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11. 发明申请

US20050167568A1 Inspection system with auto-focus 有权
标题翻译：自动对焦检测系统
公开(公告)号：US20050167568A1
公开(公告)日：2005-08-04
申请号：US10877311
申请日：2004-06-25
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G01N21/95 , G02B27/40
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

12. 发明授权

US09761102B2 Terrain surveillance system 有权
公开(公告)号：US09761102B2
公开(公告)日：2017-09-12
申请号：US14115392
申请日：2012-05-03
申请人： Avishay Guetta , Michael Yagudaev , Doron Korngut
发明人： Avishay Guetta , Michael Yagudaev , Doron Korngut
IPC分类号： G08B13/189 , G08B13/184
CPC分类号： G08B13/189 , G08B13/184
摘要： A system for the surveillance of terrain and the detection of intrusions over a plane extending into that terrain. A curtain array of light beams is projected along the plane and reflections from the terrain are detected by a sensor array essentially spatially coincident with the array of light sources. The times of flight of the beams are determined, and these characterize the form of the terrain being surveilled. The initial background reflection pattern is acquired and stored by the system. A sudden change in this detected background pattern can be defined as arising from an unexpected reflection, indicative of an intrusion. Signal processing systems are described utilizing modulated laser beams and detection at a frequency at least twice that of the modulation, such that reflected signals arising from the ON and the OFF periods of the laser modulation can be subtracted to eliminate the background signals.

13. 发明申请

US20110170090A1 ILLUMINATION SYSTEM FOR OPTICAL INSPECTION 有权
标题翻译：光学检测用照明系统
公开(公告)号：US20110170090A1
公开(公告)日：2011-07-14
申请号：US13069332
申请日：2011-03-22
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

14. 发明授权

US07841529B2 Multiple optical head inspection system and a method for imaging an article 有权
标题翻译：多光学头部检查系统和成像成像方法
公开(公告)号：US07841529B2
公开(公告)日：2010-11-30
申请号：US10987083
申请日：2004-11-12
申请人： Emanuel Elyasaf , Avishay Guetta
发明人： Emanuel Elyasaf , Avishay Guetta
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/9501
摘要： A method for imaging an article, the method includes: (i) providing short duration light pulses; (ii) directing the light pulses, by multiple optical heads, to illuminate multiple spaced apart areas of an article; and (iii) directing light from the multiple areas towards multiple two-dimensional light sensors; whereas (iv) imparting motion between the article and the multiple optical heads during the stages of providing and directing. An apparatus for inspecting an article that includes: (i) at least one pulsating source for providing short duration light pulses; (ii) multiple optical heads, adapted to direct the light pulses to illuminate multiple spaced apart areas of an article and to collect light from the multiple areas towards multiple two-dimensional light sensors; and (iii) a positioning device which is adapted to impart motion between the article and the multiple optical heads.
摘要翻译：一种用于对物品成像的方法，所述方法包括：（i）提供短持续时间的光脉冲; （ii）通过多个光学头引导光脉冲以照亮物品的多个间隔开的区域; 和（iii）将来自多个区域的光引导到多个二维光传感器; 而（iv）在提供和指导的阶段期间在物品和多个光学头之间施加运动。一种用于检查物品的装置，包括：（i）至少一个用于提供短持续时间的光脉冲的脉动源; （ii）多个光学头，适于引导光脉冲照亮物品的多个间隔开的区域并且将来自多个区域的光聚集到多个二维光传感器; 以及（iii）适于在所述制品和所述多个光学头之间施加运动的定位装置。

15. 发明授权

US07586959B2 Speckle reduction with transparent blocks 有权
标题翻译：散斑减少与透明块
公开(公告)号：US07586959B2
公开(公告)日：2009-09-08
申请号：US11236355
申请日：2005-09-26
申请人： Doron Korngut , Avishay Guetta
发明人： Doron Korngut , Avishay Guetta
IPC分类号： G02B27/48
CPC分类号： G02B27/48
摘要： Apparatus for reducing speckle, including a first coherence-reducing component, having a first array of transparent first elements arranged to receive different, respective first portions of a collimated light beam that is incident on the first component, the first elements generating different, respective optical lengths with respect to the light beam passing therethrough and outputting the respective first portions as respective first collimated sub-beams. The apparatus further includes a second coherence-reducing component, having a second array of transparent second elements arranged to receive different, respective second portions of each of the first collimated sub-beams of the light beam, the second elements generating different, respective optical lengths with respect to the light beam passing therethrough and outputting the respective second portions as respective second collimated sub-beams. The apparatus also includes a light combiner, which is arranged to combine the second collimated sub-beams into a collimated output beam.
摘要翻译：用于减少斑点的装置，包括第一相干减少部件，具有第一阵列的透明第一元件，其布置成接收入射在第一部件上的准直光束的不同的相应的第一部分，第一元件产生不同的相应光学相对于通过其的光束的长度，并将相应的第一部分作为相应的第一准直子光束输出。该装置还包括第二相干减少部件，具有透明第二元件的第二阵列，布置成接收光束的每个第一准直子光束的不同的相应的第二部分，第二元件产生不同的相应的光学长度相对于通过其的光束，并将相应的第二部分作为相应的第二准直子光束输出。该装置还包括一个组合器，其被布置成将第二准直子光束组合成准直的输出光束。

16. 发明授权

US07586596B2 Field folding optical method for imaging system 有权
标题翻译：成像系统的场折叠光学方法
公开(公告)号：US07586596B2
公开(公告)日：2009-09-08
申请号：US11426054
申请日：2006-06-23
申请人： Avishay Guetta , Doron Korngut , Gil Blai , Yoni Cohen
发明人： Avishay Guetta , Doron Korngut , Gil Blai , Yoni Cohen
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/47 , G01N21/8806
摘要： Apparatus for inspecting a surface of a sample, including a detector and folding optics. The folding optics are configured to receive radiation arising from a first region of the surface and from a second region of the surface. The first region and the second region have a first spatial relationship with respect to each other. The folding optics form from the radiation a first image of the first region and a second image of the second region on the detector, wherein the first image is a linear transformation of the first region and the second image is the linear transformation of the second region. The first image and the second image have a second spatial relationship, different from the linear transformation of the first spatial relationship, with respect to each other.
摘要翻译：用于检查样品表面的装置，包括检测器和折叠光学元件。折叠光学元件构造成接收从表面的第一区域和表面的第二区域产生的辐射。第一区域和第二区域相对于第一区域和第二区域具有第一空间关系。折射光学器件从辐射形成第一区域的第一图像和检测器上的第二区域的第二图像，其中第一图像是第一区域的线性变换，第二图像是第二区域的线性变换。第一图像和第二图像具有与第一空间关系的线性变换不同的第二空间关系。

17. 发明授权

US07339661B2 Dark field inspection system 有权
标题翻译：暗场检查系统
公开(公告)号：US07339661B2
公开(公告)日：2008-03-04
申请号：US10511092
申请日：2003-09-08
申请人： Doron Korngut , Erez Admoni , Ofer Kadar , Lev Haikoviz , Haim Feldman , Avishay Guetta
发明人： Doron Korngut , Erez Admoni , Ofer Kadar , Lev Haikoviz , Haim Feldman , Avishay Guetta
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.
摘要翻译：用于检查样品的装置包括辐射源，其适于将光辐射引导到样品表面的区域上，以及多个图像传感器。每个图像传感器被配置为将从该区域散射的辐射接收到不同的相应的角度范围中，以便形成该区域的相应图像。图像处理器适于处理各个图像中的至少一个，以便检测表面上的缺陷。

18. 发明授权

US07924419B2 Illumination system for optical inspection 有权
标题翻译：光学检查照明系统
公开(公告)号：US07924419B2
公开(公告)日：2011-04-12
申请号：US12626592
申请日：2009-11-25
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

19. 发明申请

US20110043806A1 INTRUSION WARNING SYSTEM 有权
标题翻译：入侵警告系统
公开(公告)号：US20110043806A1
公开(公告)日：2011-02-24
申请号：US12988321
申请日：2009-04-16
申请人： Avishay Guetta , Doron Korngut , Gil Blai
发明人： Avishay Guetta , Doron Korngut , Gil Blai
IPC分类号： G01N21/00
CPC分类号： G08B13/2491 , G01S17/026 , G08B13/181
摘要： A system for detecting intrusion across a surface, comprising a plurality of light sources projecting an array of illuminating beams along different optical paths in the surface and a detector array system directed such that it detects along a plurality of fields of view in the surface, illumination reflected from the illuminating beams. A signal processing system detects changes along the array of fields of view, in the reflected illumination level detected by the detector system. An increase greater than a predefined level in the reflected illumination level from any field of view provides an indication of an intrusion across the surveilled surface along that field of view, at the crossing point of the direction of that field of view with the optical path whose illuminating beam generated the increase in reflected illumination from that field of view.
摘要翻译：一种用于检测跨越表面的入侵的系统，包括多个光源，所述多个光源沿着所述表面中的不同光路投射照明光束的阵列;以及探测器阵列系统，其被指示为沿着所述表面中的多个视野检测照明从照明光束反射。信号处理系统在由检测器系统检测到的反射照明水平中检测沿视场阵列的变化。在任何视野的反射照明水平上大于预定水平的增加提供了沿着该视场在该视野方向的交叉点处与沿着该视野的观察点的入射表面的入射指示，照明光束从该视野产生反射照明的增加。

20. 发明授权

US07498557B2 Cascaded image intensifier 有权
标题翻译：级联图像增强器
公开(公告)号：US07498557B2
公开(公告)日：2009-03-03
申请号：US11516667
申请日：2006-09-07
申请人： Iddo Pinkas , Tal Kuzniz , Avishay Guetta , Helmut Banzhoff , Ron Naftali
发明人： Iddo Pinkas , Tal Kuzniz , Avishay Guetta , Helmut Banzhoff , Ron Naftali
IPC分类号： H01J40/14 , H01J43/00
CPC分类号： H01J31/508
摘要： A cascaded image intensifier device is presented. In one embodiment the device comprises: at least two sections in cascade, each of a first section and a last section out of the at least two sections including a photocathode unit adapted to convert photons to electrons and a screen unit adapted to convert electrons to photons; wherein the first section includes a reducing element adapted to: (i) reduce ion-caused degradation of a photocathode unit of the first section, and (ii) reduce a number of photons exiting from the first section from a first value to a second value; and wherein the last section outputs a number of photons that equals or exceeds the first value. Also disclosed are methods and systems using the disclosed cascaded image intensifier device.
摘要翻译：提出了一种级联图像增强器件。在一个实施例中，该装置包括：级联的至少两个部分，至少两个部分中的第一部分和最后部分中的每个部分，包括适于将光子转换成电子的光电阴极单元和适于将电子转换成光子的屏幕单元 ; 其中所述第一部分包括还原元件，所述还原元件适于：（i）减少所述第一部分的光电阴极单元的离子引起的退化，以及（ii）将从所述第一部分退出的光子数量从第一值减少到第二值 ; 并且其中最后部分输出等于或超过第一值的多个光子。还公开了使用所公开的级联图像增强器装置的方法和系统。

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