专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明申请

US20070091975A1 Mounting system for optical frequency reference cavities 有权
标题翻译：光频参考腔安装系统
公开(公告)号：US20070091975A1
公开(公告)日：2007-04-26
申请号：US11510269
申请日：2006-08-25
申请人： Mark Notcutt , John Hall , Long-Sheng Ma
发明人： Mark Notcutt , John Hall , Long-Sheng Ma
IPC分类号： H01S3/00
CPC分类号： H01S3/02 , H01S3/1392 , Y10T29/49865 , Y10T29/51
摘要： A technique for reducing the vibration sensitivity of laser-stabilizing optical reference cavities is based upon an improved design and mounting method for the cavity, wherein the cavity is mounted vertically. It is suspended at one plane, around the spacer cylinder, equidistant from the mirror ends of the cavity. The suspension element is a collar of an extremely low thermal expansion coefficient material, which surrounds the spacer cylinder and contacts it uniformly. Once the collar has been properly located, it is cemented in place so that the spacer cylinder is uniformly supported and does not have to be squeezed at all. The collar also includes a number of cavities partially bored into its lower flat surface, around the axial bore. These cavities are support points, into which mounting base pins will be inserted. Hence the collar is supported at a minimum of three points.
摘要翻译：用于降低激光稳定的光学参考腔的振动灵敏度的技术基于用于空腔的改进的设计和安装方法，其中空腔垂直安装。它悬挂在隔离筒周围的一个平面上，与空腔的镜端等距。悬挂元件是非常低的热膨胀系数材料的套环，其围绕间隔圆筒并均匀地接触。一旦套环正确定位，就将其固定就位，以使间隔圆筒均匀地支撑，完全不需要挤压。轴环还包括围绕轴向孔部分地钻入其下平坦表面的多个空腔。这些腔是支撑点，安装底座销将插入该支撑点。因此，衣领至少支持三点。

12. 发明申请

US20040151216A1 TUNABLE WAVELENGTH LOCKER, TUNABLE WAVELENGTH SPECTRUM MONITOR, AND RELATIVE WAVELENGTH MEASUREMENT SYSTEM 有权
标题翻译：可调波长锁定器，可调波长频谱监视器和相对波长测量系统
公开(公告)号：US20040151216A1
公开(公告)日：2004-08-05
申请号：US10707950
申请日：2004-01-27
发明人： John C. Tsai , David W. Wang
IPC分类号： H01S003/10
CPC分类号： H01S3/1392
摘要： A system for tuning the wavelength of a beam from a tunable laser. A tunable etalon assembly includes a Fabry-Perot etalon with paired reflectors to filter the laser beam. The tunable etalon also includes a thermal unit to thermally adjust the separation of the paired responsive to an etalon tuning signal. A photodetector receives the laser beam after filtering the etalon and generates a detected signal based on intensity. A controller generates the etalon tuning signal, and receives the detected signal and generates a laser tuning signal based on it. Optionally, additional Fabry-Perot etalons, photodetectors, and one or more beamsplitters permit extending wavelength range and determining relative wavelength difference with a beam from a second laser.
摘要翻译：用于从可调激光器调谐光束的波长的系统。可调谐的标准具组件包括具有配对反射器的法布里 - 珀罗标准具以过滤激光束。可调标准具还包括热单元，用于热调节响应于标准具调谐信号的成对分离。光电检测器在过滤标准具后接收激光束，并根据强度产生检测信号。控制器产生标准具调谐信号，并接收检测到的信号，并基于此产生激光调谐信号。可选地，附加的法布里 - 珀罗标准具，光电检测器和一个或多个分束器允许扩展波长范围并且确定与来自第二激光器的光束的相对波长差异。

13. 发明申请

US20030165166A1 Wavelength-variable light source apparatus 失效
公开(公告)号：US20030165166A1
公开(公告)日：2003-09-04
申请号：US10382632
申请日：2003-03-07
申请人： Ando Electric Co., Ltd.
发明人： Seiji Funakawa
IPC分类号： H01S003/223 , H01S003/22 , H01S003/00 , H01S003/10
CPC分类号： H01S5/0687 , H01S3/1392 , H01S5/141 , H01S5/143
摘要： A wavelength-variable light source apparatus having a wavelength calibration function of emitted light therefrom. The apparatus includes a semiconductor laser light source section, an external resonance section having a reflection surface for externally resonating emitted light from the semiconductor laser light source section at a predetermined reflection wavelength, a drive section for moving a position of the reflection surface in the external resonance section for varying an external resonance condition, a control section for controlling a variable move distance of the reflection surface in the drive section, and a wavelength detection section comprising a gas cell having a wavelength absorption characteristic absorbing light at a plurality of specific wavelengths for sweeping light emitted from the external resonance section into the gas cell and detecting an absorption wavelength of the emitted light, wherein the control section controls the move distance of the reflection surface in the drive section based on the absorption wavelength detected by the wavelength detection section.

14. 发明申请

US20020186741A1 Very narrow band excimer or molecular fluorine laser 审中-公开
标题翻译：非常窄的频带准分子或分子氟激光
公开(公告)号：US20020186741A1
公开(公告)日：2002-12-12
申请号：US10114671
申请日：2002-04-01
申请人： Lambda Physik AG
发明人： Jurgen Kleinschmidt , Peter Heist , Uwe Stamm , Wolfgang Zschocke , Sergei V. Govorkov
IPC分类号： H01S003/22 , H01S003/223
CPC分类号： H01S3/106 , B23K26/12 , B23K26/128 , B23K26/705 , G01J1/4257 , G01J1/58 , G02B5/04 , G02B5/1814 , G02B5/1838 , G03F7/70025 , G03F7/70041 , G03F7/70558 , G03F7/70575 , G03F7/70808 , H01S3/0014 , H01S3/0315 , H01S3/036 , H01S3/038 , H01S3/0384 , H01S3/0385 , H01S3/08004 , H01S3/08009 , H01S3/08018 , H01S3/08036 , H01S3/08081 , H01S3/081 , H01S3/0811 , H01S3/0812 , H01S3/0971 , H01S3/09716 , H01S3/104 , H01S3/1055 , H01S3/1062 , H01S3/13 , H01S3/1305 , H01S3/1312 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/1392 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/2258
摘要： An excimer or molecular fluorine laser system generates a laser output bandwidth of less than 0.6 pm, and preferably 0.5-0.4 pm or less. The laser resonator has a line-narrowing unit preferably including a grating, and preferably also a beam expander, and may include one or more etalons or other interferometric devices. The grating may be preferably a blazed grating having a blaze angle greater than 76null, and is preferably around 80null. The grating structure is preferably defined by the surface of the grating substrate. The substrate is preferably aluminum. The system may further include an amplifier for increasing the energy of the sub-0.6 nm output beam.
摘要翻译：准分子或分子氟激光系统产生小于0.6μm，优选0.5-0.4μm或更小的激光输出带宽。激光谐振器具有优选地包括光栅的线窄变换单元，并且优选地还包括光束扩展器，并且可以包括一个或多个标准具或其它干涉测量装置。光栅可以优选为具有大于76°的闪耀角度的闪耀光栅，并且优选地为大约80°。光栅结构优选由光栅基板的表面限定。基材优选为铝。该系统还可以包括用于增加次0.6nm输出光束的能量的放大器。

15. 发明授权

US06493374B1 Smart laser with fast deformable grating 失效
标题翻译：具有快速可变形光栅的智能激光
公开(公告)号：US06493374B1
公开(公告)日：2002-12-10
申请号：US09703317
申请日：2000-10-31
申请人： Igor V. Fomenkov , Frederick G. Erie , Jesse D. Buck , Palash P. Das
发明人： Igor V. Fomenkov , Frederick G. Erie , Jesse D. Buck , Palash P. Das
IPC分类号： H01S308
CPC分类号： H01S3/13 , G03F7/70025 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/0401 , H01S3/08059 , H01S3/0812 , H01S3/086 , H01S3/1055 , H01S3/134 , H01S3/139 , H01S3/1392 , H01S3/225 , H01S3/2256
摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controller by adjusting the curvature of a grating to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations on the back side of the grating at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.
摘要翻译：智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量，波长和带宽的计算机控制。通过控制RMAX镜的位置来控制放电电压，波长来控制脉冲能量，通过调整光栅的曲率使形状比简单的凸形或简单的凹形更复杂，带宽是控制器。优选实施例在5个水平位置上在光栅背面提供七个压电驱动压力 - 张力位置，以产生诸如S形，W形和扭曲形状的形状。优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。

16. 发明申请

US20020031158A1 Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections 失效
标题翻译：具有包含用于进行波前校正的光学元件的谐振器的窄带准分子激光器
公开(公告)号：US20020031158A1
公开(公告)日：2002-03-14
申请号：US09843604
申请日：2001-04-25
发明人： Juergen Kleinschmidt
IPC分类号： H01S003/22
CPC分类号： G03F7/70025 , H01S3/1392 , H01S3/225
摘要： A gas discharge laser system for generating a laser beam, such as an excimer or molecular fluorine laser system, includes a laser resonator with an optical element for making wavefront corrections such as an adaptable optical element, a phase conjugating mirror, or a retroreflector array. The resonator preferably also has one or more line-narrowing optical elements for narrowing the bandwidth of the laser beam. One of the resonator reflectors or a transmissive or reflective intracavity optical element of the laser may include the adaptable optical element, phase conjugating mirror or retroreflector plate. A beam expander may be disposed before the adaptable optical element, phase conjugating mirror or retroreflector array for increasing the radius of curvature of the wavefront of the laser beam. A detection and control system including a processor and a detector may be used for controlling the contour of the wavefront correcting optical element in a feedback loop.
摘要翻译：用于产生激光束的气体放电激光系统，例如受激准分子或分子氟激光系统，包括具有用于进行波前校正的光学元件的激光谐振器，例如适应性光学元件，相位共轭反射镜或后向反射器阵列。谐振器优选地还具有用于使激光束的带宽变窄的一个或多个线狭窄的光学元件。谐振器反射器之一或激光器的透射或反射腔内光学元件可以包括适应性光学元件，相位共轭反射镜或后向反射板。光束扩展器可以设置在适应光学元件，相位共轭反射镜或后向反射器阵列之前，用于增加激光束的波前的曲率半径。可以使用包括处理器和检测器的检测和控制系统来控制反馈回路中的波前校正光学元件的轮廓。

17. 发明申请

US20020005955A1 Laser wavelength and bandwidth monitor 失效
标题翻译：激光波长和带宽监视器
公开(公告)号：US20020005955A1
公开(公告)日：2002-01-17
申请号：US09791496
申请日：2001-02-22
发明人： Matthias Kramer , Marcus Serwazi
IPC分类号： G01B009/02
CPC分类号： G01J9/0246 , H01S3/1305 , H01S3/1392
摘要： A first method for determining the relative wavelength shift of a laser beam away from a known reference line, such as an absorption line of a gas in an opto-galvanic cell or a reference line of reference laser uses a monitor etalon. The FSR of the etalon used to calculate the wavelength shift is determined based on a calculated gap spacing between the etalon plates, or etalon constant. The gap spacing is determined based on a fit to measured values of wavelength deviations of the FSR as a function of the relative wavelength shift. The FSR used to calculate the wavelength shift is also based on the wavelength shift itself. A second method for measuring the absolute bandwidth and spectral purity of a tunable laser beam uses an opto-galvanic or absorption cell. The laser beam is directed to interact with a gas in the cell that undergoes an optical transition within the spectral tuning range of the laser. The beam is tuned through the optical transition line of the gas in the cell, and the opto-galvanic or absorption spectrum of the line is measured. The measured bandwidth and spectral purity are convoluted or broadened by the bandwidth of the laser beam used in the measurement. The bandwidth and spectral purity of the laser beam are determined based on the bandwidth and spectral purity, respectively, of the measured spectrum and a known correspondence between the measured convoluted bandwidth and spectral purity and the bandwidth and spectral purity, respectively, of the laser beam.
摘要翻译：用于确定远离已知参考线的激光束的相对波长偏移的第一方法，例如光电池或参考线参考线中的气体的吸收线使用监视器标准具。用于计算波长偏移的标准具的FSR基于标准具板之间计算的间隙间隔或标准具常数来确定。基于对作为相对波长位移的函数的FSR的波长偏差的测量值的拟合来确定间隙间隔。用于计算波长偏移的FSR也基于波长漂移本身。用于测量可调激光束的绝对带宽和光谱纯度的第二种方法使用光电或吸收单元。激光束被引导以与在激光器的光谱调谐范围内经历光学转变的单元中的气体相互作用。光束通过电池中气体的光学过渡线进行调谐，并测量线的光电或吸收光谱。测量的带宽和光谱纯度由测量中使用的激光束的带宽进行卷积或加宽。激光束的带宽和光谱纯度分别基于测量光谱的带宽和光谱纯度以及测量的卷积带宽和光谱纯度之间的已知对应关系以及激光束的带宽和光谱纯度来确定。

18. 发明申请

US20020003817A1 Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp 失效
标题翻译：使用多元素或串联的光刻激光的绝对波长校准通过空心阴极灯观察
公开(公告)号：US20020003817A1
公开(公告)日：2002-01-10
申请号：US09791431
申请日：2001-02-22
发明人： Peter Lokai , Thomas Schroeder
IPC分类号： H01S003/10 , H01S003/13
CPC分类号： H01S3/1392 , H01S3/225
摘要： A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.
摘要翻译：可调激光系统包括增益介质和用于产生激光束的光学谐振器，以及谐振器内的频谱变窄和调谐单元。检测和控制单元控制激光系统的相对波长。波长校准模块校准检测和控制单元。该模块包含多于一个物质，每个物质在激光器的调谐光谱内具有光学跃迁线。来自激光器的变窄的发射的光束部分被引导通过波长校准模块，并且当激光束通过模块内的每个物质的光学过渡线扫描时，光束部分被引导通过检测和控制单元。检测和控制单元在扫描期间进行监控和校准。

19. 发明授权

US06330261B1 Reliable, modular, production quality narrow-band high rep rate ArF excimer laser 有权
标题翻译：可靠，模块化，生产质量好的窄带高分辨率ArF准分子激光器
公开(公告)号：US06330261B1
公开(公告)日：2001-12-11
申请号：US09271041
申请日：1999-03-17
申请人： Toshihiko Ishihara , Thomas P. Duffey , John T. Melchior , Herve A. Besaucele , Richard G. Morton , Richard M. Ness , Peter C. Newman , William N. Partlo , Daniel A. Rothweil , Richard L. Sandstrom
发明人： Toshihiko Ishihara , Thomas P. Duffey , John T. Melchior , Herve A. Besaucele , Richard G. Morton , Richard M. Ness , Peter C. Newman , William N. Partlo , Daniel A. Rothweil , Richard L. Sandstrom
IPC分类号： H01S300
CPC分类号： G03F7/70025 , C23C14/0694 , C23C14/16 , C23C14/225 , C23C14/24 , G01J9/00 , G02B1/105 , G02B5/1852 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/03 , H01S3/036 , H01S3/08009 , H01S3/097 , H01S3/0971 , H01S3/09713 , H01S3/1055 , H01S3/134 , H01S3/1392 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H03K3/57 , H03K17/80
摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber, a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.
摘要翻译：本发明提供了一种可靠的模块化生产质量准分子激光器，其能够产生1000Hz至2000Hz范围内的10mJ激光脉冲，全宽度为一半，最大带宽为约0.6μm或更小。可更换模块包括激光室，由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。这些改进包括增加容量的高压电源，具有用于精确调整电压的电压降低电路，改进的换向模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

20. 发明申请

US20010028669A1 Narrow band excimer or molecular fluorine laser with adjustable bandwidth 有权
公开(公告)号：US20010028669A1
公开(公告)日：2001-10-11
申请号：US09775778
申请日：2001-02-01
发明人： Peter Heist , Jurgen Kleinschmidt
IPC分类号： H01S003/22
CPC分类号： G03F7/70025 , H01S3/08036 , H01S3/08059 , H01S3/105 , H01S3/1392 , H01S3/225
摘要： A line-narrowed excimer or molecular fluorine laser system includes a gain medium surrounded by a resonator for generating a laser beam, a discharge circuit including a plurality of electrodes for energizing the gain medium and a line-narrowing unit within the resonator for narrowing the bandwidth of the laser system. The resonator includes a deformable resonator reflector. A technique for adjusting the bandwidth of the laser system includes adjusting a surface contour of the deformable resonator reflector. A desired bandwidth may be selected manually or using a processor which automatically controls the surface contour adjustment.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式