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    • 13. 发明授权
    • Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus
    • 基板支架,基板支架单元,基板输送装置和基板接合装置
    • US08570704B2
    • 2013-10-29
    • US12879779
    • 2010-09-10
    • Hidehiro MaedaMasahiro Yoshihashi
    • Hidehiro MaedaMasahiro Yoshihashi
    • H01T23/00
    • H01L21/6831H01L21/67742H01L21/67766H01L21/68771
    • A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.
    • 在保持基板的状态下,可靠地输送基板保持架。 提供了一种用于通过由外部源提供的电力产生的静电力来保持基板的基板保持器。 在保持基板的状态下输送基板支架。 衬底保持器包括:具有放置在其上的衬底的保持器主体和通过保持器主体外部暴露的连接器端子,其中连接器端子可附接到外部电源端子并可从其拆卸。 还提供了一种用于通过由从外部源供给的电力产生的静电力来运送保持基板的基板保持架的基板输送装置。 基板输送装置包括:放置部,其具有放置基板保持件的放置面,放置部保持基板保持件;电源端子,其向放置面放置的基板保持器供电。
    • 14. 发明申请
    • Transport Method and Transport Apparatus
    • 运输方式和运输设备
    • US20130274915A1
    • 2013-10-17
    • US13916149
    • 2013-06-12
    • Hidehiro MaedaKazuya OkamotoYasuaki Tanaka
    • Hidehiro MaedaKazuya OkamotoYasuaki Tanaka
    • H01L21/677
    • H01L21/677H01L21/67092H01L21/67259H01L21/68H01L24/34H01L2924/00014Y10T156/10H01L2224/37099H01L2224/84
    • Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on acceleration of the substrate holders. Whether there is the possibility of misalignment may be judged based on acceleration of a transporting section that transports the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of (i) a transporting section that transports the pair of substrate holders and (ii) one of the pair of substrate holders.
    • 提供了一种传送方法,包括判断是否存在由被对准部对准和堆叠的一对基板保持器保持的要分层的基板之间的大于或等于阈值的偏移的可能性, 一对基板支架从对准部分输送到压力施加部分; 并且如果判断表示存在不对准的可能性,则将一对基板保持器传送到除压力施加部以外的区域。 可以基于基板保持器的加速度判断是否存在未对准的可能性。 可以基于输送基板保持器的输送部的加速度判断是否存在未对准的可能性。 可以基于基板保持器的相对位置来判断是否存在未对准的可能性。 可以基于(i)输送一对基板保持器的输送部和(ii)一对基板保持件中的一个的相对位置来判断是否存在未对准的可能性。
    • 16. 发明申请
    • SUBSTRATE HOLDER, SUBSTRATE HOLDER UNIT, SUBSTRATE TRANSPORT APPARATUS, AND SUBSTRATE BONDING APPARATUS
    • 基板支架,基板支架单元,基板运输装置和基板接合装置
    • US20110007447A1
    • 2011-01-13
    • US12879779
    • 2010-09-10
    • Hidehiro MAEDAMasahiro Yoshihashi
    • Hidehiro MAEDAMasahiro Yoshihashi
    • H01L21/683
    • H01L21/6831H01L21/67742H01L21/67766H01L21/68771
    • A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.
    • 在保持基板的状态下,可靠地输送基板保持架。 提供了一种用于通过由外部源提供的电力产生的静电力来保持基板的基板保持器。 在保持基板的状态下输送基板支架。 衬底保持器包括:具有放置在其上的衬底的保持器主体和通过保持器主体外部暴露的连接器端子,其中连接器端子可附接到外部电源端子并且可从外部电源端子拆卸。 还提供了一种用于通过由从外部源供给的电力产生的静电力来运送保持基板的基板保持架的基板输送装置。 基板输送装置包括:放置部,其具有放置基板保持件的放置面,放置部保持基板保持件;电源端子,其向放置面放置的基板保持器供电。