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    • 12. 发明授权
    • Method and apparatus for chemical-mechanical polishing of diamond
    • 钻石化学机械抛光的方法和装置
    • US5746931A
    • 1998-05-05
    • US760845
    • 1996-12-05
    • John Edwin GraebnerSungho JinWei Zhu
    • John Edwin GraebnerSungho JinWei Zhu
    • B24B37/04H01L21/00
    • B24B37/04
    • This application describes a new method for rapid thinning, planarizing and fine polishing surfaces of diamond to the submicron/nanometer level so that large area, uniform thickness diamond wafers can be obtained. The method combines both chemical (dissolution of carbon in molten metals) and mechanical (rotating or moving sample fixtures in contact with the dissolving metals) polishing to achieve flat, smooth surface finishes in a relatively short period of time, thus improving the quality and economics of the overall polishing process. Several embodiments of apparatus for performing such chemical-mechanical polishing (CMP) of diamond are described.
    • 该应用描述了一种用于将金刚石的表面快速稀释,平面化和精细抛光到亚微米/纳米级的新方法,从而可以获得大面积均匀厚度的金刚石晶片。 该方法结合了化学(溶解在金属中的碳)和机械(与溶解金属接触的旋转或移动的样品夹具)抛光,以在相对较短的时间内实现平坦,光滑的表面光洁度,从而提高了质量和经济性 的整体抛光过程。 描述了用于进行金刚石的这种化学机械抛光(CMP)的设备的几个实施例。
    • 17. 发明授权
    • Field emitting device comprising field-concentrating nanoconductor assembly and method for making the same
    • 场致发射器件包括场集中纳米电导体组件及其制造方法
    • US06538367B1
    • 2003-03-25
    • US09369802
    • 1999-08-06
    • Kyung Moon ChoiSungho JinGregory Peter KochanskiWei Zhu
    • Kyung Moon ChoiSungho JinGregory Peter KochanskiWei Zhu
    • H01J102
    • H01J1/304B82Y10/00H01J9/025H01J23/04H01J2201/30469H01J2225/38Y10S977/939
    • This invention is predicated on applicants' discovery that a highly oriented nanoconductor structure alone does not guarantee efficient field emission. To the contrary, the conventional densely populated, highly oriented structures actually yield relatively poor field emission characteristics. Applicants have determined that the individual nanoconductors in conventional assemblies are so closely spaced that they shield each other from effective field concentration at the ends, thus diminishing the driving force for efficient electron emission. In accordance with the invention, an improved field emitting nanoconductors assembly (a “low density nanoconductor assembly”) comprises an array of nanoconductors which are highly aligned but spaced from each other no closer than 10% of the height of the nanoconductors. In this way, the field strength at the ends will be at least 50% of the maximal field concentration possible. Several ways of making the optimally low density assemblies are described along with several devices employing the assemblies.
    • 本发明基于申请人的发现,即单独的高度取向的纳米结构结构不能保证有效的场发射。 相反,传统的人口稠密,高度取向的结构实际上产生相对较差的场致发射特性。 申请人已经确定,常规组件中的单个纳米电感器如此紧密地间隔开,使得它们彼此屏蔽在端部处的有效场浓度,从而减少了有效电子发射的驱动力。根据本发明,改进的场发射纳米结构器件组件 “低密度纳米导体组件”)包括高度对准但彼此间隔不超过纳米电感器高度的10%的纳米电感器阵列。 以这种方式,末端的场强将是可能的最大场浓度的至少50%。 使用几种使用组件的装置来描述制造最佳低密度组件的几种方式。