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    • 12. 发明申请
    • Semiconductor Device with a Bipolar Transistor and Method of Manufacturing Such a Device
    • 具有双极晶体管的半导体器件及其制造方法
    • US20080203434A1
    • 2008-08-28
    • US12088719
    • 2006-09-22
    • Philippe Meunier-BeillardRaymond James DuffyPrabhat AgarwalGodfridus Adrianus Maria Hurkx
    • Philippe Meunier-BeillardRaymond James DuffyPrabhat AgarwalGodfridus Adrianus Maria Hurkx
    • H01L29/737H01L21/331
    • H01L29/7378H01L29/0817H01L29/66242
    • The invention relates to a semiconductor device (10) with a substrate and a semiconductor body of silicon comprising a bipolar transistor with an emitter region (1), a base region (2) and a collector region (3) which are respectively of the N-type conductivity, the P-type conductivity and the N-type conductivity by the provision of suitable doping atoms, wherein the base region (2) comprises a mixed crystal of silicon and germanium, the base region (2) is separated from the emitter region by an intermediate region (22) of silicon having a doping concentration which is lower than the doping concentration of the emitter region (1) and with a thickness smaller than the thickness of the emitter region (1) and the emitter region (1) comprises a sub-region comprising a mixed crystal of silicon and germanium which is positioned at the side of emitter region (1) remote from the intermediate region (22). According to the invention, the sub-region comprising the mixed crystal of silicon and germanium extend substantially through the whole emitter region (1) up to the interlace with the intermediate region (22) and the doping atoms of the emitter region (1) are arsenic atoms. Such a device has a very steep n-type doping profile (50) and a very steep p-type doping profile (20) at or within the intermediate region (22) and thus excellent high-frequency behavior with a high cut-off frequency (fr). Preferably the emitter region (1) is doped with an arsenic implantation (I) in its upper half, the final doping profile being formed after an RTA. The invention also comprises a method of manufacturing a device (10) according to the invention.
    • 本发明涉及一种具有衬底和硅半导体本体的半导体器件(10),其包括具有发射极区(1),基极区(2)和集电极区(3)的双极晶体管,所述发射极区分别为N 通过提供合适的掺杂原子,P型导电性和N型导电性,其中基区(2)包括硅和锗的混合晶体,基极区(2)与发射极分离 通过具有低于发射极区域(1)的掺杂浓度的掺杂浓度并且具有小于发射极区域(1)和发射极区域(1)的厚度的厚度的硅的中间区域(22) 包括位于远离中间区域(22)的发射极区域(1)侧的硅和锗的混合晶体的子区域。 根据本发明,包括硅和锗的混合晶体的子区域基本上延伸穿过整个发射极区域(1)直到与中间区域(22)交错,并且发射极区域(1)的掺杂原子是 砷原子 这种器件在中间区域(22)处或中间区域(22)内具有非常陡峭的n型掺杂分布(50)和非常陡的p型掺杂分布(20),因此具有高截止频率的极好的高频特性 (fr)。 优选地,发射极区域(1)在其上半部分掺杂有砷注入(I),最后的掺杂分布在RTA之后形成。 本发明还包括一种制造根据本发明的装置(10)的方法。
    • 14. 发明申请
    • Digital Voltage Level Shifter
    • 数字电压电平变换器
    • US20070279091A1
    • 2007-12-06
    • US11663406
    • 2004-09-22
    • Mayank GoelPrabhat Agarwal
    • Mayank GoelPrabhat Agarwal
    • H03K3/356
    • H03K3/356147H03K17/102
    • A digital voltage level shifter for converting an input signal with a low voltage swing to an output signal with a high voltage swing comprises a first inverter stage for generating an inverted signal from an input signal, the inverted signal having a voltage swing between a core voltage and ground, and a second inverter stage for producing an anti-phase signal from the inverted input signal, the anti-phase signal having a voltage swing between the core voltage and ground. The first and second inverters each drive a respective thin gate NMOS transistor connected in cascode with a respective NMOS transistor. The sources of the first and second thin gate NMOS transistors are connected to ground. The gates of the NMOS transistors are connected to the output of the respective inverters through a respective capacitor and are referenced to the core voltage through a respective resistor. The drains of the NMOS transistors are connected to an output circuit to provide an output signal having a voltage higher than the core voltage.
    • 用于将具有低电压摆幅的输入信号转换为具有高电压摆幅的输出信号的数字电压电平移位器包括用于从输入信号产生反相信号的第一反相器级,反相信号具有在核心电压 以及用于从反相输入信号产生反相信号的第二反相器级,反相信号在核心电压和地之间具有电压摆幅。 第一和第二反相器各自驱动以共源共栅连接的相应的薄栅极NMOS晶体管与相应的NMOS晶体管。 第一和第二薄栅NMOS晶体管的源极连接到地。 NMOS晶体管的栅极通过相应的电容器连接到各个反相器的输出,并且通过相应的电阻器参考核心电压。 NMOS晶体管的漏极连接到输出电路,以提供具有高于核心电压的电压的输出信号。
    • 17. 发明授权
    • Bipolar transistor and method of manufacturing the same
    • 双极晶体管及其制造方法
    • US07671447B2
    • 2010-03-02
    • US11632614
    • 2005-07-07
    • Andreas Hubertus MontreeJan Willem SlotboomPrabhat AgarwalPhilippe Meunier-Beillard
    • Andreas Hubertus MontreeJan Willem SlotboomPrabhat AgarwalPhilippe Meunier-Beillard
    • H01L23/58
    • H01L29/7317H01L29/1004H01L29/365H01L29/66265H01L29/735H01L2924/0002H01L2924/00
    • The invention relates to a semiconductor device (10) with a semiconductor body (12) comprising a bipolar transistor with an emitter region (1), a base region (2) and a collector region (3) of, respectively, a first conductivity type, a second conductivity type, opposite to the first conductivity type, and the first conductivity type, wherein, viewed in projection, the emitter region (1) is positioned above or below the base region (2), and the collector region (3) laterally borders the base region (2). According to the invention, the base region (2) comprises a highly doped subregion (2A) the doping concentration of which has a delta-shaped profile in the thickness direction, and said highly doped sub-region (2A) extends laterally as far as the collector region (3). Such a lateral bipolar transistor has excellent high-frequency properties and a relatively high breakdown voltage between the base and collector regions (2, 3), implying that the device is suitable for high power applications. The doping concentration lies preferably between about 1019 and about 1020 at/cm3, and the thickness of the sub-region (2A) lies between 1 and 15 nm and preferably between 1 and 10 nm. The invention also comprises a method of manufacturing such a device (10).
    • 本发明涉及具有半导体本体(12)的半导体器件(10),该半导体器件(12)包括分别具有第一导电类型的发射极区域(1),基极区域(2)和集电极区域(3) ,与第一导电类型相反的第二导电类型和第一导电类型,其中,从投影中观察,发射极区域(1)位于基极区域(2)的上方或下方,并且集电极区域(3) 横向地邻接基部区域(2)。 根据本发明,基极区域(2)包括其掺杂浓度在厚度方向上具有δ形轮廓的高掺杂子区域(2A),并且所述高度掺杂子区域(2A)横向延伸至 收集器区域(3)。 这种横向双极晶体管在基极和集电极区域(2,3)之间具有优异的高频特性和较高的击穿电压,这意味着该器件适用于高功率应用。 掺杂浓度优选介于约1019至约1020 at / cm3,子区(2A)的厚度在1至15nm之间,优选在1至10nm之间。 本发明还包括制造这种装置(10)的方法。
    • 19. 发明申请
    • RADIATION DOSIMETER
    • 辐射剂量计
    • US20090146068A1
    • 2009-06-11
    • US11719550
    • 2005-11-17
    • Prabhat Agarwal
    • Prabhat Agarwal
    • G01T1/24
    • G01T1/026G01T1/2018G01T1/245
    • A personal X-ray dosimeter system, comprising a portable detector (100) and a reader device (114). The portable detector (100) comprises an array (104) of programmed non-volatile memory elements (102) and a scintillator element (106) for converting a portion of X-radiation incident thereon to UV radiation. As a result of exposure to X-radiation (112) not converted to UV radiation, some of the memory elements (102) will have the charge on their floating gates, thereby causing a corresponding shift in threshold voltage (VT). After some exposure time, the reader device (114) reads from the detector (100) data representative of the number of VT shifted memory elements (102), and determines therefrom using predetermined calibration curves, the radiation dose (122) to which the user has been exposed.
    • 一种个人X射线剂量计系统,包括便携式检测器(100)和读取器装置(114)。 便携式检测器(100)包括编程的非易失性存储元件(102)的阵列(104)和用于将入射到其上的X射线的一部分转换为紫外线辐射的闪烁器元件(106)。 作为未被转换成UV辐射的X辐射(112)的结果,一些存储元件(102)将在其浮动栅极上具有电荷,从而导致阈值电压(VT)的相应偏移。 在一些曝光时间之后,读取器设备(114)从检测器(100)读取表示VT移位存储器元件(102)的数量的数据,并且使用预定的校准曲线来确定用户的辐射剂量(122) 已经曝光