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    • 23. 发明申请
    • THIN FILM TRANSISTOR AND LIQUID CRYSTAL DISPLAY
    • 薄膜晶体管和液晶显示
    • US20070108447A1
    • 2007-05-17
    • US11621277
    • 2007-01-09
    • Myung-Koo KangHyun-Jae KimSook-Young KangWoo-Suk Chung
    • Myung-Koo KangHyun-Jae KimSook-Young KangWoo-Suk Chung
    • H01L29/76H01L29/10H01L31/036H01L31/112
    • H01L29/42384G02F1/13454G02F2202/104H01L21/02675H01L21/2026H01L29/78675
    • The present invention relates to a thin film transistor and a liquid crystal display. A gate electrode is formed to include at least one portion extending in a direction perpendicular to a gain growing direction in order to make electrical charge mobility of TFTs uniform without increasing the size of the driving circuit. A thin film transistor according to the present invention includes a semiconductor pattern a thin film of poly-crystalline silicon containing grown grains on the insulating substrate. The semiconductor pattern includes a channel region and source and drain regions opposite with respect to the channel region. A gate insulating layer covers the semiconductor pattern. On the gate insulating layer, a gate electrode including at least one portion extending in a direction crossing the growing direction of the grains and overlapping the channel region is formed. In a liquid crystal display according to the present invention, a plurality of thin film transistors forming a data driver circuit include thin films of polycrystalline silicon formed by sequential lateral solidification, at least one portion of a gate electrode of each thin film transistor extends in a direction crossing the grain growing direction, and at least one of the plurality of thin film transistors has a gate electrode having a pattern different from other thin film transistors.
    • 本发明涉及薄膜晶体管和液晶显示器。 栅电极被形成为包括沿垂直于增益生长方向的方向延伸的至少一个部分,以使TFT的电荷迁移率均匀,而不增加驱动电路的尺寸。 根据本发明的薄膜晶体管包括在绝缘基板上具有含有生长晶粒的多晶硅薄膜的半导体图案。 半导体图案包括沟道区和相对于沟道区相反的源极和漏极区。 栅极绝缘层覆盖半导体图案。 在栅极绝缘层上形成栅电极,该栅电极具有沿与晶粒的生长方向交叉的方向延伸的至少一部分,与沟道区重叠。 在根据本发明的液晶显示器中,形成数据驱动电路的多个薄膜晶体管包括通过顺序横向固化形成的多晶硅薄膜,每个薄膜晶体管的栅电极的至少一部分以 方向与晶粒生长方向交叉,并且多个薄膜晶体管中的至少一个具有与其它薄膜晶体管不同的图案的栅电极。
    • 25. 发明授权
    • Polycrystalline silicon thin film transistor of liquid crystal display and manufacturing method thereof
    • 液晶显示器的多晶硅薄膜晶体管及其制造方法
    • US06822703B2
    • 2004-11-23
    • US10128330
    • 2002-04-24
    • Chang-Won HwangWoo-Suk ChungTae-Hyeong ParkHyun-Jae KimGyu-Sun MoonSook-Young Kang
    • Chang-Won HwangWoo-Suk ChungTae-Hyeong ParkHyun-Jae KimGyu-Sun MoonSook-Young Kang
    • G02F1136
    • H01L27/1288G02F1/136227G02F2001/136236H01L27/1214
    • A polycrystalline silicon TFT for an LCD and a manufacturing method thereof is disclosed. The TFT comprises an active pattern formed on a substrate, a gate insulating layer formed on the substrate including the active pattern, a gate line formed on the gate insulating layer to be crossed with the active pattern and including a gate electrode for defining the first impurity region, a second impurity region and a channel region, an insulating interlayer formed on the gate insulating layer including the gate line, a data line formed on the insulating interlayer and connected to the second impurity region through the first contact hole which is formed through the gate insulating layer and the insulating interlayer on the second impurity region and a pixel electrode formed on the same insulating interlayer as the data line and connected with the first impurity region through a second contact hole which is formed through the gate insulating layer and the insulating interlayer on the first impurity region. The number of mask can be reduced to 5 or 6 sheets, thereby simplifying a manufacturing process.
    • 公开了一种用于LCD的多晶硅TFT及其制造方法。 TFT包括形成在基板上的有源图案,形成在包括有源图案的基板上的栅极绝缘层,形成在栅极绝缘层上以与有源图案交叉的栅极线,并且包括用于限定第一杂质的栅电极 区域,第二杂质区域和沟道区域,在包括栅极线的栅极绝缘层上形成的绝缘夹层,形成在绝缘层间并通过第一接触孔连接到第二杂质区域的数据线,该第一接触孔通过 栅绝缘层和第二杂质区上的绝缘中间层,以及形成在与数据线相同的绝缘夹层上的像素电极,并通过第二接触孔与第一杂质区连接,第二接触孔通过栅极绝缘层和绝缘中间层 在第一杂质区域。 掩模的数量可以减少到5张或6张,从而简化制造过程。