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    • 11. 发明授权
    • Vertical cavity surface emitting laser having continuous grading
    • 具有连续分级的垂直腔表面发射激光
    • US5530715A
    • 1996-06-25
    • US346559
    • 1994-11-29
    • Chan-Long ShiehMichael S. LebbyHsing-Chung LeePiotr Grodzinski
    • Chan-Long ShiehMichael S. LebbyHsing-Chung LeePiotr Grodzinski
    • H01S5/00H01S5/183H01S3/08
    • H01S5/183B82Y20/00H01S5/3054H01S5/3215H01S5/34313
    • A first stack of distributed Bragg mirrors having alternating layers of aluminum gallium arsenide differing in concentrations of an aluminum are disposed on a surface of a substrate with a first plurality of continuous gradient layers positioned between the alternating layers of differing aluminum concentrations to dynamically move the aluminum concentration from one of the alternating layer to another alternating layers. A first cladding region is disposed on the first stack of distributed Bragg mirrors. An active region is disposed on the first cladding region with a second cladding region being dispose on the active region. A second stack of distributed Bragg mirrors having alternating layers of aluminum gallium arsenide differing concentrations of aluminum are disposed on the second cladding region with a second plurality of continuous gradient layers being positioned between the alternating layers of differing aluminum concentrations to dynamically change the aluminum concentration from one of the altering layers to another alternating layers.
    • 具有不同于铝浓度的铝砷化镓的交替层的分布布拉格反射镜的第一堆叠被布置在基板的表面上,其中第一多个连续梯度层位于不同铝浓度的交替层之间以动态地移动铝 从交替层之一到另一个交替层的浓度。 第一包层区域布置在分布布拉格反射镜的第一堆叠上。 有源区设置在第一包层区上,第二包层区设置在有源区上。 具有不同浓度的铝的交替铝砷化镓层的第二层布拉格反射镜布置在第二覆层区域上,第二多个连续梯度层位于不同铝浓度的交替层之间以动态地将铝浓度从 另一个交替层的改变层之一。
    • 19. 发明授权
    • VCSEL with an intergrated heat sink and method of making
    • 具有集成散热器的VCSEL和制造方法
    • US5482891A
    • 1996-01-09
    • US407062
    • 1995-03-17
    • Chan-Long ShiehJohn LungoMichael S. Lebby
    • Chan-Long ShiehJohn LungoMichael S. Lebby
    • H01S5/024H01S5/183H01L21/20
    • H01S5/18344H01S2301/176H01S5/02476Y10S148/095
    • A substrate (102) having a surface (103) with a first stack of distributed Bragg reflectors (106), a first cladding region (107), an active region (108), a second cladding region (109), a second stack of distributed Bragg reflectors (110), and a contact region (111) is provided. A mesa (131) with a surface (133) and a trench (136) is formed. A first dielectric layer (122) is formed overlying substrate (102) and covering a portion of trench (136). A seed layer (126) having a pattern is formed, with the pattern of seed layer (126) having an opening on a portion of mesa (131). A metal is selectively plated on seed layer (126), thereby generating a layer (304) on seed layer (126) for removal of heat of VCSEL (101).
    • 具有表面(103)的基板(102)具有分布布拉格反射器(106)的第一叠层,第一包层区域(107),有源区域(108),第二包层区域(109) 分布式布拉格反射器(110)和接触区域(111)。 形成具有表面(133)和沟槽(136)的台面(131)。 覆盖衬底(102)并覆盖沟槽(136)的一部分的第一介电层(122)形成。 形成具有图案的种子层(126),种子层(126)的图案在台面(131)的一部分上具有开口。 金属被选择性地电镀在种子层(126)上,由此在种子层(126)上产生用于去除VCSEL(101)的热量的层(304)。