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    • 21. 发明授权
    • Bonding member and electrostatic chuck
    • 接合构件和静电吸盘
    • US07218502B2
    • 2007-05-15
    • US10790259
    • 2004-03-01
    • Tomoyuki FujiiYutaka MoriAkiyoshi Hattori
    • Tomoyuki FujiiYutaka MoriAkiyoshi Hattori
    • H01L21/683B23B31/02
    • H01L21/6831
    • A bonding member is provided, including, a ceramic member having a concave portion, a metal member having a convex portion corresponding to the concave portion of the ceramic member. A first bonding material joins a bottom portion of the concave portion of the ceramic member and a tip portion of the convex portion of the metal member. The first bonding material has a porous structure, including particles and a brazing filler metal, and covers a corner between tip and side portions of the metal member. A second bonding material including a brazing filler metal joins the side portion of the concave portion of the ceramic member and the side portion of the convex portion of the metal member.
    • 提供一种接合构件,包括具有凹部的陶瓷构件,具有与陶瓷构件的凹部对应的凸部的金属构件。 第一接合材料接合陶瓷构件的凹部的底部和金属构件的凸部的前端部。 第一接合材料具有包括颗粒和钎料的多孔结构,并且覆盖金属构件的尖端和侧部之间的角部。 包括钎料的第二接合材料接合陶瓷构件的凹部的侧部和金属构件的凸部的侧部。