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    • 21. 发明申请
    • Substrate bias voltage generator and method of generating substrate bias voltage
    • 衬底偏置电压发生器和产生衬底偏置电压的方法
    • US20070153611A1
    • 2007-07-05
    • US11602347
    • 2006-11-21
    • Jong Won Lee
    • Jong Won Lee
    • G11C5/14
    • G11C5/146G05F3/205
    • A substrate bias voltage detection unit compares a level of a substrate bias voltage with a reference voltage in response to a self-refresh signal, an idle signal, and a refresh count signal so as to output an oscillating driving signal, enables the oscillating driving signal when the substrate bias voltage is equal to or higher than a first level in a normal mode, disables the oscillating driving signal when the substrate bias voltage is at a second level in a self-refresh mode, and disables the oscillating driving signal when the substrate bias voltage is at a third level in the self-refresh mode. An oscillation unit outputs an oscillating signal according to the oscillating driving signal. A voltage pumping unit controls pumping of the substrate bias voltage according to an output signal of the oscillation unit and then outputs a pumped substrate bias voltage.
    • 衬底偏置电压检测单元响应于自刷新信号,空闲信号和刷新计数信号将衬底偏置电压的电平与参考电压进行比较以输出振荡驱动信号,使振荡驱动信号 当基板偏置电压在正常模式下等于或高于第一电平时,当自刷新模式中衬底偏置电压处于第二电平时禁用振荡驱动信号,并且当衬底偏置电压处于第二电平时禁用振荡驱动信号 自刷新模式下的偏置电压处于第三级。 振荡单元根据振荡驱动信号输出振荡信号。 电压抽取单元根据振荡单元的输出信号控制衬底偏置电压的泵浦,然后输出泵浦的衬底偏置电压。
    • 29. 发明申请
    • Polishing pad conditioner and chemical mechanical polishing apparatus having the same
    • 抛光垫调节剂及其化学机械抛光装置
    • US20050113009A1
    • 2005-05-26
    • US10985206
    • 2004-11-10
    • Jong-Won LeeJoon-Sang ParkChang-Ki Hong
    • Jong-Won LeeJoon-Sang ParkChang-Ki Hong
    • B24B53/007B24B53/02B24B7/00
    • B24B53/017B24B53/02
    • Chemical mechanical apparatuses including a polishing pad conditioning unit for improving a conditioning rate and wear uniformity of a polishing pad are provided. In one aspect, a chemical mechanical polishing apparatus includes a polishing pad conditioner including conditioning disks disposed in a radial direction of a planarizing surface of a circular polishing pad and contacted with the planarizing surface of the circular polishing pad during rotation of the circular polishing pad. The conditioning disks are connected to first drive units supported by an arm disposed over the circular polishing pad and extended in a radial direction of a planarizing surface of the circular polishing pad. The arm is connected to second drive units. The second drive units move the arm horizontally and reciprocally in the radial direction of the planarizing surface of the circular polishing pad. Thus, a conditioning rate and wear uniformity of the polishing pad may be improved.
    • 提供了包括用于改善抛光垫的调理率和磨损均匀性的抛光垫调节单元的化学机械设备。 在一个方面,一种化学机械抛光装置包括抛光垫调节器,其包括在圆形抛光垫的平坦化表面的径向方向上设置的调节盘,并且在圆形抛光垫的旋转期间与圆形抛光垫的平坦化表面接触。 调节盘连接到由设置在圆形抛光垫上的臂支撑的第一驱动单元,并且在圆形抛光垫的平坦化表面的径向方向上延伸。 臂连接到第二个驱动单元。 第二驱动单元在圆形抛光垫的平坦化表面的径向水平和往复地移动臂。 因此,可以提高抛光垫的调理率和磨损均匀性。