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21. 发明授权

US07780438B2 Substrate heating apparatus and method and coating and developing system 有权
标题翻译：基板加热装置及方法及涂层开发系统
公开(公告)号：US07780438B2
公开(公告)日：2010-08-24
申请号：US11416094
申请日：2006-05-03
申请人： Shinichi Hayashi , Hiroaki Inadomi
发明人： Shinichi Hayashi , Hiroaki Inadomi
IPC分类号： F27D15/02
CPC分类号： F27D5/0037 , F27B5/04 , F27B17/0025 , G03F7/162 , G03F7/3021 , H01L21/67109
摘要： Disclosed is a substrate heating apparatus including a hot plate that heats a substrate, and a cooling plate that supports the substrate and moves between a first position (home position) and the second position above the hot plate to transfer wafers between the two positions. A heat-radiating fin structure is connected to the cooling plate to move together with the cooling plate. The fin structure is thermally connected to the cooling plate via heat pipes. A suction port is arranged so as to locate adjacent to the fin structure when the cooling plate is in the home position. The fin structure is cooled by a gas passing therethrough before flown into the suction port, whereby the cooling plate is cooled through heat transfer from the cooling plate to the fin structure through the heat pipes.
摘要翻译：公开了一种基板加热装置，其包括加热基板的加热板和支撑基板并在第一位置（原位置）和热板上方的第二位置之间移动以在两个位置之间转移晶片的冷却板。散热片结构与冷却板连接，与冷却板一起移动。翅片结构通过热管热连接到冷却板。当冷却板处于初始位置时，设置一个吸入口以便邻近翅片结构定位。在流入吸入口之前，翅片结构被通过的气体冷却，由冷却板通过热管从冷却板传递到翅片结构而被冷却。

22. 发明授权

US07736498B2 Solution treatment apparatus and solution treatment method 有权
标题翻译：溶液处理装置和溶液处理方法
公开(公告)号：US07736498B2
公开(公告)日：2010-06-15
申请号：US12434919
申请日：2009-05-04
申请人： Nobuaki Matsuoka , Tsunenaga Nakashima , Shinichi Hayashi , Akira Oozono
发明人： Nobuaki Matsuoka , Tsunenaga Nakashima , Shinichi Hayashi , Akira Oozono
IPC分类号： H01L21/20
CPC分类号： H01L21/67178 , H01L21/6715 , H01L21/67253
摘要： In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.
摘要翻译：在本发明中，将分别连接在基板保持部周围的多个杯体的多个排气通路连接在一起，共同使用，并且参照其中的数据来调整设置在排气路径上的排气速率调节部分的开口当通过基板保持部旋转基板进行固溶处理时，基板保持部的旋转数的组合与排气路径的设定排气速度的组合相关联。根据本发明，杯体可以一直以预定的排气速度排出，而与杯体受到哪个处理的基板的状态无关。

23. 发明申请

US20100106988A1 CONTROL METHOD WITH MANAGEMENT SERVER APPARATUS FOR STORAGE DEVICE AND AIR CONDITIONER AND STORAGE SYSTEM 失效
标题翻译：用于存储设备和空调和存储系统的管理服务器设备的控制方法
公开(公告)号：US20100106988A1
公开(公告)日：2010-04-29
申请号：US12361816
申请日：2009-01-29
申请人： Shinichi Hayashi , Yuichi Taguchi , Katsumi Ouchi , Yoko Shiga , Takeshi Kato , Jun Okitsu , Tadakatsu Nakajima
发明人： Shinichi Hayashi , Yuichi Taguchi , Katsumi Ouchi , Yoko Shiga , Takeshi Kato , Jun Okitsu , Tadakatsu Nakajima
IPC分类号： G06F1/32 , G06F15/173
CPC分类号： G06F1/206 , G06F1/3221 , G06F1/3268 , G06F3/0625 , G06F3/0647 , G06F3/067 , G06F9/5011 , G06F9/5094 , G06F2206/1012 , H05K7/20836 , Y02D10/154 , Y02D10/16 , Y02D10/22
摘要： To provide a system that can reduce the power consumption of an air conditioner and the power consumption of a storage device. A control method with a management server apparatus for a plurality of storage devices and an air conditioner includes calculating plural combinations of allocating the work amount to the plurality of storage devices, calculating the heating value of each storage device included in the plurality of storage devices for each of the plural combinations, calculating the quantity of heat conducted to the air conditioner, based on the heating value and positional information of the plurality of storage devices and the air conditioner, calculating the power consumption to cool the quantity of heat conducted to the air conditioner, selecting a combination included in the plural combinations based on the power consumption of the air conditioner, and issuing a move instruction of moving the data stored in a first storage device to a second storage device to the plurality of storage devices, based on the selected combination.
摘要翻译：提供能够降低空调机的功耗和存储装置的功耗的系统。一种具有用于多个存储装置的管理服务器装置和空调的控制方法，包括：计算向多个存储装置分配工作量的多个组合，计算包含在多个存储装置中的各个存储装置的发热量，以供根据多个存储装置和空调机的发热值和位置信息，计算向空调机传导的热量的计算多个组合中的每一个，计算用于冷却传导到空气的热量的功率消耗调节器，基于空调的功率消耗来选择包含在多个组合中的组合，并且基于所述第一存储装置向所述多个存储装置发出将存储在第一存储装置中的数据移动到所述第二存储装置的移动指令选择组合。

24. 发明授权

US07600424B2 Liquid condition sensing apparatus 失效
标题翻译：液体状况检测装置
公开(公告)号：US07600424B2
公开(公告)日：2009-10-13
申请号：US11478589
申请日：2006-07-03
申请人： Hisashi Sasaki , Shinichi Hayashi
发明人： Hisashi Sasaki , Shinichi Hayashi
IPC分类号： G01F23/26
CPC分类号： G01F23/266 , G01F23/268
摘要： Capacitive liquid condition sensing apparatus includes a pair of a 1-1 electrode and a 1-2 electrode arranged to form a first capacitance; a pair of a 2-1 electrode and a 2-2 electrode arranged to form a second capacitance; a circuit board formed with a sensing circuit to sense the liquid condition such as a liquid level in accordance with the first and second capacitances; and 1-1, 1-2, 2-1 and 2-2 conductive paths connecting the 1-1, 1-2, 2-1 and 2-2 electrodes, respectively, to the sensing circuit, and including 1-1, 1-2, 2-1 and 2-2 conductive segments, respectively. The 1-1, 1-2, 2-1 and 2-2 conductive segments are arranged in a row, and extend side by side. The 1-1, 1-2, 2-1 and 2-2 conductive segments are arranged so that a first parasitic capacitance formed between the 1-1 conductive segment and the 1-2 conductive segment is equal to a second parasitic capacitance formed between the 2-1 conductive segment and the 2-2 conductive segment.
摘要翻译：电容式液体状态检测装置包括一对1-1电极和1-2电极，被布置成形成第一电容; 一对2-1电极和2-2电极，被布置成形成第二电容; 形成有感测电路的电路板，用于根据第一和第二电容感测诸如液面的液体状态; 以及分别将1-1,1-2,2-1和2-2电极连接到感测电路的1-1,1-2,2-1和2-2导电路径，并且包括1-1， 1-2,2-1和2-2导电段。 1-1,1-2,2-1,2-2导电段排列成一排并排延伸。 1-1,1-2,2-1和2-2导电段被布置成使得形成在1-1导电段和1-2导电段之间的第一寄生电容等于第二寄生电容 2-1导电段和2-2导电段。

25. 发明授权

US07591601B2 Coater/developer, coating/developing method, and storage medium 失效
标题翻译：涂布机/显影剂，涂布/显影方法和存储介质
公开(公告)号：US07591601B2
公开(公告)日：2009-09-22
申请号：US12107496
申请日：2008-04-22
申请人： Nobuaki Matsuoka , Takahiro Hashimoto , Katsuhiro Tsuchiya , Shinichi Hayashi , Yasushi Hayashida
发明人： Nobuaki Matsuoka , Takahiro Hashimoto , Katsuhiro Tsuchiya , Shinichi Hayashi , Yasushi Hayashida
IPC分类号： G03D5/00 , G03B27/32 , G03F7/00
CPC分类号： G03B27/32 , G03F7/162 , G03F7/3021
摘要： A coater/developer is disclosed that includes a heating module having a pair of rotary bodies configured to rotate about respective horizontal axles, the rotary bodies being spaced apart from each other in a direction along the conveyance path of a substrate so that the rotational axles thereof are parallel to each other; a conveyance path member engaged with and extended between the rotary bodies so as to move along an orbit, the conveyance path member forming a part of the conveyance path of the substrate placed on the conveyance path member; a first transfer part provided at the upstream end of the conveyance path; a second transfer part provided at the downstream end of the conveyance path; and a heating part provided between the upstream end and the downstream end of the conveyance path and configured to heat the substrate.
摘要翻译：公开了一种涂布机/显影剂，其包括具有一对旋转体的加热模块，所述一对旋转体构造成围绕各自的水平轴旋转，所述旋转体在沿着基板的传送路径的方向上彼此间隔开，使得其旋转轴彼此平行; 输送路径构件，其与所述旋转体接合并在所述旋转体之间延伸以沿着轨道移动，所述输送路径构件形成放置在所述输送路径构件上的所述基板的输送路径的一部分; 设置在所述输送路径的上游端的第一转印部; 设置在所述输送路径的下游端的第二输送部; 以及加热部，其设置在所述输送路径的上游端和下游端之间，并且构造成加热所述基板。

26. 发明申请

US20090178834A1 ANISOTROPIC ELECTRICALLY CONDUCTIVE FILM AND CONNECTION STRUCTURE 有权
标题翻译：各向异性导电膜和连接结构
公开(公告)号：US20090178834A1
公开(公告)日：2009-07-16
申请号：US12302640
申请日：2008-04-22
申请人： Yasushi Akutsu , Daisuke Sato , Shinichi Hayashi
发明人： Yasushi Akutsu , Daisuke Sato , Shinichi Hayashi
IPC分类号： H05K1/16 , H01B1/12
CPC分类号： H01R4/04 , C08G2650/56 , C08L33/066 , C08L71/00 , H01B1/20 , H05K3/323 , H05K2201/0133 , H05K2201/0212 , Y10T428/254 , Y10T428/31855 , C08L2666/04
摘要： An anisotropic electrically conductive film formed by a thermosetting acrylic resin composition is disclosed. The composition contains at least a thermosetting agent (A), a thermo-settable ingredient (B), an acrylic rubber containing hydroxyl groups (C), organic fine particles (D) and electrically conductive particles (E). The thermo-settable ingredient (B) may include a phosphorus-containing acrylic ester (b1). The weight averaged molecular weight of the acrylic rubber containing the hydroxyl groups (C) is not less than 1000000. The organic fine particles (D) include polybutadiene-based fine particles (d1).
摘要翻译：公开了由热固性丙烯酸树脂组合物形成的各向异性导电膜。该组合物至少含有热固性剂（A），热固性成分（B），含有羟基的丙烯酸类橡胶（C），有机细颗粒（D）和导电性颗粒（E）。热固性成分（B）可以包括含磷丙烯酸酯（b1）。含有羟基（C）的丙烯酸类橡胶的重均分子量不小于1000000.有机细颗粒（D）包括聚丁二烯基微粒（d1）。

27. 发明申请

US20080241402A1 COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND STORAGE MEDIUM 有权
标题翻译：涂料与开发系统，涂料和开发方法和储存介质
公开(公告)号：US20080241402A1
公开(公告)日：2008-10-02
申请号：US12057846
申请日：2008-03-28
申请人： Nobuaki MATSUOKA , Takahiro HASHIMOTO , Katsuhiro TSUCHIYA , Shinichi HAYASHI , Yasushi HAYASHIDA
发明人： Nobuaki MATSUOKA , Takahiro HASHIMOTO , Katsuhiro TSUCHIYA , Shinichi HAYASHI , Yasushi HAYASHIDA
IPC分类号： B05D3/00 , B05C13/00 , B05C11/00
CPC分类号： H01L21/67745 , H01L21/67178
摘要： A coating and developing system includes processing blocks S2 to S4 of the same construction each built by stacking up a plurality of unit blocks including a film forming unit block and a developing unit block in layers. The processing b locks are arranged longitudinally between a carrier block S1 and an interface block S6. The number of processing blocks like the processing blocks S2 to S4 arranged between the carrier block S1 and the interface block S6 is adjusted to adjust the throughput of the coating and developing system. thus a coating and developing system capable of achieving a desired throughput can be easily designed and manufactured.
摘要翻译：涂覆和显影系统包括具有相同构造的处理块S 2至S 4，每个构造通过堆叠多个单元块，包括成膜单元块和显影单元块。处理b锁被纵向布置在承载块S1和接口块S6之间。布置在载体块S1和接口块S6之间的处理块S 2至S 4的处理块的数量被调整以调节涂覆和显影系统的生产量。因此可以容易地设计和制造能够实现所需生产量的涂层和显影系统。

28. 发明授权

US07286908B2 Communication system for communication between in-vehicle terminals and center, and in-vehicle terminal employed in communication system 失效
公开(公告)号：US07286908B2
公开(公告)日：2007-10-23
申请号：US10105306
申请日：2002-03-26
申请人： Shinichi Hayashi , Akihito Tada , Hironobu Sugimoto , Akimasa Nanba , Toshiyuki Kaneiwa , Toshiaki Egawa
发明人： Shinichi Hayashi , Akihito Tada , Hironobu Sugimoto , Akimasa Nanba , Toshiyuki Kaneiwa , Toshiaki Egawa
IPC分类号： G06F9/445 , H04Q7/38 , G01C21/00
CPC分类号： G06F8/61 , G01C21/26 , G06F8/654 , G08G1/096827 , H04L29/06 , H04L67/12 , H04L67/325 , H04L67/34 , H04L69/329 , H04W4/04
摘要： In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.

29. 发明授权

US07280894B2 Communication system for communication between in-vehicle terminals and center, and in-vehicle terminal employed in communication system 失效
标题翻译：车载终端和中心之间通信的通信系统以及通信系统中使用的车载终端
公开(公告)号：US07280894B2
公开(公告)日：2007-10-09
申请号：US10288438
申请日：2002-11-06
申请人： Shinichi Hayashi , Akihito Tada , Hironobu Sugimoto , Akimasa Nanba , Toshiaki Egawa
发明人： Shinichi Hayashi , Akihito Tada , Hironobu Sugimoto , Akimasa Nanba , Toshiaki Egawa
IPC分类号： H04B7/26 , G06F19/00 , H04M11/00
CPC分类号： G06F8/61 , G01C21/26 , G06F8/654 , G08G1/096827 , H04L29/06 , H04L67/12 , H04L67/325 , H04L67/34 , H04L69/329 , H04W4/04
摘要： In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.
摘要翻译：在用于从中心向车载终端下载程序的通信系统中，可以检查在车载终端中下载是否正常完成或程序正常运行。根据启动下载的程序的定时，车内终端检查程序是否被激活以正常运行。信息传输到中心。根据该信息，中心意识到下载完成没有任何问题，程序在车载终端中正常运行。

30. 发明授权

US07245348B2 Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning 有权
标题翻译：涂层和显影系统以及具有防反射膜和辅助块的检测和清洁的涂层和显影方法
公开(公告)号：US07245348B2
公开(公告)日：2007-07-17
申请号：US11117566
申请日：2005-04-29
申请人： Masami Akimoto , Shinichi Hayashi , Yasushi Hayashida , Nobuaki Matsuoka , Yoshio Kimura , Issei Ueda , Hikaru Ito
发明人： Masami Akimoto , Shinichi Hayashi , Yasushi Hayashida , Nobuaki Matsuoka , Yoshio Kimura , Issei Ueda , Hikaru Ito
IPC分类号： G03B27/52
CPC分类号： H01L21/67184 , H01L21/6715 , H01L21/67178 , H01L21/6719
摘要： A coating and developing system includes an auxiliary block, a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system can cope with either a case where antireflection films are formed or a case where no antireflection film is formed. Film forming unit blocks, namely, a TCT layer, a COT layer and a BCT layer, and developing unit blocks, namely, DEV layers, are stacked up in layers in a processing block S2. The TCT layer, the COT layer and the BCT layer are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a carrying program.
摘要翻译：涂覆显影系统包括辅助块，抗蚀剂膜形成单元块和层叠的抗反射膜形成单元块，以形成抗蚀剂膜和抗蚀剂膜下面的抗反射膜，以及抗反射膜，覆盖抗蚀剂膜空间。涂覆和显影系统可以应对形成防反射膜的情况或不形成抗反射膜的情况。成膜单位块，即TCT层，COT层和BCT层，以及显影单元块，即DEV层，在处理块S2中层叠。在形成防反射膜的情况下选择性地使用TCT层，COT层和BCT层以及未形成任何抗反射膜的情况。涂层和显影系统由携带程序控制。

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