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21. 发明授权

US09588066B2 Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) 有权
标题翻译：使用多角度X射线反射散射法（XRS）测量周期结构的方法和系统
公开(公告)号：US09588066B2
公开(公告)日：2017-03-07
申请号：US14161942
申请日：2014-01-23
申请人： Heath A. Pois , David A. Reed , Bruno W. Schueler , Rodney Smedt , Jeffrey T. Fanton
发明人： Heath A. Pois , David A. Reed , Bruno W. Schueler , Rodney Smedt , Jeffrey T. Fanton
IPC分类号： G01N23/201 , H01L21/66
CPC分类号： G01N23/201 , G01N2223/054 , H01L22/12
摘要： Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.
摘要翻译：公开了使用多角度X射线反射散射法（XRS）测量周期性结构的方法和系统。例如，通过X射线反射散射法测量样品的方法包括将入射的X射线束照射在具有周期性结构的样品上以产生散射的X射线束，入射的X射线束同时提供多个入射角和多个方位角。该方法还涉及收集散射的X射线束的至少一部分。

22. 发明申请

US20150204802A1 METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-ANGLE X-RAY REFLECTANCE SCATTEROMETRY (XRS) 有权
标题翻译：使用多角度X射线反射散射测量（XRS）测量周期结构的方法和系统
公开(公告)号：US20150204802A1
公开(公告)日：2015-07-23
申请号：US14161942
申请日：2014-01-23
申请人： Heath A. Pois , David A. Reed , Bruno W. Schueler , Rodney Smedt , Jeffrey T. Fanton
发明人： Heath A. Pois , David A. Reed , Bruno W. Schueler , Rodney Smedt , Jeffrey T. Fanton
IPC分类号： G01N23/201
CPC分类号： G01N23/201 , G01N2223/054 , H01L22/12
摘要： Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.
摘要翻译：公开了使用多角度X射线反射散射法（XRS）测量周期性结构的方法和系统。例如，通过X射线反射散射法测量样品的方法包括将入射的X射线束照射在具有周期性结构的样品上以产生散射的X射线束，入射的X射线束同时提供多个入射角和多个方位角。该方法还涉及收集散射的X射线束的至少一部分。

23. 发明申请

US20150052723A1 Methods and Systems for Fabricating Platelets of a Monochromator for X-ray Photoelectron Spectroscopy 有权
标题翻译：用于制造X射线光电子能谱仪的单色器血小板的方法和系统
公开(公告)号：US20150052723A1
公开(公告)日：2015-02-26
申请号：US13975035
申请日：2013-08-23
申请人： Jeffrey T. Fanton , Rodney Smedt , Bruno W. Schueler , David A. Reed
发明人： Jeffrey T. Fanton , Rodney Smedt , Bruno W. Schueler , David A. Reed
IPC分类号： B23P19/04 , G01N23/20
CPC分类号： G01N23/20 , B23Q17/20 , G01N23/2273 , G21K1/06 , G21K2201/064 , H01J37/256 , Y10T29/49764 , Y10T29/49769 , Y10T29/49771 , Y10T29/53022
摘要： Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.
摘要翻译：公开了用于制造用于X射线光电子能谱（XPS）的单色仪的血小板的方法和系统。例如，制造用于X射线光电子能谱的单色仪的血小板的方法包括将晶体放置在X射线测量装置的台上，该晶体具有顶面。该方法还包括通过X射线反射测量晶体的晶面的取向，晶体的顶表面下方的晶面并具有主轴。该方法还包括通过测量从晶体顶表面反射的光束来测量晶体顶表面的表面角度。

24. 发明申请

US20130077742A1 SYSTEM AND METHOD FOR CHARACTERIZING A FILM BY X-RAY PHOTOELECTRON AND LOW-ENERGY X-RAY FLUORESCENCE SPECTROSCOPY 有权
标题翻译：用X射线光电子和低能量X射线荧光光谱表征薄膜的系统和方法
公开(公告)号：US20130077742A1
公开(公告)日：2013-03-28
申请号：US13246488
申请日：2011-09-27
申请人： Bruno W. Schueler , David A. Reed , Jeffrey T. Fanton , Rodney Smedt
发明人： Bruno W. Schueler , David A. Reed , Jeffrey T. Fanton , Rodney Smedt
IPC分类号： G01N23/223 , G21K1/00
CPC分类号： G21K1/06 , G01N23/223 , G01N23/2273 , G01N2223/61 , G21K2201/062 , G21K2201/064
摘要： Systems and methods for characterizing films by X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a system for characterizing a film may include an X-ray source for generating an X-ray beam having an energy below the k-edge of silicon. A sample holder may be included for positioning a sample in a pathway of the X-ray beam. A first detector may be included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. A second detector may be included for collecting an X-ray fluorescence (XRF) signal generated by bombarding the sample with the X-ray beam. Monitoring/estimation of the primary X-ray flux at the analysis site may be provided by X-ray flux detectors near and at the analysis site. Both XRF and XPS signals may be normalized to the (estimated) primary X-ray flux to enable film thickness or dose measurement without the need to employ signal intensity ratios.
摘要翻译：公开了通过X射线光电子能谱（XPS）表征膜的系统和方法。例如，用于表征胶片的系统可以包括用于产生具有低于硅的k边缘的能量的X射线束的X射线源。可以包括样品保持器以将样品定位在X射线束的通路中。可以包括第一检测器以收集通过用X射线束轰击样品而产生的XPS信号。可以包括第二检测器，用于收集通过用X射线束轰击样品而产生的X射线荧光（XRF）信号。在分析现场的X射线通量探测器附近和分析现场可以提供监测/估计分析现场的主要X射线通量。 XRF和XPS信号都可以归一化为（估计的）初级X射线通量，以实现膜厚度或剂量测量，而不需要使用信号强度比。

25. 发明授权

US07658598B2 Method and control system for a pump 有权
标题翻译：泵的方法和控制系统
公开(公告)号：US07658598B2
公开(公告)日：2010-02-09
申请号：US11257333
申请日：2005-10-24
申请人： David A. Reed , Timothy D. Hogue
发明人： David A. Reed , Timothy D. Hogue
IPC分类号： F04B49/00 , F04B43/06
CPC分类号： F04B43/0736
摘要： The present invention includes methods and apparatuses for operating and controlling AOD pumps.
摘要翻译：本发明包括用于操作和控制AOD泵的方法和装置。

26. 发明授权

US5619034A Differentiating mass spectrometer 失效
标题翻译：微分质谱仪
公开(公告)号：US5619034A
公开(公告)日：1997-04-08
申请号：US559489
申请日：1995-11-15
申请人： David A. Reed , Paul W. Palmberg
发明人： David A. Reed , Paul W. Palmberg
IPC分类号： G01Q10/00 , G01Q30/04 , H01J49/40 , H01J37/26
CPC分类号： H01J49/025 , H01J49/061 , H01J49/40
摘要： A Time of Flight Mass Spectrometer which features rastering the secondary beam on the surface and analyzing composition at each of the rastered locations thereby greatly increasing the rate of data throughput. The primary beam is rastered on the target surface and the secondary beam is rastered on the detector surface. The latter arrangement provides ways of interpreting data including mapping the distribution of selected species on the target surface. The secondary beam is generated from a gas. This latter arrangement is especially useful for studying reaction rams of mixtures of reactive gases.
摘要翻译：飞行时间质谱仪，其特征在于对表面上的次级光束进行扫描，并分析每个分层位置的成分，从而大大提高了数据吞吐量。主光束在目标表面上被扫描，次光束在检测器表面上被扫描。后一种安排提供了解释数据的方法，包括在目标表面上绘制所选物种的分布。二次束由气体产生。后一种布置对于研究反应性气体混合物的反应釜是特别有用的。

27. 发明授权

US5123460A Multi-purpose container system for loading liquid dispenser 失效
标题翻译：用于装载液体分配器的多用途容器系统
公开(公告)号：US5123460A
公开(公告)日：1992-06-23
申请号：US458329
申请日：1989-12-28
申请人： David A. Reed
发明人： David A. Reed
IPC分类号： B65D1/20 , B65D21/02 , B65D25/56 , G01F19/00
CPC分类号： B65D25/56 , B65D1/20 , B65D21/0237 , G01F19/00
摘要： A container system is provided for storing, transporting, measuring and loading liquid into dispenser equipment. A predetermined quantity of liquid is stored within a first larger container having gradings or markings for visually observing the quantity of liquid in the container. A lower discharge outlet is provided for selectively discharging liquid from the first container. A second smaller container, also including gradings or markings for visually observing the quantity of liquid within the second container, is removably mounted to the outer surface of the first container. A spray nozzle for metering and controlling the quantity of liquid to be discharged from the first larger container may be stored within the smaller second container when not in use. The container system enables a user to transport both a larger and smaller container, and a discharge nozzle, as a single assembled unit. The components of the system which may be disassembled and selectively used for different operations including measurement of liquid contents at different degrees of precision.
摘要翻译：提供容器系统用于将液体储存，运输，测量和装载到分配器设备中。将预定量的液体储存在具有用于目视观察容器中的液体量的分级或标记的第一较大容器内。提供下排出口用于选择性地从第一容器排出液体。第二个较小的容器，还包括用于目视观察第二容器内的液体量的分级或标记，可移除地安装在第一容器的外表面上。用于计量和控制从第一较大容器排出的液体量的喷嘴可以在不使用时储存在较小的第二容器内。容器系统使得用户能够将较大和较小的容器以及排放喷嘴作为单个组装单元运输。该系统的部件可以拆卸并选择性地用于不同的操作，包括以不同的精度测量液体内容物。

28. 发明授权

US5121318A On-line plant operating procedure guidance system 失效
标题翻译：在线植物操作程序指导系统
公开(公告)号：US5121318A
公开(公告)日：1992-06-09
申请号：US340197
申请日：1989-04-19
申请人： Melvin H. Lipner , David A. Reed , Steven D. Whaley
发明人： Melvin H. Lipner , David A. Reed , Steven D. Whaley
IPC分类号： G01D7/00 , G05B23/02 , G06F1/00 , G06F9/44 , G08B23/00 , G21D3/00
CPC分类号： G06F9/4446
摘要： A method of displaying data corresponding to a procedure is provided where all of the data required to follow the procedure is displayed together with abbreviated text corresponding to the procedure. Text and data corresponding to only a portion of the procedure is displayed at any given time. Additional information related to several consecutive steps of the procedure which appear on separate screens is displayed continuously to one side of the screen. Additional data may be selected to displayed prior to returning to the original screen.

29. 发明授权

US4596573A Container 失效
标题翻译：容器
公开(公告)号：US4596573A
公开(公告)日：1986-06-24
申请号：US566353
申请日：1983-12-28
申请人： Jeremy F. Donnan , David A. Reed
发明人： Jeremy F. Donnan , David A. Reed
IPC分类号： A61J1/05 , A61J1/10 , B65D33/38 , A61M5/00
CPC分类号： A61J1/10 , Y10S128/24
摘要： A container suitable for storing and dispensing parenteral fluids comprises a flat member 2 inserted into a pouch 1 of plastics material. The member has two ports 9, 10 passing therethrough which are protected by removeable tabs 14, 15 having passageways 19, 20 which are coaxial with the ports. The port 9 is sealed after filling by a cup-shaped closure (25, FIG. 4 not shown). The port 10 is closed by a ruptureable membrane and may have a resilient plug (29, FIG. 5 not shown) and needle guide (30, FIG. 5 not shown). The tabs may be connected to the member by portions 16, 16a, 17, 17a and 18 of reduced thickness. The outer ends of the passageways are sealed by covers 21, 22 or by flattening and sealing the ends of the passageways.The member, ports and tabs may be integrally formed by injection moulding (FIG. 1).
摘要翻译：适于储存和分配肠胃外流体的容器包括插入塑料材料袋1中的平坦构件2。该构件具有穿过其中的两个端口9,10，其被可拆卸的翼片14,15保护，其具有与端口同轴的通道19,20。端口9在通过杯形封闭件（图4中未示出的25）填充之后被密封。端口10由可破裂的膜封闭，并且可以具有弹性塞子（图5中的29，未示出）和针引导件（图5中未示出的30）。突片可以通过减小厚度的部分16,16a，17,17a和18连接到构件。通道的外端由盖21,22密封，或通过使通道的端部压平和密封。构件，端口和突片可以通过注射成型（图1）一体地形成。

30. 发明授权

US4588514A Liquid thickened bleaching composition 失效
标题翻译：液体增稠漂白组合物
公开(公告)号：US4588514A
公开(公告)日：1986-05-13
申请号：US651729
申请日：1984-09-19
申请人： Frank Jones , David A. Reed , Jane A. Crompton , Pedro M. Beramendi
发明人： Frank Jones , David A. Reed , Jane A. Crompton , Pedro M. Beramendi
IPC分类号： C11D7/54 , C11D3/395 , C11D10/02 , C11D7/52
CPC分类号： C11D1/83 , C11D10/04 , C11D3/3956 , C11D1/10 , C11D1/29 , C11D1/75
摘要： Thickened, pourable liquid bleaching compositions which have been thickened with the aid of two different detergent-active materials, e.g. a tertiary amine oxide with a saturated fatty acid soap or an alkali metal sarcosinate often show a decrease in viscosity on storage of the composition.By inclusion of a third, synthetic detergent of the sulphate or sulphonate type, e.g. an alkylethersulphate, compositions are obtained with a significantly reduced decrease of viscosity during storage, particularly over longer periods and at higher storage temperatures.The compositions are useful for bleaching hard surfaces.
摘要翻译：增稠的可倾倒的液体漂白组合物，其借助于两种不同的洗涤剂活性物质例如，具有饱和脂肪酸皂或碱金属肌氨酸钠的叔胺氧化物在组合物储存时通常显示出降低的粘度。通过包括第三种硫酸盐或磺酸盐类型的合成洗涤剂，例如，烷基醚硫酸盐，在储存期间，特别是在更长的时间段和更高的储存温度下，获得显着降低的粘度降低的组合物。该组合物可用于漂白硬表面。

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