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    • 21. 发明申请
    • SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • 半导体器件制造方法
    • US20100190336A1
    • 2010-07-29
    • US12693093
    • 2010-01-25
    • Takaharu ItaniKoji MatsuoKazuhiko Nakamura
    • Takaharu ItaniKoji MatsuoKazuhiko Nakamura
    • H01L21/285
    • H01L21/28518H01L29/665H01L29/66575H01L29/78
    • A semiconductor device manufacturing method has conducting first heating processing at a first heating temperature in an inert atmosphere under a first pressure in a first process chamber to silicide an upper part of the source-drain diffusion layer and form a silicide film; conducting second heating processing at a second heating temperature in an oxidizing atmosphere under a second pressure in a second process chamber to selectively oxidize at least a surface of the metal film on the element isolating insulation film and form a metal oxide film; conducting third heating processing at a third heating temperature which is higher than the first heating temperature and the second heating temperature in an atmosphere in a third process chamber to increase a concentration of silicon in the silicide film; and selectively removing the metal oxide film and an unreacted part of the metal film on the element isolating insulation film.
    • 半导体器件制造方法在第一处理室中在第一压力下在惰性气氛中在第一加热温度下进行第一加热处理,以硅化源极 - 漏极扩散层的上部并形成硅化物膜; 在第二处理室中在第二压力的氧化气氛中在第二加热温度下进行第二加热处理,以选择性地氧化元件隔离绝缘膜上的金属膜的至少一个表面,并形成金属氧化物膜; 在第三处理室的气氛中,在高于第一加热温度和第二加热温度的第三加热温度下进行第三加热处理,以增加硅化物膜中硅的浓度; 并且在元件隔离绝缘膜上选择性地除去金属氧化物膜和金属膜的未反应部分。
    • 23. 发明授权
    • Aqueous ballpoint pen refill and process for producing the same
    • 水性圆珠笔笔芯及其制作方法
    • US6056463A
    • 2000-05-02
    • US340829
    • 1999-06-28
    • Akane NishioKoji MatsuoShinko MukodaKoichi Murakawa
    • Akane NishioKoji MatsuoShinko MukodaKoichi Murakawa
    • B43K7/00B43K7/02B43K15/02B43K27/00C09D11/18
    • B43K7/005B43K15/02B43K27/00B43K7/02
    • There are provided an aqueous ballpoint pen refill which can produce tasteful writings or drawings with a plurality of colors and which gives an attractive impression, since the inks in the ink reservoir constitute an interesting pattern and also a process for producing the same. A plurality of aqueous inks Ia and Ib with different colors are charged into an ink reservoir having a point tip at the front end to form a vertical or horizontal layered structure or a spiral structure; the aqueous inks containing pigments as coloring agents respectively and each having a viscosity of 45 mPa.multidot.S or more; the specific gravity difference of the inks being not more than 0.05. Injection needles connected respectively to front ends of a plurality of ink tanks are inserted to the transparent ink reservoir, and the plurality of inks with different colors are injected while the injection needles are drawn out of the ink reservoir.
    • 提供了一种水性圆珠笔笔芯,其可以产生具有多种颜色的雅致的书写或绘图,并且由于墨水储存器中的墨水构成有趣的图案,并且其制造方法也产生了吸引人的印象。 多个具有不同颜色的水性墨水1a和1b被装入到在前端具有尖端的墨水储存器中以形成垂直或水平分层结构或螺旋结构; 水性油墨分别含有颜料作为着色剂,各自具有45mPaxS以上的粘度; 油墨的比重差不大于0.05。 分别连接到多个墨罐的前端的注射针被插入到透明墨水容器中,并且注射针从墨水容器中抽出时,注入不同颜色的多种墨水。