amanda Baer , Michael Feldbaum , Hung-Chin Guthrie , Aron Pentek
发明人： Donald Allen , Amanda Baer , Michael Feldbaum , Hung-Chin Guthrie , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , Y10T29/49021 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for making a write pole in a perpendicular magnetic recording write head uses a metal mask to pattern the primary resist and only ion milling during the subsequent patterning steps. A layer of primary resist is deposited over the magnetic write pole material and a metal mask layer is deposited on the primary resist layer. An imaging resist layer is formed on the metal mask layer and lithographically patterned generally in the desired shape of the write pole. Ion milling without a reactive gas is then performed over the imaging resist pattern to pattern the underlying metal mask layer, which is then used as the mask to define the shape of the primary resist pattern. Ion milling with oxygen is then performed over the metal mask pattern to pattern the underlying primary resist. Ion milling without a reactive gas is then performed over the primary resist pattern to form the underlying write pole.
摘要翻译：用于在垂直磁记录写头中制作写极的方法使用金属掩模对主抗蚀剂进行图案化，并且在随后的图案化步骤期间仅使用离子铣削。一层主抗蚀剂沉积在磁写磁极材料上，并且金属掩模层沉积在主抗蚀剂层上。在金属掩模层上形成成像抗蚀剂层，并且通常以写入极的所需形状进行光刻图案化。然后在成像抗蚀剂图案上进行无反应气体的离子研磨以对下面的金属掩模层进行图案化，然后将其用作掩模以限定主抗蚀剂图案的形状。然后在金属掩模图案上进行用氧离子研磨以对下面的主抗蚀剂进行图案化。然后在主抗蚀剂图案上执行没有反应气体的离子研磨以形成下面的写极。

28. 发明申请

US20070081278A1 Magnetic head having non-GMR shunt for perpendicular recording and method for making magnetic head having non-GMR shunt for perpendicular recording 失效
标题翻译：具有用于垂直记录的非GMR分路的磁头和用于制造具有用于垂直记录的非GMR分路的磁头的方法
公开(公告)号：US20070081278A1
公开(公告)日：2007-04-12
申请号：US11247081
申请日：2005-10-11
申请人： Michael Feldbaum , Quang Le , Edward Lee , Neil Robertson , Charles Seegel
发明人： Michael Feldbaum , Quang Le , Edward Lee , Neil Robertson , Charles Seegel
IPC分类号： G11B5/127 , G11B5/33
CPC分类号： G11B5/1278 , G11B5/3106 , G11B5/3133 , G11B5/3967 , G11B5/40 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head having non-GMR shunt for perpendicular recording and method for making magnetic head having non-GMR shunt for perpendicular recording is disclosed. A shunt is provided for shunting charge from a read sensor. The shunt is formed co-planar with the read sensor and is fabricated using non-GMR materials.
摘要翻译：公开了一种具有用于垂直记录的非GMR分路的磁头和用于制造具有用于垂直记录的非GMR分路的磁头的方法。提供分流器用于从读取传感器分流电荷。分流器与读取传感器形成共面并且使用非GMR材料制造。

29. 发明申请

US20060231523A1 Method to planarize perpendicular write poles using a combination of CMP and reactive ion milling 有权
标题翻译：使用CMP和反应离子铣削的组合来平面化垂直写入极的方法
公开(公告)号：US20060231523A1
公开(公告)日：2006-10-19
申请号：US11453681
申请日：2006-06-14
申请人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek , Neil Robertson , Sue Zhang
发明人： Amanda Baer , Hamid Balamane , Michael Feldbaum , Ming Jiang , Aron Pentek , Neil Robertson , Sue Zhang
IPC分类号： B44C1/22 , G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/1871 , G11B5/3169 , Y10T29/49032 , Y10T29/49039 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular write head includes a beveled main pole having corners defining a track width and having a planarized surface and encapsulated on either side thereof and below by an alumina layer, the alumina layer having a polished surface and extending above the main pole on either side thereof as steps.
摘要翻译：垂直写头包括具有限定轨道宽度并且具有平坦化表面并且在其两侧和下方由氧化铝层封装的角的倾斜主极，所述氧化铝层具有抛光表面并且在其两侧的主极上方延伸作为步骤。

30. 发明授权

US07075094B2 System, method, and apparatus for ion beam etching process stability using a reference for time scaling subsequent steps 失效
标题翻译：使用参考时间缩放后续步骤的离子束蚀刻工艺稳定性的系统，方法和装置
公开(公告)号：US07075094B2
公开(公告)日：2006-07-11
申请号：US10930277
申请日：2004-08-30
申请人： Michael Feldbaum , Hung-Chin Guthrie , Wipul Pemsiri Jayasekara , Aron Pentek
发明人： Michael Feldbaum , Hung-Chin Guthrie , Wipul Pemsiri Jayasekara , Aron Pentek
IPC分类号： H01J37/305
CPC分类号： H01L22/20 , H01J2237/3114 , H01L21/31116 , H01L21/32136
摘要： A system for improving drift compensation for ion mill applications defines a reference step for purposes of time duration. The reference step is controlled by an end point detector and monitored for use with subsequent process steps. The time duration for a subsequent step is adjusted as a percentage of the reference step. A time scaling factor determines the actual duration of the subsequent step. Rather than directly using times of step duration, the system uses a percentage of the reference step for the latter step. The duration of the reference step varies depending on the tool drift. The overall duration is changed in the same proportion as the duration of the reference step, and thereby compensates for the influence of drift on the end product.
摘要翻译：用于改进离子磨应用的漂移补偿的系统为了持续时间而定义了参考步骤。参考步骤由端点检测器控制，并被监控以用于随后的处理步骤。后续步骤的持续时间作为参考步骤的百分比进行调整。时间缩放因子确定后续步骤的实际持续时间。而不是直接使用步骤持续时间，系统使用后一步骤的参考步骤百分比。参考步骤的持续时间取决于刀具漂移。整个持续时间以与参考步骤的持续时间相同的比例改变，从而补偿漂移对最终产品的影响。

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