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141. 发明授权

US06894302B2 Surface inspection apparatus and method thereof 失效
标题翻译：表面检查装置及其方法
公开(公告)号：US06894302B2
公开(公告)日：2005-05-17
申请号：US09791742
申请日：2001-02-26
申请人： Ichiro Ishimaru , Minori Noguchi , Ichiro Moriyama , Yoshikazu Tanabe , Yasuo Yatsugake , Yukio Kenbou , Kenji Watanabe , Hirofumi Tsuchiyama
发明人： Ichiro Ishimaru , Minori Noguchi , Ichiro Moriyama , Yoshikazu Tanabe , Yasuo Yatsugake , Yukio Kenbou , Kenji Watanabe , Hirofumi Tsuchiyama
IPC分类号： G01B11/30 , G01B11/24 , G01B11/245 , G01N21/95 , G01N21/956 , G06T1/00 , H01L21/66 , G01N21/88
CPC分类号： G01N21/88 , G01N21/474 , G01N21/94 , G01N21/9501 , G01N21/9503 , G01N2021/8825 , G01N2021/8854
摘要： The invention provides a surface inspection apparatus and a method for inspecting the surface of a sample that are capable of inspecting discriminatingly between the scratch of various configuration and the adhered foreign object that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to polishing process such as CMP or grinding process in semiconductor manufacturing process or magnetic head manufacturing process. In the invention, the scratch and foreign object that occur on the polished or ground surface of the sample is epi-illuminated and slant-illuminated by use of approximately same light flux, the difference between the scattered light intensity emitted from the shallow scratch and that from the foreign object when epi-illumination is applied and slant illumination is applied to thereby discriminate between the shallow scratch and the foreign object, and the directionality of the scattered light when the epi-illumination is applied and the slant illumination is applied is detected to thereby discriminate between the linear scratch and the foreign object.
摘要翻译：本发明提供了一种表面检查装置和用于检查样品表面的方法，所述表面检查装置和检查方法能够区分各种构型的刮擦和在作业目标（例如，工件）上发生在工作目标表面上的被粘附的异物之间的差异，半导体衬底上的绝缘膜）在半导体制造工艺或磁头制造工艺中进行诸如CMP或研磨工艺的抛光工艺。在本发明中，通过使用大致相同的光通量，在样品的抛光面或地面上发生的划痕和异物被表面照射和倾斜照射，从浅划痕发射的散射光强度与当外加照明被施加并且倾斜照明被施加以从而区分浅刮伤和异物时，并且当施加外露照明并施加倾斜照明时散射光的方向性被检测到从而区分线状刮痕和异物。

142. 发明授权

US06853143B2 Electron beam system and method of manufacturing devices using the system 有权
标题翻译：电子束系统及其制造方法
公开(公告)号：US06853143B2
公开(公告)日：2005-02-08
申请号：US10337420
申请日：2003-01-07
申请人： Mamoru Nakasuji , Takao Kato , Tohru Satake , Kenji Watanabe , Takeshi Murakami , Nobuharu Noji
发明人： Mamoru Nakasuji , Takao Kato , Tohru Satake , Kenji Watanabe , Takeshi Murakami , Nobuharu Noji
IPC分类号： G01N23/04 , G21K7/00 , H01J37/28 , H01J7/24 , F16K5/00
CPC分类号： H01J37/28 , G01N23/04 , H01J2237/2817
摘要： An electron beam system wherein a shot noise of an electron beam can be reduced and a beam current can be made higher, and further a shaped beam is formed by a two-stage lenses so as to allow for an operation with high stability. In this electron beam system, an electron beam emitted from an electron gun is irradiated onto a sample and secondary electrons emanated from the sample are detected. The electron gun is a thermionic emission type and designed to operate in a space charge limited condition. A shaping aperture and a NA aperture are arranged in front locations of the electron gun. An image of the shaping aperture formed by an electron beam emitted from the thermionic emission electron gun is focused onto a surface of the sample through the two-stage lenses.
摘要翻译：一种电子束系统，其中可以减少电子束的喷射噪声并且可以使束流更高，并且还可以通过两级透镜形成成形梁，以允许具有高稳定性的操作。在该电子束系统中，从电子枪发射的电子束照射到样品上，并检测从样品发出的二次电子。电子枪是一种热离子发射型，设计用于在空间电荷限制条件下工作。成形孔径和NA孔径布置在电子枪的前部位置。由从热电子发射电子枪发射的电子束形成的成形孔的图像通过两级透镜聚焦到样品的表面上。

143. 发明授权

US06797975B2 Method and its apparatus for inspecting particles or defects of a semiconductor device 有权
标题翻译：用于检查半导体器件的颗粒或缺陷的方法及其装置
公开(公告)号：US06797975B2
公开(公告)日：2004-09-28
申请号：US09931997
申请日：2001-08-17
申请人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
发明人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
IPC分类号： G01N2188
CPC分类号： G01N21/4738 , G01N21/8806 , G01N21/93 , G01N21/94 , G01N21/9501 , G01N2015/1486 , G01N2015/1493
摘要： Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.
摘要翻译：通常，作为检测结果，粒子/缺陷检查装置输出检测出的粒子/缺陷的总数。对于制造过程中的故障采取对策，分析检查装置检测到的颗粒/缺陷。由于检查装置输出大量检测到的粒子/缺陷，所以需要巨大的时间来分析检测到的粒子/缺陷，从而导致制造过程中的失败的对策的延迟。在本发明中，用于光学检查颗粒或缺陷的装置在检查结果中将颗粒或缺陷尺寸与故障原因相关联。数据处理电路从检查结果统计中指出故障原因，并显示检查结果信息。通过设定用于识别半导体装置等上的各区域的故障的阈值来进行故障分析，以统计学评价检测出的粒子。

144. 发明授权

US06709166B1 Connector assembly with multi-part housing 有权
标题翻译：连接器组件与多部分外壳
公开(公告)号：US06709166B1
公开(公告)日：2004-03-23
申请号：US09570123
申请日：2000-05-12
申请人： Akihiro Miyachi , Masashi Seto , Kazuhiro Shimada , Hideo Tamura , Kenji Watanabe
发明人： Akihiro Miyachi , Masashi Seto , Kazuhiro Shimada , Hideo Tamura , Kenji Watanabe
IPC分类号： G02B638
CPC分类号： G02B6/3893 , G02B6/3887 , G02B6/4292
摘要： A connector assembly includes a multi-part housing for mating with a complementary connecting device. The housing has a first housing part of a first, resilient plastic material and includes a resilient latch portion for latching engagement with the complementary connecting device. The housing has a second housing part of a second plastic material with less resiliency than the first plastic material and includes a cavity for receiving and retaining an operative component of the connector assembly.
摘要翻译：连接器组件包括用于与互补连接装置配合的多部分壳体。壳体具有第一弹性塑料材料的第一壳体部分，并且包括用于与互补连接装置锁定接合的弹性闩锁部分。壳体具有第二塑料材料的第二壳体部分，弹性小于第一塑料材料，并且包括用于接收和保持连接器组件的可操作部件的空腔。

145. 发明授权

US06650409B1 Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system 失效
标题翻译：半导体器件制造方法，用于实施相同的系统和包括在同一系统中的半导体工件处理设备
公开(公告)号：US06650409B1
公开(公告)日：2003-11-18
申请号：US08617270
申请日：1996-03-14
申请人： Minori Noguchi , Yukio Kembo , Hiroshi Morioka , Hidetoshi Nishiyama , Hideaki Doi , Masataka Shiba , Yoshiharu Shigyo , Kazuhiko Matsuoka , Kenji Watanabe , Yoshimasa Ohshima , Fumiaki Endo , Yuzo Taniguchi
发明人： Minori Noguchi , Yukio Kembo , Hiroshi Morioka , Hidetoshi Nishiyama , Hideaki Doi , Masataka Shiba , Yoshiharu Shigyo , Kazuhiko Matsuoka , Kenji Watanabe , Yoshimasa Ohshima , Fumiaki Endo , Yuzo Taniguchi
IPC分类号： G01N2189
CPC分类号： H01L21/67288 , G01N21/9501 , H01J2237/0225 , H01L21/67253 , H01L21/681
摘要： A semiconductor device producing method and a semiconductor device producing system employs a processing apparatus provided with a dust particle detecting apparatus. The dust particle detecting apparatus measures the condition of adhesion of dust particles adhering to a work at least before or after processing the work, manages the condition of incremental adhesion of dust particles to the work resulting from processing for each lot of works or for each work on the basis of the measured condition of adhesion of dust particles measured before or after processing the work, and determines the time when the processing apparatus is to be cleaned or the cycle of cleaning the processing apparatus on the basis of the managed condition of adhesion of dust particles.
摘要翻译：半导体器件制造方法和半导体器件制造系统采用具有灰尘粒子检测装置的处理装置。尘埃粒子检测装置至少在工件加工之前或之后测量附着在工件上的灰尘颗粒的附着状态，管理灰尘颗粒对于每批工件或每个工件的加工产生的增加粘附的条件基于在处理工件之前或之后测量的粉尘颗粒的粘附测量条件，并根据管理的粘附条件确定处理设备要清洁的时间或清洁处理设备的循环灰尘颗粒。

146. 发明授权

US06542830B1 Process control system 有权
标题翻译：过程控制系统
公开(公告)号：US06542830B1
公开(公告)日：2003-04-01
申请号：US09142546
申请日：1998-09-10
申请人： Fumio Mizuno , Seiji Isogai , Kenji Watanabe , Yasuhiro Yoshitake , Terushige Asakawa , Yuichi Ohyama , Hidekuni Sugimoto , Seiji Ishikawa , Masataka Shiba , Jun Nakazato , Makoto Ariga , Tetsuji Yokouchi , Toshimitsu Hamada , Ikuo Suzuki , Masami Ikota , Mari Nozoe , Isao Miyazaki , Yoshiharu Shigyo
发明人： Fumio Mizuno , Seiji Isogai , Kenji Watanabe , Yasuhiro Yoshitake , Terushige Asakawa , Yuichi Ohyama , Hidekuni Sugimoto , Seiji Ishikawa , Masataka Shiba , Jun Nakazato , Makoto Ariga , Tetsuji Yokouchi , Toshimitsu Hamada , Ikuo Suzuki , Masami Ikota , Mari Nozoe , Isao Miyazaki , Yoshiharu Shigyo
IPC分类号： H01L2166
CPC分类号： H01L22/20 , G01N21/9501 , G01R31/2894 , G01R33/06 , H01L2223/54466 , H01L2924/0002 , H01L2924/00
摘要： A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.
摘要翻译：根据本发明的处理管理系统包括用于检查晶片上的缺陷的检查装置，通过通信网络连接的检查装置，从这些检查装置获得的检查信息和图像信息被收集以构建数据库和图像文件，其中缺陷的定义通过基于检查信息和从检查装置获得的图像信息来表征缺陷的元件的组合来给出。通过给出缺陷的定义，可以细分和知道缺陷的特征。因此，可以研究缺陷的原因。

147. 发明授权

US06508236B2 Fuel supply device and internal combustion engine mounting the same 失效
标题翻译：燃油供应装置和内燃机安装相同
公开(公告)号：US06508236B2
公开(公告)日：2003-01-21
申请号：US09819639
申请日：2001-03-29
申请人： Kiyoshi Amou , Yoshio Okamoto , Takehiko Kowatari , Ayumu Miyajima , Yuzo Kadomukai , Toru Ishikawa , Masami Nagano , Takanobu Ichihara , Hiroaki Saeki , Kenji Watanabe
发明人： Kiyoshi Amou , Yoshio Okamoto , Takehiko Kowatari , Ayumu Miyajima , Yuzo Kadomukai , Toru Ishikawa , Masami Nagano , Takanobu Ichihara , Hiroaki Saeki , Kenji Watanabe
IPC分类号： F02M3102
CPC分类号： F02M61/162 , F02M69/325
摘要： Atomizing air flowing in an atomizing gas passage is merged with a fuel spray to promote atomization of the fuel, and carrier air flowing in a carrier gas passage is merged with the fuel spray at a further downstream position so as to surround the fuel spray. By doing so, the atomized fuel spray is carried to the downstream side so as to prevent the fuel spray from adhering onto the wall surface. The starting-up performance, fuel consumption and exhaust gas cleaning of an internal combustion engine are improved in this way.
摘要翻译：在雾化气体通道中流动的雾化空气与燃料喷雾合流以促进燃料的雾化，并且在载气通道中流动的载气与在更下游位置处的燃料喷雾合并，以包围燃料喷雾。通过这样做，雾化的燃料喷雾被运送到下游侧，以防止燃料喷雾粘附在壁表面上。以这种方式提高内燃机的起动性能，燃料消耗和废气净化。

148. 发明授权

US06491454B1 Tape printing device and method 有权
标题翻译：胶带印刷装置及方法
公开(公告)号：US06491454B1
公开(公告)日：2002-12-10
申请号：US09253104
申请日：1999-02-19
申请人： Yoshiya Toyosawa , Kenji Watanabe , Takeshi Hosokawa
发明人： Yoshiya Toyosawa , Kenji Watanabe , Takeshi Hosokawa
IPC分类号： B41J346
CPC分类号： G06F17/211 , B41J3/4075 , B41J3/46
摘要： A tape printing apparatus and method for printing a series of characters on a tape including an input device to input a series of characters, and a display device coupled to the input device and configured to display the series of characters. A tape length calculator is coupled to the input device to automatically calculate a total length of tape to be printed based upon the series of characters. The printing apparatus further includes a unit selector to convert the total length into a displayed length of a selected unit of length selected from at least two different choices of units of length, and a tape length display for displaying the displayed length in the selected unit of length prior to printing. A storage device is coupled to the unit selector and is adapted to store the length unit as a selected display unit.
摘要翻译：一种用于在包括输入装置的磁带上打印一系列字符以输入一系列字符的带式打印装置和方法，以及耦合到输入装置并被配置为显示一系列字符的显示装置。磁带长度计算器耦合到输入设备，以基于一系列字符自动计算要打印的磁带的总长度。打印设备还包括单元选择器，用于将总长度转换成从至少两个长度单位的不同选择中选出的长度的所选单位的显示长度，以及用于在所选择的单位中显示所显示的长度的带长度显示打印前的长度。存储设备耦合到单元选择器，并且适于将长度单元存储为选择的显示单元。

149. 发明授权

US06464162B2 Web processing system 失效
公开(公告)号：US06464162B2
公开(公告)日：2002-10-15
申请号：US10050108
申请日：2002-01-18
申请人： Kenji Watanabe , Tsuneo Yamazaki , Fujio Kuwabara , Akihiro Sanda
发明人： Kenji Watanabe , Tsuneo Yamazaki , Fujio Kuwabara , Akihiro Sanda
IPC分类号： B65H1804
CPC分类号： H02K49/106 , B65H18/106 , B65H2301/4148 , B65H2403/7254 , B65H2403/731 , B65H2515/32 , B65H2701/1719 , H02K49/108 , Y10S242/909 , Y10T83/2074 , Y10T83/7809 , B65H2220/02
摘要： A winding device has a drive shaft having a flange, and a holder rotatably mounted on the drive shaft in covering relation to the flange, for winding the web therearound. The holder has a first torque adjustment plate rotatably mounted on the drive shaft and having a surface disposed in facing relation to a surface of the flange, the first torque adjustment plate supporting a plurality of magnets on the surface thereof, and a second torque adjustment plate rotatably mounted on the drive shaft and having a surface disposed in facing relation to an opposite surface of the flange, the second torque adjustment plate supporting a plurality of magnets on the surface thereof. The winding device is capable of winding relatively wide webs having a large thickness ranging from 100 to 150 &mgr;m, e.g., photographic photosensitive webs (films), with a low tension fluctuation ratio of ±5% or less, while producing large tension easily and stably. The winding device is constructed for easy maintenance.

150. 发明授权

US06386774B1 Tape cartridge and printing device 失效
标题翻译：磁带盒和打印设备
公开(公告)号：US06386774B1
公开(公告)日：2002-05-14
申请号：US09644943
申请日：2000-08-23
申请人： Masaji Takayama , Kenji Watanabe , Yoshikiyo Furuya
发明人： Masaji Takayama , Kenji Watanabe , Yoshikiyo Furuya
IPC分类号： B41J1126
CPC分类号： B26D7/025 , B26D1/305 , B41J3/4075 , B41J11/703 , B41J17/32 , B41J33/52 , B41J35/08
摘要： A printing device including a printing mechanism adapted to print a series of letters and characters on a printing tape which is fed through the printing mechanism in a generally vertical orientation. A manually operated cutting mechanism is provided which includes a movable cutting blade configured to cut a printed section of the printing tape at a generally vertical cutting region after a printing operation. The movable cutting blade is rotatably supported in a manner positioning its axis of rotation on one side of the cutting region while the fixed cutting blade is positioned on the other side of the cutting region. The movable cutting blade initially contacts the vertically oriented printing tape from a lower face of the blade during cutting of the printing tape, and moves generally in the direction toward the one side of the cutting region. An operation button provided on a top face of the printing device is configured to move substantially linearly toward a bottom of the printing device. The movable cutting blade rotates toward a fixed cutting blade when the operation button is depressed to manually cut the printing tape disposed between the movable cutting blade and the fixed cutting blade from the lower face of the printing tape.
摘要翻译：一种打印装置，其包括适于在打印带上打印一系列字母和字符的打印机构，打印带通过打印机构以大致垂直的方向进给。提供了一种手动切割机构，其包括可动切割刀片，其被配置为在打印操作之后在大致垂直的切割区域切割打印带的打印部分。可移动切割刀片以固定切割刀片位于切割区域的另一侧上的方式可旋转地支撑在定位其切割区域的一侧上的旋转轴线上。可移动切割刀片在切割打印带期间最初从刀片的下表面接触垂直取向的打印带，并且大致沿朝向切割区域的一侧的方向移动。设置在打印装置的顶面上的操作按钮构造成朝向打印装置的底部基本上线性地移动。当操作按钮被按下时，可移动切割刀片朝向固定切割刀片旋转，以便从打印带的下表面手动切割设置在可动切割刀片和固定切割刀片之间的打印带。

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