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11. 发明授权

US08692441B2 Method for forming an ultrasonic transducer, and associated apparatus 有权
标题翻译：用于形成超声换能器的方法及相关装置
公开(公告)号：US08692441B2
公开(公告)日：2014-04-08
申请号：US13907046
申请日：2013-05-31
申请人： Research Triangle Institute
发明人： David Dausch , Scott H. Goodwin
IPC分类号： H01L41/047 , H01L41/053 , H01L41/107 , H03H9/15 , B31D3/00
CPC分类号： H01L41/0474 , B06B1/0607 , G10K11/004 , H01L41/0973 , H01L41/29 , H01L41/293 , H01L41/332
摘要： A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.
摘要翻译：提供一种用于形成压电超声换能器装置的方法，该装置具有沉积在设置在初级基底上的电介质层上的第一电极。压电材料沉积在第一电极和第二电极之间，以形成换能器装置。至少压电材料被图案化，使得第一电极的一部分从其横向向外延伸。蚀刻初级衬底和电介质层以形成延伸到第一电极的横向向外部分的第一通孔，并且沉积第一导电材料以基本上填充第一通孔并与横向向外部分形成导电接合的第一电极。蚀刻初级衬底以限定延伸穿过其中的第二通孔，其中第二通孔与第一通路横向间隔开。还提供了相关联的方法和装置。

12. 发明授权

US08431034B2 Manufacturing of nanopores 失效
标题翻译：纳米孔的制造
公开(公告)号：US08431034B2
公开(公告)日：2013-04-30
申请号：US12988571
申请日：2009-04-22
申请人： Sarunas Petronis , Bengt Kasemo
发明人： Sarunas Petronis , Bengt Kasemo
IPC分类号： B31D3/00 , B44C1/22
CPC分类号： B01D67/0062 , B01D69/12
摘要： The present invention relates to nanopore membranes, methods for manufacturing such nanopore membranes, and uses thereof. In the methods for manufacturing the membranes colloidal lithography is used, which results in production of nanosize pores in a short time and on a large scale. The nanopore membranes have a narrow size distribution and are randomly arranged. Furthermore, the inter-pore distance shows very little variation.
摘要翻译：本发明涉及纳米孔膜，制造这种纳米孔膜的方法及其应用。在制造膜的方法中，使用胶体光刻法，其导致在短时间内和大规模地生产纳米尺寸的孔隙。纳米孔膜具有窄的尺寸分布并且随机排列。此外，孔间距离显示出非常小的变化。

13. 发明申请

US20090117335A1 Method for Producing a Nanoporous Substrate 失效
标题翻译：生产纳米多孔基材的方法
公开(公告)号：US20090117335A1
公开(公告)日：2009-05-07
申请号：US12093343
申请日：2006-11-14
申请人： Tomokazu Iyoda , Kaori Kamata , Ryoko Watanabe
发明人： Tomokazu Iyoda , Kaori Kamata , Ryoko Watanabe
IPC分类号： B32B3/26 , B31D3/00
CPC分类号： H01L21/3086 , H01L21/0337 , Y10S438/942 , Y10S438/947 , Y10S977/888 , Y10S977/892 , Y10S977/895 , Y10T428/24504
摘要： Nanoporous substrate with fine pores having a diameter from 3 to 40 nm arranged with less than 60 nm periodicity is prepared by a method comprising the steps of coating amphipathic block copolymer on a substrate, forming a film containing hydrophilic cylinders aligned perpendicularly to the surface of the film on a substrate, and immersing the substrate into a solution containing an etchant.
摘要翻译：通过包括以下步骤的方法制备直径为3至40nm的具有小于60nm周期的直径的细孔的纳米多孔基材，所述方法包括以下步骤：将两亲嵌段共聚物涂布在基材上，形成含有垂直于将基板浸渍在含有蚀刻剂的溶液中。

14. 发明授权

US07393458B2 Porous material and production process thereof 失效
标题翻译：多孔材料及其生产工艺
公开(公告)号：US07393458B2
公开(公告)日：2008-07-01
申请号：US11264163
申请日：2005-11-02
申请人： Kazuhiko Fukutani , Tohru Den
发明人： Kazuhiko Fukutani , Tohru Den
IPC分类号： B31D3/00 , B44C1/22
CPC分类号： C23C14/5873 , C23C14/06 , C23C14/185 , G11B5/855 , Y10S977/773 , Y10T428/12479 , Y10T428/12528 , Y10T428/12625 , Y10T428/12674 , Y10T428/249953 , Y10T428/249967 , Y10T428/249969 , Y10T428/24997 , Y10T428/249975 , Y10T428/249978 , Y10T428/249979 , Y10T428/249987
摘要： There are provided a porous material and a process for producing the same. The porous material has a plurality of columnar pores and an area surrounding the pores, and the area is an amorphous area containing C, Si, Ge or a combination thereof.
摘要翻译：提供多孔材料及其制造方法。多孔材料具有多个柱状孔和围绕孔的区域，该区域是含有C，Si，Ge或它们的组合的无定形区域。

15. 发明授权

US07389014B2 Integrated semiconductor circuits and methods of making integrated semiconductor circuits 有权
标题翻译：集成半导体电路和制造集成半导体电路的方法
公开(公告)号：US07389014B2
公开(公告)日：2008-06-17
申请号：US11393845
申请日：2006-03-31
申请人： Theodore I Kamins
发明人： Theodore I Kamins
IPC分类号： G02B6/12 , H01L21/00 , H01L33/00 , B31D3/00
CPC分类号： H01L29/0665 , B82Y10/00 , H01L29/0673 , H01L29/0676 , H01L31/101 , H01L33/005 , H01L33/02
摘要： An integrated semiconductor circuit includes a substrate having a surface of a first semiconductor material, at least one separating material formed on the surface and defining a through hole, and a guide region formed in the hole. The guide region comprises at least one second semiconductor material. The guide region comprises at least a first region and a second region having a larger cross-section than the first region. The first region contacts the surface of the substrate over a small contact region. Methods of making the integrated semiconductor circuit are also disclosed.
摘要翻译：集成半导体电路包括具有第一半导体材料的表面的基板，形成在表面上并限定通孔的至少一个分离材料和形成在孔中的引导区域。引导区域包括至少一个第二半导体材料。引导区域至少包括具有比第一区域更大的横截面的第一区域和第二区域。第一区域在小的接触区域上接触衬底的表面。还公开了制造集成半导体电路的方法。

16. 发明申请

US20070138133A1 Flexible fuel cell 失效
标题翻译：灵活的燃料电池
公开(公告)号：US20070138133A1
公开(公告)日：2007-06-21
申请号：US11641716
申请日：2006-12-20
申请人： Hye Cha , Tae Kim , Chang Ryu , Sam Her , Sung Kim
发明人： Hye Cha , Tae Kim , Chang Ryu , Sam Her , Sung Kim
IPC分类号： B31D3/00 , H01M4/88 , C23F1/00
CPC分类号： H01M8/1011 , H01M4/8657 , H01M4/8803 , H01M4/92 , H01M8/0239 , H01M8/0245 , H01M8/1004 , H01M8/1097 , H01M2250/30 , Y02B90/18 , Y02E60/523 , Y02P70/56
摘要： Through holes for flow paths of the fuel cell are formed in a thermoplastic polymer film by a process selected from a group consisting of laser drilling, etching and lithography, an inner side surface of the thermoplastic polymer film is coated with a metal layer, and the through holes are filled with a fuel diffusion material and a catalyst to provide an anode. The procedure is repeated to provide a cathode. Then, the anode and the cathode are placed to oppose each other. A cation conducting polymer membrane is disposed, between the anode and the cathode, and the anode, the cation conducting polymer membrane and the cathode are hot-pressed.
摘要翻译：通过选自激光钻孔，蚀刻和光刻的方法，在热塑性聚合物膜中形成用于燃料电池的流路的通孔，热塑性聚合物膜的内侧表面涂覆有金属层，并且通孔填充有燃料扩散材料和催化剂以提供阳极。重复该过程以提供阴极。然后，阳极和阴极彼此相对放置。在阳极和阴极之间设置阳离子导电聚合物膜，并且阳极，阳离子导电聚合物膜和阴极被热压。

17. 发明申请

US20060231525A1 Method for manufacturing porous structure and method for forming pattern 有权
公开(公告)号：US20060231525A1
公开(公告)日：2006-10-19
申请号：US11455916
申请日：2006-06-20
申请人： Koji Asakawa , Toshiro Hiraoka , Yoshihiro Akasaka , Yasuyuki Hotta
发明人： Koji Asakawa , Toshiro Hiraoka , Yoshihiro Akasaka , Yasuyuki Hotta
IPC分类号： C23F1/00 , B31D3/00 , B44C1/22
CPC分类号： C08J9/26 , B82Y10/00 , B82Y30/00 , C03C17/007 , C03C2217/425 , C03C2217/479 , C03C2218/33 , C08J2333/12 , C08J2383/16 , C23F1/30 , G03F7/0002 , G11B5/74 , G11B5/743 , G11B5/855 , G11B2005/0029 , H01G11/30 , H01G11/56 , H01J9/02 , H01J9/025 , H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02211 , H01L21/02216 , H01L21/02282 , H01L21/02337 , H01L21/02348 , H01L21/0337 , H01L21/31695 , H01M2/145 , H01M2/1653 , H01M4/131 , H01M4/133 , H01M4/8605 , H01M4/96 , H01M8/0234 , H01M8/0245 , H01M8/026 , H01M8/1011 , H01M10/0525 , Y02E60/13 , Y02E60/523 , Y02P70/56 , Y10S438/945 , Y10S438/947 , Y10S977/90 , Y10T428/24149
摘要： A pattern forming material contains a block copolymer or graft copolymer and forms a structure having micro polymer phases, in which, with respect to at least two polymer chains among polymer chains constituting the block copolymer or graft copolymer, the ratio between N/(Nc−No) values of monomer units constituting respective polymer chains is 1.4 or more, where N represents total number of atoms in the monomer unit, Nc represents the number of carbon atoms in the monomer unit, No represents the number of oxygen atoms in the monomer unit.

18. 发明授权

US07081208B2 Method to build a microfilter 失效
标题翻译：建立微型过滤器的方法
公开(公告)号：US07081208B2
公开(公告)日：2006-07-25
申请号：US10320834
申请日：2002-12-16
申请人： Kenneth J McCullough , Wayne M Moreau , Keith R Pope , Robert J Purtell , John P Simons , William A Syverson , Charles J Taft
发明人： Kenneth J McCullough , Wayne M Moreau , Keith R Pope , Robert J Purtell , John P Simons , William A Syverson , Charles J Taft
IPC分类号： B44C1/22 , B31D3/00
CPC分类号： B01D67/0032 , B01D61/147 , B01D67/003 , B01D67/0088 , B01D67/0093 , B01D69/10 , B01D2323/225 , B01D2323/34
摘要： Methods are provided for making microfilters by subtractive techniques which remove a component or part of a filter material to form pores in the filter material and additive techniques which deposit a filter material onto a porous underlying substrate. All the methods employ a supercritical fluid or mixture which have very high solvency properties and low viscosity and CO2 is the preferred supercritical fluid.
摘要翻译：提供了用于通过减去技术制造微过滤器的方法，该技术除去过滤材料的组分或部分以在过滤材料中形成孔隙，以及将过滤材料沉积到多孔下面的基底上的添加技术。所有方法都采用具有非常高的溶解性能和低粘度的超临界流体或混合物，而CO 2 O 2是优选的超临界流体。

19. 发明申请

US20060065621A1 Method and system for improving coupling between a surface wave plasma source and a plasma space 有权
公开(公告)号：US20060065621A1
公开(公告)日：2006-03-30
申请号：US10953791
申请日：2004-09-30
申请人： Lee Chen , Caiz Tian , Naoki Matsumoto
发明人： Lee Chen , Caiz Tian , Naoki Matsumoto
IPC分类号： B31D3/00 , C23F1/00
CPC分类号： H01J37/32522 , H01J37/32192 , H01J37/3222
摘要： A surface wave plasma (SWP) source having an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface of the EM wave launcher adjacent the plasma. A power coupling system is coupled to the EM wave launcher, and configured to provide the EM energy to the EM wave launcher for forming the plasma. A mode scrambler coupled to the plasma surface of the EM wave launcher, and configured to reduce mode jumping between the desired EM wave mode and another EM wave mode.

20. 发明申请

US20060000798A1 Method of creating pores in a thin sheet of polyimide 失效
标题翻译：在聚酰亚胺薄片中产生孔的方法
公开(公告)号：US20060000798A1
公开(公告)日：2006-01-05
申请号：US11131943
申请日：2005-05-18
申请人： Roger Legras , Etienne Ferain
发明人： Roger Legras , Etienne Ferain
IPC分类号： B31D3/00
CPC分类号： B01D69/02 , B01D67/0034 , B01D71/64 , B01D2325/021 , B26F1/31
摘要： The invention concerns a method which consists in first subjecting the polyimide sheet to ionic bombardment, followed by an irradiation in the visible domain and finally a relatively brief chemical etching. Said method enables a thin polyimide sheet comprising pores, of nanometric to micrometric size, having a substantially cylindrical shape and substantially equal diameters to be obtained.
摘要翻译：本发明涉及一种方法，该方法包括首先使聚酰亚胺片进行离子轰击，然后在可视域中进行照射，最后进行相对简短的化学蚀刻。所述方法能够实现包含具有基本上圆柱形形状并且基本相同直径的纳米至微米尺寸的孔的薄聚酰亚胺片。

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