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11. 发明授权

US07336366B2 Methods and systems for reducing complex conjugate ambiguity in interferometric data 有权
标题翻译：用于降低干涉测量数据中复杂共轭模糊度的方法和系统
公开(公告)号：US07336366B2
公开(公告)日：2008-02-26
申请号：US11336652
申请日：2006-01-20
申请人： Michael Choma , Joseph A. Izatt , Anjul Davis
发明人： Michael Choma , Joseph A. Izatt , Anjul Davis
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B9/02004 , G01B9/02002 , G01B9/02069 , G01B9/02078 , G01B9/02091
摘要： A complex conjugate ambiguity can be resolved in an Optical Coherence Tomography (OCT) interferogram. A reference light signal is propagated along a reference path. A sample light signal is impinged on a sample reflector. The reference light signal is frequency shifted with respect to the sample light signal to thereby separate a positive and a negative displacement of a complex conjugate component of the OCT interferogram.
摘要翻译：在光学相干断层扫描（OCT）干涉图中可以解决复共轭模糊度。参考光信号沿着参考路径传播。样品光信号撞击样品反射器。参考光信号相对于采样光信号被偏移，从而分离OCT干涉图的复共轭分量的正位移和负位移。

12. 发明授权

US07321430B2 Vibration resistant interferometry 有权
标题翻译：抗振动干涉测量
公开(公告)号：US07321430B2
公开(公告)日：2008-01-22
申请号：US11112332
申请日：2005-04-22
申请人： Leslie L. Deck
发明人： Leslie L. Deck
IPC分类号： G01B11/02
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/0207 , G01B9/02076 , G01B9/02078 , G01B9/02083 , G01B9/02084 , G01B9/0209 , G01B11/2441 , G01B2290/70
摘要： Scanning interferometry data for a test object is provided, the data typically including intensity values for each of multiple scan positions for each of different spatial locations of the test object. The intensity values for each spatial location define an interference signal for the spatial location, and the intensity values for a common scan position define a data set for that scan position. Scan values are provided for each scan position, in which scan value increments between various scan values can be non-uniform. Information is determined about the test object based on the scanning interferometry data and scan values. The determination includes transforming at least some of the interference signals into a frequency domain with respect to the scan values.
摘要翻译：提供了用于测试对象的扫描干涉测量数据，该数据通常包括测试对象的每个不同空间位置的多个扫描位置中的每一个的强度值。每个空间位置的强度值定义了空间位置的干扰信号，并且共同扫描位置的强度值定义了该扫描位置的数据集。为每个扫描位置提供扫描值，扫描值在各种扫描值之间递增可能不均匀。基于扫描干涉测量数据和扫描值确定关于测试对象的信息。该确定包括将至少一些干扰信号相对于扫描值转换成频域。

13. 发明申请

US20070216908A1 CLUTTER REJECTION FILTERS FOR OPTICAL DOPPLER TOMOGRAPHY 审中-公开
标题翻译：用于光学多普勒血管造影术的离心器止血滤器
公开(公告)号：US20070216908A1
公开(公告)日：2007-09-20
申请号：US11688142
申请日：2007-03-19
申请人： Xingde Li , Hongwu Ren
发明人： Xingde Li , Hongwu Ren
IPC分类号： G01B9/02
CPC分类号： G01B9/02044 , A61B5/0066 , A61B5/0073 , A61B5/02007 , A61B5/0261 , A61B5/1075 , G01B9/0201 , G01B9/02045 , G01B9/02078 , G01B9/02083 , G01B9/02091 , G01N21/4795 , G01P5/26
摘要： In Optical Doppler tomography (ODT), or color Doppler optical coherence tomography, the signal component of primary interest arises from moving scatterers, such as flowing blood cells in blood vessels. Clutter rejection filters are provided and used to remove undesired components from the ODT signal, such as clutter induced by stationary scatterers (e.g., the relatively stationary tissue of a blood vessel wall). Empirical results indicate that such clutter rejection filters can be employed to achieve ODT images from which blood vessel diameter can more accurately be estimated than images obtained using conventional ODT techniques. Further, Doppler images obtained using the clutter rejection filter technique disclosed herein exhibit fewer background artifacts induced by the relative motion of stationary scatterers with respect to the scanning probe.
摘要翻译：在光学多普勒断层扫描（ODT）或彩色多普勒光学相干断层扫描中，主要关注的信号分量来自运动散射体，如血管中的血细胞流动。提供杂波拒绝滤波器并用于从ODT信号中去除不期望的分量，例如由固定散射体（例如，血管壁的相对静止的组织）引起的杂波。实证结果表明，这种杂波抑制滤波器可用于实现ODT图像，从而可以比使用常规ODT技术获得的图像更准确地估计血管直径。此外，使用本文公开的杂波抑制滤波器技术获得的多普勒图像表现出较少的相对于扫描探针的固定散射体的相对运动引起的背景伪像。

14. 发明申请

US20070115476A1 COMMON PATH FREQUENCY DOMAIN OPTICAL COHERENCE REFLECTOMETRY/TOMOGRAPHY DEVICE 失效
标题翻译：通用路径频域域光学相关反射光谱/ TOMOGRAPHY设备
公开(公告)号：US20070115476A1
公开(公告)日：2007-05-24
申请号：US11539719
申请日：2006-10-09
申请人： Felix Feldchtein , Grigory Gelikonov
发明人： Felix Feldchtein , Grigory Gelikonov
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01N21/4795 , G01B9/02044 , G01B9/02057 , G01B9/02065 , G01B9/02078 , G01B9/02091 , G01B2290/70
摘要： Common path frequency domain optical coherence reflectometry/tomography devices include a portion of optical fiber with predetermined optical properties adapted for producing two eigen modes of the optical radiation propagating therethrough with a predetermined optical path length difference. The two replicas of the optical radiation outgoing from the portion of the optical fiber are then delivered to an associated sample by an optical fiber probe. The tip of the optical fiber serves as a reference reflector and also serves as a combining element that produces a combination optical radiation by combining an optical radiation returning from the associated sample with a reference optical radiation reflected from the reference reflector. The topology of the devices allows for registering a cross-polarized or a parallel-polarized component of the optical radiation reflected or backscattered from the associated sample. Having the optical path length difference for the two eigen modes of the optical radiation (which is an equivalent of an interferometer offset in previously known devices) differ from the reference offset in the devices of the present invention allows for relieving the requirements to the spectral resolution of the FD OCT engine and/or data acquisition and processing system, and substantially eliminates depth ambiguity problems.
摘要翻译：公共路径频域光学相干反射/断层摄影装置包括具有预定光学特性的光纤的一部分，其适于产生具有预定光程长度差异的在其中传播的光辐射的两个本征模。然后从光纤部分出射的光辐射的两个副本通过光纤探针传送到相关样品。光纤的尖端用作参考反射器，并且还用作通过组合从相关样品返回的光辐射与从参考反射器反射的参考光辐射而产生组合光辐射的组合元件。器件的拓扑结构允许记录从相关样品反射或反向散射的光辐射的交叉极化或平行偏振分量。对于本发明的装置中的光辐射的两个本征模式的光程长度差（其等同于先前已知的装置中的干涉仪偏移）不同于参考偏移允许将要求减轻到光谱分辨率的FD OCT引擎和/或数据采集和处理系统，并且基本上消除了深度歧义问题。

15. 发明授权

US07057742B2 Frequency-scanning interferometer with non-specular reference surface 失效
标题翻译：频率扫描干涉仪带非镜面参考面
公开(公告)号：US07057742B2
公开(公告)日：2006-06-06
申请号：US10610235
申请日：2003-06-30
申请人： Joseph C. Marron , Dean Faklis
发明人： Joseph C. Marron , Dean Faklis
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B9/02078 , G01B9/02004
摘要： A frequency-scanning interferometer is modified to include a diffuse reference surface. An illuminating system produces an expanding measuring beam, portions of which reflect from a test object surface and the diffuse reference surface on converging paths to an imaging system. Interference patterns between overlapping images of the object and reference surfaces are generated at a plurality of frequencies for measuring the object surface with respect to the reference surface.
摘要翻译：频率扫描干涉仪被修改为包括漫射参考表面。照明系统产生扩展的测量光束，其部分部分从测试对象表面反射，并且漫射参考表面在会聚路径上反射到成像系统。在用于测量对象表面相对于参考表面的多个频率处产生对象和参考表面的重叠图像之间的干涉图案。

16. 发明授权

US06989905B2 Phase gap analysis for scanning interferometry 有权
标题翻译：扫描干涉测量的相位差分析
公开(公告)号：US06989905B2
公开(公告)日：2006-01-24
申请号：US10429175
申请日：2003-05-02
申请人： Peter J. De Groot
发明人： Peter J. De Groot
IPC分类号： G01B9/02
CPC分类号： G01B11/0608 , G01B9/02044 , G01B9/02078 , G01B9/02085 , G01B9/02087 , G01B9/0209 , G01B11/2441
摘要： A method including: providing a coherence profile and a phase profile derived from interferometry data for a test surface; calculating a phase gap map, wherein the phase gap map is related to a difference between the coherence profile and the phase profile; fitting an expression including a term based on the coherence profile to the phase gap map; and determining a height profile for the test surface using information derived from the fit.
摘要翻译：一种方法，包括：提供相干轮廓和从测试表面的干涉测量数据导出的相位曲线; 计算相位差图，其中所述相位差图与所述相干分布和所述相位分布之间的差异相关; 将包括基于相干轮廓的术语的表达拟合到相位图中; 以及使用从所述拟合得到的信息来确定所述测试表面的高度分布。

17. 发明申请

US20030112444A1 System and method for measuring optical distance 有权
标题翻译：用于测量光学距离的系统和方法
公开(公告)号：US20030112444A1
公开(公告)日：2003-06-19
申请号：US10024455
申请日：2001-12-18
申请人： Massachusetts Institute of Technology
发明人： Changhuei Yang , Adam Wax , Ramachandra R. Dasari , Michael S. Feld
IPC分类号： G01B009/02
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02078 , G01B9/0209 , G01B2290/45 , G01J9/04 , G01N21/45
摘要： The methods of the present invention are directed at an accurate phase-based technique for measuring arbitrarily long optical distances with sub-nanometer precision. A preferred embodiment of the present invention method employs a interferometer, for example, a Michelson interferometer, with a pair of harmonically related light sources, one continuous wave (CW) and a second source having low coherence. By slightly adjusting the center wavelength of the low coherence source between scans of the target sample, the phase relationship between the heterodyne signals of the CW and low coherence light is used to measure the separation between reflecting interfaces with sub-nanometer precision. As the preferred embodiment of this method is completely free of 2null ambiguity, an issue that plagues most phase-based techniques, it can be used to measure arbitrarily long optical distances without loss of precision.
摘要翻译：本发明的方法涉及用于以亚纳米精度测量任意长的光学距离的精确的基于相位的技术。本发明方法的优选实施例采用干涉仪，例如迈克尔逊干涉仪，具有一对谐波相关的光源，一个连续波（CW）和具有低相干性的第二源。通过在目标样本的扫描之间稍微调整低相干光源的中心波长，使用CW的外差信号与低相干光之间的相位关系来测量具有亚纳米精度的反射界面之间的距离。由于该方法的优选实施例完全不存在2pi模糊度，这是一种困扰大多数基于相位的技术的问题，可以用于测量任意长的光学距离而不损失精度。

18. 发明申请

US20010050773A1 Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum 有权
标题翻译：用于确定物体相对于基准的绝对位置和表面轮廓的高度扫描干涉仪
公开(公告)号：US20010050773A1
公开(公告)日：2001-12-13
申请号：US09769891
申请日：2001-01-25
发明人： Peter De Groot , Xavier Colonna De Lega , Leslie L. Deck , James W. Kramer
IPC分类号： G01B009/02
CPC分类号： G01B11/30 , G01B9/02058 , G01B9/02078 , G01B9/02083 , G01B9/0209
摘要： The invention features a surface profiling method including: collecting interferometric data related to a surface profile of a measurement object; and calculating the surface profile based on the collected interferometric data and at least one value indicative of dispersion in the phase change on reflection (PCOR) of the profiled surface of the measurement object. The invention also features a surface profiling system including: an interferometry system which during operation provides interferometric data related to a surface profile of a measurement object; and an electronic processor coupled the interferometry system, wherein during operation the electronic processor calculates the surface profile based on the interferometric data and at least one parameter indicative of dispersion in the phase change on reflection (PCOR) of the profiled surface of the measurement object.
摘要翻译：本发明的特征在于一种表面分析方法，包括：收集与测量对象的表面轮廓相关的干涉测量数据; 以及基于所收集的干涉测量数据和指示测量对象的成型表面的反射相位变化（PCOR）中的色散的至少一个值来计算表面轮廓。本发明还具有表面分布系统，其包括：干涉测量系统，其在操作期间提供与测量对象的表面轮廓相关的干涉测量数据; 以及耦合所述干涉测量系统的电子处理器，其中在操作期间，所述电子处理器基于所述干涉测量数据和指示所述测量对象的成型表面的反射相位变化（PCOR）上的色散的至少一个参数来计算所述表面轮廓。

19. 发明申请

US20010043333A1 Optical systems for measuring form and geometric dimensions of precision engineered parts 有权
标题翻译：用于测量精密工程零件的形状和几何尺寸的光学系统
公开(公告)号：US20010043333A1
公开(公告)日：2001-11-22
申请号：US09769859
申请日：2001-01-25
发明人： Peter De Groot , Xavier Colonna De Lega , David Grigg , James Biegen
IPC分类号： G01B009/02
CPC分类号： G01B11/245 , G01B9/02021 , G01B9/02024 , G01B9/02027 , G01B9/02072 , G01B9/02078 , G01B9/0209 , G01B11/2441
摘要： The invention features a method for determining a geometric property of a test object, the method including: interferometrically profiling a first surface of the test object in a first coordinate system; interferometrically profiling a second surface of the test object in a second coordinate system different from the first coordinate system; providing a relationship between the first and second coordinate system; and calculating the geometric property based on the interferometrically profiled surfaces and the relationship between the first and second coordinate system. In some embodiments, the relationship may be determined by using calibrated gage blocks or by using a displacement measuring interferometer. Corresponding system are also described.
摘要翻译：本发明的特征在于一种用于确定测试对象的几何特性的方法，该方法包括：在第一坐标系中对测试对象的第一表面进行干涉测量; 在不同于第一坐标系的第二坐标系中对测试对象的第二表面进行干涉测量; 提供第一和第二坐标系之间的关系; 并基于干涉测量曲面计算几何特性以及第一和第二坐标系之间的关系。在一些实施例中，可以通过使用校准的计量块或通过使用位移测量干涉仪来确定该关系。还描述了相应的系统。

20. 发明授权

US5159408A Optical thickness profiler using synthetic wavelengths 失效
标题翻译：使用合成波长的光学厚度分布器
公开(公告)号：US5159408A
公开(公告)日：1992-10-27
申请号：US676049
申请日：1991-03-27
申请人： H. E. Waldenmaier , P. J. DeGroot , G. H. Hayes
发明人： H. E. Waldenmaier , P. J. DeGroot , G. H. Hayes
IPC分类号： G01B11/00 , G01B9/02 , G01D5/26
CPC分类号： G01B9/02007 , G01B9/02027 , G01B9/02057 , G01B9/02063 , G01B9/02064 , G01B9/02078 , G01D5/266 , G01B2290/30 , G01B2290/70
摘要： Optical metrology method and apparatus wherein three optical wavelengths of a fixed polarization are generated and separated into a reference beam (RB) and a measurement or object beam (OB) having, ideally, equal optical path lengths. After reflecting from surfaces being measured OB is combined with RB and provided to sensors which measure the intensity associated with each of the wavelengths. Any difference between the intensities is indicative of a difference in the optical path lengths of OB and RB and is a function of the polarization state of each of the three returned wavelengths. Differences in optical path length may be indicative of a difference between a reference surface and a test surface, or a difference in thickness or index of refraction across an object. Two multi-mode laser diodes (12, 14) are provided for generating the three optical wavelengths. Two synthetic wavelenths are derived from the three optical wavelengths and are employed to improve the precision of measurement while retaining a large dynamic range made possible by the use of a large synthetic wavelength.

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