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    • 11. 发明授权
    • Write head with high moment film layer having tapered portion extending beyond write gap layer
    • 用具有锥形部分延伸超过写间隙层的高力矩膜层写头
    • US06873494B2
    • 2005-03-29
    • US10134799
    • 2002-04-29
    • Yingjian ChenXiaozhong Dang
    • Yingjian ChenXiaozhong Dang
    • G11B5/31G11B5/39G11B5/40
    • B82Y25/00B82Y10/00G11B5/3106G11B5/313G11B5/3133G11B5/3153G11B5/3163G11B5/40G11B2005/3996
    • An inductive write head structure incorporating a high moment film in conjunction with at least one pole (e.g., the bottom pole) for use with magnetic storage media and a process for producing the same in which a lift-off photoresist mask is used prior to the deposition of the high moment sputtered film. Following the lift-off process, the high moment film remains on the bottom pole (“P1”) pedestal (in the case of a PDZT type write head) or on the P1 itself (in the case of a Stitched Pole write head). The edge of the lift-off sputtered film is then covered by cured photoresist insulation which is placed at a distance away from the air bearing surface (“ABS”). The coverage of insulation at the edge of the sputtered film is desirable in order to avoid forming a topographic step which may have undesired consequences in the subsequent top pole formation processes.
    • 结合至少一个极(例如,底极)与磁存储介质一起使用的高力矩膜的感应写头结构及其制造方法,其中在剥离光刻胶掩模之前使用剥离光致抗蚀剂掩模 沉积高速溅射膜。 在剥离过程之后,高力矩胶片保留在底极(“P1”)底座上(在PDZT型写入头的情况下)或P1本身(在缝合杆写入头的情况下)。 然后,剥离溅射膜的边缘被固定的光致抗蚀剂绝缘体覆盖,该固化的光致抗蚀剂绝缘体被放置在远离空气支承表面(“ABS”)的一定距离处。 在溅射膜的边缘处的绝缘层的覆盖是期望的,以避免形成在随后的顶极形成过程中可能具有不期望的后果的地形步骤。
    • 13. 发明授权
    • Thin film write head for improved high speed and high density recording
    • 薄膜写入头用于改进高速和高密度记录
    • US06353511B1
    • 2002-03-05
    • US09335155
    • 1999-06-15
    • Zhupei ShiLien-Chang WangBill CrueYingjian ChenSyed Hossain
    • Zhupei ShiLien-Chang WangBill CrueYingjian ChenSyed Hossain
    • G11B531
    • G11B5/3967G11B5/3109G11B5/3113G11B5/3116G11B5/313G11B5/3153G11B5/3163G11B5/455
    • A preferred embodiment provides a thin film write head having upper and lower pole structures each having pedestal pole tips formed with CoNiFe. The pedestal pole tips may have from about 60% to about 70% Co and from about 10% to about 15% Ni. The upper pole structure of the preferred embodiment has a laminated yoke portion having upper and lower layers. The lower layer is stitched to the pedestal pole tip of the upper pole structure and comprises FeXN, where X is selected from the group consisting of Rh, Ta, Hf, Al, Zr, Ti, Ru, Si, Cr, V, Si, Sr, Nb, Mo, Ru, and Pd. The upper layer comprises NiFe preferably having from about 15% to about 55% of Fe. It is preferred to define the lower layer of the yoke by etching FeXN material using the upper layer as a hard mask. In a preferred method and embodiment, the top surfaces of the conductor coil and the upper pedestal pole tip are planarized with an inorganic capping layer formed thereover to insulate the conductor coil from the yoke and to provide a low apex angle to form the yoke over.
    • 优选实施例提供一种具有上和下极结构的薄膜写头,每个具有由CoNiFe形成的基座极尖。 基座极尖可以具有约60%至约70%的Co和约10%至约15%的Ni。 优选实施例的上极结构具有具有上层和下层的层叠轭部分。 下层被缝合到上极结构的基座极端,并且包括FeXN,其中X选自Rh,Ta,Hf,Al,Zr,Ti,Ru,Si,Cr,V,Si, Sr,Nb,Mo,Ru和Pd。 上层包含优选具有约15%至约55%Fe的NiFe。 优选通过使用上层作为硬掩模蚀刻FeXN材料来限定轭的下层。 在优选的方法和实施例中,导体线圈和上基座极尖的顶表面与形成在其上的无机覆盖层平坦化,以使导体线圈与轭绝缘,并提供低顶角以形成轭。
    • 15. 发明申请
    • Method For Manufacturing Wraparound Shield Write Head Using Hard Masks
    • 使用硬掩模制造绕组屏蔽写头的方法
    • US20130026131A1
    • 2013-01-31
    • US13193520
    • 2011-07-28
    • Shiwen HuangFenglin LiuQiping ZhongKyusik ShinYingjian Chen
    • Shiwen HuangFenglin LiuQiping ZhongKyusik ShinYingjian Chen
    • G11B5/127
    • G11B5/3116G11B5/3163
    • The present disclosure describes a method for manufacturing a full wraparound shield damascene write head through the implementation of a three layered (tri-layered) hard mask. According to an embodiment of the invention, the various layers of hard mask are used for different purposes during the formation of a write head. The wraparound shield head of the present invention exhibits improved physical characteristics that further result in improved performance characteristics. Use of the hard mask layers according to the present invention allows for use of manufacturing processes that can be more closely controlled than those processes used in other processes. For example, smaller dimension lithographic techniques can be used. Also, reliance on certain CMP processes is not necessary where the use of CMP processes is not as well-controlled as deposition or lithographic techniques as is possible using the present invention.
    • 本公开描述了通过实施三层(三层)硬掩模制造全封装屏蔽镶嵌写头的方法。 根据本发明的实施例,在形成写入头期间,各种硬掩模层用于不同的目的。 本发明的环绕式屏蔽头表现出改进的物理特性,进一步导致改善的性能特征。 根据本发明的硬掩模层的使用允许使用可以比其它工艺中使用的那些方法更加严格地控制的制造工艺。 例如,可以使用较小尺寸的光刻技术。 此外,在使用CMP工艺不如使用本发明可能的沉积或光刻技术那样不受控制的情况下,对某些CMP工艺的依赖是不必要的。
    • 17. 发明授权
    • Method and system for providing a magnetic recording transducer having side shields
    • 用于提供具有侧屏蔽的磁记录换能器的方法和系统
    • US08231796B1
    • 2012-07-31
    • US12331238
    • 2008-12-09
    • Yun-Fei LiYingjian Chen
    • Yun-Fei LiYingjian Chen
    • B44C1/22
    • G11B5/3163G11B5/3116G11B5/315
    • A method and system provide a magnetic transducer that includes an underlayer and a nonmagnetic layer on the underlayer. The method and system include providing a trench in the nonmagnetic layer. The trench has a plurality of sides. The method and system also include providing a separation layer in the trench. A portion of the separation layer resides on the sides of the trench. The method and system include providing the main pole. At least part of the main pole resides in the trench on the portion of the separation layer and has a plurality of pole sides. The method and system further include removing at least a portion of the second nonmagnetic layer, thereby exposing the portion of the separation layer. The method and system also include providing a side shield. The separation layer magnetically separates the pole sides from the side shield.
    • 一种方法和系统提供一种在底层上包括底层和非磁性层的磁换能器。 该方法和系统包括在非磁性层中提供沟槽。 沟槽具有多个侧面。 该方法和系统还包括在沟槽中提供分离层。 分离层的一部分位于沟槽的侧面。 该方法和系统包括提供主极。 主极的至少一部分位于分离层部分上的沟槽中,并且具有多个极侧。 所述方法和系统还包括去除第二非磁性层的至少一部分,从而暴露分离层的部分。 该方法和系统还包括提供侧护罩。 分离层将极侧与侧护罩磁性地分离。