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    • 15. 发明授权
    • Method for analyzing circuit pattern defects and a system thereof
    • 电路图形缺陷分析方法及其系统
    • US07352890B2
    • 2008-04-01
    • US11356210
    • 2006-02-17
    • Atsushi ShimodaIchirou IshimaruYuji TakagiTakuo TamuraYuichi HamamuraKenji WatanabeYasuhiko OzawaSeiji Isogai
    • Atsushi ShimodaIchirou IshimaruYuji TakagiTakuo TamuraYuichi HamamuraKenji WatanabeYasuhiko OzawaSeiji Isogai
    • G06K9/00
    • G06T7/0004G06T2207/30148H01L22/20
    • A system for analyzing defects in electronic circuit patterns, including: comparing position information of structural defects with position information of electrical faults and extracting corroborated defects having common position information between the structural defects and electrical faults; classifying images of extracted corroborated defects into critical defect images and non-critical defect images based on a pre-stored classification rule which defines critical and non-critical defects by referring to images of defects, position information of defects, and results of performing an electronic test; modifying the pre-stored classification rule by correcting classification of classified defect images displayed on the screen; and repeating the operations for each subsequent object, wherein for each present object under inspection, using a modified pre-stored classification rule with respect to a previous object, as the pre-stored classification rule for the operations with respect to the present object.
    • 一种用于分析电子电路图案缺陷的系统,包括:将结构缺陷的位置信息与电气故障的位置信息进行比较,并提取在结构缺陷和电气故障之间具有共同位置信息的证实缺陷; 基于预先存储的分类规则将提取的确证缺陷的图像分类为关键缺陷图像和非关键缺陷图像,该分类规则通过参考缺陷图像,缺陷位置信息和执行电子化的结果来定义关键和非关键缺陷 测试; 通过校正显示在屏幕上的分类缺陷图像的分类来修改预先存储的分类规则; 并对每个后续对象重复操作,其中对于被检查的每个当前对象,使用关于先前对象的经修改的预先存储的分类规则作为关于本对象的操作的预先存储的分类规则。
    • 19. 发明申请
    • Method for analyzing circuit pattern defects and a system thereof
    • 电路图形缺陷分析方法及其系统
    • US20060140472A1
    • 2006-06-29
    • US11356210
    • 2006-02-17
    • Atsushi ShimodaIchirou IshimaruYuji TakagiTakuo TamuraYuichi HamamuraKenji WatanabeYasuhiko OzawaSeiji Isogai
    • Atsushi ShimodaIchirou IshimaruYuji TakagiTakuo TamuraYuichi HamamuraKenji WatanabeYasuhiko OzawaSeiji Isogai
    • G06K9/00
    • G06T7/0004G06T2207/30148H01L22/20
    • A system for analyzing defects in electronic circuit patterns, including: comparing position information of structural defects with position information of electrical faults and extracting corroborated defects having common position information between the structural defects and electrical faults; classifying images of extracted corroborated defects into critical defect images and non-critical defect images based on a pre-stored classification rule which defines critical and non-critical defects by referring to images of defects, position information of defects, and results of performing an electronic test; modifying the pre-stored classification rule by correcting classification of classified defect images displayed on the screen; and repeating the operations for each subsequent object, wherein for each present object under inspection, using a modified pre-stored classification rule with respect to a previous object, as the pre-stored classification rule for the operations with respect to the present object.
    • 一种用于分析电子电路图案缺陷的系统,包括:将结构缺陷的位置信息与电气故障的位置信息进行比较,并提取在结构缺陷和电气故障之间具有共同位置信息的证实缺陷; 基于预先存储的分类规则将提取的确证缺陷的图像分类为关键缺陷图像和非关键缺陷图像,该分类规则通过参考缺陷图像,缺陷位置信息和执行电子化的结果来定义关键和非关键缺陷 测试; 通过校正显示在屏幕上的分类缺陷图像的分类来修改预先存储的分类规则; 并对每个后续对象重复操作,其中对于被检查的每个当前对象,使用关于先前对象的经修改的预先存储的分类规则作为关于本对象的操作的预先存储的分类规则。
    • 20. 发明申请
    • IMAGE DISPLAY DEVICE
    • 图像显示设备
    • US20080129187A1
    • 2008-06-05
    • US11943690
    • 2007-11-21
    • Takuo TamuraMasakazu SagawaHiroshi Kikuchi
    • Takuo TamuraMasakazu SagawaHiroshi Kikuchi
    • H01J1/62
    • H01J31/127H01J29/04H01J2329/0484
    • An image display device in which each pixel has a thin-film electron source composed of a lower electrode (which is a signal wire), an electron accelerating layer (which is formed by anodizing the surface of said signal wire), and an upper electrode (which covers said electron accelerating layer and releases electrons), in which the anodized film constituting said electron accelerating layer contains hydrated alumina component and anhydrous alumina component such that their ratio in the side close to the upper electrode is greater than that in the side close to the lower electrode. This structure prevents said thin-film electron source from being deteriorated in diode characteristics by said electron accelerating layer, thereby enhancing the reliability of said image display device.
    • 一种图像显示装置,其中每个像素具有由下电极(其是信号线),电子加速层(通过阳极氧化所述信号线的表面形成)构成的薄膜电子源,以及上电极 (其覆盖所述电子加速层并释放电子),其中构成所述电子加速层的阳极氧化膜含有水合氧化铝组分和无水氧化铝组分,使得它们在靠近上电极的一侧的比例大于侧面密封 到下电极。 该结构防止所述电子加速层使所述薄膜电子源的二极管特性劣化,从而提高所述图像显示装置的可靠性。