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11. 发明授权

US08488639B1 Systems and methods having a frequency comb 有权
标题翻译：具有频率梳的系统和方法
公开(公告)号：US08488639B1
公开(公告)日：2013-07-16
申请号：US12699566
申请日：2010-02-03
申请人： Jean-Claude Diels , Ladan Arissian
发明人： Jean-Claude Diels , Ladan Arissian
IPC分类号： H01S3/10
CPC分类号： H01S3/1112 , H01S3/083 , H01S3/10092 , H01S3/1121 , H01S3/1392 , H01S3/1398 , H01S3/2383
摘要： Apparatus, systems, and methods having a frequency comb of large spacing can be used in a variety of applications. In various embodiments, a frequency comb is generated from a slave laser by injecting an optical output from a drive laser into the slave laser. One or more parameters of the drive laser and/or the slave laser can be adjusted such that a frequency comb can be generated at a multiple of the repetition rate of the drive laser. Additional apparatus, systems, and methods are disclosed.
摘要翻译：具有大间距的频率梳的装置，系统和方法可用于各种应用中。在各种实施例中，通过将来自驱动激光器的光输出注入到从激光器中，从从激光器产生频梳。可以调节驱动激光器和/或从属激光器的一个或多个参数，使得可以以驱动激光器的重复频率的倍数产生频率梳。公开了附加装置，系统和方法。

12. 发明授权

US08442083B2 Systems and methods for stabilizing laser frequency based on an isoclinic point in the absorption spectrum of a gas 有权
标题翻译：基于气体吸收光谱中的等角点稳定激光频率的系统和方法
公开(公告)号：US08442083B2
公开(公告)日：2013-05-14
申请号：US13281323
申请日：2011-10-25
申请人： Nathan P. Wells , James C. Camparo
发明人： Nathan P. Wells , James C. Camparo
IPC分类号： H01S3/13
CPC分类号： H01S5/0687 , H01S3/1392 , H01S5/06837 , H01S5/183
摘要： Systems and methods for stabilizing laser frequency based on an isoclinic point of an atomic or molecular medium are provided herein. A system may include: a transmission cell containing a gas and configured to transmit light from the laser, the gas having an absorption spectrum with an isoclinic point; a photodiode generating an output based on an amplitude of transmitted laser light; and circuitry configured to tune the frequency of the laser to the isoclinic point of the absorption spectrum based on the output. The absorption spectrum may have first and second overlapping peaks respectively corresponding to first and second transitions of the gas, the isoclinic point being a saddle point between the first and second peaks. The first and second peaks may have substantially equal amplitude as one another and/or may broaden substantially equally as each other as a function of a physical parameter of the gas.
摘要翻译：本文提供了基于原子或分子介质的等角点稳定激光频率的系统和方法。系统可以包括：包含气体并被配置为透射来自激光器的光的传输单元，所述气体具有具有等角点的吸收光谱; 基于发射激光的振幅产生输出的光电二极管; 以及被配置为基于输出将激光器的频率调谐到吸收光谱的等角点的电路。吸收光谱可以具有分别对应于气体的第一和第二跃迁的第一和第二重叠峰，异斜面点是第一和第二峰之间的鞍点。第一和第二峰可以具有彼此基本上相等的幅度和/或可以作为气体的物理参数的函数彼此大致相等地扩大。

13. 发明申请

US20120275478A1 METHOD AND LASER DEVICE FOR GENERATING PULSED HIGH POWER LASER LIGHT 审中-公开
标题翻译：用于产生脉冲高功率激光的方法和激光装置
公开(公告)号：US20120275478A1
公开(公告)日：2012-11-01
申请号：US13511040
申请日：2009-11-20
申请人： Ferenc Krausz , Ernst Fill , Jens Rauschenberger , Ioachim Pupeza
发明人： Ferenc Krausz , Ernst Fill , Jens Rauschenberger , Ioachim Pupeza
IPC分类号： H01S3/10
CPC分类号： H01S3/0057 , H01S3/005 , H01S3/0959 , H01S3/1392 , H01S4/00
摘要： A method of generating pulsed laser light (1) comprises the steps of providing laser light pulses (2, 3) having a predetermined pulse repetition rate (frep) with a laser source device (10), coupling the laser light pulses into an enhancement cavity (21) with a plurality of cavity mirrors (21.1, 21.2, . . . ) and a predetermined cavity length (L), and coherent addition of the laser light pulses (2) in the enhancement cavity so that at least one cavity pulse (1.1, 1.2, . . . ) is formed, wherein the at least one cavity pulse (1.1, 1.2, . . . ) circulating in the enhancement cavity (21) irradiates all of the cavity mirrors (21.1, 21.2, . . . ) with an angle (α) of incidence of more than 45°. Furthermore, a laser device (100) being configured for conducting the method is described.
摘要翻译：产生脉冲激光（1）的方法包括以下步骤：用激光源装置（10）提供具有预定脉冲重复频率（frep）的激光脉冲（2,3），将激光脉冲耦合到增强腔（21），具有多个腔镜（21.1,21.2 ...）和预定的腔长度（L），并且将激光光脉冲（2）相干相加在增强腔中，使得至少一个腔脉冲形成在其中在增强空腔（21）中循环的至少一个腔脉冲（1.1,1.2，...）照射所有腔镜（21.1,21.2 ...）角度（α）的入射角大于45°。此外，描述了用于进行该方法的激光装置（100）。

14. 发明授权

US08050301B2 Systems and methods for stabilizing laser frequency based on an isoclinic point in the absorption spectrum of a gas 有权
标题翻译：基于气体吸收光谱中的等角点稳定激光频率的系统和方法
公开(公告)号：US08050301B2
公开(公告)日：2011-11-01
申请号：US12702991
申请日：2010-02-09
申请人： Nathan P. Wells , James C. Camparo
发明人： Nathan P. Wells , James C. Camparo
IPC分类号： H01S3/13
CPC分类号： H01S5/0687 , H01S3/1392 , H01S5/06837 , H01S5/183
摘要： Systems and methods for stabilizing laser frequency based on an isoclinic point of an atomic or molecular medium are provided herein. A system may include: a transmission cell containing a gas and configured to transmit light from the laser, the gas having an absorption spectrum with an isoclinic point; a photodiode generating an output based on an amplitude of transmitted laser light; and circuitry configured to tune the frequency of the laser to the isoclinic point of the absorption spectrum based on the output. The absorption spectrum may have first and second overlapping peaks respectively corresponding to first and second transitions of the gas, the isoclinic point being a saddle point between the first and second peaks. The first and second peaks may have substantially equal amplitude as one another and/or may broaden substantially equally as each other as a function of a physical parameter of the gas.
摘要翻译：本文提供了基于原子或分子介质的等角点稳定激光频率的系统和方法。系统可以包括：包含气体并被配置为透射来自激光器的光的传输单元，所述气体具有具有等角点的吸收光谱; 基于发射激光的振幅产生输出的光电二极管; 以及被配置为基于输出将激光器的频率调谐到吸收光谱的等角点的电路。吸收光谱可以具有分别对应于气体的第一和第二跃迁的第一和第二重叠峰，异斜面点是第一和第二峰之间的鞍点。第一和第二峰可以具有彼此基本上相等的幅度和/或可以作为气体的物理参数的函数彼此大致相等地扩大。

15. 发明申请

US20080130694A1 Laser frequency stabilizing apparatus, method and computer program product for stabilizing laser frequency 有权
标题翻译：用于稳定激光频率的激光频率稳定装置，方法和计算机程序产品
公开(公告)号：US20080130694A1
公开(公告)日：2008-06-05
申请号：US11987507
申请日：2007-11-30
申请人： Hideyuki Nakagawa
发明人： Hideyuki Nakagawa
IPC分类号： H01S3/13
CPC分类号： H01S3/1392 , H01S3/09415 , H01S3/10069 , H01S3/109 , H01S3/1305 , H01S3/1398 , H01S3/1611 , H01S3/1673
摘要： A laser frequency stabilizing apparatus stabilizes an oscillation frequency of laser light by varying a resonator length on the basis of a saturated absorption line included in an optical output signal. The optical output signal is obtained by irradiating an absorption cell with the laser light. The laser frequency stabilizing apparatus includes: a light detecting section for detecting the optical output signal; a differential signal detecting section for detecting a differential signal of the optical light signal; an actuator for varying the resonator length; a drive section for driving the actuator; and a control section for controlling the drive section on the basis of the differential signal. The control section determines saturated absorption lines on the basis of an output of the differential signal, selects a specific saturated absorption line on the basis of the number of determined saturated absorption lines and a combination of the determined saturated absorption lines, and stabilizes the oscillation frequency of the laser light at the specific saturated absorption line.
摘要翻译：激光频率稳定装置通过基于包括在光输出信号中的饱和吸收线改变谐振器长度来稳定激光的振荡频率。通过用激光照射吸收单元获得光输出信号。激光频率稳定装置包括：光检测部，用于检测光输出信号; 差分信号检测部分，用于检测光信号的差分信号; 用于改变谐振器长度的致动器; 用于驱动致动器的驱动部分; 以及控制部分，用于根据差分信号控制驱动部分。控制部基于差分信号的输出来决定饱和吸收线，根据所确定的饱和吸收线的数量和所确定的饱和吸收线的组合，选择特定的饱和吸收线，使振荡频率稳定在特定饱和吸收线上的激光。

16. 发明申请

US20070139128A1 ATOMIC FREQUENCY ACQUIRING APPARATUS AND ATOMIC CLOCK 有权
标题翻译：原子频率获取装置和原子钟
公开(公告)号：US20070139128A1
公开(公告)日：2007-06-21
申请号：US11613290
申请日：2006-12-20
申请人： Tomoko Koyama
发明人： Tomoko Koyama
IPC分类号： H01S1/06
CPC分类号： G04F5/145 , H01S3/1392
摘要： An atomic frequency acquisition apparatus includes: a cell enclosing atomic gas therein; a laser light source that oscillates laser light that enters the cell and excites the atomic gas; and a photodetecting section that detects the laser light that has passed the cell, wherein the laser light source and the photodetecting section are attached to a common surface facing an interior of the cell, and the cell has a first reflection section on which the laser light oscillated from the laser light source is incident at an incident angle of 45 degrees, and a second reflection section on which the laser light reflected by the first reflection section is incident at an incident angle of 45 degrees.
摘要翻译：原子频率获取装置包括：其中包围原子气体的单元; 激光源，其激励进入电池并激发原子气体的激光; 以及光检测部，其检测已经通过所述电池的激光，其中所述激光源和所述受光部附接到面向所述电池单元的内部的公共表面，并且所述电池具有第一反射部，所述激光从激光光源振荡的入射角为45度的入射角以及由第一反射部反射的激光以45度的入射角入射的第二反射部。

17. 发明申请

US20070008995A1 Frequency-stabilized laser and frequency stabilizing method 审中-公开
标题翻译：频率稳定激光器和频率稳定方法
公开(公告)号：US20070008995A1
公开(公告)日：2007-01-11
申请号：US11483092
申请日：2006-07-10
申请人： Hidekazu Oozeki , Yasushi Ishii
发明人： Hidekazu Oozeki , Yasushi Ishii
IPC分类号： H01S3/13
CPC分类号： H01S3/1392 , H01S3/082 , H01S3/09415 , H01S3/109 , H01S3/1611 , H01S3/1673
摘要： The invention provides a frequency-stabilized laser and frequency-stabilizing method capable of stabilizing an oscillation frequency of laser beam. A photodetector detects an optical output signal obtained when a reference laser beam transmits through an absorption cell. A third-order differential signal detector generates a third-order differential signal of the optical output signal. A first actuator varies the resonator length. A first driver drives the first actuator. A second actuator varies the resonator length. A second driver drives the second actuator. A first controller controls the first driver based on the optical output signal. A second controller controls the resonator length based on the third-order differential signal using the second actuator. The first actuator and the second actuator are used to control the resonator length to stabilize the oscillation frequency.
摘要翻译：本发明提供能够稳定激光束的振荡频率的频率稳定的激光和频率稳定方法。光电检测器检测当参考激光束透射通过吸收单元时获得的光输出信号。三阶差分信号检测器产生光输出信号的三阶差分信号。第一执行器改变谐振器长度。第一个驱动器驱动第一个执行器。第二个致动器改变谐振器长度。第二个驱动器驱动第二个致动器。第一控制器基于光输出信号控制第一驱动器。第二控制器使用第二致动器基于三阶差分信号来控制谐振器长度。第一致动器和第二致动器用于控制谐振器长度以稳定振荡频率。

18. 发明授权

US07006541B2 Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp 失效
公开(公告)号：US07006541B2
公开(公告)日：2006-02-28
申请号：US10354945
申请日：2003-01-29
申请人： Peter Lokai , Thomas Schroeder , Juergen Kleinschmidt , Uwe Stamm , Klaus Wolfgang Vogler
发明人： Peter Lokai , Thomas Schroeder , Juergen Kleinschmidt , Uwe Stamm , Klaus Wolfgang Vogler
IPC分类号： H01S3/13
CPC分类号： H01S3/225 , H01S3/1392
摘要： A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.

19. 发明授权

US06700916B1 E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems 失效
标题翻译：电子诊断，激光模拟器，用于光刻曝光辐射发生系统的光谱的自动测试和去卷积，例如准分子或分子氟激光或EUV源系统
公开(公告)号：US06700916B1
公开(公告)日：2004-03-02
申请号：US10259212
申请日：2002-09-26
申请人： Matthias Kramer , Günter Nowinski , Juergen Kleinschmidt , Marcus Serwazi
发明人： Matthias Kramer , Günter Nowinski , Juergen Kleinschmidt , Marcus Serwazi
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70525 , H01S3/036 , H01S3/08004 , H01S3/1055 , H01S3/134 , H01S3/1392 , H01S3/225
摘要： An E-Diagnostic system for monitoring a state of an excimer laser or molecular fluorine laser system includes a processing device and an interface. The processing device runs a program for outputting parameter requests to the laser system, receiving parameter values from the laser system in response to the parameter requests, and storing the parameter values such that a record of the state of the excimer or molecular fluorine laser system is kept. The interface signal-couples the processing device with the laser system permitting the outputting of the parameter requests and the receiving of the parameter values between the processing device and the laser system.
摘要翻译：用于监测准分子激光或分子氟激光系统的状态的电子诊断系统包括处理装置和界面。处理装置运行用于向激光系统输出参数请求的程序，响应于参数请求从激光系统接收参数值，并存储参数值，使得准分子或分子氟激光系统的状态记录为保持接口将处理装置与激光系统进行信号耦合，允许输出参数请求和接收处理装置与激光系统之间的参数值。

20. 发明申请

US20030053511A1 Laser having multiple reflectivity band reflector 有权
标题翻译：激光器具有多个反射带反射器
公开(公告)号：US20030053511A1
公开(公告)日：2003-03-20
申请号：US10198373
申请日：2002-07-18
申请人： APPLIED OPTOELECTRONICS, INC.
发明人： James N. Baillargeon , Wen-Yen Hwang , Klaus Alexander Anselm , Chih-Hsiang Lin
IPC分类号： H01S003/10 , H01S003/04 , H01S003/08 , H01S003/082
CPC分类号： H01S3/1303 , H01S3/131 , H01S3/1392 , H01S5/0687
摘要： A multiple reflectivity band reflector (MRBR) includes a stack of dielectric layers, arranged so that the reflector has a reflectivity profile comprising a plurality of reflectivity bands, e.g. at least first and second wavelength bands with reflectivity above a lasing threshold reflectivity, separated by a third wavelength band between the first and second wavelength bands having reflectivity below the lasing threshold reflectivity. A laser having at least a first mirror and an MRBR as the second mirror has a laser cavity, at least a portion of which is defined by the first mirror and the MRBR. An active region located within the laser cavity contains a material that is capable of stimulated emission at one or more wavelengths in the first and second wavelength bands. The gain spectrum of the laser is adjusted to select one of the first and second wavelength bands, thereby providing for lasing at a wavelength within the selected wavelength band. The laser may be, e.g., a monolithic VCSEL or a one-section or two-section external-cavity VECSEL having the MRBR as one of its cavity mirrors.
摘要翻译：多反射带反射器（MRBR）包括一叠电介质层，其布置成使得反射器具有包括多个反射带的反射率分布，具有高于激光阈值反射率的反射率的至少第一和第二波长带，其具有低于激光阈值反射率的反射率的第一和第二波长带之间的第三波长带分隔开。具有至少第一反射镜和MRBR作为第二反射镜的激光器具有激光腔，其至少一部分由第一反射镜和MRBR限定。位于激光腔内的有源区域包含能够在第一和第二波长带中的一个或多个波长处受激发射的材料。调整激光器的增益光谱以选择第一和第二波长带中的一个，从而提供在所选波长带内的波长处的激光。激光器可以是例如单片VCSEL或具有MRBR作为其腔镜之一的单段或两段外腔VECSEL。

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