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    • 1. 发明授权
    • Multiple optical head inspection system and a method for imaging an article
    • 多光学头部检查系统和成像成像方法
    • US07841529B2
    • 2010-11-30
    • US10987083
    • 2004-11-12
    • Emanuel ElyasafAvishay Guetta
    • Emanuel ElyasafAvishay Guetta
    • G01N21/88
    • G01N21/8806G01N21/9501
    • A method for imaging an article, the method includes: (i) providing short duration light pulses; (ii) directing the light pulses, by multiple optical heads, to illuminate multiple spaced apart areas of an article; and (iii) directing light from the multiple areas towards multiple two-dimensional light sensors; whereas (iv) imparting motion between the article and the multiple optical heads during the stages of providing and directing. An apparatus for inspecting an article that includes: (i) at least one pulsating source for providing short duration light pulses; (ii) multiple optical heads, adapted to direct the light pulses to illuminate multiple spaced apart areas of an article and to collect light from the multiple areas towards multiple two-dimensional light sensors; and (iii) a positioning device which is adapted to impart motion between the article and the multiple optical heads.
    • 一种用于对物品成像的方法,所述方法包括:(i)提供短持续时间的光脉冲; (ii)通过多个光学头引导光脉冲以照亮物品的多个间隔开的区域; 和(iii)将来自多个区域的光引导到多个二维光传感器; 而(iv)在提供和指导的阶段期间在物品和多个光学头之间施加运动。 一种用于检查物品的装置,包括:(i)至少一个用于提供短持续时间的光脉冲的脉动源; (ii)多个光学头,适于引导光脉冲照亮物品的多个间隔开的区域并且将来自多个区域的光聚集到多个二维光传感器; 以及(iii)适于在所述制品和所述多个光学头之间施加运动的定位装置。
    • 2. 发明申请
    • Multiple optical head inspection system and a method for imaging an article
    • 多光学头部检查系统和成像成像方法
    • US20070222978A1
    • 2007-09-27
    • US10987083
    • 2004-11-12
    • Emanuel ElyasafAvishay Guetta
    • Emanuel ElyasafAvishay Guetta
    • G01N21/88
    • G01N21/8806G01N21/9501
    • A method for imaging an article, the method includes: (i) providing short duration light pulses; (ii) directing the light pulses, by multiple optical heads, to illuminate multiple spaced apart areas of an article; and (iii) directing light from the multiple areas towards multiple two-dimensional light sensors; whereas (iv) imparting motion between the article and the multiple optical heads during the stages of providing and directing. An apparatus for inspecting an article that includes: (i) at least one pulsating source for providing short duration light pulses; (ii) multiple optical heads, adapted to direct the light pulses to illuminate multiple spaced apart areas of an article and to collect light from the multiple areas towards multiple two-dimensional light sensors; and (iii) a positioning device which is adapted to impart motion between the article and the multiple optical heads.
    • 一种用于对物品成像的方法,所述方法包括:(i)提供短持续时间的光脉冲; (ii)通过多个光学头引导光脉冲以照亮物品的多个间隔开的区域; 和(iii)将来自多个区域的光引导到多个二维光传感器; 而(iv)在提供和指导的阶段期间在物品和多个光学头之间施加运动。 一种用于检查物品的装置,包括:(i)至少一个用于提供短持续时间的光脉冲的脉动源; (ii)多个光学头,适于引导光脉冲照亮物品的多个间隔开的区域并且将来自多个区域的光聚集到多个二维光传感器; 以及(iii)适于在所述制品和所述多个光学头之间施加运动的定位装置。
    • 3. 发明授权
    • Aerial observation system
    • 空中观测系统
    • US08982333B2
    • 2015-03-17
    • US13119968
    • 2009-09-21
    • Avishay GuettaYuval GuettaRafael Ambar
    • Avishay GuettaYuval GuettaRafael Ambar
    • G01C3/08B64B1/50
    • B64B1/50
    • An aerial platform comprising a kite providing a level of directional stability when elevated by the wind, and an inflated balloon attached above the kite with a cord. The payload is attached to the kite. The physical separation of the balloon from the kite isolates the payload from shocks generated by the balloon. Additional isolation is provided by use of an elastic attachment cord. Electric power is supplied to the aerial platform by means of an optical fiber receiving optical power from a ground-based source, and conversion of the optical power to electrical power on board the platform. In order to provide a strong tether line, the optical fiber is plaited with a jacket braided from high tensile strength fibers. An aerial laser transmitter is described using a ground based laser source transmitting laser power through an optical fiber to an aerial platform for transmission from the platform.
    • 一种包括风筝的空中平台,当风起升时提供一定程度的方向稳定性,以及用绳索附着在风筝上方的充气气球。 有效载荷附着在风筝上。 气球与风筝的物理分离将有效载荷与气球产生的冲击隔离。 通过使用弹性连接线提供额外的隔离。 通过接收来自地面源的光功率的光纤向平台提供电力,并将光功率转换为平台上的电力。 为了提供一个强力的系绳,光纤被编织有高抗拉强度纤维的护套。 使用基于地面的激光源来描述空中激光发射器,该激光源通过光纤将激光功率传输到用于从平台传输的空中平台。
    • 4. 发明申请
    • LASER DAYLIGHT DESIGNATION AND POINTING
    • 激光指示和指示
    • US20130087684A1
    • 2013-04-11
    • US13515863
    • 2010-12-14
    • Avishay GuettaMichael YagudaevDoron Korngut
    • Avishay GuettaMichael YagudaevDoron Korngut
    • H01L27/146H01L27/148
    • F41G7/2293F41G3/02F41G3/145F41G7/2246F41G7/226G01S7/4914G01S17/32G01S17/89H01L27/146H01L27/14643H01L27/148
    • A laser designator system using modulated CW laser diodes and a conventional high pixel count image sensor array, such as CCD or CMOS array. These two technologies, diode lasers and imaging sensor arrays are reliable, widely used and inexpensive technologies, as compared with prior art pulsed laser systems. These systems are distinguished from the prior art systems in that they filter the laser signal spatially, by collecting light over a comparatively long period of time from a very few pixels out of the entire field of view of the image sensor array. This is in contrast to the prior art systems where the laser signal is filtered temporarily, over a very short time span, but over a large fraction of the field of view. By spatially filtering the signal outputs of the individual pixels, it becomes possible to subtract the background illumination from the illuminated laser spot.
    • 一种使用调制CW激光二极管和常规高像素数像素传感器阵列(如CCD或CMOS阵列)的激光指示系统。 与现有技术的脉冲激光系统相比,这两种技术,二极管激光器和成像传感器阵列是可靠的,广泛使用的和便宜的技术。 这些系统与现有技术的系统不同,它们通过从图像传感器阵列的整个视野​​内的极少数像素中收集较长时间的光,从而在空间上对激光信号进行滤波。 这与现有技术的系统不同,其中激光信号在非常短的时间跨度上临时滤波,但是在视场的很大一部分上。 通过对各个像素的信号输出进行空间滤波,可以从照明的激光光斑中减去背景照明。
    • 5. 发明申请
    • THREE DIMENSIONAL MEASUREMENT SYSTEM
    • 三维测量系统
    • US20130021595A1
    • 2013-01-24
    • US13521062
    • 2011-01-09
    • Avishay Guetta
    • Avishay Guetta
    • G01C3/08
    • G01B11/24G01S7/4912G01S17/325G01S17/89
    • A system for making distance measurements of remote points using a phenomenon related to the time of flight of an illuminating beam. A modulated beam of light is directed at the target area. The modulated beam has temporally varying information impressed upon it, such that the time of flight of the beam to the target and back can be related to the temporal signature of the received beam. An acousto-optic modulator is used to perform frequency conversion of the modulated light reflected from points in the field, before that light impinges on the pixels of a detector array. The AO modulation frequency is close to the illuminating light modulation frequency, so that the converted mixed frequency falls within the limited parallel reading rate range of the detector array, and contains the temporal signature information of the modulated light received from the target within signals of manageable frequencies.
    • 使用与照明光束的飞行时间有关的现象进行远程测距的系统。 调制光束被引导到目标区域。 调制波束具有印在其上的时间上不同的信息,使得波束到目标和背部的飞行时间可以与接收波束的时间签名相关。 在该光照射到检测器阵列的像素之前,使用声光调制器对从场中的点反射的调制光进行频率转换。 AO调制频率接近照明光调制频率,使得转换的混合频率落在检测器阵列的有限的并行读取速率范围内,并且包含从可管理的信号中的目标接收的调制光的时间签名信息 频率
    • 6. 发明申请
    • Inspection System with Auto-Focus
    • 自动对焦检测系统
    • US20070034773A1
    • 2007-02-15
    • US11466314
    • 2006-08-22
    • Gal AmarAvishay GuettaDoron ShohamGilad SchwartzRonen Eynat
    • Gal AmarAvishay GuettaDoron ShohamGilad SchwartzRonen Eynat
    • G02B27/40
    • G01N21/9501
    • Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
    • 用于光学检查样品的装置包括检测器组件,其被配置为接收来自样品上的聚焦区域的辐射,以及平移机构,其可操作地将运动传递到检测器组件和样品中的至少一个,使得 检测器组件的焦点区域沿着平移路径在样本上翻译。 高度传感器位于相对于检测器组件的已知位置,以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。 控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。
    • 7. 发明申请
    • FIELD FOLDING OPTICAL METHOD FOR IMAGING SYSTEM
    • 用于成像系统的现场折叠光学方法
    • US20070008520A1
    • 2007-01-11
    • US11426054
    • 2006-06-23
    • Avishay GuettaDoron KorngutGil BlaiYoni Cohen
    • Avishay GuettaDoron KorngutGil BlaiYoni Cohen
    • G01N21/88
    • G01N21/9501G01N21/47G01N21/8806
    • Apparatus for inspecting a surface of a sample, including a detector and folding optics. The folding optics are configured to receive radiation arising from a first region of the surface and from a second region of the surface. The first region and the second region have a first spatial relationship with respect to each other. The folding optics form from the radiation a first image of the first region and a second image of the second region on the detector, wherein the first image is a linear transformation of the first region and the second image is the linear transformation of the second region. The first image and the second image have a second spatial relationship, different from the linear transformation of the first spatial relationship, with respect to each other.
    • 用于检查样品表面的装置,包括检测器和折叠光学元件。 折叠光学元件构造成接收从表面的第一区域和表面的第二区域产生的辐射。 第一区域和第二区域相对于第一区域和第二区域具有第一空间关系。 折射光学器件从辐射形成第一区域的第一图像和检测器上的第二区域的第二图像,其中第一图像是第一区域的线性变换,第二图像是第二区域的线性变换 。 第一图像和第二图像具有与第一空间关系的线性变换不同的第二空间关系。
    • 8. 发明授权
    • Method and apparatus for inspecting a sample having a height measurement ahead of a focal area
    • 用于检查在焦点区域之前具有高度测量的样品的方法和装置
    • US07115890B2
    • 2006-10-03
    • US10877311
    • 2004-06-25
    • Gal AmarAvishay GuettaDoron ShohamGilad SchwartzRonen Eynat
    • Gal AmarAvishay GuettaDoron ShohamGilad SchwartzRonen Eynat
    • G01N21/86
    • G01N21/9501
    • Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
    • 用于光学检查样品的装置包括检测器组件,其被配置为接收来自样品上的聚焦区域的辐射,以及平移机构,其可操作地将运动传递到检测器组件和样品中的至少一个,使得 检测器组件的焦点区域沿着平移路径在样本上翻译。 高度传感器位于相对于检测器组件的已知位置,以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。 控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。
    • 10. 发明申请
    • Inspection system with auto-focus
    • 自动对焦检测系统
    • US20050167568A1
    • 2005-08-04
    • US10877311
    • 2004-06-25
    • Gal AmarAvishay GuettaDoron ShohamGilad SchwartzRonen Eynat
    • Gal AmarAvishay GuettaDoron ShohamGilad SchwartzRonen Eynat
    • G01N21/95G02B27/40
    • G01N21/9501
    • Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
    • 用于光学检查样品的装置包括检测器组件,其被配置为接收来自样品上的聚焦区域的辐射,以及平移机构,其可操作地将运动传递到检测器组件和样品中的至少一个,使得 检测器组件的焦点区域沿着平移路径在样本上翻译。 高度传感器位于相对于检测器组件的已知位置,以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。 控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。