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11. 发明授权

US06546036B1 Roof configuration for laser discharge electrodes 失效
标题翻译：激光放电电极屋顶配置
公开(公告)号：US06546036B1
公开(公告)日：2003-04-08
申请号：US09587996
申请日：2000-06-06
申请人： Igor Bragin , Vadim Berger
发明人： Igor Bragin , Vadim Berger
IPC分类号： H01S322
CPC分类号： H01S3/038 , H01S3/0384 , H01S3/0977
摘要： A method and devices for preionizing the main discharge gas volume of a gas discharge laser are described. The method and devices provide a preionizing discharge to the main gas discharge volume from above or below the main gas discharge volume. In combination with a shielding arrangement which reduces the spread of the preionization discharge other than to the main gas discharge volume, the exposure of other laser components and gas volumes to said preionization discharge is thereby minimized.
摘要翻译：对气体放电激光器的主放电气体体积进行预处理的方法和装置进行说明。所述方法和装置从主气体排出容积的上方或下方提供对主气体排出容积的预放电排放。与除了主气体放电容积之外的减少预除电放电扩散的屏蔽装置相结合，其他激光成分的曝光和气体体积因此被最小化。

12. 发明申请

US20060056478A1 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US20060056478A1
公开(公告)日：2006-03-16
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注射的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

13. 发明授权

US06834066B2 Stabilization technique for high repetition rate gas discharge lasers 有权
标题翻译：高重复气体放电激光器的稳定技术
公开(公告)号：US06834066B2
公开(公告)日：2004-12-21
申请号：US09838715
申请日：2001-04-18
申请人： Igor Bragin , Vadim Berger , Juergen Kleinschmidt
发明人： Igor Bragin , Vadim Berger , Juergen Kleinschmidt
IPC分类号： H01S300
CPC分类号： H01S3/0971 , H01S3/09705 , H01S3/0975 , H01S3/225
摘要： Method and system for providing stabilization techniques for high repetition rate gas discharge lasers with active loads provided in the discharge circuitry design which may include a resistance provided in the discharge circuitry.
摘要翻译：用于为具有在放电电路设计中提供的有源负载的高重复率气体放电激光器提供稳定技术的方法和系统，其可以包括在放电电路中提供的电阻。

14. 发明授权

US06570901B2 Excimer or molecular fluorine laser having lengthened electrodes 有权
公开(公告)号：US06570901B2
公开(公告)日：2003-05-27
申请号：US09791430
申请日：2001-02-22
申请人： Uwe Stamm , Juergen Kleinschmidt , Igor Bragin
发明人： Uwe Stamm , Juergen Kleinschmidt , Igor Bragin
IPC分类号： H01S322
CPC分类号： H01S3/0385 , H01S3/038 , H01S3/0971 , H01S3/223 , H01S3/225
摘要： An excimer or molecular fluorine laser system includes a laser tube filled with a gas mixture including fluorine and a buffer gas, and multiple electrodes within the laser tube connected with a pulsed discharge circuit for energizing the gas mixture. At least one of the electrodes is longer than 28 inches in length, preferably two main electrodes are each extended to greater than 28 inches in length. The laser system further includes a resonator including the laser tube for generating a pulsed laser beam having a desired energy. The laser system is configured such that an output beam would be emitted having an energy below the desired energy if each of the electrodes were 28 inches in length or less, and the laser system outputs a beam at the desired energy due to the length of the electrodes being extended to a length greater than 28 inches.

15. 发明授权

US06466599B1 Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权
公开(公告)号：US06466599B1
公开(公告)日：2002-10-15
申请号：US09453670
申请日：1999-12-03
申请人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
发明人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
IPC分类号： H01S3225
CPC分类号： H01S3/036 , H01S3/038 , H01S3/0971 , H01S3/225
摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

16. 发明申请

US20130034118A1 GAS PURIFIER FOR AN EXCIMER LASER 审中-公开
标题翻译：用于激光激光的气体净化器
公开(公告)号：US20130034118A1
公开(公告)日：2013-02-07
申请号：US13198484
申请日：2011-08-04
申请人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
发明人： Igor Bragin , Oleg Melnikov , Timur Misyuraev , Andreas Targsdorf , Kai Schmidt
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/2253
摘要： An excimer laser includes a laser housing containing a lasing-gas mixture including a halogen. Contaminants including particulate matter and a metal halide vapor are generated in the lasing-gas mixture during operation of the laser. A gas-cleaning arrangement extracts lasing-gas mixture from the housing and passes the lasing-gas mixture through an electrode assembly. A repeatedly pulsed gas discharge is created in the electrode assembly by driving the electrode assembly with repeated high-power short-duration pulses. The pulsed discharge causes disintegration of the metal halide vapor and electrostatic trapping in the electrode assembly of the particulate matter and products of the metal halide disintegration.
摘要翻译：准分子激光器包括含有包含卤素的激光气体混合物的激光器壳体。在激光器的操作期间，在激光 - 气体混合物中产生包括颗粒物质和金属卤化物蒸气的污染物。气体清洁装置从壳体中提取激光气体混合物，并将激光气体混合物通过电极组件。通过用重复的大功率短脉冲脉冲驱动电极组件，在电极组件中产生反复脉冲的气体放电。脉冲放电会导致金属卤化物蒸气的分解和颗粒物质的电极组件中的静电捕获以及金属卤化物的分解产物。

17. 发明授权

US08192790B2 Electrodes for generating a stable discharge in gas laser systems 有权
标题翻译：用于在气体激光系统中产生稳定放电的电极
公开(公告)号：US08192790B2
公开(公告)日：2012-06-05
申请号：US12792625
申请日：2010-06-02
申请人： Igor Bragin , Rustem Osmanow , Jürgen Bäumler , Michael Semling
发明人： Igor Bragin , Rustem Osmanow , Jürgen Bäumler , Michael Semling
IPC分类号： H01S3/097 , H01S3/03 , H01S3/00 , H01S3/083
CPC分类号： H01S3/225 , H01S3/0384 , H01S3/0388
摘要： Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.
摘要翻译：通过利用包括能够用作阳极和阴极之一的表面部分的电极以便对气体放电激光系统的放电室中的气体混合物通电，在气体激光器系统的放电室中使电弧最小化，肩部位于表面部分的任一侧并暴露于气体混合物，以及由电绝缘材料制成的涂层，其中涂层通过冷喷涂法附着到肩部。

18. 发明申请

US20070002918A1 Acoustic shock-wave damping in pulsed gas-laser discharge 审中-公开
标题翻译：脉冲气体激光放电中的声波冲击波阻尼
公开(公告)号：US20070002918A1
公开(公告)日：2007-01-04
申请号：US11172266
申请日：2005-06-30
申请人： Norbert Niemoeller , Igor Bragin , Vadim Berger
发明人： Norbert Niemoeller , Igor Bragin , Vadim Berger
IPC分类号： H01S3/22 , H01S3/097
CPC分类号： H01S3/0388 , H01S3/032 , H01S3/036 , H01S3/0384 , H01S3/0385 , H01S3/0971 , H01S3/225
摘要： An excimer laser has a laser chamber containing a laser gas and including an electrode assembly for firing gas discharge pulses in the laser gas for pumping the laser. The electrode assembly includes two elongated electrodes, one or both of which is partially covered by a ceramic foam. The electrodes are arranged to provide a discharge gap between the electrodes. The ceramic foam on an electrode serves to damp acoustic disturbances and resulting refractive index disturbances in the gas that occur as a result of firing a gas discharge pulse in the discharge gap.
摘要翻译：准分子激光器具有包含激光气体的激光室，并且包括用于激发激光器中的气体放电脉冲的电极组件，用于泵浦激光。电极组件包括两个细长电极，其中一个或两个部分被陶瓷泡沫覆盖。电极被布置成在电极之间提供放电间隙。电极上的陶瓷泡沫用于抑制由于在放电间隙中发生气体放电脉冲而发生的气体中的声学干扰和由此产生的折射率干扰。

19. 发明申请

US20050002427A1 Cooled electrodes for high repetition excimer or molecular fluorine lasers 审中-公开
标题翻译：用于高重复准分子或分子氟激光器的冷却电极
公开(公告)号：US20050002427A1
公开(公告)日：2005-01-06
申请号：US10833455
申请日：2004-04-28
申请人： Igor Bragin , Vadim Berger , Ulrich Rebhan , Norbert Niemoller , Konstantin Aab
发明人： Igor Bragin , Vadim Berger , Ulrich Rebhan , Norbert Niemoller , Konstantin Aab
IPC分类号： H01S3/038 , H01S3/04 , H01S3/041 , H01S3/22 , H01S3/223 , H01S3/225
CPC分类号： H01S3/0385 , H01S3/041 , H01S3/225
摘要： The consumption and/or erosion of electrodes in high repetition rate gas discharge lasers, such as excimer or molecular fluorine lasers, can be reduced using any of a number of temperature regulation approaches described herein. A flow of a cooling medium can be used to remove heat from the electrodes during laser operation, in order to reduce the rate of consumption and/or erosion. The rate of erosion can be controlled by adjusting the rate and/or temperature of the cooling medium flowing through the electrodes, or in bodies in good thermal contact with those electrodes. The cooled electrodes also can function to remove heat from the laser gas, and can have finned surfaces to facilitate such heat removal. Regulating the temperature of the electrodes and laser gas also can function to minimize resonance effects in the laser gas due to the presence of temperature gradients.
摘要翻译：高重复率气体放电激光器（例如准分子或分子氟激光器）中的电极的消耗和/或腐蚀可以使用本文所述的多种温度调节方法中的任何一种来减少。为了降低消耗和/或侵蚀的速度，可以使用冷却介质的流动来在激光操作期间从电极去除热量。可以通过调节流过电极的冷却介质的速率和/或温度，或与这些电极良好的热接触的体内来控制侵蚀速率。冷却的电极还可以用于从激光气体中除去热量，并且可以具有翅片表面以促进这种除热。由于温度梯度的存在，调节电极和激光气体的温度也可以使激光气体中的谐振效应最小化。

20. 发明授权

US06785316B1 Excimer or molecular laser with optimized spectral purity 失效
标题翻译：准分子激光或具有优化光谱纯度的分子激光
公开(公告)号：US06785316B1
公开(公告)日：2004-08-31
申请号：US09640595
申请日：2000-08-17
申请人： Igor Bragin , Vadim Berger , Uwe Stamm
发明人： Igor Bragin , Vadim Berger , Uwe Stamm
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , H01S3/0971 , H01S3/225
摘要： A final stage capacitance of a pulse compression circuit for an excimer or molecular fluorine lithography laser system is provided by a set of peaking capacitors connected through a first inductance to the electrodes and a set of sustaining capacitors connected to the electrodes through a second inductance substantially greater than the first inductance. Current pulses through the discharge are temporally extended relative to current pulses of a system having its final stage capacitance provided only by a set of peaking capacitors connected to the electrodes via the first inductance. An amplified spontaneous emission (ASE) level in the laser pulses is reduced thereby enhancing their spectral purity.
摘要翻译：用于准分子或分子氟光刻激光系统的脉冲压缩电路的最终级电容由通过第一电感连接到电极的一组峰化电容器提供，并且一组维持电容器通过大体上更大的第二电感连接到电极比第一个电感。通过放电的电流脉冲相对于具有其最终级电容的系统的电流脉冲在时间上延长，该最终级电容仅由通过第一电感连接到电极的一组峰值电容器提供。激光脉冲中的放大自发发射（ASE）水平降低，从而增强其光谱纯度。

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