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131. 发明申请

US20100325761A1 Scanning Probe Microscope and Method of Observing Sample Using the Same 有权
标题翻译：扫描探针显微镜及其使用方法
公开(公告)号：US20100325761A1
公开(公告)日：2010-12-23
申请号：US12864196
申请日：2008-12-18
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01Q60/24
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

132. 发明申请

US20100246933A9 Pattern Inspection Method And Apparatus 有权
标题翻译：图案检验方法及装置
公开(公告)号：US20100246933A9
公开(公告)日：2010-09-30
申请号：US11931856
申请日：2007-10-31
申请人： Takashi Hiroi , Masahiro Watanabe , Chie Shishido , Aritoshi Sugimoto , Maki Tanaka , Hiroshi Miyai , Asahiro Kuni , Yasuhiko Nara
发明人： Takashi Hiroi , Masahiro Watanabe , Chie Shishido , Aritoshi Sugimoto , Maki Tanaka , Hiroshi Miyai , Asahiro Kuni , Yasuhiko Nara
IPC分类号： G06K9/00
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/8854 , G01N2021/8861 , G01N2021/8864 , G01R31/311 , G03F1/86 , G06T1/0007 , G06T7/0002 , G06T7/001 , G06T2200/24 , G06T2207/10061 , G06T2207/30148 , H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/24592 , H01J2237/28
摘要： An apparatus for processing a defect candidate image, including: a scanning electron microscope for taking an enlarged image of a specimen by irradiating and scanning a converged electron beam onto the specimen and detecting charged particles emanated from the specimen by the irradiation; an image processor for processing the image taken by the scanning electron microscope to detect defect candidates on the specimen and classify the detected defect candidates into one of plural classes; a memory for storing output from the image processor including images of the detected defect candidates; and a display unit which displays information stored in the memory and an indicator, wherein the display unit displays a distribution of the detected and classified defect candidates in a map format by distinguishing by the classified class, and the display unit also displays an image of a defect candidate stored in the memory together with the map which is indicated on the map by the indicator.
摘要翻译：一种用于处理缺陷候选图像的装置，包括：扫描电子显微镜，用于通过照射和扫描聚集的电子束到样品上并通过照射检测从样品发出的带电粒子，从而获取样本的放大图像; 用于处理由扫描电子显微镜拍摄的图像以检测样本上的缺陷候选的图像处理器，并将检测到的缺陷候选分类为多个等级之一; 用于存储来自图像处理器的输出的存储器，包括检测到的缺陷候选的图像; 以及显示单元，其显示存储在存储器中的信息和指示器，其中，所述显示单元通过由所述分类的类区分来以地图格式显示所检测和分类的缺陷候选的分布，并且所述显示单元还显示图像存储在存储器中的缺陷候选者以及由指示符在地图上指示的地图。

133. 发明授权

US07800781B2 Recording medium and color adjusting apparatus 有权
标题翻译：记录介质和颜色调节装置
公开(公告)号：US07800781B2
公开(公告)日：2010-09-21
申请号：US11588500
申请日：2006-10-27
申请人： Masahiro Watanabe , Masayoshi Shimizu
发明人： Masahiro Watanabe , Masayoshi Shimizu
IPC分类号： G03F3/08
CPC分类号： H04N1/62
摘要： With a recording medium causing a computer to execute a color adjustment program used for the color adjustment of a display, weights are assigned to the adjustment amounts of colors included in an adjustment range in correspondence with a positional relationship with a target color in color space, and the adjustment amount of the target color, when information about the target color to be adjusted, the adjustment amount indicating the amount of the color adjustment made to the target color, and the adjustment range for deciding the range of colors to be adjusted along with the target color are input. According to the weights, colors after the adjustment for the target color and the colors included in the adjustment range are calculated, and a three-dimensional region corresponding to the calculated colors is drawn in the color space.
摘要翻译：利用使计算机执行用于显示器的颜色调整的颜色调整程序的记录介质，根据与颜色空间中的目标颜色的位置关系对应地将包括在调整范围中的颜色的调整量分配给权重，和目标颜色的调整量，当关于要调整的目标颜色的信息，指示对目标颜色进行的颜色调整量的调整量以及用于决定要调整的颜色范围的调整范围连同输入目标颜色。根据权重，计算对目标颜色的调整后的颜色和包含在调整范围中的颜色，并且在颜色空间中绘制与计算出的颜色对应的三维区域。

134. 发明申请

US20100225772A1 IMAGE PROCESSING DEVICE, IMAGE PICKING-UP DEVICE, IMAGE PROCESSING METHOD, AND PROGRAM 有权
标题翻译：图像处理装置，图像拾取装置，图像处理方法和程序
公开(公告)号：US20100225772A1
公开(公告)日：2010-09-09
申请号：US12294470
申请日：2008-02-07
申请人： Jun Murayama , Masahiro Watanabe , Atsushi Ito , Seiji Kobayashi , Yoichi Yagasaki , Kenji Tanaka
发明人： Jun Murayama , Masahiro Watanabe , Atsushi Ito , Seiji Kobayashi , Yoichi Yagasaki , Kenji Tanaka
IPC分类号： H04N5/228
CPC分类号： G06T5/002 , G06T7/223 , G06T2207/10016 , G06T2207/20021 , H04N5/23248 , H04N5/23254 , H04N5/23267
摘要： An image processing apparatus (1), for performing image processing on image data which is obtained by performing imaging of a subject and in which the degree of motion blurring of an image represented by the image data changes in accordance with an imaging condition at the time of performing imaging of the subject, includes a motion information correcting unit (12) for correcting motion information representing motion concerning the image on the basis of imaging information representing the imaging condition, and a motion blurring adding unit (13) for adding motion blurring to the image by using the motion information corrected by the motion information correcting means to perform image processing on the image data.
摘要翻译：一种图像处理装置（1），用于对通过对被摄体进行成像而获得的图像数据进行图像处理，其中由该图像数据表示的图像的运动模糊程度根据当时的成像条件而改变包括：运动信息校正单元，用于基于代表成像条件的成像信息来校正表示与图像相关的运动的运动信息;以及运动模糊添加单元，用于将运动模糊添加到通过使用由运动信息校正装置校正的运动信息来执行对图像数据的图像处理的图像。

135. 发明授权

US07768634B2 Defects inspecting apparatus and defects inspecting method 有权
标题翻译：缺陷检查设备和缺陷检查方法
公开(公告)号：US07768634B2
公开(公告)日：2010-08-03
申请号：US12192578
申请日：2008-08-15
申请人： Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
发明人： Sachio Uto , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Akira Hamamatsu , Takahiro Jingu , Toshihiko Nakata , Masahiro Watanabe
IPC分类号： G01N21/00
CPC分类号： G01N21/00 , G01N21/9501 , G06T7/0004 , G06T2207/30148
摘要： An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.
摘要翻译：一种检查装置和方法，包括：第一和第二照明单元，用于以不同的入射角照射待检查样本的表面;以及第一和第二检测光学单元，其以不同的仰角方向布置在样本的表面上，用于检测样本的图像由第一和第二照明单元照亮。

136. 发明授权

US07716970B2 Scanning probe microscope and sample observation method using the same 有权
标题翻译：扫描探针显微镜和样品观察方法使用
公开(公告)号：US07716970B2
公开(公告)日：2010-05-18
申请号：US11411022
申请日：2006-04-26
申请人： Masahiro Watanabe , Toshihiko Nakata , Shuichi Baba
发明人： Masahiro Watanabe , Toshihiko Nakata , Shuichi Baba
IPC分类号： G01B5/28
CPC分类号： G01Q60/34
摘要： The present invention provides a method of using an accurate three-dimensional shape without damaging a sample by making a probe contact the sample only at a measuring point, lifting and retracting the probe when moving to the next measuring point and making the probe approach the sample after moving to the next measuring point, wherein high frequency/minute amplitude cantilever excitation and vibration detection are performed and further horizontal direction excitation or vertical/horizontal double direction excitation are performed to improve the sensitivity of contacting force detection on a slope of steep inclination. The method uses unit for inclining the probe in accordance with the inclination of a measurement target and a structure capable of absorbing or adjusting the orientation of the light detecting the condition of contact between the probe and sample after reflection on the cantilever, which varies a great deal depending on the inclination of the probe.
摘要翻译：本发明提供了一种使用准确的三维形状而不损害样品的方法，该方法是使探针仅在测量点接触样品，当移动到下一个测量点时提升和缩回探针并使探针接近样品在移动到下一个测量点之后，执行高频/分钟幅度的悬臂激励和振动检测，并且执行进一步的水平方向激励或垂直/水平双向激励，以提高在陡倾斜度上的接触力检测的灵敏度。该方法使用用于根据测量对象的倾斜度和能够吸收或调节探测器和样品之间的接触条件的光的方向来倾斜测量头的单元，其反射在悬臂上，其变化很大取决于探头的倾斜度。

137. 发明申请

US20100104173A1 Method And Apparatus For Inspecting A Pattern Formed On A Substrate 有权
标题翻译：检查基板上形成的图案的方法和装置
公开(公告)号：US20100104173A1
公开(公告)日：2010-04-29
申请号：US12649898
申请日：2009-12-30
申请人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
发明人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
IPC分类号： G06K9/62
CPC分类号： G03F7/7065 , G01N21/95684
摘要： A pattern inspection method and apparatus in which a deep ultraviolet light or an ultraviolet light is irradiated onto a specimen on which a pattern is formed, an image of the specimen which is irradiated with the deep ultraviolet light or the ultraviolet light is formed and the formed image is detected with a rear-surface irradiation type image sensor, which is sensitive to wavelengths of no greater than 400 nmm. A signal outputted from the image sensor is processed so as to detect a defect of the specimen by converting an analog image signal outputted from the image sensor to a digital image signal with an A/D converter, and a display displays information of the defect detected.
摘要翻译：将深紫外光或紫外线照射到形成有图案的试样上的图案检查方法和装置形成了被深紫外线或紫外线照射的样本的图像，形成使用对不大于400nm的波长敏感的背面照射型图像传感器来检测图像。处理从图像传感器输出的信号，以便通过用A / D转换器将从图像传感器输出的模拟图像信号转换为数字图像信号来检测样本的缺陷，并且显示器显示检测到的缺陷的信息。

138. 发明授权

US07692144B2 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus 有权
标题翻译：电子束曝光或系统检查或测量装置及其方法和高度检测装置
公开(公告)号：US07692144B2
公开(公告)日：2010-04-06
申请号：US11925142
申请日：2007-10-26
申请人： Masahiro Watanabe , Takashi Hiroi , Maki Tanaka , Hiroyuki Shinada , Yasutsugu Usami
发明人： Masahiro Watanabe , Takashi Hiroi , Maki Tanaka , Hiroyuki Shinada , Yasutsugu Usami
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/20 , H01J37/21 , H01J37/222 , H01J37/226 , H01J37/265 , H01J37/28 , H01J37/304 , H01J2237/20235 , H01J2237/20292 , H01J2237/216 , H01J2237/2445 , H01J2237/24578 , H01J2237/2482 , H01J2237/2487 , H01J2237/2814 , H01J2237/2817 , H01J2237/2826 , H01J2237/304 , H01J2237/3175
摘要： A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.
摘要翻译：用于评价试样的高度的方法和装置包括：电子束单元，具有电子束源，透镜，用于设置样本的台面并可在高度方向上控制;以及检测器，以及用于检测高度的高度检测系统样本被放置在桌子上，而样品被电子束照射。高度检测系统还包括照明系统，收集系统，第一和第二检测器，被配置为在样本被电子束照射的同时从第一和第二检测器接收输出信号并从输出产生比较信号的装置信号，其中比较信号响应于样本的高度。

139. 发明申请

US20090274368A1 Image correction method and apparatus 审中-公开
标题翻译：图像校正方法及装置
公开(公告)号：US20090274368A1
公开(公告)日：2009-11-05
申请号：US12458384
申请日：2009-07-09
申请人： Masahiro Watanabe
发明人： Masahiro Watanabe
IPC分类号： G06K9/00
CPC分类号： G06K9/00221 , G06T5/008 , H04N1/62 , H04N1/628 , H04N9/643
摘要： A computer readable storage medium contains instructions that, when executed by a computer, cause the computer to perform detecting a flat image portion having a color variation amount less than a predetermined amount from a specific color region having a specific color in an image, measuring a size of the flat image portion detected, and correcting the flat image portion by a first correction amount if the size of the flat image portion measured is larger than a predetermined value, and correcting the flat image portion by a second correction amount greater than the first second correction amount if the size of the flat image portion measured is not greater than the predetermined value.
摘要翻译：计算机可读存储介质包含指令，当由计算机执行时，计算机执行从图像中具有特定颜色的特定颜色区域检测具有小于预定量的颜色变化量的平面图像部分，测量检测出的平面图像部分的尺寸，并且如果测量的平面图像部分的尺寸大于预定值，则将平面图像部分校正第一校正量，并且将平坦图像部分校正大于第一校正量的第二校正量如果测量的平面图像部分的尺寸不大于预定值，则第二校正量。

140. 发明授权

US07599076B2 Method for optically detecting height of a specimen and charged particle beam apparatus using the same 有权
标题翻译：用于光学检测样品的高度的方法和使用其的带电粒子束装置的方法
公开(公告)号：US07599076B2
公开(公告)日：2009-10-06
申请号：US11591563
申请日：2006-11-02
申请人： Keiya Saito , Masahiro Watanabe , Yasuhiro Yoshitake
发明人： Keiya Saito , Masahiro Watanabe , Yasuhiro Yoshitake
IPC分类号： G01B11/28
CPC分类号： G01B11/0608 , H01J37/20 , H01J37/21 , H01J37/265 , H01J37/28 , H01J2237/20292 , H01J2237/216 , H01J2237/2482 , H01J2237/2817
摘要： The present invention provides an optical height detection method and electron beam apparatus to which the method is applied, in which the focusing accuracy of the CD-SEM apparatus, a SEM inspection apparatus, and others is improved by reducing detection errors and improving detection accuracy so as to improve the accuracy of the optical height detection method, and throughput of a CD-SEM apparatus or others is improved by reducing the processing time of automatic focus control performed based on the detected height according to the optical height detection method. An optical detection optical system projects two-dimensional slit light to a measurement object from diagonally above it, detects the light reflected by the measurement object, converts a detected two-dimensional slit image into an electrical signal by a two-dimensional area sensor, eliminates slit parts having a large detection error from the electrical signal, and detects the height of the measurement object.
摘要翻译：本发明提供了采用该方法的光学高度检测方法和电子束装置，其中通过降低检测误差并提高检测精度来提高CD-SEM装置，SEM检查装置等的聚焦精度为了提高光学高度检测方法的精度，通过根据光学高度检测方法减少基于检测到的高度进行的自动聚焦控制的处理时间来提高CD-SEM装置等的生产量。光学检测光学系统将二维狭缝光从对角线投射到测量对象上，检测由测量对象反射的光，通过二维区域传感器将检测到的二维狭缝图像转换为电信号，消除狭缝部分具有来自电信号的大的检测误差，并且检测测量对象的高度。

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