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11. 发明授权

US5656769A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5656769A
公开(公告)日：1997-08-12
申请号：US513650
申请日：1995-08-10
申请人： Katsushi Nakano , Tetsuji Onuki
发明人： Katsushi Nakano , Tetsuji Onuki
IPC分类号： G01Q20/04 , G01B5/28
CPC分类号： G01Q10/04 , G01Q70/04 , Y10S977/87 , Y10S977/872
摘要： An apparatus includes an X-direction piezoelectric driving member expandable in the X direction upon application of a voltage, and a Y-direction piezoelectric driving member expandable in the Y direction upon application of a voltage. One end of the X-direction piezoelectric driving member is flexibly connected to a frame via a hinge, and the other end of the member is firmly connected to a block. One end of the Y-direction piezoelectric driving member is flexibly connected to the frame via a hinge, and the other end of the member is flexibly connected to the block via a hinge. A probe can be scanned by using this scanning mechanism without causing much fluctuations of the optical axis of a light beam used for the atomic force microscope.
摘要翻译：一种装置包括：施加电压时沿X方向扩展的X方向压电驱动构件和在施加电压时在Y方向上可扩展的Y方向压电驱动构件。 X方向压电驱动构件的一端通过铰链而柔性地连接到框架，并且构件的另一端牢固地连接到块体。 Y方向压电驱动构件的一端通过铰链而柔性地连接到框架，并且构件的另一端经由铰链挠曲地连接到块体。可以通过使用该扫描机构扫描探针，而不会引起用于原子力显微镜的光束的光轴的很大波动。

12. 发明授权

US5463897A Scanning stylus atomic force microscope with cantilever tracking and optical access 失效
标题翻译：扫描触针原子力显微镜与悬臂跟踪和光学访问
公开(公告)号：US5463897A
公开(公告)日：1995-11-07
申请号：US107017
申请日：1993-08-17
申请人： Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
发明人： Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
IPC分类号： G01B21/30 , G01Q20/00 , G01Q20/02 , G01Q30/06 , G01Q30/12 , G01Q40/00 , G01Q60/24 , G01Q60/38 , G01B5/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , Y10S977/87
摘要： A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides a light beam emitted from the laser source onto a point on said cantilever during scanning thereof. A moving laser beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the laser beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.
摘要翻译：采用光杆技术的扫描式触针原子力显微镜（AFM）及其操作方法。本发明的AFM包括光源和扫描的光学组件，其在从扫描过程中将从激光源发射的光束引导到所述悬臂上的点上。因此产生移动的激光束，其将在扫描期间自动跟踪悬臂的移动。本发明还允许激光束用于测量，校准或校正扫描机构的运动，并且还允许使用光学显微镜观察样品和悬臂。

13. 发明授权

US5448399A Optical system for scanning microscope 失效
公开(公告)号：US5448399A
公开(公告)日：1995-09-05
申请号：US850677
申请日：1992-03-13
申请人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
发明人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

14. 发明授权

US5319960A Scanning force microscope 失效
标题翻译：扫描力显微镜
公开(公告)号：US5319960A
公开(公告)日：1994-06-14
申请号：US847160
申请日：1992-03-06
申请人： Ronald C. Gamble , Paul E. West
发明人： Ronald C. Gamble , Paul E. West
IPC分类号： G01B21/30 , G01B7/34 , G01Q10/00 , G01Q20/02 , G01Q30/08 , G01Q30/14 , G01Q70/02 , H01J37/28 , G01B5/28
CPC分类号： G01Q30/08 , B82Y35/00 , G01Q20/02 , G01Q30/14 , G01Q70/02 , Y10S977/87
摘要： The scanning force microscope is an improved free standing type scanning force microscope with integrated scanning drivers for examination of a wide range of sizes and weights of stationary specimens, with the capability of scanning a sample in contact with a fluid. The scanning force microscope also includes motorized driver legs for operating the approach of the optical lever arm and sensor head to the sample, to allow for automation of the approach of the sensor head to the specimen.
摘要翻译：扫描力显微镜是具有集成扫描驱动器的改进的独立式扫描力显微镜，用于检查固定样品的宽范围尺寸和重量，具有扫描样品与流体接触的能力。扫描力显微镜还包括用于操作光学杠杆臂和传感器头到样品的接近的电动驱动器腿，以允许传感器头对样本的接近的自动化。

15. 发明授权

US08087288B1 Scanning stylus atomic force microscope with cantilever tracking and optical access 失效
标题翻译：扫描触针原子力显微镜与悬臂跟踪和光学访问
公开(公告)号：US08087288B1
公开(公告)日：2012-01-03
申请号：US08871029
申请日：1997-06-09
申请人： Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
发明人： Craig B. Prater , James Massie , David A. Grigg , Virgil B. Elings , Paul K. Hansma , Barney Drake
IPC分类号： G01B5/28 , G01Q60/24
CPC分类号： G01Q60/38 , G01Q20/02 , Y10S977/87
摘要： A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.
摘要翻译：采用光杆技术的扫描式触针原子力显微镜（AFM）及其操作方法。本发明的AFM包括光源和扫描的光学组件，其在从扫描过程中将从光源发射的光引导到悬臂上的点上。因此产生移动的光束，其将在扫描期间自动跟踪悬臂的移动。本发明还允许光束用于测量，校准或校正扫描机构的运动，并且还允许使用光学显微镜观察样品和悬臂。

16. 发明授权

US06928863B2 Apparatus and method for isolating and measuring movement in a metrology apparatus 失效
标题翻译：用于在计量装置中隔离和测量运动的装置和方法
公开(公告)号：US06928863B2
公开(公告)日：2005-08-16
申请号：US10624246
申请日：2003-07-22
申请人： James R. Massie
发明人： James R. Massie
IPC分类号： G01B11/00 , G01B5/28 , G01B21/00 , G01B21/30 , G01D5/26 , G01Q10/02 , G01Q10/04 , G01Q30/06 , G01Q30/20 , G01Q60/00 , G01Q70/02 , G01Q90/00 , G01N13/16
CPC分类号： G01Q70/02 , G01B5/28 , G01D5/26 , G01Q10/04 , Y10S977/87 , Y10S977/872
摘要： A metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The linkage supports a sample holder and transmits appropriate displacements generated by the actuator thereof The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the reference structure and is located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.
摘要翻译：计量装置包括具有可在第一和第二正交方向上可控地移动的第一致动器级的致动器和与第一致动器台相邻的第二致动器级，以在与第一和第二正交方向正交的第三方向上可控地移动。联接器联接到第二致动器台和固定到参考结构的第二端的多杆连杆组件。联动装置支撑样品架并传递由其致动器产生的适当的位移。第二致动器级和联接器以第三正交方向移动连杆，使得连杆与第一和第二方向上的任何第二致动器台运动基本上隔离。目的是固定在参考结构上，并且位于光源和位置传感器之间。位置传感器测量第一和第二方向上的第一致动器台运动。

17. 发明申请

US20040140426A1 Scanning probe microscope with improved probe head mount 有权
标题翻译：扫描探针显微镜，带有改进的探针头安装
公开(公告)号：US20040140426A1
公开(公告)日：2004-07-22
申请号：US10755750
申请日：2004-01-12
申请人： PSIA Corporation
发明人： Joonhyung Kwon , Young Seok Kim , Sang-il Park
IPC分类号： H01J003/14 , H01J005/16
CPC分类号： G01Q20/02 , G01Q10/02 , G01Q10/04 , G01Q70/02 , Y10S977/732 , Y10S977/849 , Y10S977/869 , Y10S977/87 , Y10S977/873 , Y10S977/881
摘要： A scanning probe microscope uses two different scanners (also called nullscanning stagesnull) that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called nullx-y scannernull) scans a sample in a plane (also called nullx-y planenull), while the other scanner (called nullz scannernull) scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called nullz directionnull) perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.
摘要翻译：扫描探针显微镜使用两个不同的扫描仪（也称为“扫描阶段”），其彼此完全分离，并且由固定框架物理分离。一个扫描仪（称为“xy扫描仪”）扫描平面中的样品（也称为“xy平面”），而另一个扫描仪（称为“z扫描仪”）扫描探针尖端（其在悬臂的自由端支撑））在垂直于该平面的方向（也称为“z方向”）上。两个扫描仪之间的分离可以消除串扰。

18. 发明申请

US20040134264A1 Apparatus and method for isolating and measuring movement in a metrology apparatus 失效
标题翻译：用于在计量装置中隔离和测量运动的装置和方法
公开(公告)号：US20040134264A1
公开(公告)日：2004-07-15
申请号：US10624246
申请日：2003-07-22
申请人： Veeco Instruments Inc.
发明人： James R. Massie
IPC分类号： G01B005/28
CPC分类号： G01Q70/02 , G01B5/28 , G01D5/26 , G01Q10/04 , Y10S977/87 , Y10S977/872
摘要： A metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The linkage supports a sample holder and transmits appropriate displacements generated by the actuator thereof The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the reference structure and is located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.
摘要翻译：计量装置包括具有可在第一和第二正交方向上可控地移动的第一致动器级的致动器和与第一致动器台相邻的第二致动器级，以在与第一和第二正交方向正交的第三方向上可控地移动。联接器联接到第二致动器台和固定到参考结构的第二端的多杆连杆组件。联动装置支撑样品架并传递由其致动器产生的适当的位移。第二致动器级和联接器以第三正交方向移动连杆，使得连杆与第一和第二方向上的任何第二致动器台运动基本上隔离。目的是固定在参考结构上，并且位于光源和位置传感器之间。位置传感器测量第一和第二方向上的第一致动器台运动。

19. 发明授权

US06748794B2 Method for replacing a probe sensor assembly on a scanning probe microscope 失效
标题翻译：在扫描探针显微镜上更换探头传感器组件的方法
公开(公告)号：US06748794B2
公开(公告)日：2004-06-15
申请号：US10190404
申请日：2002-07-07
申请人： David James Ray
发明人： David James Ray
IPC分类号： G01B528
CPC分类号： G01Q20/02 , G01Q70/02 , Y10S977/868 , Y10S977/87
摘要： A scanning force microscope system that employs a laser (76) and a probe assembly (24) mounted in a removable probe illuminator assembly (22), that is mounted to the moving portion of a scanning mechanism. The probe illuminator assembly may be removed from the microscope to permit alignment of said laser beam onto a cantilever (30) after removal. This prevents damage to, and shortens alignment time of, the microscope during replacement and alignment of the probe assembly. The scanning probe microscope assembly (240) supports a scanning probe microscope (244). Scanning probe microscope (244) holds a removable probe sensor assembly (242). Removable probe sensor assembly (242) may be transported and conveniently attached to the adjustment station (250) where the probe sensor assembly parameters may be observed and adjusted if necessary. The probe sensor assembly (242) may then be attached to the scanning probe microscope (244).
摘要翻译：一种扫描力显微镜系统，其使用安装在扫描机构的移动部分上的安装在可移除的探针照射器组件（22）中的激光器（76）和探针组件（24）。探针照明器组件可以从显微镜移除，以允许在去除之后将所述激光束对准到悬臂（30）上。这可以防止在更换和对准探头组件期间显微镜的损坏和缩短对准时间。扫描探针显微镜组件（240）支撑扫描探针显微镜（244）。扫描探针显微镜（244）保持可移除的探针传感器组件（242）。可移动的探针传感器组件（242）可以被传送并方便地附接到调节站（250），其中如果需要可以观察和调整探针传感器组件的参数。探头传感器组件（242）然后可以附接到扫描探针显微镜（244）。

20. 发明授权

US06455838B2 High sensitivity deflection sensing device 失效
标题翻译：高灵敏度偏转感测装置
公开(公告)号：US06455838B2
公开(公告)日：2002-09-24
申请号：US09166979
申请日：1998-10-06
申请人： Tilman Schäffer , Paul K. Hansma
发明人： Tilman Schäffer , Paul K. Hansma
IPC分类号： H01J314
CPC分类号： G01Q20/02 , G01Q70/06 , Y10S977/863 , Y10S977/869 , Y10S977/87
摘要： A high sensitivity beam deflection sensing optical device, such as an atomic force microscope, including one or more of the following: specified means in the path of the incident beam for adjusting the size and/or power of the incident beam spot, means for moving the incident beam spot with movement of the object whereby to maintain the position of the spot on the object, and means for increasing the signal to noise ratio of the optical detector in which adjusted gains are applied to different segments of the optical detector.
摘要翻译：一种高灵敏度光束偏转感测光学装置，例如原子力显微镜，包括以下中的一个或多个：用于调整入射光束光斑的尺寸和/或功率的入射光束的路径中的指定装置，用于移动的装置具有物体运动的入射光束点，从而保持物体上的光斑的位置，以及用于增加光学检测器的信噪比的装置，其中调节的增益被施加到光学检测器的不同部分。

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