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    • 14. 发明申请
    • Antireflective hardmask composition and methods for using same
    • 防反射硬掩模组​​合物及其使用方法
    • US20070072111A1
    • 2007-03-29
    • US11325281
    • 2006-01-04
    • Chang OhDong UhDo KimJin LeeIrina NamHui YunJong Kim
    • Chang OhDong UhDo KimJin LeeIrina NamHui YunJong Kim
    • G03C1/00
    • G03F7/091
    • Hardmask compositions having antireflective properties useful in lithographic processes, methods of using the same, and semiconductor devices fabricated by such methods, are provided. Antireflective hardmask compositions of the invention include: (a) a polymer component including at least one polymer having a monomeric unit of Formula (I) wherein R1 and R2 may each independently be hydrogen, hydroxyl, C1-10 alkyl, C6-10 aryl, allyl, or halo; R3 and R4 may be each independently be hydrogen, a crosslinking functionality, or a chromophore; R5 and R6 may each independently be hydrogen or an alkoxysiloxane having the structure of Formula (II), wherein at least one of R5 and R6 is an alkoxysilane; wherein R8, R9, and R10 may each independently be a hydrogen, alkyl, or aryl; and x is 0 or a positive integer; R7 may be hydrogen, C1-10 alkyl, C6-10 aryl, or allyl; and n is a positive integer; (b) a crosslinking component; and (c) an acid catalyst.
    • 提供了具有抗平滑印刷工艺中有用的抗反射性能的硬掩模组合物,其使用方法以及通过这些方法制造的半导体器件。 本发明的抗反射硬掩模组​​合物包括:(a)包含至少一种具有式(I)的单体单元的聚合物的聚合物组分,其中R 1和R 2各自 独立地是氢,羟基,C 1-10烷基,C 6-10芳基,烯丙基或卤素; R 3和R 4可以各自独立地为氢,交联官能团或发色团; R 5和R 6可各自独立地为氢或具有式(II)结构的烷氧基硅氧烷,其中R 5和 和R 6是烷氧基硅烷; 其中R 8,R 9和R 10可各自独立地为氢,烷基或芳基; x为0或正整数; R 7可以是氢,C 1-10烷基,C 6-10芳基或烯丙基; 并且n是正整数; (b)交联组分; 和(c)酸催化剂。
    • 15. 发明申请
    • Multiple-gate MOS transistor using Si substrate and method of manufacturing the same
    • 使用Si衬底的多栅极MOS晶体管及其制造方法
    • US20070069254A1
    • 2007-03-29
    • US11447786
    • 2006-06-06
    • Young ChoTae RohJong Kim
    • Young ChoTae RohJong Kim
    • H01L29/76
    • H01L29/785H01L29/66818H01L29/7851
    • Provided are a multiple-gate MOS (metal oxide semiconductor) transistor and a method of manufacturing the same. The transistor includes a single crystalline active region having a channel region having an upper portion of a streamlined shape (∩) obtained by patterning an upper portion of a bulk silicon substrate with an embossed pattern, and having a thicker and wider area than the channel region; a nitride layer formed at both side surfaces of the single crystalline active region to expose an upper portion of the single crystalline active region at a predetermined height; and a gate electrode formed to be overlaid with the exposed upper portion of the single crystalline active region of the channel region.
    • 提供一种多栅极MOS(金属氧化物半导体)晶体管及其制造方法。 晶体管包括具有通道区域的单晶有源区域,沟道区域具有通过用压花图案图案化体硅衬底的上部并且具有比沟道区域更厚和更宽的面积而获得的流线型形状(∩)的上部 ; 形成在所述单晶有源区的两个侧表面处的氮化物层,以在预定高度暴露所述单晶有源区的上部; 以及形成为与通道区域的单晶有源区域的暴露的上部分重叠的栅电极。
    • 19. 发明申请
    • Liquid for liquid lens with high reliability
    • 液体透镜具有高可靠性
    • US20070040146A1
    • 2007-02-22
    • US11505811
    • 2006-08-18
    • Jae BaeHee ChoiHa JungJong Kim
    • Jae BaeHee ChoiHa JungJong Kim
    • H01G9/02
    • G02B1/06G02B3/14G02B26/005
    • Disclosed herein are a liquid for a liquid lens and a liquid lens module. The liquid for a liquid lens comprises an electrolyte solution and an insulating solution wherein the electrolyte solution contains H2O, 1,2-propanediol and LiCl, and the insulating solution is a silicon (Si) oil and optionally contains 1,6-dibromohexane or bromobenzene as an organic additive. The liquid lens module comprises a transparent cover, a case for accommodating an electrolyte solution and an insulating solution, a pair of electrodes for supplying electricity to the electrolyte solution, and an insulating film for covering one of the electrodes in contact with the electrolyte solution wherein the electrolyte solution contains H2O, 1,2-propanediol and LiCl, and the insulating solution is a silicon (Si) oil. The electrolyte solution and the insulating solution used in the liquid for a liquid lens satisfy the requirements for liquid lenses. In addition, the liquid for a liquid lens ensures superior low- and high-temperature reliability. Therefore, the liquid for a liquid lens is suitable for commercialization.
    • 这里公开了液体透镜和液体透镜模块的液体。 用于液体透镜的液体包括电解质溶液和绝缘溶液,其中电解质溶液含有H 2 O,1,2-丙二醇和LiCl,并且绝缘溶液是硅(Si)油, 任选地含有1,6-二溴己烷或溴苯作为有机添加剂。 液体透镜模块包括透明盖,用于容纳电解质溶液的壳体和绝缘溶液,用于向电解质溶液供电的一对电极和用于覆盖与电解质溶液接触的一个电极的绝缘膜,其中 电解质溶液含有H 2 O,1,2-丙二醇和LiCl,绝缘溶液是硅(Si)油。 用于液体透镜的液体中的电解质溶液和绝缘溶液满足液体透镜的要求。 此外,用于液体透镜的液体确保了优异的低温和高温可靠性。 因此,用于液体透镜的液体适于商业化。