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    • 13. 发明授权
    • Method for coating a semiconductor device with a phosphosilicate glass
    • 用磷硅玻璃涂覆半导体器件的方法
    • US4513026A
    • 1985-04-23
    • US518329
    • 1983-08-01
    • Hidekazu MiyamotoYoshimi ShioyaMamoru MaedaMikio Takagi
    • Hidekazu MiyamotoYoshimi ShioyaMamoru MaedaMikio Takagi
    • C23C16/44C23C16/455H01L21/316
    • C23C16/45514C23C16/455C23C16/45578H01L21/02129H01L21/02271H01L21/31625
    • A semiconductor device having a deposited phosphosilicate glass film, containing an insubstantial amount of hydrogen and a low phosphorus concentration, is manufactured at a high mass productivity. This semiconductor device is manufactured by first placing plural substrates for semiconductor devices to be treated in a reaction tube so that the main surfaces of the substrates are substantially vertically aligned with respect to one another and are substantially perpendicularly intersected by the central axis of the reaction tube, the reaction tube being provided with at least two gas feed pipes having plural small openings pierced along the longitudinal direction thereof. Second, a silicon compound gas is introduced through one of the gas feed pipes into the reaction tube and an oxidizing gas is introduced through the other of the gas feed pipes into the reaction tube, while the inside of the reaction tube is maintained a reduced low pressure, whereby phosphosilicate glass films are deposited on the main surfaces of the substrates.
    • 具有含有非实质量的氢和低磷浓度的沉积磷硅酸盐玻璃膜的半导体器件以高质量生产率被制造。 该半导体器件通过首先在反应管中放置要处理的半导体器件的多个基板,使得基板的主表面相对于彼此大致垂直取向并且基本上垂直于反应管的中心轴线相交 反应管设置有至少两个气体供给管,其具有沿其纵向方向刺穿的多个小开口。 其次,将硅化合物气体通过气体供给管中的一个引入反应管中,并且将氧化气体通过另一个气体供给管引入反应管中,同时反应管的内部保持较低的 压力,由此磷硅玻璃膜沉积在基板的主表面上。
    • 16. 发明授权
    • Process for high pressure oxidation of silicon
    • 硅高压氧化工艺
    • US4275094A
    • 1981-06-23
    • US955755
    • 1978-10-30
    • Mikio TakagiMamoru MaedaHajime Kamioka
    • Mikio TakagiMamoru MaedaHajime Kamioka
    • C30B33/00H01L21/316
    • H01L21/02238C30B33/005H01L21/02255H01L21/31662
    • A process for high pressure oxidation of silicon comprising the steps of inserting silicon wafers and an oxidizing substance into a quartz capsule sealing the quartz capsule gas-tightly by fusing, and heating the quartz capsule to generate a high pressure oxidizing atmosphere therein and to form an oxide film on the silicon wafers without a flow of the oxidizing atmosphere. In a case where water is used as the oxidizing substance, the water is frozen and the inside space of the quartz capsule is exhausted before the sealing operation. Furthermore, in a case where an oxidizing gas, e.g. oxygen gas, is used as the oxidizing substance, if the pressure of the gas is higher than the ambient pressure, the quartz capsule is cooled to decrease the gas pressure to a pressure below the ambient pressure before the sealing operation.
    • 一种用于硅的高压氧化的方法,包括以下步骤:将硅晶片和氧化物质插入石英胶囊中,通过熔融气密地密封石英胶囊,并加热石英胶囊以在其中产生高压氧化气氛,并形成 硅晶片上的氧化膜,而没有氧化气氛的流动。 在使用水作为氧化物质的情况下,水被冻结,石英胶囊的内部空间在密封操作之前被排出。 此外,在例如氧化气体的情况下, 氧气用作氧化物质,如果气体的压力高于环境压力,则在密封操作之前,将石英胶囊冷却以将气体压力降低到低于环境压力的压力。
    • 17. 发明授权
    • Picture transfer method and apparatus therefor
    • 图像传送方法及其装置
    • US4366506A
    • 1982-12-28
    • US271239
    • 1981-06-08
    • Koichi EjiriMorisumi KuroseMamoru Maeda
    • Koichi EjiriMorisumi KuroseMamoru Maeda
    • H03M7/46H04N1/41H04N1/411H04N7/12
    • H04N1/411
    • A system for sampling binary value images of white and black and efficiently encoding and decoding them is disclosed. An image is sampled to form a plurality of small picture cells. The small picture cells are merged in groups of four to form a plurality of large picture cells. At least one least frequently occurring density level is determined for the plurality of large picture cells. The least frequently occurring density level is converted to an adjacent density level. The density levels for the picture cells are then encoded and transmitted to a receiver. At the receiving end, the encoded large picture cells are decoded to form a plurality of restored large picture cells. Each restored large picture cell is divided into four small restored picture cells by comparing its density level with that of four neighboring large restored picture cells.
    • 公开了一种用于对白和黑二进制值图像进行采样并对其进行有效编码和解码的系统。 对图像进行采样以形成多个小图像单元。 小图像单元以四组合并形成多个大图像单元。 为多个大图像单元确定至少一个最不频繁出现的浓度水平。 最不发生的密度水平被转换为相邻的密度水平。 然后将图像单元的密度级别编码并发送到接收器。 在接收端,编码的大图像单元被解码以形成多个恢复的大图像单元。 将每个恢复的大图像单元通过将其密度水平与四个相邻的大的恢复图像单元的密度水平进行比较而被分为四个小的恢复图像单元